公开(公告)号：US4757168A

公开(公告)日：1988-07-12

申请号：US871328

申请日：1986-06-06

申请人： Shiori Fujiyoshi ,  Shigeru Matsui

发明人： Shiori Fujiyoshi ,  Shigeru Matsui

IPC分类号： H01H23/02 ,  H01H9/00

CPC分类号： H01H23/02

摘要： A switch device is disclosed, which comprises a mounting frame provided with a switch body or bodies, a reinforcing frame to be provided with a plate, placed on the surface of a building-forming material and threadedly fixed to the mounting frame, a decorative frame fixed integrally with or separately from the reinforcing frame, and a decorative surface sheet or sheets to be fitted into the decorative frame and attached to a switch-working portion or portions of the switch body or bodies and having an area larger than that of the switch body or bodies. A light display for indicating the on.off state of the switch is or are formed on the decorative surface sheet or sheets.

摘要翻译： 公开了一种开关装置，其包括设置有开关主体或主体的安装框架，设置有板的加强框架，放置在建筑物形成材料的表面上并螺纹地固定到安装框架上，装饰框架 与加强框架一体地固定或与加强框架分开固定的装饰性表面片材，以及装配到装饰框架中并附接到开关工作部分或开关体或部分的装饰性表面片材，并且具有比开关 身体或身体。 用于指示开关的开启状态的光显示器形成在装饰性表面片材上。

公开(公告)号：US4752735A

公开(公告)日：1988-06-21

申请号：US946957

申请日：1986-12-29

申请人： Takashi Onodera ,  Shigeru Matsui ,  Hideki Kohno

发明人： Takashi Onodera ,  Shigeru Matsui ,  Hideki Kohno

IPC分类号： A61B5/055 ,  A61B10/00 ,  G01R33/24 ,  G01R33/387 ,  G01R33/565 ,  G01R33/20

CPC分类号： G01R33/56518 ,  G01R33/24

摘要： Method for measuring the time dependence of an oscillating field gradient and representatively its integral function with respect to time for imaging method using the field gradient such as rapid chemical shift imaging method echo planar method, etc. A uniform specimen is placed within a coil of an NMR device, in which nuclear spins are excited; a phase encoding field gradient is applied thereto; and signals are sampled under application of the field gradient to be measured. These steps are repeated and an integral function of the field gradient with respect to time is obtained by using the peak position in the series of data obtained by this repetition.

摘要翻译： 用于使用诸如快速化学位移成像方法回波平面法等场梯度的成像方法来测量振荡场梯度的时间依赖性和代表性的其积分函数的方法。将均匀的样本放置在 其中核自旋激发的NMR装置; 应用相位编码场梯度; 并且在应用待测量的场梯度下对信号进行采样。 重复这些步骤，通过使用通过该重复获得的一系列数据中的峰值位置获得相对于时间的场梯度的积分函数。

公开(公告)号：US20130107255A1

公开(公告)日：2013-05-02

申请号：US13702684

申请日：2011-05-31

申请人： Shigeru Matsui ,  Daisuke Kurimoto

发明人： Shigeru Matsui ,  Daisuke Kurimoto

IPC分类号： G01J3/10

CPC分类号： G01J3/10 ,  G01J3/12 ,  G01J3/2803 ,  G01J3/42 ,  G01N21/255 ,  G01N21/31

摘要： Disclosed is a spectrophotometer capable of achieving a good signal-to-noise ratio by improving the use efficiency of the amount of light emitted from a Xe flash lamp or other intermittent light source. Light having a desired wavelength is selected from the light emitted from the Xe flash lamp (1), which is a single light source having a wide wavelength range, allowed to pass through a sample (7), detected by a photodetector (21, 22), and supplied to a low-pass filter (24) in a signal processing circuit (23). The duration of the waveform of a signal output from the photodetector (21, 22) is extended by the low-pass filter (24), which has a time constant equivalent to the elapsed time required for the intensity of the light emitted from the Xe flash lamp (1) to decrease from a peak value to a half value and acts as delay means or other duration extension means. The signal having a waveform whose duration is extended is supplied to a computer (30) through an amplifier (25) and an analog-to-digital conversion circuit (26). As the signal having the waveform whose duration is extended can be used, it is possible to enhance the use efficiency of the total amount of emitted light and optimize the effect of signal-to-noise ratio improvement.

摘要翻译： 公开了一种分光光度计，其能够通过提高从Xe闪光灯或其它间歇光源发射的光量的使用效率来获得良好的信噪比。 从具有宽波长范围的单个光源的Xe闪光灯（1）发出的光被选择为允许通过样品（7）的光，由光电检测器（21,22）检测到的光 ），并提供给信号处理电路（23）中的低通滤波器（24）。 从光电检测器（21,22）输出的信号的波形的持续时间由低通滤波器（24）延长，该低通滤波器具有等于从Xe发射的光的强度所需的经过时间的时间常数 闪光灯（1）从峰值减小到半值，并作为延迟装置或其他持续时间延长装置。 具有延长其持续时间的波形的信号通过放大器（25）和模拟 - 数字转换电路（26）提供给计算机（30）。 由于可以使用其持续时间延长的波形的信号，所以可以提高发光总量的使用效率并优化信噪比改善的效果。

公开(公告)号：US08246803B2

公开(公告)日：2012-08-21

申请号：US11654683

申请日：2007-01-18

申请人： Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

发明人： Motohiro Yamazaki ,  Ryoji Inaba ,  Satoshi Takahashi ,  Shigeru Matsui

IPC分类号： G01N27/453

CPC分类号： G01N27/44721

摘要： An object of the present invention is to provide a capillary electrophoresis apparatus in which simultaneity can be ensured between sensitivity and data acquisition to decrease a pull-up signal while spectral data acquisition is eliminated in each capillary exchange. The invention relates to a capillary electrophoresis apparatus characterized in that a multi-bandpass filter is provided in an optical detection system. In one aspect of the invention, a signal detection area of a two-dimensional detector is divided into plural regions corresponding to wavelength transmission regions of the multi-bandpass filter. An integrated value of the fluorescence spectrum signal is determined in the region including a fluorescence spectrum peak of an analysis sample in the plural regions. The analysis is performed with the integrated value.

摘要翻译： 本发明的目的是提供一种毛细管电泳装置，其中可以在灵敏度和数据采集之间确保同时性，以减少上拉信号，同时在每个毛细管交换中消除光谱数据采集。 本发明涉及一种毛细管电泳装置，其特征在于在光学检测系统中提供多带通滤波器。 在本发明的一个方面，二维检测器的信号检测区域被分成与多带通滤波器的波长透射区域对应的多个区域。 在包括多个区域中的分析样品的荧光光谱峰的区域中确定荧光光谱信号的积分值。 分析用积分值进行。

公开(公告)号：US08243263B2

公开(公告)日：2012-08-14

申请号：US13167298

申请日：2011-06-23

申请人： Shigeru Matsui

发明人： Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/94

摘要： In the conventional contaminant particle/defect inspection method, if the illuminance of the illumination beam is held at not more than a predetermined upper limit value not to give thermal damage to the sample, the detection sensitivity and the inspection speed being in the tradeoff relation with each other, it is very difficult to improve one of the detection sensitivity and the inspection speed without sacrificing the other or improve both at the same time. The invention provides an improved optical inspection method and an improved optical inspection apparatus, in which a pulse laser is used as a light source, and a laser beam flux is split into a plurality of laser beam fluxes which are given different time delay to form a plurality of illumination spots. The scattered light signal from each illumination spot is isolated and detected by using a light emission start timing signal for each illumination spot.

摘要翻译： 在常规污染物颗粒/缺陷检查方法中，如果照明光束的照度被保持在不对样品造成热损伤的预定上限值以下，则检测灵敏度和检查速度与 彼此难以提高检测灵敏度和检测速度之一而不牺牲另一方或同时改善两者。 本发明提供了一种改进的光学检查方法和改进的光学检查装置，其中使用脉冲激光器作为光源，并且激光束通量被分割成多个激光束，其被给予不同的时间延迟以形成 多个照明点。 通过使用每个照明点的发光开始定时信号来隔离并检测来自每个照明点的散射光信号。

公开(公告)号：US20110134418A1

公开(公告)日：2011-06-09

申请号：US13058081

申请日：2009-07-15

申请人： Shigeru Matsui ,  Mizuki Oku

发明人： Shigeru Matsui ,  Mizuki Oku

IPC分类号： G01N21/88

CPC分类号： G01N21/93 ,  G01N21/94 ,  G01N21/9501

摘要： A surface inspecting apparatus can inspect a smaller defect by using a PSL of a smaller particle size. However, the particle size of the PSL is restricted. In the conventional surface inspecting apparatus, therefore, no consideration has been taken as to how to inspect the defect of such a small particle size as is not set in the PSL which will be needed in the near future in an inspection of a semiconductor manufacturing step. The invention has a light source device for generating light which simulated at least one of a wavelength, a light intensity, a time-dependent change of the light intensity, and a polarization of light which was scattered, diffracted, or reflected by an inspection object, and the light is inputted to a photodetector of the surface inspecting apparatus. The smaller defect can be inspected.

摘要翻译： 表面检查装置可以通过使用较小粒径的PSL来检查较小的缺陷。 然而，PSL的粒径受到限制。 因此，在传统的表面检查装置中，没有考虑如何检查在半导体制造步骤的检查中在不久的将来需要的PSL中未设置的这种小粒径的缺陷 。 本发明具有用于产生光的光源装置，其模拟由检查对象散射，衍射或反射的光的波长，光强度，时间依赖性变化和光的偏振中的至少一个 并且光被输入到表面检查装置的光电检测器。 可以检查较小的缺陷。

公开(公告)号：US07872742B2

公开(公告)日：2011-01-18

申请号：US12690987

申请日：2010-01-21

申请人： Shigeru Matsui

发明人： Shigeru Matsui

IPC分类号： G01N21/00

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/9505

摘要： A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio.

摘要翻译： 能够获取各散射方位角的散射光强度分布信息，高灵敏度地检测异物和缺陷的表面检查装置。 用于冷凝的凹面镜和用于成像的另一凹面镜用于处理宽的立方角。 由于使用用于冷凝和图像形成的反射镜，所以不需要用于夹持透镜周边的支撑件，并且有效开口面积不会降低。 设置多个方位检测光学系统，并且可以通过掩埋整个周边来检测所有方位角处的反射光，而不需要特定的透镜抛光。 光信号统一单元将来自与用于提高S / N比的系统中预先指定的散射方位相对应的特定系统的数字数据相加。

公开(公告)号：US07853068B2

公开(公告)日：2010-12-14

申请号：US12216642

申请日：2008-07-09

申请人： Shigeru Matsui ,  Katsuya Suzuki

发明人： Shigeru Matsui ,  Katsuya Suzuki

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G03F7/7065 ,  G06T2207/30148

摘要： The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.

摘要翻译： 图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案， 具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。 该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在 对角位置，检测图像位于中间位置。 该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。

公开(公告)号：US20100118310A1

公开(公告)日：2010-05-13

申请号：US12690987

申请日：2010-01-21

申请人： Shigeru Matsui

发明人： Shigeru Matsui

IPC分类号： G01N21/94 ,  G01N21/47

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/9505

摘要： A surface inspection apparatus capable of acquiring scattered light intensity distribution information for each scattering azimuth angle, and detecting foreign matters and defects with high sensitivity. A concave mirror for condensation and another concave mirror for image formation are used to cope with a broad cubic angle. Since mirrors for condensation and image formation are used, a support for clamping the periphery of a lens is unnecessary, and an effective aperture area does not decrease. A plurality of azimuth-wise detection optical systems is disposed and reflected light at all azimuths can be detected by burying the entire periphery without calling for specific lens polishing. A light signal unification unit sums digital data from a particular system corresponding to a scattering azimuth designated in advance in the systems for improving an S/N ratio.

摘要翻译： 能够获取各散射方位角的散射光强度分布信息，高灵敏度地检测异物和缺陷的表面检查装置。 用于冷凝的凹面镜和用于成像的另一凹面镜用于处理宽的立方角。 由于使用用于冷凝和图像形成的反射镜，所以不需要用于夹持透镜周边的支撑件，并且有效开口面积不会降低。 设置多个方位检测光学系统，并且可以通过掩埋整个周边来检测所有方位角处的反射光，而不需要特定的透镜抛光。 光信号统一单元将来自与用于提高S / N比的系统中预先指定的散射方位相对应的特定系统的数字数据相加。

公开(公告)号：US07616805B2

公开(公告)日：2009-11-10

申请号：US12249328

申请日：2008-10-10

申请人： Shigeru Matsui ,  Katsuya Suzuki

发明人： Shigeru Matsui ,  Katsuya Suzuki

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G03F7/7065 ,  G06T2207/30148

摘要： The pattern defect inspection apparatus is operable to detect defects by comparing a detection image, which is obtained through scanning by an image sensor those patterns that have the identical shape and are continuously disposed on the object under tested at equal intervals in row and column directions, with a reference image obtained by scanning neighboring identical shape patterns in the row and column directions. This apparatus has a unit for generating an average reference image by statistical computation processing from the images of identical shape patterns lying next to the detection image including at least eight nearest chips on the up-and-down and right-and-left sides and at diagonal positions with the detection image being intermediately situated. The apparatus also includes a unit that detects a defect by comparing the detection image to the average reference image thus generated.

摘要翻译： 图案缺陷检查装置可以通过将通过图像传感器进行扫描而得到的检测图像进行比较来检测缺陷，所述检测图像具有相同形状且连续设置在被检测物体上的行和列方向上等间隔的那些图案， 具有通过扫描行和列方向上的相邻相同形状图案而获得的参考图像。 该装置具有用于通过统计计算处理从邻近检测图像的相同形状图案的图像生成平均参考图像的单元，该检测图像包括上下左右侧至少八个最近的码片，以及在 对角位置，检测图像位于中间位置。 该装置还包括通过将检测图像与由此生成的平均参考图像进行比较来检测缺陷的单元。