公开(公告)号：US20040256992A1

公开(公告)日：2004-12-23

申请号：US10828216

申请日：2004-04-21

Inventor： Tetuji Hirao

IPC: H01J001/02 ,  H01J017/04 ,  H01J061/04

CPC classification number: H01J61/822 ,  H01J61/0732 ,  H01J61/36 ,  H01J61/86

Abstract: A short arc type super high pressure discharge lamp has a pair of electrodes, a light emitting portion in which greater than 0.15 mg/mm3 is enclosed, and sealing portions provided on both side of the light emitting portion, wherein at least one of the pair of electrodes has a thick portion which extends into one of the sealing portions and a coil is wound around the thick portion in the one of the sealing portion via gap.

Abstract translation: 短弧型超高压放电灯具有一对电极，其中封闭有大于0.15mg / mm 3的发光部分和设置在发光部分两侧的密封部分，其中至少一个 一对电极的厚度部分延伸到一个密封部分中，并且线圈缠绕在密封部分通孔之一中的厚部分上。

公开(公告)号：US20040223530A1

公开(公告)日：2004-11-11

申请号：US10791664

申请日：2004-03-01

Applicant: TRUMPF Laser GmbH + Co. KG

Inventor： Reinhard Ifflaender

IPC: H01S003/22 ,  H01S003/223 ,  H01J017/04 ,  H01J061/04

CPC classification number: H01J61/0735 ,  H01J61/80 ,  H01J61/90 ,  H01S3/04 ,  H01S3/092

Abstract: In order to improve a pumping light source for laser-active media comprising an outer member enclosing a gas discharge medium, a first electrode acting as a cathode and having a first electrode end located within the outer member, a second electrode acting as an anode and having a second electrode end located within the outer member and a gas discharge chamber located within the outer member between the electrode ends facing one another, in such a manner that the service life thereof is longer it is suggested that the first electrode end be essentially cooled by radiation and that a predominantly diffuse gas discharge be formed proceeding from an areally extended surface area located at the first electrode end.

Abstract translation: 为了改善用于激光活性介质的泵浦光源，其包括封闭气体放电介质的外部构件，用作阴极的第一电极和位于外部构件内的第一电极端，用作阳极的第二电极和 具有位于外部构件内的第二电极端和位于电气端之间的外部构件内的气体放电室，使得其使用寿命更长，这表明第一电极端基本上被冷却 通过辐射，并且主要扩散的气体排出物形成为从位于第一电极端部的内伸的表面区域开始。

公开(公告)号：US20040075391A1

公开(公告)日：2004-04-22

申请号：US10358433

申请日：2003-02-04

Inventor： Donald J. E. Miller JR.

IPC: H01J017/04 ,  H01J061/04 ,  H01J017/16 ,  H01J061/30

CPC classification number: H01K1/28 ,  H01J17/04 ,  H01J17/16 ,  H01K1/14 ,  H01K1/18

Abstract: Flat Light is a light bulb diamond in shape with a flat top and a spiraling coil for maximum light emissions.

Abstract translation: 平板灯是一种具有平坦顶部和螺旋线圈​​的灯泡金刚石，以实现最大的光照。

公开(公告)号：US20040016894A1

公开(公告)日：2004-01-29

申请号：US10202422

申请日：2002-07-23

Inventor： Neil Wester

IPC: H01J061/04

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033

Abstract: A photolithography tool includes an anode and a cathode composed of a first material and a second material. The second material has a lower work function than the first material. Electrons emitted from the cathode ionize a gas into a plasma that generates EUV light. The EUV light is focused on a mask to produce an image of a circuit pattern. The image is projected on a semiconductor wafer to produce a circuit.

Abstract translation: 光刻工具包括由第一材料和第二材料组成的阳极和阴极。 第二种材料具有比第一种材料更低的功能。 从阴极发射的电子将气体电离成产生EUV光的等离子体。 EUV光聚焦在掩模上以产生电路图案的图像。 将图像投影在半导体晶片上以产生电路。

公开(公告)号：US20030020403A1

公开(公告)日：2003-01-30

申请号：US10089687

申请日：2002-04-03

Inventor： Keisuke Okubo ,  Mitsuru Ikeuchi ,  Shoji Miyanaga

IPC: H01J061/04 ,  H01J061/073

CPC classification number: H01J61/0732 ,  H01J61/86

Abstract: (Object) The object of the invention is to improve the thermal radiation characteristic of the electrodes in a high pressure discharge lamp of the short arc type in which the input power has been increased in order to increase the amount of radiant light, and to reduce the electrode temperature with high efficiency. (Arrangement) The object is achieved as claimed in the invention in a high pressure discharge lamp of the short arc type in the emission tube of which there is a pair of electrodes, in that at least part of the sides of the above described electrodes is provided with a groove area, that the depth D of this groove area is within 12% of the electrode diameter and that the relation D/P is between the depth D of the groove area and the pitch P between the grooves is greater than or equal to 2.

Abstract translation: （目的）本发明的目的在于提高输入功率增加的短弧型高压放电灯中的电极的热辐射特性，以增加辐射光量，并且减少 电极温度效率高。 （排列）根据本发明，在具有一对电极的发射管中的短弧型高压放电灯中实现上述目的，其中上述电极的至少一部分侧面是 设置有沟槽区域，该沟槽区域的深度D在电极直径的12％内，并且关系D / P在沟槽区域的深度D和沟槽之间的间距P之间的距离大于或等于 到2。

公开(公告)号：US20020014842A1

公开(公告)日：2002-02-07

申请号：US09157244

申请日：1998-09-18

Inventor： MAKOTO HORIUCHI ,  KIYOSHI TAKAHASHI ,  MAKOTO KAI

IPC: H01J017/04 ,  H01J061/04 ,  H01J017/20 ,  H01J061/12

CPC classification number: H01J61/0732 ,  H01J61/827 ,  H01J61/86

Abstract: A high-pressure discharge lamp is configured to regulate the relationship between the radius r (mm) of the tungsten rods forming the electrodes and the lamp current I (amperes) using the formula 1 1.5 null I null null r 2 null 9 when the ratio of the circumference of the circle to its diameter is expressed as null. The high-pressure discharge lamp suppresses early blackening, and achieves a long-life light source.

Abstract translation: 高压放电灯被配置为使用公式 1