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公开(公告)号：US09212048B2
公开(公告)日：2015-12-15
申请号：US13890363
申请日：2013-05-09
CPC分类号： B81B3/0075 , B81B2207/07 , B81B2207/096 , B81C1/00238 , B81C1/00674 , B81C2203/0109 , H01L2224/16225 , H01L2924/19105
摘要： A hybridly integrated component includes an ASIC element having a processed front side, a first MEMS element having a micromechanical structure extending over the entire thickness of the first MEMS substrate, and a first cap wafer mounted over the micromechanical structure of the first MEMS element. At least one structural element of the micromechanical structure of the first MEMS element is deflectable, and the first MEMS element is mounted on the processed front side of the ASIC element such that a gap exists between the micromechanical structure and the ASIC element. A second MEMS element is mounted on the rear side of the ASIC element. The micromechanical structure of the second MEMS element extends over the entire thickness of the second MEMS substrate and includes at least one deflectable structural element.
摘要翻译： 混合集成部件包括具有经处理的前侧的ASIC元件，具有在第一MEMS基板的整个厚度上延伸的微机械结构的第一MEMS元件和安装在第一MEMS元件的微机械结构上的第一盖晶片。 第一MEMS元件的微机械结构的至少一个结构元件是可偏转的，并且第一MEMS元件安装在ASIC元件的经处理的正面上，使得在微机械结构和ASIC元件之间存在间隙。 第二个MEMS元件安装在ASIC元件的后侧。 第二MEMS元件的微机械结构在第二MEMS基板的整个厚度上延伸，并且包括至少一个可偏转的结构元件。
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公开(公告)号：US09266720B2
公开(公告)日：2016-02-23
申请号：US14059202
申请日：2013-10-21
申请人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
发明人： Johannes Classen , Axel Franke , Jens Frey , Heribert Weber , Frank Fischer , Patrick Wellner , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： B81C1/00
CPC分类号： B81C1/00246 , B81C1/0023 , B81C2203/075 , B81C2203/0771 , H01L2224/48463
摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.
摘要翻译： 元件具有至少一个MEMS元件和由半导体材料制成的至少一个盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。
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3.发明授权Micromechanical angular acceleration sensor and method for measuring an angular acceleration 有权微机械角加速度传感器和角加速度测量方法公开(公告)号：US08950258B2
公开(公告)日：2015-02-10
申请号：US13479746
申请日：2012-05-24
IPC分类号： G01P15/10 , G01P15/12 , G01P15/09 , H01L41/113
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译： 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。
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4.发明申请Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration 有权微机械角加速度传感器和测量角加速度的方法公开(公告)号：US20120297878A1
公开(公告)日：2012-11-29
申请号：US13479746
申请日：2012-05-24
IPC分类号： G01P15/097
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译： 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。
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5.发明申请Micromechanical Rotary Acceleration Sensor and Method for Detecting a Rotary Acceleration 有权微机械旋转加速度传感器和检测旋转加速度的方法公开(公告)号：US20120272735A1
公开(公告)日：2012-11-01
申请号：US13453425
申请日：2012-04-23
IPC分类号： G01P15/00
CPC分类号： G01P15/097
摘要： The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
摘要翻译： 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚固装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。
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6.发明授权Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration 有权微机械式旋转加速度传感器及旋转加速度检测方法公开(公告)号：US09164123B2
公开(公告)日：2015-10-20
申请号：US13453425
申请日：2012-04-23
IPC分类号： G01P15/00 , G01P15/097
CPC分类号： G01P15/097
摘要： The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
摘要翻译： 本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚定装置和至少两个飞轮块的基板。 至少一个飞轮质量通过联接元件连接到至少一个锚定装置。 所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。 至少两个飞轮质量被设计成使得它们具有不同的固有频率。
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公开(公告)号：US20140326070A1
公开(公告)日：2014-11-06
申请号：US14334407
申请日：2014-07-17
申请人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
发明人： Reinhard Neul , Johannes Classen , Torsten Ohms , Burkhard Kuhlmann , Axel Franke , Oliver Kohn , Daniel Christoph Meisel , Joerg Hauer , Udo-Martin Gomez , Kersten Kehr
IPC分类号： G01P3/44 , F16F1/02 , G01C19/574
CPC分类号： G01C19/574 , F16F1/025 , G01C19/5747 , G01P3/44
摘要： A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
摘要翻译： 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。
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8.发明授权Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes 有权具有两个敏感轴和耦合检测模式的微机械偏航率传感器公开(公告)号：US08683863B2
公开(公告)日：2014-04-01
申请号：US12987732
申请日：2011-01-10
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
摘要翻译： 在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构， 第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有 第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线 第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。
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公开(公告)号：US08561465B2
公开(公告)日：2013-10-22
申请号：US12587487
申请日：2009-10-06
IPC分类号： G01C19/00
CPC分类号： G01C19/5755 , G01C19/574 , G01C19/5747 , G01C19/5762
摘要： A rotation rate sensor includes: a mounting device; a first drive frame having a drive, which is designed to set the first drive frame into a first oscillatory motion along an axis of oscillation relative to the mounting device; a first stator electrode; a first actuator electrode coupled to the first drive frame in such a way that in a rotary motion of the rotation rate sensor due to a Coriolis force, the first actuator electrode being displaceable in a first deflection direction relative to the first stator electrode; and an evaluation device configured to determine a voltage applied between the first stator electrode and the first actuator electrode, and to specify information regarding the rotary motion of the rotation rate sensor while taking the determined voltage value into account.
摘要翻译： 旋转速率传感器包括：安装装置; 具有驱动器的第一驱动框架，其被设计成将第一驱动框架相对于安装装置沿着振荡轴线设置为第一振荡运动; 第一定子电极; 第一致动器电极，其以这样的方式联接到第一驱动框架，使得在旋转速度传感器由于科里奥利力的旋转运动中，第一致动器电极可相对于第一定子电极在第一偏转方向上移位; 以及评估装置，被配置为确定施加在第一定子电极和第一致动器电极之间的电压，并且在考虑所确定的电压值的同时指定关于旋转速率传感器的旋转运动的信息。
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公开(公告)号：US08490483B2
公开(公告)日：2013-07-23
申请号：US12834953
申请日：2010-07-13
申请人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
发明人： Martin Wrede , Johannes Classen , Torsten Ohms , Carsten Geckeler , Burkhard Kuhlmann , Jens Frey , Daniel Christoph Meisel , Joerg Hauer , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5712 , G01C19/5747
摘要： A micromechanical yaw-rate sensor comprising a first yaw-rate sensor element, which outputs a first sensor signal, which contains information about a rotation around a first rotational axis, a second yaw-rate sensor element, which outputs a second sensor signal, which contains information about a rotation around a second rotational axis, which is perpendicular to the first rotational axis, a drive, which drives the first yaw-rate sensor element, and a coupling link, which mechanically couples the first yaw-rate sensor element and the second yaw-rate sensor element to one another, so that driving of the first yaw-rate sensor element also causes driving of the second yaw-rate sensor element.
摘要翻译： 一种微机械摆动速率传感器，包括第一偏转速率传感器元件，该第一偏转速率传感器元件输出包含关于围绕第一旋转轴线的旋转的信息的第一传感器信号，输出第二传感器信号的第二偏转速度传感器元件， 包含关于围绕垂直于第一旋转轴线的第二旋转轴线的旋转的信息，驱动第一偏转速率传感器元件的驱动器和耦合连杆，其将第一横摆速率传感器元件和 第二偏转速率传感器元件彼此之间，使得第一偏转速率传感器元件的驱动也引起第二偏转速率传感器元件的驱动。
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