Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method
    21.
    发明授权
    Semiconductor manufacturing facility, semiconductor manufacturing apparatus and semiconductor manufacturing method 失效
    半导体制造设备,半导体制造装置和半导体制造方法

    公开(公告)号:US06547660B1

    公开(公告)日:2003-04-15

    申请号:US09669909

    申请日:2000-09-27

    IPC分类号: B01L104

    摘要: A semiconductor manufacturing facility is provided, which can reduce a thermal load in a clean room and reduce an amount of energy thereof. Semiconductor manufacturing equipment, which generates heat when it is used, is installed in the clean room and is covered by a housing. The housing is configured to be capable of introducing the air inside the clean room into an interior thereof. The air inside the housing is exhausted outside the clean room through a plurality of exhaust passage members. A heat insulating material is associated with the housing to reduce the release of heat from the housing to the air inside the clean room. A space between the housing and the semiconductor manufacturing equipment may be hermetically sealed, and an air introducing member may be connected to the housing to take air outside the clean room into the hermetically sealed space.

    摘要翻译: 提供了一种半导体制造设备,其可以降低洁净室中的热负荷并减少其能量。 使用时产生热量的半导体制造设备安装在洁净室中并被壳体覆盖。 壳体构造成能够将清洁室内的空气引入其内部。 壳体内的空气通过多个排气通道构件在洁净室外排出。 绝热材料与壳体相关联,以减少热量从壳体释放到洁净室内的空气。 壳体和半导体制造设备之间的空间可以被气密地密封,并且空气引入构件可以连接到壳体以将清洁室外的空气吸入密封空间。

    Apparatus for removing flash from molded products
    23.
    发明授权
    Apparatus for removing flash from molded products 失效
    用于从模制产品中去除闪光的装置

    公开(公告)号:US4995286A

    公开(公告)日:1991-02-26

    申请号:US196133

    申请日:1988-09-19

    IPC分类号: B23B5/00 B26F3/08 B29C37/02

    摘要: An automatic flash removing apparatus, according to the present invention, comprises a flash removing cutter edge carried by a cutter holder. The cutter holder is movable with carrying the cutter edge relative to a molded product. On the other hand, the molded product is supported on a product support which can drive the product relative to the cutter edge so that the portion of the product having flash to be removed is placed in opposition to the cutter edge. The cutter holder is associated with a pressure regulator means for adjusting pressure to depress the cutter edge toward the product. Regulated depression pressure may avoid fluctuation of smoothness of the product after removing the flash.

    Mechanical seal
    24.
    发明授权
    Mechanical seal 失效
    机械密封

    公开(公告)号:US4103907A

    公开(公告)日:1978-08-01

    申请号:US693314

    申请日:1976-06-07

    IPC分类号: F16J15/34

    CPC分类号: F16J15/3432 Y10S277/93

    摘要: A mechanical seal comprising:Sealing elements forming a sliding seal surface for sealing action and made of material having a high heat conductivity;Surface deformation-generating grooves provided at the portion close to said sliding seal surface on the sealing elements so that a fluid film can be generated by the wedge action of surface deformations of said sliding seal surface; andGrooves for generating turbulence and increasing heat transfer area which are provided in the marginal portion, separately of the grooves for generating surface deformation, in said sealing elements so that cooling fluid fed to said sliding seal surface can be made turbulent and contact area of the cooling fluid can be increased.

    摘要翻译: 一种机械密封,包括:

    Method of making a junction type field effect transistor
    25.
    发明授权
    Method of making a junction type field effect transistor 失效
    制造结型场效应晶体管的方法

    公开(公告)号:US4036672A

    公开(公告)日:1977-07-19

    申请号:US683265

    申请日:1976-05-05

    申请人: Sadao Kobayashi

    发明人: Sadao Kobayashi

    摘要: In the manufacture of a vertical structure junction type field effect transistor, the formation of a gate region is followed by an oxidation treatment of the upper surface of the gate region and then by the growth of a semiconductor layer consisting of a monocrystalline region on the channel portion and a polycrystalline region on the oxide film formed on the gate region. The existence of the oxide film on the gate region prevents the out-diffusion of the impurity doped in the gate region, preventing the lowering of the breakdown voltage, and enabling a short channel length and small series resistance of the channel.

    摘要翻译: 在垂直结构型场效应晶体管的制造中,栅极区域的形成之后是对栅极区域的上表面进行氧化处理,然后通过在沟道上由单晶区域构成的半导体层的生长 部分和形成在栅极区域上的氧化物膜上的多晶区域。 栅极区域上的氧化膜的存在防止了掺杂在栅极区域中的杂质的扩散,防止了击穿电压的降低,并且能够实现沟道的短沟道长度和小的串联电阻。

    System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment
    26.
    发明授权
    System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment 失效
    半导体设备废热利用系统和方法及半导体设备余热利用热交换器

    公开(公告)号:US06799539B2

    公开(公告)日:2004-10-05

    申请号:US10468362

    申请日:2003-08-19

    IPC分类号: F22D102

    摘要: An amount of energy consumption in a semiconductor fabrication facility can be reduced by using cooling water drained from a semiconductor fabrication apparatus as a heat source of another semiconductor fabrication apparatus. Cooling water of 80° C. drained from a heating furnace of a heat processing apparatus (10) is supplied to a deionized water heating apparatus (32) of a cleaning apparatus (30). The deionized water heating apparatus (32) raises a temperature of deionized water of a room temperature to 60° C. through heat exchange with the cooling water of 80° C. The cooling water, whose temperature falls to 30° C. after the heat exchange, is reutilized for cooling of the heating furnace (12).

    摘要翻译: 通过使用从半导体制造装置排出的冷却水作为另一半导体制造装置的热源,可以减少半导体制造设备中的能量消耗。 将从加热处理装置(10)的加热炉排出的80℃的冷却水供给到清洗装置(30)的去离子水加热装置(32)。 去离子水加热装置(32)通过与80℃的冷却水进行热交换,将室温下去离子水的温度升高到60℃。加热后的温度降至30℃的冷却水 再次利用加热炉(12)的冷却。

    Iodine cell
    29.
    发明授权
    Iodine cell 失效
    碘细胞

    公开(公告)号:US4656105A

    公开(公告)日:1987-04-07

    申请号:US726907

    申请日:1985-04-17

    摘要: This invention provides an iodine cell in which a composition obtained by including a carbon such as carbon black and graphite in dispersed form in a composition comprising iodine and a polymer having the ability to form a complex adduct with it, said polymer fixing iodine, is used as a positive electrode material and preferably a cation exchange membrane is used as a separator. The iodine cell is characterized by having a high output, a low internal resistance, a high charging-discharging life (a large cycle number) and a long service life and being able to be charged even when almost all of iodine has been liberated from the positive electrode. It can be used suitably as a primary cell, preferably as a secondary cell.

    摘要翻译: PCT No.PCT / JP84 / 00416 Sec。 371日期:1985年04月17日 102(e)日期1985年4月17日PCT提交1984年8月30日PCT公布。 出版物WO85 / 01155 1985年3月14日。本发明提供了一种碘电池,其中通过将分散形式的碳如碳黑和石墨包含在包含碘的组合物和具有与其形成复合加合物的能力的聚合物中而获得的组合物, 所述聚合物固定碘用作正极材料,优选使用阳离子交换膜作为隔膜。 碘电池的特征在于具有高输出,低内阻,高充电 - 放电寿命(大循环数)和长使用寿命,并且即使几乎所有的碘已经从 正极。 它可以适当地用作初级电池,优选用作二次电池。

    Metallic tone powder coating composition
    30.
    发明授权
    Metallic tone powder coating composition 失效
    金属色粉涂料组合物

    公开(公告)号:US4048136A

    公开(公告)日:1977-09-13

    申请号:US621518

    申请日:1975-10-10

    摘要: A metallic tone powder coating composition of acrylic resin series which prises a polymer-capsulated metal powder composite material wherein a vinyl monomer is chemically combined with a powder of a metal such as aluminum and a copolymer having a glass transition temperature of at least 20.degree. C wherein the sum of an acrylic ester and a methacrylic ester is at least 30% by weight of the total monomer constituting the copolymer. This powder coating composition provides a coating film having excellent weather-resistance and beautiful appearance and is suited for use in electrostatic powder spraying.

    摘要翻译: 丙烯酸树脂系列的金属色调粉末涂料组合物,其包含聚合物包覆的金属粉末复合材料,其中乙烯基单体与金属如铝的粉末和玻璃化转变温度为至少20℃的共聚物化学结合 其中丙烯酸酯和甲基丙烯酸酯的总和为构成共聚物的总单体的至少30重量%。 该粉末涂料组合物提供了具有优异的耐候性和美观的涂膜,适用于静电粉末喷涂。