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公开(公告)号:US11581297B2
公开(公告)日:2023-02-14
申请号:US17026637
申请日:2020-09-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yonghyuk Choi , Bongsoon Lim , Hongsoo Jeon , Jaeduk Yu
IPC: H01L23/528 , H01L23/522 , H01L25/18 , H01L25/065 , H01L23/00 , G11C16/08 , G11C16/04
Abstract: A memory device includes first and second semiconductor layers. The first semiconductor layer includes wordlines and bitlines, an upper substrate, and a memory cell array. The memory cell array includes a memory blocks. The second semiconductor layer includes a lower substrate, and an address decoder. Each memory block includes a core region including a memory cells, a first extension region adjacent to a first side of the core region and including a plurality of wordline contacts, and a second extension region adjacent to a second side of the core region and including an insulating mold structure. The second extension region includes step zones and at least one flat zone. Through-hole vias penetrating the insulating mold structure are in the flat zone. The wordlines and the address decoder are electrically connected with each other by at least the through-hole vias.
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公开(公告)号:US10381078B2
公开(公告)日:2019-08-13
申请号:US15992840
申请日:2018-05-30
Applicant: Samsung Electronics Co., Ltd.
Inventor: Chanho Kim , Dong-Kil Yun , Pansuk Kwak , Hongsoo Jeon
IPC: G11C14/00 , H01L27/11578 , H01L27/108 , H01L27/1157 , G11C11/4094 , G11C11/408 , G11C16/08 , G11C16/10 , G11C16/26 , G11C11/4091 , G11C16/04
Abstract: A semiconductor memory includes a first memory cell array in a first region of a substrate and a second memory cell array in a second region of the substrate. The first memory cell array includes cell strings, and each cell string includes non-volatile memory cells stacked in a direction perpendicular to the substrate. The second memory cell array includes volatile memory cells, and each volatile memory cell includes a select transistor and a capacitor. The capacitor includes at least one contact electrically connected with the select transistor and having a second height corresponding to a first height of each cell string, and at least one second contact supplied with a ground voltage, having a third height corresponding to the first height of each cell string, adjacent to the at least one first contact, and electrically disconnected with the at least one first contact.
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