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113 条记录 (耗时 0.02 秒)

    Method and apparatus for removing coating from substrate
    21.
    发明授权
    Method and apparatus for removing coating from substrate 失效
    从基材上除去涂层的方法和装置

    公开(公告)号：US4859303A

    公开(公告)日：1989-08-22

    申请号：US106213

    申请日：1987-10-09

    申请人： Alexander Kalnitsky ,  Joseph P. Ellul ,  Sing P. Tay ,  Jacques G. Poirier

    发明人： Alexander Kalnitsky ,  Joseph P. Ellul ,  Sing P. Tay ,  Jacques G. Poirier

    IPC分类号： B44D3/16 ,  G03F7/42 ,  H01J37/32

    CPC分类号： H01J37/32357 ,  B44D3/168 ,  G03F7/427 ,  H01J2237/004

    摘要： In a method and apparatus for plasma stripping a polymer photoresist coating from a semiconductor substrate, positively charged species are removed from an activated gas flow before the gas flow is brought into contact with the coating to strip the coating from the substrate. The positively charged species may be removed by bringing the activated gas into contact with a grounded conducting surface to discharge the positively charged species, or by passing the activated gas through a negatively charged electrostatic filter to filter out positively charged species. The removal of positively charged species from the gas flow reduces or eliminates build up of positive charge on an outer surface of the photoresist coating so as to avoid driving mobile positively charged ions from the photoresist into the substrate, thereby avoiding contamination of the substrate.

    摘要翻译： 在用于从半导体衬底等离子体剥离聚合物光刻胶涂层的方法和装置中，在使气流与涂层接触以从衬底剥离涂层之前，从活性气体流中除去带正电的物质。 可以通过使活化气体与接地的导电表面接触以排出带正电的物质或通过使活化气体通过带负电的静电过滤器以过滤带正电的物质来除去带正电的物质。 从气流中去除带正电荷的物质减少或消除在光致抗蚀剂涂层的外表面上的正电荷的积累，以避免驱动移动的带正电荷的离子从光致抗蚀剂进入衬底，从而避免衬底的污染。

    Electrically heated decal stripping tool
    22.
    发明授权
    Electrically heated decal stripping tool 失效
    电加热贴花剥离工具

    公开(公告)号：US4690724A

    公开(公告)日：1987-09-01

    申请号：US855811

    申请日：1986-04-24

    申请人： William F. Outlaw

    发明人： William F. Outlaw

    IPC分类号： B29C63/00 ,  B44C7/02 ,  B44D3/16 ,  B32B31/18

    CPC分类号： B44D3/168 ,  B29C63/0013 ,  B44C7/027 ,  Y10S156/937 ,  Y10T156/19 ,  Y10T156/1911

    摘要： A portable decal stripping tool particularly adapted for the quick removal of adhesive decals from an automotive surface and comprising a decal stripper attachment for a soldering iron including an elongate shaft with a head portion secured thereto adapted to removably engage and support a razor blade. The decal stripper attachment is constructed of heat conductive material which facilitates elevation of the temperature of the razor blade secured therein so that it will slide under and remove a decal by melting the adhesive securing it to an automobile surface or the like.

    摘要翻译： 一种便携式贴花剥离工具，特别适用于从汽车表面快速去除粘合剂贴花，并且包括用于烙铁的贴花汽提器附件，该烙铁包括细长轴，该细长轴具有固定到其上的头部，其适于可拆卸地接合和支撑剃刀刀片。 贴花汽提器附件由导热材料构成，其有助于固定在其中的剃刀刀片的温度升高，从而通过将固定到汽车表面等上的粘合剂熔化而将其滑下并去除贴花。