公开(公告)号：US08433525B2

公开(公告)日：2013-04-30

申请号：US13085346

申请日：2011-04-12

Applicant: George Burba ,  Dayle McDermitt ,  Anatoly Komissarov ,  Tyler G. Anderson ,  Liukang Xu ,  Bradley A. Riensche

Inventor： George Burba ,  Dayle McDermitt ,  Anatoly Komissarov ,  Tyler G. Anderson ,  Liukang Xu ,  Bradley A. Riensche

IPC: G01N31/00

CPC classification number: G01N21/3504 ,  G01N21/39 ,  G01N2201/1211 ,  G01N2201/1214 ,  G01N2201/1218

Abstract: A system and method to obtain correct gas density and flux measurements using (i) gas analyzer (open-path, or closed-path gas analyzers with short intake tube, or any combination of the two); (ii) fast temperature or sensible heat flux measurement device (such as, fine-wire thermocouple, sonic anemometer, or any other device providing fast accurate gas temperature measurements); (iii) fast air water content or latent heat flux measurement device (such as, hygrometer, NDIR analyzer, any other device providing fast accurate gas water content measurements); (iv) vertical wind or sampling device (such as sonic anemometer, scintillometer, or fast solenoid valve, etc.) and (v) algorithms in accordance with the present invention to compute the corrected gas flux, compensated for T-P effects. In case when water factor in T-P effects is negligible, the fast air water content or latent heat flux measurement device (item iii in last paragraph) can be excluded.

Abstract translation: 使用（i）气体分析仪（具有短进气管的开路或闭路气体分析仪或两者的任意组合）获得正确的气体密度和通量测量的系统和方法; （ii）快速温度或显热通量测量装置（例如细线热电偶，声波风速计或提供快速精确气体温度测量的任何其他装置）; （iii）快速空气含水量或潜热通量测量装置（如湿度计，NDIR分析仪，任何其他提供快速准确气体含水量测量的装置）; （iv）垂直风或取样装置（例如声波风速计，闪烁仪或快速电磁阀等）和（v）根据本发明的计算校正气体通量的算法，补偿T-P效应。 在T-P效应中的水分因子可忽略的情况下，可以排除快速空气含水量或潜热通量测量装置（最后一项中的项目iii）。

公开(公告)号：US20120078532A1

公开(公告)日：2012-03-29

申请号：US12889656

申请日：2010-09-24

Applicant: David Edward Forsyth ,  Wayne Kenneth Miller

Inventor： David Edward Forsyth ,  Wayne Kenneth Miller

IPC: G06F19/00

CPC classification number: G01N21/3504 ,  G01N21/274 ,  G01N21/61 ,  G01N2201/1218 ,  G01N2201/1248

Abstract: Non-dispersive infrared (NDIR) sensing systems employ a NDIR sensor coupled to a microprocessor to determine gas concentrations by employing slope-based methodologies that compensate for pressure variations, temperature variations, or both, which may compare NDIR signals with calibrated data. NDIR sensor systems may employ means for limiting the system peak current demand providing for the portability and scalability of the system. In NDIR sensor systems calculating gas concentrations using calibration data, the phase of the change in the NDIR output signal in response to a change in the infrared source emitter level may be measured as part of the calibration process.

Abstract translation: 非分散红外（NDIR）感测系统使用耦合到微处理器的NDIR传感器来通过采用补偿压力变化，温度变化或两者的基于斜率的方法来确定气体浓度，这可以将NDIR信号与校准数据进行比较。 NDIR传感器系统可以采用用于限制系统峰值电流需求的装置，以提供系统的可移植性和可扩展性。 在使用校准数据计算气体浓度的NDIR传感器系统中，响应于红外源发射极电平的变化，NDIR输出信号的变化的相位可以作为校准过程的一部分来测量。

公开(公告)号：US20100214561A1

公开(公告)日：2010-08-26

申请号：US12774379

申请日：2010-05-05

Applicant: Shuichi CHIKAMATSU ,  Minori NOGUCHI ,  Kenji AIKO

Inventor： Shuichi CHIKAMATSU ,  Minori NOGUCHI ,  Kenji AIKO

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

公开(公告)号：US20090207405A1

公开(公告)日：2009-08-20

申请号：US12428065

申请日：2009-04-22

Applicant: Shuichi CHIKAMATSU ,  Minori Noguchi ,  Kenji Aiko

Inventor： Shuichi CHIKAMATSU ,  Minori Noguchi ,  Kenji Aiko

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载要检查的基板并沿预定方向扫描;以及机构，其具有以倾斜方式照射被检查基板上的缺陷的系统，并且通过设置在所述检测光学系统上的检测光学系统检测所述缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

公开(公告)号：US06842286B2

公开(公告)日：2005-01-11

申请号：US10233940

申请日：2002-09-03

Applicant: John Phillip Ertel ,  William Richard Trutna, Jr.

Inventor： John Phillip Ertel ,  William Richard Trutna, Jr.

IPC: G01N21/41 ,  G01N21/45 ,  G01S7/497 ,  G02B7/00 ,  G01J3/18 ,  G02B27/44 ,  H04J14/02

CPC classification number: G02B7/003 ,  G01N21/45 ,  G01N2021/4106 ,  G01N2201/1211 ,  G01N2201/1214 ,  G01N2201/1218 ,  G01S7/497 ,  Y10S359/90

Abstract: Optical systems are provided. One such optical system includes an optical source that propagates a source beam of light. A diffracting component is optically coupled to the optical source and is operative to receive the source beam and produce a diffracted beam. A target is located to receive the diffracted beam. Additionally, a compensating system repositions at least one of the optical source, the diffracting component, and the target in response to a detected change in refractive index of a medium through which the diffracted beam propagates so that the diffracted beam continues to be received by the target. Methods and other systems also are provided.

Abstract translation: 提供光学系统。 一种这样的光学系统包括传播源光束的光源。 衍射组件光耦合到光源并且可操作地接收源光束并产生衍射光束。 目标位于接收衍射光束。 此外，补偿系统响应于所检测的衍射光束传播的介质的折射率变化，重新定位光源，衍射部件和靶中的至少一个，使得衍射光束继续被 目标。 还提供了方法和其它系统。

公开(公告)号：US20240060875A1

公开(公告)日：2024-02-22

申请号：US17890016

申请日：2022-08-17

Applicant: InvenSense, Inc.

Inventor： Jeremy Parker ,  Nishit Goel ,  Stephen Bart

IPC: G01N21/17 ,  B81B7/02

CPC classification number: G01N21/1702 ,  B81B7/02 ,  G01N2021/1704 ,  G01N2201/1218 ,  B81B2203/0127

Abstract: A bi-directional photoacoustic gas sensor includes a first photoacoustic cell, where an electromagnetic radiation source emits radiation to interact with an external gas and generate pressure waves that are detected by a MEMS diaphragm. A second photoacoustic cell has an interior volume and acoustic compliance that corresponds to the interior volume and acoustic compliance of the first photoacoustic cell. Processing circuitry within a substrate uses a first acoustic signal, received by the first photoacoustic cell, and a second acoustic signal, received by the second photoacoustic cell, to determine a bi-directional response of the gas sensor to remove noise and improve the sensor's signal-to-noise ratio.

公开(公告)号：US20180252640A1

公开(公告)日：2018-09-06

申请号：US15449107

申请日：2017-03-03

Applicant: HONEYWELL INTERNATIONAL INC.

Inventor： Raghavendra Muniraju ,  Mahadevanna Basavaraj Shreshthi ,  Venkata Subbanna Karanam

IPC: G01N21/3518 ,  G01N33/00

CPC classification number: G01N21/3518 ,  G01N21/3504 ,  G01N21/61 ,  G01N33/0032 ,  G01N2201/1218

Abstract: Apparatus for determining concentration of a targeted gas in environmental air, the apparatus includes a non-dispersive infrared (NDIR) sensor, a pressure sensor coupled in fluid communication with an interior of the NDIR sensor; and a processor. The processor is configured to receive pressure data from the pressure sensor based on gas pressure within an interior of the NDIR sensor, receive a target-gas concentration signal from the NDIR sensor, and produce a pressure-compensated concentration signal based on the target-gas concentration signal, a predetermined reference pressure and the pressure data from the pressure sensor.

公开(公告)号：US20150177142A1

公开(公告)日：2015-06-25

申请号：US14420101

申请日：2013-07-23

Applicant: PerkinElmer Singapore PTE Ltd

Inventor： Robert Alan Hoult

IPC: G01N21/62 ,  G01J3/28

CPC classification number: G01N21/62 ,  G01J3/28 ,  G01N21/274 ,  G01N21/552 ,  G01N2201/1218 ,  G01N2201/12784

Abstract: A method of using a spectrometer to produce corrected diamond Attenuated Total Reflectance (ATR) spectral data includes acquiring, using the spectrometer, an initial set of ATR spectral data for a sample pressed into contact with a diamond ATR crystals; numerically matching, using the spectrometer, a pressure dependent diamond artefact reference spectrum to a corresponding pressure dependent diamond artefact in the initial set of ATR spectral data; and numerically subtracting out the numerically matched pressure dependent diamond artefact reference spectrum from the initial set of ATR spectral data to yield a corrected set of ATR spectral data for the sample for output by the spectrometer.

Abstract translation: 使用光谱仪产生校正的菱形衰减全反射（ATR）光谱数据的方法包括采用光谱仪获取与菱形ATR晶体接触的样品的初始ATR光谱数据集; 使用光谱仪将压力依赖金刚石假象参考光谱数值匹配到初始ATR光谱数据集中相应的压力依赖金刚石伪影; 并从初始的ATR光谱数据集中数字地减去与数字匹配的压力相关金刚石伪像参考光谱，以产生用于由光谱仪输出的样品的校正的ATR光谱数据集。

公开(公告)号：US09016573B2

公开(公告)日：2015-04-28

申请号：US13471917

申请日：2012-05-15

Applicant: Achim Stangelmayer ,  Damian Andrzejewski

Inventor： Achim Stangelmayer ,  Damian Andrzejewski

IPC: G06K7/10 ,  G06T7/40

CPC classification number: G06T7/40 ,  G01N21/274 ,  G01N21/78 ,  G01N2021/7786 ,  G01N2201/1211 ,  G01N2201/1218 ,  G01N2201/12746

Abstract: A sensor unit is disclosed which includes a sensor and an information module. The sensor exhibits an optical behavior dependent on at least one variable of a sample. Sensor related information can be emitted by the information module as optical radiation. In embodiments the sensor related information includes calibration data for the sensor. The sensor related information may additionally include identification data for the sensor. In embodiments the information module measures at least one ambient parameter, and emits the measurement value in an optical signal. The measurement value is taken into account when determining at least one variable of a sample by means of the sensor unit. In embodiments the information module may also transmit status information of the sensor unit. Furthermore a method for determining a variable of a sample with a sensor unit and a measurement system is disclosed.

Abstract translation: 公开了一种传感器单元，其包括传感器和信息模块。 传感器表现出取决于样品的至少一个变量的光学行为。 传感器相关信息可由信息模块作为光辐射发射。 在实施例中，传感器相关信息包括传感器的校准数据。 传感器相关信息可另外包括传感器的识别数据。 在实施例中，信息模块测量至少一个环境参数，并且在光信号中发射测量值。 当通过传感器单元确定样品的至少一个变量时，考虑测量值。 在实施例中，信息模块还可以传送传感器单元的状态信息。 此外，公开了一种用传感器单元和测量系统确定样品的变量的方法。

公开(公告)号：US20140340684A1

公开(公告)日：2014-11-20

申请号：US14279369

申请日：2014-05-16

Applicant: Sick AG

Inventor： Julian EDLER ,  Thomas BEYER ,  Rolf DISCH

IPC: G01N21/39

CPC classification number: G01N21/39 ,  G01J3/433 ,  G01J3/4338 ,  G01N21/274 ,  G01N21/3504 ,  G01N21/3554 ,  G01N2021/399 ,  G01N2201/0691 ,  G01N2201/1211 ,  G01N2201/1215 ,  G01N2201/1218

Abstract: A method of determining a concentration of a gas in a sample and/or the composition of a gas using a spectrometer comprises the transmitting of radiation whose wavelength substantially continuously runs through a wavelength range, wherein the continuous running through of the wavelength range is overlaid by a wavelength modulation; the measuring of an absorption signal from the absorption of the radiation by the gas as a function of the wavelength of the radiation; the converting of the absorption signal into a first and a second derivative signal; the deriving of a first measured gas concentration value from the first derivative signal and of a second measured gas concentration value from the second derivative signal; and the determining of the concentration and/or the composition of the gas from at least the first measured gas concentration value, wherein the wavelength modulation is adapted in response to a change of a state variable of the gas such that a ratio between the first measured gas concentration value and the second measured gas concentration value is kept substantially constant.

Abstract translation: 使用光谱仪确定样品中气体浓度和/或气体组成的方法包括传输其波长基本上连续穿过波长范围的辐射，其中波长范围的连续穿过被覆盖在 波长调制; 通过气体吸收辐射的吸收信号作为辐射波长的函数的测量; 将吸收信号转换成第一和第二导数信号; 从所述一阶导数信号导出第一测量气体浓度值和从所述二阶导数信号得到第二测量气体浓度值; 以及从至少第一测量气体浓度值确定气体的浓度和/或组成，其中响应于气体的状态变量的变化而调整波长调制，使得第一测量的气体浓度值 气体浓度值和第二测量气体浓度值保持基本上恒定。