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公开(公告)号：US20070128758A1
公开(公告)日：2007-06-07
申请号：US11605292
申请日：2006-11-29
CPC分类号： B06B1/0292 , H01L27/0629 , H01L28/40 , H01L29/78
摘要： A semiconductor device has, on a single substrate, a semiconductor circuit portion and a hollow capacitor portion including a pair of counter electrodes and a hollow part located between the counter electrodes. The hollow part of the hollow capacitor portion is surrounded by an insulating film, and a through hole is formed in the insulating film to communicate with the hollow part. The top surface of the insulating film covering the hollow part is planarized. Part of the insulating film located to the lateral sides of the hollow part supports the other part thereof located on the hollow part and upper one of the counter electrodes.
摘要翻译： 半导体器件在单个衬底上具有包括一对对电极和位于对置电极之间的中空部分的半导体电路部分和中空电容器部分。 中空电容器部分的中空部分被绝缘膜包围，并且在绝缘膜中形成通孔以与中空部分连通。 覆盖中空部分的绝缘膜的顶表面被平坦化。 位于中空部分的侧面的绝缘膜的一部分支撑位于中空部分上的另一部分和对置电极的上部之一。
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公开(公告)号：US07560684B2
公开(公告)日：2009-07-14
申请号：US11795791
申请日：2006-03-07
CPC分类号： H01L27/14621 , B60R1/00 , B60R2300/10 , B60R2300/105 , B60R2300/8033 , B60R2300/8093 , H01L31/02165 , H04N9/07
摘要： A vehicle-mounted imaging device that is mounted in an automobile and performs color imaging has been provided with a plurality of two-dimensionally arranged pixel cells. In each of the pixels, a color filter separates incident light by a multilayer interference filter. The multilayer interference filter is composed of two λ/4 multilayer films and a spacer layer sandwiched therebetween. The multilayer interference filter transmits light in a wavelength region that corresponds to an optical thickness of the spacer layer. The λ/4 multilayer films and spacer layer are composed of inorganic materials.
摘要翻译： 安装在汽车中并执行彩色成像的车载成像装置已经设置有多个二维排列的像素单元。 在每个像素中，滤色器通过多层干涉滤光器分离入射光。 多层干涉滤光片由两个λ/ 4多层膜和夹在其间的间隔层组成。 多层干涉滤光器透过与间隔层的光学厚度对应的波长范围的光。 λ/ 4多层膜和间隔层由无机材料组成。
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公开(公告)号：US20080135740A1
公开(公告)日：2008-06-12
申请号：US11795791
申请日：2006-03-07
CPC分类号： H01L27/14621 , B60R1/00 , B60R2300/10 , B60R2300/105 , B60R2300/8033 , B60R2300/8093 , H01L31/02165 , H04N9/07
摘要： A vehicle-mounted imaging device that is mounted in an automobile and performs color imaging has been provided with a plurality of two-dimensionally arranged pixel cells. In each of the pixels, a color filter separates incident light by a multilayer interference filter. The multilayer interference filter is composed of two λ/4 multilayer films and a spacer layer sandwiched therebetween. The multilayer interference filter transmits light in a wavelength region that corresponds to an optical thickness of the spacer layer. The λ/4 multilayer films and spacer layer are composed of inorganic materials.
摘要翻译： 安装在汽车中并执行彩色成像的车载成像装置已经设置有多个二维排列的像素单元。 在每个像素中，滤色器通过多层干涉滤光器分离入射光。 多层干涉滤光片由两个λ/ 4多层膜和夹在其间的间隔层组成。 多层干涉滤光器透过与间隔层的光学厚度对应的波长范围的光。 λ/ 4多层膜和间隔层由无机材料组成。
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公开(公告)号：US07868286B2
公开(公告)日：2011-01-11
申请号：US12427332
申请日：2009-04-21
IPC分类号： H01J40/14
CPC分类号： H01L27/14621 , B60R1/00 , B60R2300/10 , B60R2300/105 , B60R2300/8033 , B60R2300/8093 , H01L31/02165 , H04N9/07
摘要： A vehicle-mounted imaging device that is mounted in an automobile and performs color imaging has been provided with a plurality of two-dimensionally arranged pixel cells. In each of the pixels, a color filter separates incident light by a multilayer interference filter. The multilayer interference filter is composed of two λ/4 multilayer films and a spacer layer sandwiched therebetween. The multilayer interference filter transmits light in a wavelength region that corresponds to an optical thickness of the spacer layer. The λ/4 multilayer films and spacer layer are composed of inorganic materials.
摘要翻译： 安装在汽车中并执行彩色成像的车载成像装置已经设置有多个二维排列的像素单元。 在每个像素中，滤色器通过多层干涉滤光器分离入射光。 多层干涉滤光片由两个λ/ 4多层膜和夹在其间的间隔层组成。 多层干涉滤光器透过与间隔层的光学厚度对应的波长范围的光。 λ/ 4多层膜和间隔层由无机材料组成。
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公开(公告)号：US07332717B2
公开(公告)日：2008-02-19
申请号：US10580534
申请日：2005-09-15
IPC分类号： G01J5/00
摘要： An infrared sensor includes a series capacitor element and a reference capacitor element each exhibiting a predetermined capacitance value; an infrared-detecting capacitor element whose capacitance value varies depending on an intensity of infrared light incident on the element; and an output node being a node at which a first terminal of the series capacitor element, a first terminal of the reference capacitor element and a first terminal of the infrared-detecting capacitor element are connected to one another. The intensity of infrared light is output as a potential difference between the reference potential which is brought to a potential by applying a predetermined voltage between the series capacitor element and the reference capacitor element and the detection potential which is brought to a potential by applying a predetermined voltage between the series capacitor element and the infrared-detecting capacitor element.
摘要翻译： 红外线传感器包括串联电容器元件和参考电容器元件，每个都具有预定的电容值; 其电容值根据入射到元件上的红外光的强度而变化的红外线检测电容器元件; 并且输出节点是串联电容器元件的第一端子，参考电容器元件的第一端子和红外线检测电容器元件的第一端子彼此连接的节点。 红外光的强度通过在串联电容器元件和参考电容器元件之间施加预定电压而被引入到电位的参考电位之间的电位差和通过施加预定的 串联电容器元件和红外线检测电容器元件之间的电压。
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26.发明授权Solid-state imaging device, manufacturing method of solid-state imaging device, and camera employing same 有权固态成像装置，固态成像装置的制造方法以及使用该装置的相机公开(公告)号：US07759679B2
公开(公告)日：2010-07-20
申请号：US10536962
申请日：2004-09-13
IPC分类号： H01L29/10
CPC分类号： H01L27/14685 , G02B5/201 , G02B5/285 , H01L27/14621 , H04N5/2254
摘要： A solid-state imaging device includes a color filter that selectively transmits incoming light. The color filter includes two λ/4 multilayer films, and an insulation layer sandwiched between the two λ/4 multilayer films. Here, each of the λ/4 multilayer films is constituted by a plurality of dielectric layers, and the optical thickness of the insulation layer is not λ/4. Since this color filter has a smaller thickness, the solid-state imaging device has a smaller size.
摘要翻译： 固态成像装置包括选择性地传输入射光的滤色器。 滤色器包括两个λ/ 4多层膜和夹在两个λ/ 4多层膜之间的绝缘层。 这里，λ/ 4多层膜由多个电介质层构成，绝缘层的光学厚度不为λ/ 4。 由于该滤色器具有较小的厚度，所以固态成像装置具有较小的尺寸。
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27.发明申请Solid-state imaging device, manufacturing method of solid-state imaging device, and camera employing same 有权固态成像装置，固态成像装置的制造方法以及使用该装置的相机公开(公告)号：US20060205107A1
公开(公告)日：2006-09-14
申请号：US10536962
申请日：2004-09-13
CPC分类号： H01L27/14685 , G02B5/201 , G02B5/285 , H01L27/14621 , H04N5/2254
摘要： A solid-state imaging device includes a color filter that selectively transmits incoming light. The color filter includes two λ/4 multilayer films, and an insulation layer sandwiched between the two λ/4 multilayer films. Here, each of the λ/4 multilayer films is constituted by a plurality of dielectric layers, and the optical thickness of the insulation layer is not λ/4. Since this color filter has a smaller thickness, the solid-state imaging device has a smaller size.
摘要翻译： 固态成像装置包括选择性地传输入射光的滤色器。 滤色器包括两个λ/ 4多层膜和夹在两个λ/ 4多层膜之间的绝缘层。 这里，每个λ/ 4多层膜由多个电介质层构成，绝缘层的光学厚度不是λ/ 4。 由于该滤色器具有较小的厚度，所以固态成像装置具有较小的尺寸。
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公开(公告)号：US20090201371A1
公开(公告)日：2009-08-13
申请号：US12427332
申请日：2009-04-21
IPC分类号： H04N7/18
CPC分类号： H01L27/14621 , B60R1/00 , B60R2300/10 , B60R2300/105 , B60R2300/8033 , B60R2300/8093 , H01L31/02165 , H04N9/07
摘要： A vehicle-mounted imaging device that is mounted in an automobile and performs color imaging has been provided with a plurality of two-dimensionally arranged pixel cells. In each of the pixels, a color filter separates incident light by a multilayer interference filter. The multilayer interference filter is composed of two λ/4 multilayer films and a spacer layer sandwiched therebetween. The multilayer interference filter transmits light in a wavelength region that corresponds to an optical thickness of the spacer layer. The λ/4 multilayer films and spacer layer are composed of inorganic materials.
摘要翻译： 安装在汽车中并执行彩色成像的车载成像装置已经设置有多个二维排列的像素单元。 在每个像素中，滤色器通过多层干涉滤光器分离入射光。 多层干涉滤光片由两个λ/ 4多层膜和夹在其间的间隔层组成。 多层干涉滤光器透过与间隔层的光学厚度对应的波长范围的光。 λ/ 4多层膜和间隔层由无机材料组成。
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公开(公告)号：US20070125949A1
公开(公告)日：2007-06-07
申请号：US10580534
申请日：2005-09-15
IPC分类号： G01J5/00
摘要： An infrared sensor includes a series capacitor element and a reference capacitor element each exhibiting a predetermined capacitance value; an infrared-detecting capacitor element whose capacitance value varies depending on an intensity of infrared light incident on the element; and an output node being a node at which a first terminal of the series capacitor element, a first terminal of the reference capacitor element and a first terminal of the infrared-detecting capacitor element are connected to one another. A potential of the output node is brought to a reference potential by applying a predetermined voltage between a second terminal of the series capacitor element and a second terminal of the reference capacitor element; a potential of the output node is brought to a detection potential by applying the predetermined voltage between the second terminal of the series capacitor element and a second terminal of the infrared-detecting capacitor element; and the intensity of infrared light is output as a potential difference between the reference potential and the detection potential.
摘要翻译： 红外线传感器包括串联电容器元件和参考电容器元件，每个都具有预定的电容值; 其电容值根据入射到元件上的红外光的强度而变化的红外线检测电容器元件; 并且输出节点是串联电容器元件的第一端子，参考电容器元件的第一端子和红外线检测电容器元件的第一端子彼此连接的节点。 通过在串联电容器元件的第二端子和参考电容器元件的第二端子之间施加预定电压使输出节点的电位达到参考电位; 通过在串联电容器元件的第二端子和红外线检测电容器元件的第二端子之间施加预定电压使输出节点的电位达到检测电位; 并且将红外光的强度作为参考电位和检测电位之间的电位差输出。
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公开(公告)号：US07968888B2
公开(公告)日：2011-06-28
申请号：US11422708
申请日：2006-06-07
IPC分类号： H01L31/00
CPC分类号： H01L27/1462 , H01L27/14621 , H01L27/14623 , H01L27/14625 , H01L27/14627 , H01L27/14632 , H01L27/14685 , H01L27/14687
摘要： An object of the present invention is to provide a small solid-state image sensor which realizes significant improvement in sensitivity. The solid-state image sensor of the present invention includes a semiconductor substrate in which photoelectric conversion units are formed, a light-blocking film which is formed above the semiconductor substrate and has apertures formed so as to be positioned above respective photoelectric conversion units, and a high refractive index layer formed in the apertures. Here, each aperture has a smaller aperture width than a maximum wavelength in a wavelength of light in a vacuum converted from a wavelength of the light entering the photoelectric conversion unit through the apertures, and the high refractive index is made of a high refractive index material having a refractive index which allows transmission of light having the maximum wavelength through the aperture.
摘要翻译： 本发明的目的是提供一种实现敏感度显着提高的小型固态图像传感器。 本发明的固态图像传感器包括形成有光电转换单元的半导体衬底，形成在半导体衬底之上并具有形成为位于各个光电转换单元之上的孔的遮光膜，以及 形成在孔中的高折射率层。 这里，每个孔径在从通过孔进入光电转换单元的光的波长转换的真空中的光波长中的最大波长较小，高折射率由高折射率材料 具有折射率，其允许通过孔径传输具有最大波长的光。
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