公开(公告)号：US20230232638A1

公开(公告)日：2023-07-20

申请号：US17673760

申请日：2022-02-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Ju-Chun Fan ,  Ching-Hua Hsu ,  Chun-Hao Wang ,  Yi-Yu Lin ,  Dong-Ming Wu ,  Po-Kai Hsu

IPC: H01L27/22 ,  H01L43/02 ,  H01L43/08 ,  G11C5/02 ,  H01L23/522 ,  H01L23/528

CPC classification number: H01L27/226 ,  H01L43/02 ,  H01L43/08 ,  G11C5/02 ,  H01L23/5226 ,  H01L23/5283

Abstract: Abstract of Disclosure A memory array includes at least one strap region, at least two sub-arrays, a plurality of staggered, dummy magnetic storage elements, and a plurality of bit line structures. The strap region includes a plurality of source line straps and a plurality of word line straps. The two sub-arrays include a plurality of staggered, active magnetic storage elements. The two sub -arrays are separated by the strap region. The staggered, dummy magnetic storage elements are disposed within the strap region. The bit line structures are disposed in the two sub-arrays, and each of the bit line structures is disposed above and directly connected with at least one of the staggered, active magnetic storage elements.

公开(公告)号：US11665913B2

公开(公告)日：2023-05-30

申请号：US17541226

申请日：2021-12-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Yi-Yu Lin ,  Po-Kai Hsu ,  Chung-Yi Chiu

IPC: H10B63/00

CPC classification number: H10B63/30 ,  H10N70/041 ,  H10N70/066 ,  H10N70/24 ,  H10N70/826

Abstract: A resistive random access memory (RRAM) structure includes a substrate. A transistor is disposed on the substrate. The transistor includes a gate structure, a source and a drain. A drain contact plug contacts the drain. A metal interlayer dielectric layer is disposed on the drain contact plug. An RRAM is disposed on the drain and within a first trench in the metal interlayer dielectric layer. The RRAM includes the drain contact plug, a metal oxide layer and a top electrode. The drain contact plug serves as a bottom electrode of the RRAM. The metal oxide layer contacts the drain contact plug. The top electrode contacts the metal oxide layer and a metal layer is disposed within the first trench.

公开(公告)号：US20220367791A1

公开(公告)日：2022-11-17

申请号：US17348776

申请日：2021-06-16

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Si-Han Tsai ,  Dong-Ming Wu ,  Chen-Yi Weng ,  Ching-Hua Hsu ,  Ju-Chun Fan ,  Yi-Yu Lin ,  Che-Wei Chang ,  Po-Kai Hsu ,  Jing-Yin Jhang

IPC: H01L43/08 ,  H01L43/02 ,  H01L43/10 ,  G11C11/16 ,  H01L27/22 ,  H01F10/32

Abstract: A magnetoresistive random access memory (MRAM) device includes a first array region and a second array region on a substrate, a first magnetic tunneling junction (MTJ) on the first array region, a first top electrode on the first MTJ, a second MTJ on the second array region, and a second top electrode on the second MTJ. Preferably, the first top electrode and the second top electrode include different nitrogen to titanium (N/Ti) ratios.

公开(公告)号：US20220310902A1

公开(公告)日：2022-09-29

申请号：US17242322

申请日：2021-04-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Ching-Hua Hsu ,  Si-Han Tsai ,  Shun-Yu Huang ,  Chen-Yi Weng ,  Ju-Chun Fan ,  Che-Wei Chang ,  Yi-Yu Lin ,  Po-Kai Hsu ,  Jing-Yin Jhang ,  Ya-Jyuan Hung

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/08 ,  H01L43/12

Abstract: A magnetoresistive random access memory (MRAM) structure, including a substrate and multiple MRAM cells on the substrate, wherein the MRAM cells are arranged in a memory region adjacent to a logic region. An ultra low-k (ULK) layer covers the MRAM cells, wherein the surface portion of ultra low-k layer is doped with fluorine, and dents are formed on the surface of ultra low-k layer at the boundaries between the memory region and the logic region.

公开(公告)号：US20220115584A1

公开(公告)日：2022-04-14

申请号：US17088531

申请日：2020-11-03

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Po-Kai Hsu ,  Ju-Chun Fan ,  Ching-Hua Hsu ,  Yi-Yu Lin ,  Hung-Yueh Chen

IPC: H01L43/02 ,  H01L43/12 ,  H01L27/22

Abstract: A method for fabricating a semiconductor device includes the steps of first forming a first inter-metal dielectric (IMD) layer on a substrate and a metal interconnection in the first IMD layer, forming a magnetic tunneling junction (MTJ) and a top electrode on the metal interconnection, forming a spacer adjacent to the MTJ and the top electrode, forming a second IMD layer around the spacer, forming a cap layer on the top electrode, the spacer, and the second IMD layer, and then patterning the cap layer to form a protective cap on the top electrode and the spacer.

公开(公告)号：US20220059761A1

公开(公告)日：2022-02-24

申请号：US17516669

申请日：2021-11-01

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Po-Kai Hsu ,  Hung-Yueh Chen ,  Chen-Yi Weng ,  Si-Han Tsai ,  Jing-Yin Jhang ,  Yu-Ping Wang

IPC: H01L43/12 ,  H01L43/02 ,  H01L27/22

Abstract: A method of fabricating a semiconductor device includes the steps of: providing a semiconductor structure including a memory region and a logic region. The semiconductor structure includes a first interlayer dielectric and at least one magnetoresistive random access memory (MRAM) cell disposed on the first interlayer dielectric, and the MRAM cell is disposed in the memory region; depositing a second interlayer dielectric covering the first interlayer dielectric and the at least one MRAM cell; depositing a mask layer conformally covering the second interlayer dielectric; perform a planarization process to remove the mask layer in the memory region; after the step of performing the planarization process, removing the mask layer in the logic region.

公开(公告)号：US20210343935A1

公开(公告)日：2021-11-04

申请号：US16884060

申请日：2020-05-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Wei Chen ,  Po-Kai Hsu ,  Yu-Ping Wang ,  Hung-Yueh Chen

IPC: H01L43/12 ,  H01L43/02 ,  H01F10/32

Abstract: A method for fabricating a semiconductor device includes the steps of: forming a first inter-metal dielectric (IMD) layer on a substrate; forming a first metal interconnection and a second metal interconnection in the first IMD layer; forming a channel layer on the first metal interconnection and the second metal interconnection; forming a magnetic tunneling junction (MTJ) stack on the channel layer; and removing the MTJ stack to form a MTJ.

公开(公告)号：US20210328133A1

公开(公告)日：2021-10-21

申请号：US15930425

申请日：2020-05-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Po-Kai Hsu ,  Hung-Yueh Chen ,  Yu-Ping Wang

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/12

Abstract: A method for fabricating a semiconductor device includes the steps of: forming a first metal interconnection on a substrate; forming a stop layer on the first metal interconnection; removing the stop layer to form a first opening; forming an electromigration enhancing layer in the first opening; and forming a second metal interconnection on the electromigration enhancing layer. Preferably, top surfaces of the electromigration enhancing layer and the stop layer are coplanar.

公开(公告)号：US12156478B2

公开(公告)日：2024-11-26

申请号：US18110337

申请日：2023-02-15

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hui-Lin Wang ,  Po-Kai Hsu ,  Chen-Yi Weng ,  Jing-Yin Jhang ,  Yu-Ping Wang ,  Hung-Yueh Chen

IPC: H10N50/80 ,  H10B61/00 ,  H10N50/01 ,  H10N50/10

Abstract: A semiconductor device includes: a substrate comprising a magnetic tunneling junction (MTJ) region and a logic region, a MTJ on the MTJ region, a top electrode on the MTJ, a connecting structure on the top electrode, and a first metal interconnection on the logic region. Preferably, the first metal interconnection includes a via conductor on the substrate and a trench conductor, in which a bottom surface of the trench conductor is lower than a bottom surface of the connecting structure.

公开(公告)号：US20240365679A1

公开(公告)日：2024-10-31

申请号：US18205570

申请日：2023-06-05

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： I-Fan Chang ,  Jia-Rong Wu ,  Rai-Min Huang ,  Po-Kai Hsu

IPC: H10N50/80 ,  H10B61/00 ,  H10N50/01

CPC classification number: H10N50/80 ,  H10B61/22 ,  H10N50/01 ,  G11C11/161

Abstract: The invention provides a semiconductor layout pattern, which comprises a first metal layer, wherein the first metal layer comprises a plurality of first patterns and a plurality of fishbone line patterns arranged on the same layer, wherein each fishbone line pattern comprises a principal axis pattern extending along a first direction and a plurality of branches arranged along a second direction, and each first pattern is located between two adjacent branches and the principal axis pattern, and a second metal layer is located on the first metal layer. A plurality of magnetic tunnel junction (MTJ) elements located on the second metal layer, wherein each magnetic tunnel junction element is arranged in a rhombic shape.