Gas control system for chemical vapor deposition system
    24.
    发明授权
    Gas control system for chemical vapor deposition system 失效
    化学气相沉积系统气体控制系统

    公开(公告)号:US4369031A

    公开(公告)日:1983-01-18

    申请号:US302003

    申请日:1981-09-15

    Abstract: A gas flow control system in which several constituent gases are mixed and the mixture delivered through controlled injectors to a processing zone. Mass flow controllers control the injector flows with one of the controllers being a master and the other being slaved to provide a selected percentage of the flow through the master controller. The gas mix is regulated by a mass flow controller on one of the constituents and a flow meter on the other, the flow meter producing an error signal which is used to readjust the total flow through the injectors by control of the master injector flow controller.

    Abstract translation: 一种气体流量控制系统,其中混合了几种构成气体,并将混合物通过受控喷射器输送到处理区域。 质量流量控制器控制喷油器流量,其中一个控制器是主控制器,另一个控制器是从机的,以提供通过主控制器的流量的选定百分比。 气体混合物由质量流量控制器在组分之一和流量计之间调节,流量计产生误差信号,该误差信号用于通过主喷射器流量控制器的控制重新调整通过喷射器的总流量。

    Treatment of urea solutions
    25.
    发明授权
    Treatment of urea solutions 失效
    尿素溶液的处理

    公开(公告)号:US4308234A

    公开(公告)日:1981-12-29

    申请号:US210384

    申请日:1980-11-26

    CPC classification number: F02F1/4264 B01J10/005 B01J3/044 C07C273/04

    Abstract: A device for treating urea solutions coming from synthesis reactors and containing in addition to the formed urea also free ammonia, water and unreacted ammonium carbamate having two steps wherein in the first step, a substantial amount of ammonia is distilled while ammonium carbamate is only partially decomposed, and in the second step, the bulk of carbamate is decomposed and the residual ammonia is distilled.

    Abstract translation: 用于处理来自合成反应器的尿素溶液并且除了形成的尿素之外还含有游离氨,水和未反应的氨基甲酸铵的装置,其具有两个步骤,其中在第一步中,大量氨被蒸馏,而氨基甲酸铵仅部分分解 ,在第二步中,大部分氨基甲酸酯被分解并残留氨被蒸馏。

    Treatment of urea solutions
    26.
    发明授权
    Treatment of urea solutions 失效
    尿素溶液的处理

    公开(公告)号:US4269997A

    公开(公告)日:1981-05-26

    申请号:US56551

    申请日:1979-07-11

    CPC classification number: F02F1/4264 B01J10/005 B01J3/044 C07C273/04

    Abstract: A process and a device for treating urea solutions coming from synthesis reactors and containing in addition to the formed urea also free ammonia, water and unreacted ammonium carbammate having two steps wherein in the first step, a substantial amount of ammonia is distilled while ammonium carbammate is only partially decomposed, and in the second step, the bulk of carbammate is decomposed and the residual ammonia is distilled.

    Abstract translation: 用于处理来自合成反应器的尿素溶液和含有形成的尿素的方法和装置还游离氨,水和未反应的氨基甲酸铵,其具有两个步骤,其中在第一步中,大量氨被蒸馏,而氨基甲酸铵是 仅部分分解,在第二步中,大量的碳酸盐被分解并残留氨被蒸馏。

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