Method and apparatus for testing optical films
    21.
    发明授权
    Method and apparatus for testing optical films 有权
    光学薄膜测试方法和设备

    公开(公告)号:US09389188B2

    公开(公告)日:2016-07-12

    申请号:US14704007

    申请日:2015-05-05

    摘要: A structure for testing a luminescent film includes a Lambertian light source, an integrating sphere having an input port, and a measuring device. The Lambertian light source includes a mixing chamber having an input port and an output port, and a light emitter coupled to the input port. During testing the luminescent film is positioned between the output port of the mixing chamber and the input port of the integrating sphere. The measuring device is optically coupled to the integrating sphere.

    摘要翻译: 用于测试发光膜的结构包括朗伯光源,具有输入端口的积分球和测量装置。 朗伯光源包括具有输入端口和输出端口的混合室以及耦合到输入端口的光发射器。 在测试期间,发光膜位于混合室的输出端口和积分球的输入端口之间。 测量装置光学耦合到积分球。

    System and method for measuring properties of a thin film coated glass
    22.
    发明授权
    System and method for measuring properties of a thin film coated glass 有权
    用于测量薄膜涂层玻璃的性能的系统和方法

    公开(公告)号:US08855450B2

    公开(公告)日:2014-10-07

    申请号:US13676420

    申请日:2012-11-14

    摘要: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.

    摘要翻译: 一种用于测量具有光源,光谱仪,至少一对探针,第一光纤开关和第二光纤开关的薄膜涂覆玻璃的性质的系统。 一对探针包括位于玻璃板一侧的第一探针和位于玻璃板相反一侧的第二探针,其直接与第一探针相对。 第一和第二光纤开关适于将任一探针耦合到光源和/或光谱仪。 由于系统的设计是光学对称的,所以可以在不使用诸如瓦或反射镜的参考材料的情况下执行校准。 第一和第二探针中的每一个具有彼此分开距离n的第一腿部和第二腿部,从而可以检测成角度的反射。

    Apparatus for detecting light-transmissive sheet-like body
    23.
    发明授权
    Apparatus for detecting light-transmissive sheet-like body 失效
    用于检测透光片状体的装置

    公开(公告)号:US06943363B2

    公开(公告)日:2005-09-13

    申请号:US10060148

    申请日:2002-02-01

    摘要: Illuminating light emitted from a light source is led via a condenser lens, an optical fiber, a half-silvered mirror, and a condenser lens to a reflector. The reflector reflects the illuminating light to a CCD device through a telecentric optical system which comprises the condenser lens, the half-silvered mirror, and an aperture member. The illuminating light applied to the CCD device is greatly reduced in amount as it passes through a light-transmissive sheet-like body twice. The light-transmissive sheet-like body itself or an edge thereof can be detected with high accuracy even if the light-transmissive sheet-like body has a high transmittance.

    摘要翻译: 从光源发出的照明光通过聚光透镜,光纤,半镀银镜和聚光镜引导到反射器。 反射镜通过远心光学系统将照明光反射到CCD装置,该远心光学系统包括聚光透镜,半镀银镜和孔径构件。 当其穿过透光片状主体两次时,施加到CCD装置的照明光量大大减少。 即使透光片状体具有高透射率,也可以高精度地检测透光性片状体本​​身或其边缘。

    Apparatus and method for inspecting light transmittable material
    24.
    发明授权
    Apparatus and method for inspecting light transmittable material 失效
    用于检查透光材料的装置和方法

    公开(公告)号:US06897958B2

    公开(公告)日:2005-05-24

    申请号:US10122336

    申请日:2002-04-16

    CPC分类号: G01N21/8916

    摘要: In an inspection device, an inspection light projector and an auxiliary light emitter respectively project an inspection light and auxiliary light onto a position of a filmstrip. After transmitting the filmstrip, the inspection light is received by a defect detector. When receiving the inspection light, the defect detector generates a data signal and sends it to a controller. In the controller, a threshold of a level of the data signal is memorized, and the level of the data signal is compared with the threshold. If the level of the data signal becomes under the threshold, the controller determines that the filmstrip has a coloring defect. Further, if there is a dust on the filmstrip, the level of the data signal becomes higher. Because the auxiliary light is diffused by the dust, and a part of the auxiliary light is received by the defect detector.

    摘要翻译: 在检查装置中,检查光投影仪和辅助发光体分别将检查光和辅助光投射到胶片的位置。 在发送胶片之后,检查光由缺陷检测器接收。 当接收到检查光时,缺陷检测器产生数据信号并将其发送到控制器。 在控制器中,存储数据信号电平的阈值,并将数据信号的电平与阈值进行比较。 如果数据信号的电平变得低于阈值,则控制器确定胶片具有着色缺陷。 此外,如果胶片上有灰尘,则数据信号的电平变高。 由于辅助光被灰尘扩散,并且辅助光的一部分被缺陷检测器接收。

    Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate
    26.
    发明授权
    Method of inspecting ununiformity of transparent material, apparatus therefor, and method of selecting transparent substrate 有权
    检查透明材料不均匀性的方法及其设备及选择透明基板的方法

    公开(公告)号:US06861659B2

    公开(公告)日:2005-03-01

    申请号:US10421431

    申请日:2003-04-23

    申请人: Masaru Tanabe

    发明人: Masaru Tanabe

    摘要: A laser beam L from a laser 2 is introduced from an introducing surface into a transparent substrate 1 by using mirrors 31 and 32. The laser beam introduced through the transparent substrate 1 repeats a total reflection on the surfaces (main surfaces and end surfaces) of the transparent substrate 1 and enters a state in which the laser beam is almost confined in the substrate 1. When an ununiform portion such as a scratch exists on the surface of the transparent substrate 1, however, total reflecting conditions are not satisfied and the light leaks out of the ununiform portion. The leaked light is formed as an image on a CCD 6 by a lens system 7 and an image process is executed by an image processing apparatus 12. In a detected image, the ununiform portion in which the scratch or the like exists is brightly seen in a linear or a dot form in a black background, so that the ununiform portion such as a very fine scratch can be detected.

    摘要翻译: 来自激光器2的激光束L通过使用反射镜31和32从引入表面引入到透明基板1中。通过透明基板1引入的激光束重复在表面(主表面和端面)上的全反射 透明基板1进入激光束几乎被限制在基板1中的状态。然而,当在透明基板1的表面上存在诸如划痕的不均匀部分时,不满足总反射条件,并且光 泄漏出不均匀的部分。 泄漏的光由透镜系统7形成为CCD 6上的图像,并且图像处理装置12执行图像处理。在检测到的图像中,存在刮痕等的不均匀部分在 在黑色背景中是线形或点形,从而可以检测到非常细的划痕等不均匀部分。

    Laser scanner projection system for viewing features on substrates and
on coated substrates
    27.
    发明授权
    Laser scanner projection system for viewing features on substrates and on coated substrates 失效
    激光扫描仪投影系统,用于观察基板和涂层基板上的特征

    公开(公告)号:US6160625A

    公开(公告)日:2000-12-12

    申请号:US200666

    申请日:1998-11-25

    IPC分类号: G01N21/896 G01N21/32

    CPC分类号: G01N21/896

    摘要: An inspection system for viewing substrate or coated substrate features, wherein a directed light source is projected through a coated substrate onto a viewing surface such that features or irregularities in the substrate or in the coating of the coated substrate are displayed. The inspection system includes a projection system including a light source positioned adjacent the second major surface of the optically transmissive substrate, and a viewing screen positioned adjacent the first major surface of the substrate. The substrate is positioned in optical alignment along an optical path between the light source and the viewing screen such that irregularities in the coated top surface of the substrate can be visually observed on the viewing screen by a user. In one aspect the substrate is coated. Optionally, the directed light source is a laser scanner assembly.

    摘要翻译: 一种用于观察衬底或涂覆的衬底特征的检查系统,其中定向光源通过涂覆的衬底突出到观察表面上,使得显示衬底或涂覆的衬底的涂层中的特征或凹凸。 检查系统包括投影系统,该投影系统包括邻近光学透射基底的第二主表面定位的光源,以及邻近基板的第一主表面定位的观察屏。 衬底沿着光源和观察屏之间的光路定位成光学对准,使得用户可以在观察屏幕上目视观察衬底的涂覆顶表面中的不规则性。 在一个方面,涂覆基底。 可选地,定向光源是激光扫描器组件。

    Optical method and apparatus for detecting low frequency defects
    28.
    发明授权
    Optical method and apparatus for detecting low frequency defects 失效
    用于检测低频缺陷的光学方法和装置

    公开(公告)号:US6075591A

    公开(公告)日:2000-06-13

    申请号:US967305

    申请日:1997-10-21

    申请人: Peter A. Vokhmin

    发明人: Peter A. Vokhmin

    CPC分类号: G01N21/958

    摘要: Inspection of an optical object for the existence therein of inhomogeneities, comprises providing a diverging beam of inspection radiation and directing the beam on the optical object so that each point thereof is illuminated at a single angle; projecting the beam through the optical object on a projection screen and obtaining thereby a shadow pattern thereof, the optical inhomogeneities being distinguishable in the shadow pattern owing to the difference in the brightness of the areas corresponding thereto over the background brightness of the pattern; imaging the shadow pattern via the optical object in such a manner that the rays forming the image pass through each point of the optical object at an angle corresponding to the angle at which the point is illuminated; and detecting and analyzing the image of the shadow pattern.

    摘要翻译: 光学对象在其中存在不均匀性的检查包括提供发散的检查辐射束并将光束引导到光学物体上,使得其每个点以单个角度被照射; 将光束投射到投影屏幕上,从而获得阴影图案,由于与图案的背景亮度相对应的区域的亮度差,阴影图案中的光学不均匀性可区分; 以使得形成图像的光线以对应于点被照射的角度的角度穿过光学对象的每个点的方式,通过光学对象成像阴影图案; 并且检测和分析阴影图案的图像。

    Optical member inspection apparatus
    29.
    发明授权
    Optical member inspection apparatus 失效
    光学元件检测仪器

    公开(公告)号:US06034766A

    公开(公告)日:2000-03-07

    申请号:US35055

    申请日:1998-03-05

    摘要: An optical member inspection apparatus is disclosed. A light shielding plate functions to cast a shadow region so that a line sensor receives an image producing a particular defined image data output, generally speaking a dark image representing an absence of light from an illuminator. When an inspection target optical member is inserted in the light path to intersect that shadow region, the line sensor produces the same image data in the event that there is no defect in the optical member. However, a defect in the optical member will enable light from outside that shadow region to be diffused to impinge on the line sensor thereby producing a change in the image data output. Evaluation of the change in the image data output can provide an indication of the degree of defectiveness.

    摘要翻译: 公开了一种光学构件检查装置。 遮光板用于投射阴影区域,使得线传感器接收产生特定定义的图像数据输出的图像,一般来说表示来自照明器的光不存在的暗图像。 当在光路中插入检查对象光学构件以与该阴影区域相交时,在光学构件中没有缺陷的情况下,线传感器产生相同的图像数据。 然而,光学构件的缺陷将使来自该阴影区域的外部的光能够扩散以撞击在线传感器上,从而产生图像数据输出的变化。 评估图像数据输出的变化可以提供缺陷程度的指示。