公开(公告)号：US09255801B2

公开(公告)日：2016-02-09

申请号：US13922801

申请日：2013-06-20

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01P3/44 ,  G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/56 ,  G01C19/5747

Abstract: A yaw rate sensor, including a substrate and a main extension plane, for detecting a yaw rate around a first direction in parallel to the main extension plane, a first Coriolis mass, and a second Coriolis mass, and a drive device configured to drive the first and second Coriolis masses in parallel to a drive direction perpendicular to the first direction, the first and second Coriolis masses, for a yaw rate around the first direction, experiencing a Coriolis acceleration in parallel to a detection direction, which is perpendicular to the drive and first directions, the first and second Coriolis masses having first/second partial areas and third/fourth partial areas, respectively. The first and third partial areas are farther from the axis of symmetry in parallel to the first direction, and the second and fourth partial areas are closer to the axis of symmetry in parallel to the first direction.

Abstract translation: 包括基板和主延伸平面的横摆角速度传感器，用于检测平行于主延伸平面的第一方向的横摆率，第一科里奥利质量和第二科里奥利质量，驱动装置被配置为驱动 第一和第二科里奥利质量平行于垂直于第一方向的驱动方向，第一和第二科里奥利质量，对于围绕第一方向的横摆率，经历与垂直于驱动器的检测方向平行的科里奥利加速度 和第一方向，分别具有第一/第二部分区域和第三/第四部分区域的第一和第二科里奥利群体。 第一和第三部分区域平行于第一方向距离对称轴更远，并且第二和第四部分区域平行于第一方向更靠近对称轴。

公开(公告)号：US09212048B2

公开(公告)日：2015-12-15

申请号：US13890363

申请日：2013-05-09

Applicant: Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Heribert Weber ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0075 ,  B81B2207/07 ,  B81B2207/096 ,  B81C1/00238 ,  B81C1/00674 ,  B81C2203/0109 ,  H01L2224/16225 ,  H01L2924/19105

Abstract: A hybridly integrated component includes an ASIC element having a processed front side, a first MEMS element having a micromechanical structure extending over the entire thickness of the first MEMS substrate, and a first cap wafer mounted over the micromechanical structure of the first MEMS element. At least one structural element of the micromechanical structure of the first MEMS element is deflectable, and the first MEMS element is mounted on the processed front side of the ASIC element such that a gap exists between the micromechanical structure and the ASIC element. A second MEMS element is mounted on the rear side of the ASIC element. The micromechanical structure of the second MEMS element extends over the entire thickness of the second MEMS substrate and includes at least one deflectable structural element.

Abstract translation: 混合集成部件包括具有经处理的前侧的ASIC元件，具有在第一MEMS基板的整个厚度上延伸的微机械结构的第一MEMS元件和安装在第一MEMS元件的微机械结构上的第一盖晶片。 第一MEMS元件的微机械结构的至少一个结构元件是可偏转的，并且第一MEMS元件安装在ASIC元件的经处理的正面上，使得在微机械结构和ASIC元件之间存在间隙。 第二个MEMS元件安装在ASIC元件的后侧。 第二MEMS元件的微机械结构在第二MEMS基板的整个厚度上延伸，并且包括至少一个可偏转的结构元件。

公开(公告)号：US08844357B2

公开(公告)日：2014-09-30

申请号：US13294752

申请日：2011-11-11

Applicant: Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

Inventor： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC: G01C19/56 ,  G01C19/5747

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

Abstract translation: 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US08683863B2

公开(公告)日：2014-04-01

申请号：US12987732

申请日：2011-01-10

Applicant: Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

Inventor： Johannes Classen ,  Burkhard Kuhlmann ,  Daniel Christoph Meisel

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.

Abstract translation: 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

公开(公告)号：US20120152019A1

公开(公告)日：2012-06-21

申请号：US13305292

申请日：2011-11-28

Applicant: Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

Inventor： Burkhard Kuhlmann ,  Rolf Scheben ,  Daniel Christoph Meisel ,  Benjamin Schmidt ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5712

Abstract: A yaw-rate sensor is described as having a substrate which has a main plane of extension for detecting a yaw rate about a first axis extending parallel to the main plane of extension is provided, the yaw-rate sensor having a first rotation element and a second rotation element, the first rotation element being drivable about a first axis of rotation, the second rotation element being drivable about a second axis of rotation, the first axis of rotation being situated perpendicularly to the main plane of extension, the second axis of rotation being situated perpendicularly to the main plane of extension, the first rotation element and the second rotation element being drivable in opposite directions.

Abstract translation: 横摆率传感器被描述为设置有具有用于检测围绕平行于主平面延伸的第一轴延伸的横摆率的主扩展平面的基板，该偏航率传感器具有第一旋转元件和 第二旋转元件，第一旋转元件围绕第一旋转轴线驱动，第二旋转元件围绕第二旋转轴线驱动，第一旋转轴线垂直于主平面延伸，第二旋转轴线 垂直于延伸主平面定位，第一旋转元件和第二旋转元件可沿相反方向驱动。

公开(公告)号：US20130098154A1

公开(公告)日：2013-04-25

申请号：US13635581

申请日：2011-01-19

Applicant: Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

Inventor： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

IPC: G01P15/09

CPC classification number: G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

Abstract: A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

Abstract translation: 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

公开(公告)号：US08375787B2

公开(公告)日：2013-02-19

申请号：US12637171

申请日：2009-12-14

Applicant: Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

Inventor： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC: G01C19/56

CPC classification number: G01C19/5755 ,  G01C19/574

Abstract: A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.

Abstract translation: 旋转速率传感器包括具有主延伸面的基板和可相对于基板移动的科里奥利元件，所述科里奥利元件被设置为可激发以执行基本上平行于主延伸平面的振荡偏转; 并且科里奥利元素进一步通过作用在科里奥利元件上的科里奥利力来提供偏转，以执行垂直于主延伸平面的可检测科里奥利偏转; 并且所述旋转速率传感器还包括至少一个补偿电极，所述至少一个补偿电极用于作为所述科里奥利元件的悬浮力的至少部分补偿作为所述振荡偏转的函数。

公开(公告)号：US09003881B2

公开(公告)日：2015-04-14

申请号：US13197100

申请日：2011-08-03

Applicant: Reinhard Neul ,  Daniel Christoph Meisel

Inventor： Reinhard Neul ,  Daniel Christoph Meisel

IPC: G01C19/56 ,  G01C19/5755

CPC classification number: G01C19/5755

Abstract: A yaw-rate sensor for determining a Coriolis force includes a semiconductor substrate, a mass body mounted so it is movable over the semiconductor substrate, a drive unit for setting the mass body into an oscillating movement, and a detection unit for determining a deflection of the mass body which is caused by the Coriolis force. The detection unit includes a piezoresistive element, whose electrical resistance is a function of the deformation of the piezoresistive element.

Abstract translation: 用于确定科里奥利力的偏转速率传感器包括半导体衬底，安装成可在半导体衬底上移动的质量体，用于将质量体设置为振荡运动的驱动单元，以及用于确定 由科里奥利力造成的质量体。 检测单元包括压阻元件，其电阻是压阻元件的变形的函数。

公开(公告)号：US20120125099A1

公开(公告)日：2012-05-24

申请号：US13294752

申请日：2011-11-11

Applicant: Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

Inventor： Rolf Scheben ,  Burkhard Kuhlmann ,  Thorsten Balslink ,  Daniel Christoph Meisel ,  Benjamin Schmidt

IPC: G01C19/56

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor includes: a substrate having a main extension plane for detecting a yaw rate about a first axis extending parallel to the main extension plane; a first Coriolis element; a second Coriolis element; a third Coriolis element; and a fourth Coriolis element. The first Coriolis element and the fourth Coriolis element are drivable in the same direction parallel to a second axis extending parallel to the main extension plane and perpendicularly to the first axis. The first Coriolis element and the second Coriolis element are drivable in opposite directions parallel to the second axis. The first Coriolis element and the third Coriolis element are drivable in opposite directions parallel to the second axis.

Abstract translation: 偏航率传感器包括：具有用于检测围绕平行于主延伸平面延伸的第一轴线的横摆率的主延伸面的基板; 第一个科里奥利元素; 第二个科里奥利元素; 第三科里奥利元素; 和第四个科里奥利元素。 第一科里奥利元件和第四科里奥利元件可以在平行于平行于主延伸平面并垂直于第一轴线延伸的第二轴线的相同方向上驱动。 第一科里奥利元件和第二科里奥利元件可以在平行于第二轴线的相反方向上驱动。 第一科里奥利元件和第三科里奥利元件可以在平行于第二轴线的相反方向上驱动。

公开(公告)号：US20120031183A1

公开(公告)日：2012-02-09

申请号：US13197100

申请日：2011-08-03

Applicant: Reinhard NEUL ,  Daniel Christoph Meisel

Inventor： Reinhard NEUL ,  Daniel Christoph Meisel

IPC: G01P15/14

CPC classification number: G01C19/5755

Abstract: A yaw-rate sensor for determining a Coriolis force includes a semiconductor substrate, a mass body mounted so it is movable over the semiconductor substrate, a drive unit for setting the mass body into an oscillating movement, and a detection unit for determining a deflection of the mass body which is caused by the Coriolis force. The detection unit includes a piezoresistive element, whose electrical resistance is a function of the deformation of the piezoresistive element.

Abstract translation: 用于确定科里奥利力的偏转速率传感器包括半导体衬底，安装成可在半导体衬底上移动的质量体，用于将质量体设置为振荡运动的驱动单元，以及用于确定 由科里奥利力造成的质量体。 检测单元包括压阻元件，其电阻是压阻元件的变形的函数。