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公开(公告)号：US4462688A
公开(公告)日：1984-07-31
申请号：US321657
申请日：1981-11-16
Applicant: Nathan Gold
Inventor： Nathan Gold
Abstract: An Ebert monochromator is modified in a wafer chuck format and adapted to received and sum spectrally tailored light in discrete band widths so that the meter emulates the photographic response of photo resist to light from a high pressure mercury lamp. The monochromator light path is placed between two closely spaced parallel mirrors (spaced apart on the order of 1/8 of an inch). The apparatus includes a circular entrance aperture having a right angle deflecting cone directed to a slit. That slit thereafter emits light to a cylindrical mirror. At the cylindrical mirror, collimated light rebounds to and on a diffraction grating. The light is chromatically classified at the diffraction grating, rebounds to the cylindrical mirror and on reflection passes to a focussing plane. At the focussing plane the particular spectra detected is displayed. Two apparatus are disclosed for tuning the spectral response of the light meter to the spectral response of the photo resist. In one embodiment moveable shutter elements at preselected intervals on either side of the focussing plane in an alternating pattern are located. By placing a photo sensor downstream of the apertures and focal plane, the flow of light through the light meter is integrated and as spectrally tailored closely parallels the response of the photo resist. According to a second and preferred embodiment, a photo diode array is placed at the focussing plane of the monochromator. The diodes are discretely tuned in their response to emulate the response of the photo resist. The output of the light meter in sum emulates the exposure characteristics of the photo resist.
Abstract translation: Ebert单色仪以晶片卡盘格式修改，适用于以离散的带宽接收和归纳光谱定制的光，以便仪表模拟抗蚀剂对来自高压汞灯的光的照相反应。 单色仪光路放置在两个紧密间隔的平行镜（间隔大约1/8英寸）之间。 该装置包括具有指向狭缝的直角偏转锥的圆形入口孔。 该狭缝之后将其发射到圆柱形镜。 在圆柱镜上，准直光反射到衍射光栅上和上。 光在衍射光栅处被分色，反弹到圆柱形反射镜，反射通过聚焦平面。 在聚焦平面上显示检测到的特定光谱。 公开了两种装置，用于将光计的光谱响应调谐到光致抗蚀剂的光谱响应。 在一个实施例中，以交替图案位于聚焦平面的任一侧上的预选间隔处的可移动快门元件被定位。 通过将光感测器放置在孔和焦平面的下游，通过光度计的光的流动是一体化的，并且光谱定制紧密地平行于光致抗蚀剂的响应。 根据第二和优选实施例，光电二极管阵列放置在单色仪的聚焦平面上。 二极管在其响应中离散地调谐以模拟光刻胶的响应。 光度计的输出总和模拟了光刻胶的曝光特性。
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公开(公告)号：US4298797A
公开(公告)日：1981-11-03
申请号：US10820
申请日：1979-02-09
Applicant: Claude R. Bernard , Bernard Daigne , Francois Girard
Inventor： Claude R. Bernard , Bernard Daigne , Francois Girard
CPC classification number: G01J3/20 , G01J3/02 , G01J3/0202 , G01J3/36
Abstract: A spectrograph usable more particularly in the far ultraviolet range. It comprises along the Rowland circle measuring blocks including photo-detectors. Said measuring blocks are movably mounted along a guiding rail materializing the Rowland circle. Motion means are provided for the displacement of the various measuring blocks along the guiding rail. Transmission means between the motion means and a measuring block constantly direct the latter towards the diffraction grating.
Abstract translation: 更特别可用于远紫外线范围的光谱仪。 它包括罗兰圆测量块，包括光电探测器。 所述测量块沿着实现罗兰圆的导轨可移动地安装。 提供运动装置用于沿着导轨移动各种测量块。 运动装置和测量块之间的传输装置不断地将其指向衍射光栅。
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公开(公告)号：US3973849A
公开(公告)日：1976-08-10
申请号：US587459
申请日：1975-06-16
Applicant: Ralph Newton Jackson , Richard Wilhelm Kern , Alvin Hu Tong
Inventor： Ralph Newton Jackson , Richard Wilhelm Kern , Alvin Hu Tong
CPC classification number: G01J3/02 , G01J3/0213 , G01J3/04 , G01J3/12 , G01J3/2803 , G01J2003/1217 , G01J2003/1286 , G01J2003/2866
Abstract: A spectrum analyzer is disclosed which is of the type that utilizes an electrically scannable array of optical detectors. The array is selectively illuminated, i.e. irradiated, by at least two portions of a spectral band image of radiation. One of the portions is associated with a first spectral range and the other portion is associated with a second spectral range. The first and second ranges include mutually exclusive first and second spectral components, respectively, and a common third spectral component which is intermediate of the other two components. The detectors are calibrated by means which include a pair of optical filters. One of the filters is a single narow band transmission which has a transmission characteristic corresponding to one of the three aforementioned spectral components. The other filter is a double, i.e. two, narrow band transmission filter which has a transmission characteristic corresponding to the other two spectral components. In this way, the number of calibrating filters used in the system during the calibration mode is minimized and simplified than would otherwise be the case if a separate filter for each of the three spectral components were to be utilized.
Abstract translation: 公开了一种使用光学检测器的电可扫描阵列的类型的频谱分析仪。 通过辐射的光谱带图像的至少两个部分选择性地照射阵列，即照射阵列。 其中一个部分与第一光谱范围相关联，另一部分与第二光谱范围相关联。 第一和第二范围分别包括相互排斥的第一和第二光谱分量，以及作为其它两个分量中间的公共第三光谱分量。 检测器通过包括一对光学滤波器的装置进行校准。 滤波器之一是具有对应于上述三个频谱分量中的一个的传输特性的单个无线传输。 另一个滤波器是具有对应于其他两个频谱分量的传输特性的双倍，即两个窄带传输滤波器。 以这种方式，在校准模式期间在系统中使用的校准滤波器的数量被最小化和简化，否则如果要使用用于三个频谱分量中的每一个的单独的滤波器将是情况。
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公开(公告)号：US3818197A
公开(公告)日：1974-06-18
申请号：US25915272
申请日：1972-06-02
Applicant: BAIRD ATOMIC INC
Abstract: A system for calculating, analyzing and presenting a chemical analysis of a specimen is comprised of a spectrometer, a converter-control, a computer, programmers, a keyboard, and a display. The format of the presented data the calculation of the specimen data and the analysis of the calculated data are specified by a combination of interrogating signals from the programmers and responsive signals from the keyboard.
Abstract translation: 用于计算，分析和呈现试样的化学分析的系统由光谱仪，转换器控制，计算机，程序员，键盘和显示器组成。 所呈现的数据的格式，样本数据的计算和计算数据的分析由来自编程器的询问信号和来自键盘的响应信号的组合指定。
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公开(公告)号：US3805065A
公开(公告)日：1974-04-16
申请号：US35085173
申请日：1973-04-13
Applicant: WILLIAMS A
Inventor： WILLIAMS A
CPC classification number: G01J3/02 , G01J3/0218 , G01J3/10 , G01J3/36
Abstract: A lighting control system for varying the intensity of a light source. A plurality of the spectrum wavelength bands from the light source are detected. The intensity of each of the bands is measured and an output signal is generated in accordance with the intensity of each of the measured bands. Control feedback means may be provided for varying the intensity of the light source in accordance with the output signal. The spectral wavelength bands of light may be complementary colors so that the intensity as well as the hue of the light can be varied. A light detector can include a directivity-sensitive end cap, the cap transmitting the detected light through a bundle of optical fibers to a plurality of photoconductive cells, with each of the photoconductive cells being sensitive to light in one of the spectral wavelength bands.
Abstract translation: 一种用于改变光源强度的照明控制系统。 检测来自光源的多个光谱波长带。 测量每个带的强度，并且根据每个测量带的强度产生输出信号。 可以提供控制反馈装置以根据输出信号改变光源的强度。 光的光谱波长带可以是互补颜色，使得光的强度以及光的色调可以变化。 光检测器可以包括方向性敏感端帽，帽将检测到的光通过一束光纤传输到多个光电导单元，其中每个光电导单元对光谱波长带中的一个光敏感。
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Patent Agency Ranking
公开(公告)号：US3580679A
公开(公告)日：1971-05-25
申请号：US3580679D
申请日：1968-09-24
Applicant: PERKIN ELMER CORP
Inventor： PERKIN RICHARD S
CPC classification number: G01J3/36 , G01J3/0208
Abstract: In certain astronomical applications, it is desirable to photograph (or otherwise observe) a celestial body (e.g., spectroheliograms of the sun) at a very narrow spectral bandwidth (i.e., substantially monochromatically). It is proposed to modify an otherwise conventional astronomical telescope so as to allow the simultaneous photographing (or other recording) of, for example, the sun at a plurality of different extremely very narrow wave bands (i.e., discrete, substantially monochromatic spectroheliograms). This may be accomplished by providing a series (say, four) of discrete apertures at the entrance end of an otherwise conventional telescope; and means at the image or exit end of the telescope for separately forming an image from each of the four separate entrance beams. By providing different narrow band-pass filters (or other means for rendering each of the beams monochromatic at a different wavelength), a simultaneous photograph (or other measurement) of the sun at different spectral lines may be made. Comparison of such simultaneous photographs can yield information concerning relative intensity of spectral lines from any part of the sun, free from uncertainty due to, for example, the fluctuating intensity with time of the source (e.g., the sun) itself. Preferably the entrance apertures are provided with moderately broad-pass reflecting filters for rejecting (i.e., reflecting away) most of the radiant energy outside of the vicinity at which each of the separate spectral measurements are being made.
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公开(公告)号：US3531202A
公开(公告)日：1970-09-29
申请号：US3531202D
申请日：1966-11-14
Applicant: BAIRD ATOMIC INC
Inventor： WILKINSON HUGH MALCOLM , SPERGEL PHILIP
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公开(公告)号：US3090278A
公开(公告)日：1963-05-21
申请号：US1669060
申请日：1960-03-22
Applicant: BAIRD ATOMIC INC
Inventor： SAUNDERSON JASON L
IPC: G01J3/36
CPC classification number: G01J3/36
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公开(公告)号：US3064520A
公开(公告)日：1962-11-20
申请号：US6552660
申请日：1960-10-27
Applicant: BAIRD ATOMIC INC
Inventor： SAUNDERSON JASON L , DU BOLS ELIOT
IPC: G01J3/36
CPC classification number: G01J3/36
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350.发明授权Device for measuring radiations from a spectrum by means of an exploring photoelectric cell 失效用于通过探测光电池测量光谱的辐射的装置
公开(公告)号：US2918606A
公开(公告)日：1959-12-22
申请号：US68650657
申请日：1957-09-26
Applicant: RENAULT
Inventor： LUCIEN PERAS
IPC: G01J3/36
CPC classification number: G01J3/36
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