公开(公告)号：US07938515B2

公开(公告)日：2011-05-10

申请号：US12389710

申请日：2009-02-20

申请人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

发明人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/316

摘要： The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (001′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, 1′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); Wc is a half-value width of a peak of the (001′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

摘要翻译： 本发明提供了一种电介质膜结构，其具有设置在基板上的基板和电介质膜，并且其中电介质膜相对于基板具有（001）面取向，并且其中以下等式（1）中的值u， 关于电介质膜是大于2的实数：u =（Cc / Ca）×（Wa / Wc）（1）其中，Cc是介电膜的（001'）面的峰的计数 平面外X射线衍射测量（这里，1'是选择为Cc变为最大的自然数）; Ca是In平面X射线衍射测定中的电介质膜的（h'00）面的峰值的计数数（这里，h'是选择为Cc变为最大的自然数）; Wc是外平面摇摆曲线X射线衍射测定中的电介质膜的（001'）面的峰值的半值宽度; Wa是In平面摇摆曲线X射线衍射测定中的电介质膜的（h'00）面的峰值的半值宽度。

公开(公告)号：US08846556B2

公开(公告)日：2014-09-30

申请号：US12952644

申请日：2010-11-23

申请人： Makoto Kubota ,  Tatsuo Furuta ,  Hiroshi Saito ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui

发明人： Makoto Kubota ,  Tatsuo Furuta ,  Hiroshi Saito ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui

IPC分类号： B41J2/045 ,  C04B35/00 ,  H01L41/00 ,  H02N2/00 ,  H01L41/18 ,  H01L41/187 ,  C04B35/468 ,  C04B35/628 ,  H01L41/09 ,  C04B35/626 ,  H02N2/10 ,  H02N2/16

CPC分类号： H01L41/1871 ,  C04B35/468 ,  C04B35/4682 ,  C04B35/62655 ,  C04B35/62805 ,  C04B35/62886 ,  C04B2235/3208 ,  C04B2235/3236 ,  C04B2235/3262 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2235/762 ,  C04B2235/765 ,  C04B2235/77 ,  C04B2235/783 ,  C04B2235/786 ,  C04B2235/96 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163

摘要： A piezoelectric ceramic that includes barium titanate and 0.04 mass % or more and 0.20 mass % or less manganese relative to barium titanate. The piezoelectric ceramic is composed of crystal grains. The crystal grains include crystal grains A having an equivalent circular diameter of 30 μm or more and 300 μm or less and crystal grains B having an equivalent circular diameter of 0.5 μm or more and 3 μm or less. The crystal grains A and the crystal grains B individually form aggregates and the aggregates of the crystal grains A and the aggregates of the crystal grains B form a sea-island structure.

摘要翻译： 一种压电陶瓷，其包含钛酸钡，相对于钛酸钡为0.04质量％以上且0.20质量％以下的锰。 压电陶瓷由晶粒组成。 晶粒包括等效圆直径为30μm以上且300μm以下的晶粒A和等效圆直径为0.5μm以上且3μm以下的晶粒B. 晶粒A和晶粒B分别形成聚集体，并且晶粒A的聚集体和晶粒B的聚集体形成海岛结构。

公开(公告)号：US07999441B2

公开(公告)日：2011-08-16

申请号：US12237933

申请日：2008-09-25

申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

IPC分类号： H01L41/04

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/316 ,  H01L41/319

摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

摘要翻译： 压电致动器包括在两个电极层和隔膜之间的压电膜。 假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 当施加预定电场以使压电膜失真时，位于膜片表面上并具有最大位移的点由PδMAX表示; 以PδMAX为中心并且具有与PδMAX的位移的最小差异的基准圆的圆周上的点由PδA表示，所述隔膜具有能够确定在直线接合PδMAX中设定的轴A1的形状 和PδA，所述隔膜包括其中与A1正交并垂直于所述膜表面上的轴线A2的平面为{110}面的单晶材料，并且所述压电膜为{100} - 单晶材料， 定向电影。

公开(公告)号：US20090091215A1

公开(公告)日：2009-04-09

申请号：US12237933

申请日：2008-09-25

申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

IPC分类号： H01L41/00

CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/316 ,  H01L41/319

摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

摘要翻译： 压电致动器包括在两个电极层和隔膜之间的压电膜。 假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 位于膜片表面上并且当施加预定电场以使压电膜失真时具有最大位移的点由PdeltaMAX表示; 并且位于具有PdeltaMAX作为中心并且具有与PdeltaMAX的位移的最小差异的参考圆的圆周上的点由PdeltaA表示，所述隔膜具有能够确定在连接PdeltaMAX的直线中设置的轴A1的形状 和PdeltaA，隔膜包括其中与A1正交并垂直于膜片表面上的轴线A2的平面为{110}面的单晶材料，并且压电膜为{100} - 单晶材料， 定向电影。

公开(公告)号：US07984977B2

公开(公告)日：2011-07-26

申请号：US11769091

申请日：2007-06-27

申请人： Kenichi Takeda ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

发明人： Kenichi Takeda ,  Katsumi Aoki ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

IPC分类号： B41J2/045

CPC分类号： H01L41/1876 ,  H01L41/319 ,  Y10T29/42

摘要： A piezoelectric element comprises a piezoelectric body including a film made of an ABO3 perovskite oxide crystal epitaxially grown above a substrate, and a pair of electrode layers provided to the piezoelectric body, wherein the piezoelectric body has a porous region on a side opposite to a side of the substrate.

摘要翻译： 压电元件包括​​压电体，该压电体包括在基板上外延生长的由ABO3钙钛矿氧化物晶体构成的膜和设置在压电体上的一对电极层，其中，压电体在与侧面相反的一侧具有多孔区域 的基底。

公开(公告)号：US07513608B2

公开(公告)日：2009-04-07

申请号：US11338774

申请日：2006-01-25

申请人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

发明人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/316

摘要： The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (001′)face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, l′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); Wc is a half-value width of a peak of the (001′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

摘要翻译： 本发明提供了一种电介质膜结构，其具有设置在基板上的基板和电介质膜，并且其中电介质膜相对于基板具有（001）面取向，并且其中以下等式（1）中的值u， u =（Cc / Ca）×（Wa / Wc）（1）中的绝对值大于2的实数：<？in-line-formula description =“In-line formula”end =“lead” <？in-line-formula description =“In-line formula”end =“tail”？>其中，Cc是平面外的电介质膜的（001'）面的峰值的计数数 X射线衍射测量（这里，l'是选择的自然数，使得Cc变为最大）; Ca是In平面X射线衍射测定中的电介质膜的（h'00）面的峰值的计数数（这里，h'是选择为Cc变为最大的自然数）; Wc是外平面摇摆曲线X射线衍射测定中的电介质膜的（001'）面的峰值的半值宽度; Wa是In平面摇摆曲线X射线衍射测定中的电介质膜的（h'00）面的峰值的半值宽度。

公开(公告)号：US20060176342A1

公开(公告)日：2006-08-10

申请号：US11338774

申请日：2006-01-25

申请人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

发明人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/316

摘要： The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (001′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, l′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); WC is a half-value width of a peak of the (001′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

摘要翻译： 本发明提供了一种电介质膜结构，其具有设置在基板上的基板和电介质膜，并且其中电介质膜相对于基板具有（001）面取向，并且其中以下等式（1）中的值u， 关于电介质膜是大于2的实数：<？in-line-formula description =“In-line Formulas”end =“lead”？> u =（C C _{其中C是在平面外X射线衍射测量中电介质膜的（001'）面的峰的计数（这里，l'是 选择的自然数使得C 变得最大）; 在平面X射线衍射测量中，电介质膜的（h'00）面的峰值的计数数（这里，h'是选择的自然数，使得C 变为最大）; WC是在平面外的摇摆曲线X射线衍射测定中的电介质膜的（001'）面的峰值的半值宽度; 并且W a a是在平面内的摇摆曲线X射线衍射测量中电介质膜的（h'00）面的峰值的半值宽度。}

公开(公告)号：US07059711B2

公开(公告)日：2006-06-13

申请号：US10769765

申请日：2004-02-03

申请人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

发明人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/316

摘要： The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (00l′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, l′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); Wc is a half-value width of a peak of the (00l′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

摘要翻译： 本发明提供了一种电介质膜结构，其具有设置在基板上的基板和电介质膜，并且其中电介质膜相对于基板具有（001）面取向，并且其中以下等式（1）中的值u， 关于电介质膜是大于2的实数：<？in-line-formula description =“In-line Formulas”end =“lead”？> u =（C C _{其中，C是在平面外X射线衍射测量中电介质膜的（001）面的峰值的计数（这里，l'是 选择的自然数使得C 变得最大）; 在平面X射线衍射测量中，电介质膜的（h'00）面的峰值的计数数（这里，h'是选择的自然数，使得C 变为最大）; 在平面外的摇摆曲线X射线衍射测量中，电介质薄膜的（001'）面的峰值的半值宽度是半值宽度; 并且W a a是在平面内的摇摆曲线X射线衍射测量中电介质膜的（h'00）面的峰值的半值宽度。}

公开(公告)号：US20060012648A1

公开(公告)日：2006-01-19

申请号：US10532020

申请日：2004-01-30

申请人： Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui ,  Katsumi Aoki ,  Takanori Matsuda ,  Masaru Shimizu

发明人： Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui ,  Katsumi Aoki ,  Takanori Matsuda ,  Masaru Shimizu

IPC分类号： B41J2/045

CPC分类号： H01L41/41 ,  B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

摘要： A piezoelectric element including an upper electrode, a piezoelectric and/or electrostrictive material and a lower electrode, characterized in that the piezoelectric and/or electrostrictive material is a composite oxide constituted by ABO3 as general formula and the piezoelectric and/or electrostrictive material has a twin crystal.

公开(公告)号：US20110128327A1

公开(公告)日：2011-06-02

申请号：US12952644

申请日：2010-11-23

申请人： Makoto Kubota ,  Tatsuo Furuta ,  Hiroshi Saito ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui

发明人： Makoto Kubota ,  Tatsuo Furuta ,  Hiroshi Saito ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui

IPC分类号： B41J2/045 ,  H01L41/18 ,  H02N2/00

CPC分类号： H01L41/1871 ,  C04B35/468 ,  C04B35/4682 ,  C04B35/62655 ,  C04B35/62805 ,  C04B35/62886 ,  C04B2235/3208 ,  C04B2235/3236 ,  C04B2235/3262 ,  C04B2235/449 ,  C04B2235/5445 ,  C04B2235/656 ,  C04B2235/6567 ,  C04B2235/762 ,  C04B2235/765 ,  C04B2235/77 ,  C04B2235/783 ,  C04B2235/786 ,  C04B2235/96 ,  H01L41/09 ,  H01L41/0973 ,  H01L41/43 ,  H02N2/106 ,  H02N2/163

摘要： A piezoelectric ceramic that includes barium titanate and 0.04 mass % or more and 0.20 mass % or less manganese relative to barium titanate. The piezoelectric ceramic is composed of crystal grains. The crystal grains include crystal grains A having an equivalent circular diameter of 30 μm or more and 300 μm or less and crystal grains B having an equivalent circular diameter of 0.5 μm or more and 3 μm or less. The crystal grains A and the crystal grains B individually form aggregates and the aggregates of the crystal grains A and the aggregates of the crystal grains B form a sea-island structure.

摘要翻译： 一种压电陶瓷，其包含钛酸钡，相对于钛酸钡为0.04质量％以上且0.20质量％以下的锰。 压电陶瓷由晶粒组成。 晶粒包括等效圆直径为30μm以上且300μm以下的晶粒A和等效圆直径为0.5μm以上且3μm以下的晶粒B. 晶粒A和晶粒B分别形成聚集体，并且晶粒A的聚集体和晶粒B的聚集体形成海岛结构。