摘要:
A semiconductor manufacturing facility is provided, which can reduce a thermal load in a clean room and reduce an amount of energy thereof. Semiconductor manufacturing equipment, which generates heat when it is used, is installed in the clean room and is covered by a housing. The housing is configured to be capable of introducing the air inside the clean room into an interior thereof. The air inside the housing is exhausted outside the clean room through a plurality of exhaust passage members. A heat insulating material is associated with the housing to reduce the release of heat from the housing to the air inside the clean room. A space between the housing and the semiconductor manufacturing equipment may be hermetically sealed, and an air introducing member may be connected to the housing to take air outside the clean room into the hermetically sealed space.
摘要:
A heat exchange section (72) is provided in the middle of a circulation water path (58, 59) connecting between a temperature-controlled water tank (71) and a semiconductor manufacturing apparatus body (4) so as to perform a heat exchange with air of a clean room (3). The heat exchange section (72) is installed near an exit of an air circulation path (32) above a fan-filter unit (34) of the clean room as a temperature stabilized area off an atmosphere of the clean room (3). Additionally, as another method, a temperature of a chemical fluid from a chemical fluid tank (6) is controlled to be a temperature of the air in the clean room by a heat exchange section (61) provided in a location the same as above without using the temperature-controlled water so as to supply the chemical fluid to the semiconductor manufacturing apparatus body (4).
摘要:
An automatic flash removing apparatus, according to the present invention, comprises a flash removing cutter edge carried by a cutter holder. The cutter holder is movable with carrying the cutter edge relative to a molded product. On the other hand, the molded product is supported on a product support which can drive the product relative to the cutter edge so that the portion of the product having flash to be removed is placed in opposition to the cutter edge. The cutter holder is associated with a pressure regulator means for adjusting pressure to depress the cutter edge toward the product. Regulated depression pressure may avoid fluctuation of smoothness of the product after removing the flash.
摘要:
A mechanical seal comprising:Sealing elements forming a sliding seal surface for sealing action and made of material having a high heat conductivity;Surface deformation-generating grooves provided at the portion close to said sliding seal surface on the sealing elements so that a fluid film can be generated by the wedge action of surface deformations of said sliding seal surface; andGrooves for generating turbulence and increasing heat transfer area which are provided in the marginal portion, separately of the grooves for generating surface deformation, in said sealing elements so that cooling fluid fed to said sliding seal surface can be made turbulent and contact area of the cooling fluid can be increased.
摘要:
In the manufacture of a vertical structure junction type field effect transistor, the formation of a gate region is followed by an oxidation treatment of the upper surface of the gate region and then by the growth of a semiconductor layer consisting of a monocrystalline region on the channel portion and a polycrystalline region on the oxide film formed on the gate region. The existence of the oxide film on the gate region prevents the out-diffusion of the impurity doped in the gate region, preventing the lowering of the breakdown voltage, and enabling a short channel length and small series resistance of the channel.
摘要:
An amount of energy consumption in a semiconductor fabrication facility can be reduced by using cooling water drained from a semiconductor fabrication apparatus as a heat source of another semiconductor fabrication apparatus. Cooling water of 80° C. drained from a heating furnace of a heat processing apparatus (10) is supplied to a deionized water heating apparatus (32) of a cleaning apparatus (30). The deionized water heating apparatus (32) raises a temperature of deionized water of a room temperature to 60° C. through heat exchange with the cooling water of 80° C. The cooling water, whose temperature falls to 30° C. after the heat exchange, is reutilized for cooling of the heating furnace (12).
摘要:
Disclosed herein is an agent for absorbing and releasing water vapor, which comprises a homopolymer of at least one monomer selected from specific N-alkyl- or N-alkylene-substituted acrylamides and methacrylamides, a copolymer of two or more of the acrylamides and methacrylamides, a copolymer of said at least one monomer with one or more monomers other than the acrylamides and methacrylamides and copolymerizable therewith, or a water-insolubilized product of the homopolymer or either one of the copolymers. The above agent has broad utility for humidity control of gases, humidity control in green houses and prevention of fogging on surfaces of transparent materials, as humidity sensors and dew sensors, etc.
摘要:
A double layer pavement marking sheet material comprises a base sheet made of rubber, synthetic resin or the like in which a multiplicity of glass microspheres are embedded. The base sheet comprises an upper layer in which the glass microspheres are embedded in such a manner that a multiplicity thereof are partially exposed from the surface of the base sheet and a lower layer having hardness within a range of 30.degree.-75.degree. and restoration rate of 50% or less. This double layer pavement marking sheet material has such an excellent conformability to the pavement surface that the sheet material is not separated once it has been adhered to the pavement surface.
摘要:
This invention provides an iodine cell in which a composition obtained by including a carbon such as carbon black and graphite in dispersed form in a composition comprising iodine and a polymer having the ability to form a complex adduct with it, said polymer fixing iodine, is used as a positive electrode material and preferably a cation exchange membrane is used as a separator. The iodine cell is characterized by having a high output, a low internal resistance, a high charging-discharging life (a large cycle number) and a long service life and being able to be charged even when almost all of iodine has been liberated from the positive electrode. It can be used suitably as a primary cell, preferably as a secondary cell.
摘要:
A metallic tone powder coating composition of acrylic resin series which prises a polymer-capsulated metal powder composite material wherein a vinyl monomer is chemically combined with a powder of a metal such as aluminum and a copolymer having a glass transition temperature of at least 20.degree. C wherein the sum of an acrylic ester and a methacrylic ester is at least 30% by weight of the total monomer constituting the copolymer. This powder coating composition provides a coating film having excellent weather-resistance and beautiful appearance and is suited for use in electrostatic powder spraying.