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公开(公告)号：US20160064261A1
公开(公告)日：2016-03-03
申请号：US14840587
申请日：2015-08-31
IPC分类号： H01L21/67 , G05B19/418
CPC分类号： G05B19/41865 , G05B2219/32247 , G05B2219/32283 , G05B2219/32313 , G05B2219/45031 , H01L21/67276 , Y02P90/02 , Y02P90/20
摘要： A method of dispatching wafer lots through a plurality of process chambers, wherein the process chambers are disposed in at least one machine. The method includes: receiving wafer lot information and process chamber data, wherein the wafer lot information identifies the wafer lots to be processed at the machine, and the process chamber data includes process information associated with the process chambers; determining a load factor of each process chamber based on the wafer lot information and process chamber data; receiving historical data of run lots previously processed through the process chambers, and determining a processing time of the wafer lots based on the historical data; generating a dispatching criteria for the wafer lots based on the load factors of the process chambers and the determined processing time of the wafer lots; and dispatching the wafer lots through the process chambers based on the dispatching criteria.
摘要翻译： 一种通过多个处理室调度晶片批次的方法，其中处理室设置在至少一个机器中。 该方法包括：接收晶片批信息和处理室数据，其中晶片批信息识别在机器处要处理的晶片批次，并且处理室数据包括与处理室相关联的处理信息; 基于晶片批次信息和处理室数据确定每个处理室的负载系数; 接收先前通过处理室处理的运行批次的历史数据，以及基于历史数据确定晶片批次的处理时间; 基于处理室的负载系数和所确定的晶片批次的处理时间来生成晶片批次的调度标准; 并根据调度标准将晶片批次分配到处理室。
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公开(公告)号：US07653451B2
公开(公告)日：2010-01-26
申请号：US12023104
申请日：2008-01-31
IPC分类号： G09F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US20080140243A1
公开(公告)日：2008-06-12
申请号：US12023104
申请日：2008-01-31
IPC分类号： G06F17/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US07349751B2
公开(公告)日：2008-03-25
申请号：US11538821
申请日：2006-10-05
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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25.发明授权Method and system for dynamically selecting wafer lots for metrology processing 有权用于动态选择用于计量处理的晶圆批次的方法和系统公开(公告)号：US07296103B1
公开(公告)日：2007-11-13
申请号：US10958834
申请日：2004-10-05
申请人： Matthew A. Purdy , Cabe W. Nicksic
发明人： Matthew A. Purdy , Cabe W. Nicksic
CPC分类号： G05B19/41865 , G05B2219/32247 , G05B2219/32306 , G05B2219/45031 , Y02P90/20 , Y02P90/86
摘要： The present invention is generally directed to various methods and systems for dynamically controlling metrology work in progress. In one illustrative embodiment, the method comprises providing a metrology control unit that is adapted to control metrology work flow to at least one metrology tool, identifying a plurality of wafer lots that are in a metrology queue wherein the wafer lots are intended to be processed in at least one metrology tool, and wherein the metrology control unit selects at least one of the wafer lots for metrology processing in the at least one metrology tool and selects at least one other of the plurality of wafer lots to be removed from the metrology queue based upon the metrology processing of the selected at least one wafer lot in the at least one metrology tool.
摘要翻译： 本发明一般涉及用于动态控制进行中的计量工作的各种方法和系统。 在一个说明性实施例中，该方法包括提供一个度量控制单元，其适于将测量工作流程控制到至少一个计量工具，识别处于计量队列中的多个晶片批次，其中晶片批次旨在被处理 至少一个计量工具，并且其中所述计量控制单元在所述至少一个计量工具中选择所述晶片批次中的至少一个用于度量处理，并且从所述计量学队列中选择所述多个晶片批次中的至少另一个待移除 在所述至少一个计量工具中对所选择的至少一个晶片批次进行计量处理。
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公开(公告)号：US07151972B2
公开(公告)日：2006-12-19
申请号：US10905456
申请日：2005-01-05
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/31411 , G05B2219/32247 , G05B2219/32267 , G05B2219/32271 , G05B2219/32293 , G05B2219/45028 , Y02P90/20
摘要： Disclosed is a method of controlling a manufacturing system. The invention automatically monitors current levels of partially completed products waiting to be processed by a tool (or group of tools) and determines whether the current levels exceed a predetermined limit. If the current levels do exceed the predetermined limit, the invention performs an optimization process. However, if the current levels do not exceed the predetermined limit, the invention performs a dispatching process. In this dispatching process, the invention automatically projects future levels of partially completed products that will be supplied to the tool to identify a future work-in-process (WIP) bubble. The WIP bubble occurs when larger than normal amounts of partially completed products are supplied to the tool. The invention automatically adjusts the operating parameters of the tool based upon both the current levels and the future levels.
摘要翻译： 公开了一种控制制造系统的方法。 本发明自动监视等待由工具（或一组工具）处理的部分完成的产品的当前水平，并确定当前水平是否超过预定极限。 如果当前水平超过预定极限，本发明进行优化处理。 然而，如果当前电平不超过预定限度，则本发明执行调度处理。 在这个调度过程中，本发明会自动将未来的部分完成产品的水平提供给工具，以识别未来的在制品（WIP）泡沫。 当大于正常量的部分完成的产品被提供给工具时，会出现WIP气泡。 本发明基于当前水平和未来水平自动调整工具的操作参数。
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公开(公告)号：US20060282187A1
公开(公告)日：2006-12-14
申请号：US11307288
申请日：2006-01-31
申请人： Eric Dickstein , Alan Dziedzic , Richard Burda
发明人： Eric Dickstein , Alan Dziedzic , Richard Burda
IPC分类号： G06F19/00
CPC分类号： G05B19/41865 , G05B2219/32247 , G05B2219/35532 , G05B2219/45031 , G07F17/32 , G07F17/3262 , G07F17/3295 , Y02P90/18 , Y02P90/20 , Y02P90/86 , Y10S707/99943
摘要： A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.
摘要翻译： 提供了一种用于在多个工具中调度多个半导体块的系统。 该系统包括调度服务器管理器和调度集成器和显示设备。 调度积分器和显示设备向管理者传送调度请求，并从管理器接收调度列表。 管理者查询多个半导体块的处理状态，并响应处理状态显示调度列表。 调度列表包括与处理状态相关的相关原因和/或代码。
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28.发明授权Floating process flow control system to handle operation events in a full automation plant 有权浮动过程流程控制系统，用于处理全自动化工厂的运行事件公开(公告)号：US07039482B2
公开(公告)日：2006-05-02
申请号：US10694683
申请日：2003-10-28
申请人： Hsien-Jung Hsu , Larry Jann
发明人： Hsien-Jung Hsu , Larry Jann
IPC分类号： G06F19/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B2219/32243 , G05B2219/32247 , G05B2219/32248 , Y02P90/14 , Y02P90/20
摘要： A method to handle operation exceptions in an automated manufacturing system is achieved. The method comprises providing an automated manufacturing system comprising a means to track progress of work in process against standard process flows and a means to select product lots for processing from the work in process and to select equipment for processing the product lots based on next step information from the standard process flows. The automated manufacturing system is monitored for operation exception events. The product lots must deviate from the standard process flows. A floating process flow is selected corresponding to the operation exception event and the product lots from a floating process flow database. The floating process flow is linked to the standard process flow such that the next step is derived from the floating process flow. Manufacturing is continued using the floating process flow. The floating process flow is unlinked from the standard process flow such that the next step is derived from the standard process flow when the floating process flow is completed. A control system apparatus for handling operation exceptions in an automated manufacturing plant is achieved.
摘要翻译： 实现了在自动化制造系统中处理操作异常的方法。 该方法包括提供一种自动化制造系统，其包括用于跟踪标准工艺流程跟踪工作进度的装置，以及用于从正在进行的工作中选择用于处理的产品批次并根据下一步骤信息选择用于处理产品批次的设备的手段 从标准工艺流程。 监控自动化制造系统的操作异常事件。 产品批次必须偏离标准工艺流程。 从浮动流程数据库中选择对应于操作异常事件和产品批次的浮动流程。 浮动流程链接到标准流程，以便下一步骤从浮动流程中获得。 使用浮动流程继续制造。 浮动工艺流程与标准工艺流程取消联系，从而当浮动工艺流程完成时，下一步骤将从标准工艺流程中获得。 实现了用于处理自动化制造工厂中的操作异常的控制系统装置。
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公开(公告)号：US06952622B2
公开(公告)日：2005-10-04
申请号：US10685683
申请日：2003-10-14
申请人： Dikran Babikian , Hilario Oh
发明人： Dikran Babikian , Hilario Oh
CPC分类号： G05B19/41865 , C01P2004/84 , G05B2219/32247 , G05B2219/32275 , G05B2219/45031 , H01L21/67276 , Y02P90/20 , Y10S438/907 , Y10S438/908
摘要： A wafer cluster tool is described which operates in a regular, periodic fashion. Embodiments of the invention have a periodicity of one sending period. The invention enables the determination of pick-up times for process chambers in the cluster tool, and embodiments of the invention allow the creation and maintenance of an updated timetable. The timetable indicates times when each of the process chambers is to be serviced. These values are updated as the process chambers receive new wafers. Robots in the cluster tool may pre-position themselves in front of modules, or process chambers, to be served. Robot pre-positioning eliminates the wait time of individual modules beyond queue times which have been pre-determined for the modules. This renders the path of the individual robots pre-deterministic, and enables the cluster tool to utilize single gripper robots.
摘要翻译： 描述了以规则的周期性方式工作的晶片簇工具。 本发明的实施例具有一个发送周期的周期。 本发明能够确定群集工具中的处理室的拾取时间，并且本发明的实施例允许创建和维护更新的时间表。 时间表指示要处理每个处理室的时间。 这些值随着处理室接收新晶片而更新。 集群工具中的机器人可以将自己预先置于要供应的模块或处理室之前。 机器人预定位消除了已经为模块预先确定的队列时间以外的各个模块的等待时间。 这使得各个机器人预先确定性的路径，并使群集工具能够利用单个抓爪机器人。
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30.发明申请Floating process flow control system to handle operation events in a full automation plant 有权浮动过程流程控制系统，用于处理全自动化工厂的运行事件公开(公告)号：US20050090924A1
公开(公告)日：2005-04-28
申请号：US10694683
申请日：2003-10-28
申请人： Hsien-Jung Hsu , Larry Jann
发明人： Hsien-Jung Hsu , Larry Jann
IPC分类号： G05B19/418 , G06F19/00 , G06Q10/00
CPC分类号： G06Q10/06 , G05B19/4184 , G05B2219/32243 , G05B2219/32247 , G05B2219/32248 , Y02P90/14 , Y02P90/20
摘要： A method to handle operation exceptions in an automated manufacturing system is achieved. The method comprises providing an automated manufacturing system comprising a means to track progress of work in process against standard process flows and a means to select product lots for processing from the work in process and to select equipment for processing the product lots based on next step information from the standard process flows. The automated manufacturing system is monitored for operation exception events. The product lots must deviate from the standard process flows. A floating process flow is selected corresponding to the operation exception event and the product lots from a floating process flow database. The floating process flow is linked to the standard process flow such that the next step is derived from the floating process flow. Manufacturing is continued using the floating process flow. The floating process flow is unlinked from the standard process flow such that the next step is derived from the standard process flow when the floating process flow is completed. A control system apparatus for handling operation exceptions in an automated manufacturing plant is achieved.
摘要翻译： 实现了在自动化制造系统中处理操作异常的方法。 该方法包括提供一种自动化制造系统，其包括用于跟踪标准工艺流程跟踪工作进度的装置，以及用于从正在进行的工作中选择用于处理的产品批次并根据下一步骤信息选择用于处理产品批次的设备的手段 从标准工艺流程。 监控自动化制造系统的操作异常事件。 产品批次必须偏离标准工艺流程。 从浮动流程数据库中选择对应于操作异常事件和产品批次的浮动流程。 浮动流程链接到标准流程，以便下一步骤从浮动流程中获得。 使用浮动流程继续制造。 浮动工艺流程与标准工艺流程取消联系，从而当浮动工艺流程完成时，下一步骤将从标准工艺流程中获得。 实现了用于处理自动化制造工厂中的操作异常的控制系统装置。
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