PATTERN STRUCTURE AND METHOD OF MANUFACTURING THE PATTERN STRUCTURE
    21.
    发明申请
    PATTERN STRUCTURE AND METHOD OF MANUFACTURING THE PATTERN STRUCTURE 有权
    图案结构及其制作方法

    公开(公告)号:US20160054498A1

    公开(公告)日:2016-02-25

    申请号:US14733234

    申请日:2015-06-08

    CPC classification number: G02B5/3058 B29D11/00644 B29K2101/10 G03F7/0002

    Abstract: A pattern structure includes a plurality of pattern structure units arranged substantially on a same plane, where each of the pattern structure units has a first surface and a second surface, which are opposite to each other, and a microstructure is defined on the first surface of each of the pattern structure units, and a flattening layer disposed on the second surface of each of the plurality of pattern structure units, where the flattening layer connects the pattern structure units with each other, and a vertical step difference exists between second surfaces of the pattern structure units.

    Abstract translation: 图案结构包括基本上在同一平面上布置的多个图案结构单元,其中每个图案结构单元具有彼此相对的第一表面和第二表面,并且在第一表面上限定微结构 每个图案结构单元和布置在多个图案结构单元的每个的第二表面上的平坦化层,其中平坦化层将图案结构单元彼此连接,并且在第二表面之间存在垂直的阶差 图案结构单位。

    Method of manufacturing master mold
    29.
    发明授权
    Method of manufacturing master mold 有权
    主模制造方法

    公开(公告)号:US09434093B2

    公开(公告)日:2016-09-06

    申请号:US14557712

    申请日:2014-12-02

    Abstract: A method of manufacturing a master mold includes forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming a large area master mold by etching a surface of a substrate based on a pattern shape of the mold resin.

    Abstract translation: 制造母模的方法包括使用模具形成多个复制树脂层; 通过将多个复制树脂层粘合在模板上来形成复制模板; 使用复制模板形成具有与多个复制树脂层的图案对应的图案的复制模具层; 使用复制模具层形成具有在其表面上形成的图案的柔性印模; 将形成在柔性印模的表面上的图案转印到模制树脂上; 并且通过基于模制树脂的图案形状蚀刻基板的表面来形成大面积的母模。

    PATTERNING METHOD USING IMPRINT MOLD, PATTERN STRUCTURE FABRICATED BY THE METHOD, AND IMPRINTING SYSTEM
    30.
    发明申请
    PATTERNING METHOD USING IMPRINT MOLD, PATTERN STRUCTURE FABRICATED BY THE METHOD, AND IMPRINTING SYSTEM 有权
    使用印花模型的方法,通过方法制作的图案结构和印刷系统

    公开(公告)号:US20150321415A1

    公开(公告)日:2015-11-12

    申请号:US14633272

    申请日:2015-02-27

    Abstract: A patterning method using an imprint mold, to form an imprinted pattern structure, includes providing a resist layer from which the pattern structure will be formed, performing a first imprint process on a first area of the resist layer by using the imprint mold to form a first pattern of the pattern structure through deformation of the resist layer in the first area, and performing a second imprint process on a second area of the resist layer by using the imprint mold to form a second pattern of the pattern structure through deformation of the resist layer in the second area. The first and second areas are overlapped with each other in a third area of the resist layer, and the performing the second imprint process deforms a first portion of the first pattern in the third area to form the second pattern

    Abstract translation: 使用压印模具形成压印图案结构的图案化方法包括提供抗蚀剂层,从其形成图案结构,通过使用压印模具在抗蚀剂层的第一区域上进行第一压印处理,以形成 通过使第一区域中的抗蚀剂层变形而形成图案结构的第一图案,并且通过使用压印模具在抗蚀剂层的第二区域上进行第二压印处理,以通过抗蚀剂的变形形成图案结构的第二图案 在第二个区域。 第一和第二区域在抗蚀剂层的第三区域中彼此重叠,并且执行第二压印处理使第三区域中的第一图案的第一部分变形以形成第二图案

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