公开(公告)号：US08075704B2

公开(公告)日：2011-12-13

申请号：US10523371

申请日：2004-06-01

Applicant: Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Russell J. Holmes ,  Allan Tram

Inventor： Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Russell J. Holmes ,  Allan Tram

IPC: B08B5/00

CPC classification number: B01D53/00 ,  B01D53/72 ,  B08B5/02 ,  B08B9/00 ,  C23G5/00 ,  H01L21/02046

Abstract: The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.

Abstract translation: 本发明公开了一种从装置内的表面除去多种分子污染物的方法。 含有氧气和/或水的净化气体被引入到装置的内部，与内表面的至少一部分接触。 污染的吹扫气体通过将一部分污染物从内表面转移到吹扫气体中而产生。 污染的净化气体从设备中移出，并且继续该过程直到污染的吹扫气体中的污染物浓度低于预定水平。

公开(公告)号：US20090229346A1

公开(公告)日：2009-09-17

申请号：US11989553

申请日：2006-07-31

Applicant: Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Jeffrey J. Spiegelman

Inventor： Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Jeffrey J. Spiegelman

IPC: G01N33/00 ,  B01D59/26

CPC classification number: B08B17/00

Abstract: A method of detecting a molecular species in an electronics processing environment is disclosed. The method exposes a capture substrate to the processing environment. The capture substrate has a surface area different from the surface area of an electronic substrate undergoing electronics processing. The molecular species is transferred from the environment to the capture substrate. A characteristic of the molecular species is identified, thereby detecting the species. Other methods utilize a capture substrate to remove the molecular species from an electronic processing environment, or use the capture substrate to determine the presence of a molecular species in a transfer container operating between two process environments or two intermediate process steps. Systems for carrying out the methods are also disclosed.

Abstract translation: 公开了一种在电子处理环境中检测分子种类的方法。 该方法将捕获衬底暴露于处理环境。 捕获基板具有与经历电子处理的电子基板的表面积不同的表面积。 分子物质从环境转移到捕获底物。 确定分子种类的特征，从而检测物种。 其他方法利用捕获底物从电子处理环境中除去分子物质，或使用捕获底物来确定在两个工艺环境或两个中间工艺步骤之间操作的转移容器中分子物质的存在。 还公开了用于实施方法的系统。

公开(公告)号：US07381243B2

公开(公告)日：2008-06-03

申请号：US10531512

申请日：2003-10-16

Applicant: Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman ,  Russell J. Holmes

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman ,  Russell J. Holmes

IPC: C01B31/20 ,  B01J20/06 ,  B01D53/04

CPC classification number: B01D53/02 ,  B01D53/04 ,  B01D2253/10 ,  B01D2253/112 ,  B01D2256/22 ,  B01D2257/104 ,  B01D2257/308 ,  B01D2257/404 ,  B01D2257/406 ,  B01D2257/702 ,  B01D2257/80 ,  B01D2259/40083 ,  B01D2259/402 ,  B01J20/06 ,  B01J20/3433 ,  B01J20/3458 ,  B01J20/3483 ,  B01J2220/42 ,  C01B32/50 ,  Y02C10/08

Abstract: The invention is a method for the decontamination of CO2 to a sufficient level of purity to allow it to be used in the semiconductor industry. The invention comprises the exposure of fluid CO2 to a combination metallic states of at least one metal under the appropriate conditions for removal of contaminants. The adsorbents are then decontaminated/activated to return the adsorbent to a mixed oxidation state and allow further rounds of decontamination. The adsorbents are selected to be complimentary to each other, preferentially adsorbing different contaminants. Additionally, the adsorbents are selected to undergo reduction differently such that upon regeneration only a portion of the metals are reduced and the adsorbent is returned essentially to its original state.

Abstract translation: 本发明是一种将CO 2去污的方法，使其具有足够的纯度以使其可用于半导体工业。 本发明包括在适合除去污染物的条件下将流体CO 2 2暴露于至少一种金属的组合金属状态。 然后将吸附剂去污/活化，使吸附剂回到混合氧化态，并允许进一步的去污染。 吸附剂被选择为彼此互补，优先吸附不同的污染物。 此外，选择吸附剂进行不同的还原，使得在再生时，只有一部分金属被还原，并且吸附剂基本恢复到其初始状态。

公开(公告)号：US20070144118A1

公开(公告)日：2007-06-28

申请号：US11318258

申请日：2005-12-22

Applicant: Daniel Alvarez ,  Troy Scoggins ,  Russell Holmes

Inventor： Daniel Alvarez ,  Troy Scoggins ,  Russell Holmes

IPC: B01D50/00

CPC classification number: H01L21/67769 ,  H01L21/67017 ,  H01L21/67389

Abstract: Embodiments of the invention are directed to methods and systems of purging of transfer containers, such as standardized mechanical interface (SMIF) pods. In particular, purified purge gases can purify front operated unified pods (FOUPs) and other non hermetically sealed transfer containers, such that the containers can be interfaced with a sealed chamber (e.g., a semiconductor processing tool) without detrimentally contaminating the environment of the sealed chamber with organics and other harmful contaminants. The methods and systems may be used to transfer objects, such as wafers, semiconductor components, and other materials requiring exposure to extremely clean environments, during electronic materials manufacturing and processing. Transfer containers specifically configured to promote purging of the container's enclosure are also described.

Abstract translation: 本发明的实施例涉及清洁转移容器的方法和系统，例如标准化机械界面（SMIF）舱。 特别地，净化的净化气体可净化前操作的统一容器（FOUP）和其他非密封的转运容器，使得容器可以与密封室（例如，半导体加工工具）接合，而不会有害地污染密封 室内有有机物和其他有害污染物。 在电子材料制造和加工期间，可以使用这些方法和系统来传送诸如晶片，半导体部件和需要暴露于非常干净的环境的其它材料的对象。 还描述了专门配置为促进容器外壳清洗的转移容器。

公开(公告)号：US20070137676A1

公开(公告)日：2007-06-21

申请号：US11706044

申请日：2007-02-13

Applicant: Jeffrey Spiegelman ,  Daniel Alvarez ,  Allan Tram ,  Russell Holmes

Inventor： Jeffrey Spiegelman ,  Daniel Alvarez ,  Allan Tram ,  Russell Holmes

IPC: B08B7/04 ,  B08B3/00

CPC classification number: B01D53/00 ,  B01D53/72 ,  B08B5/02 ,  B08B9/00 ,  C23G5/00 ,  H01L21/02046

Abstract: The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is, continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.

Abstract translation: 本发明公开了一种从装置内的表面除去多种分子污染物的方法。 含有氧气和/或水的净化气体被引入到装置的内部，与内表面的至少一部分接触。 污染的吹扫气体通过将一部分污染物从内表面转移到吹扫气体中而产生。 污染的吹扫气体从设备中移出，并且该过程一直持续到污染的净化气体中的污染物浓度低于预定水平。

公开(公告)号：US20070025277A1

公开(公告)日：2007-02-01

申请号：US11296550

申请日：2005-12-07

Applicant: Ali Sajassi ,  Dino Farinacci ,  John Zwiebel ,  Daniel Alvarez

Inventor： Ali Sajassi ,  Dino Farinacci ,  John Zwiebel ,  Daniel Alvarez

IPC: H04L12/28

CPC classification number: H04L45/00 ,  H04L45/26

Abstract: A provider edge (PE) node of a network operates to send a trace path message over the network to a receiver PE node, the trace path message recording a list of intermediate nodes of a unicast path from the PE node to the receiver PE node; and receive a join message initiated from the receiver PE node, the join message using the list to propagate to the source PE node through the intermediate nodes such that a branch of a multicast tree is aligned with the unicast path. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. 37 CFR 1.72(b).

Abstract translation: 网络的提供者边缘（PE）节点操作以通过网络向接收者PE节点发送跟踪路径消息，跟踪路径消息记录从PE节点到接收者PE节点的单播路径的中间节点列表; 并接收从接收者PE节点发起的加入消息，使用该列表的加入消息通过中间节点传播到源PE节点，使得多播树的分支与单播路径对齐。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。 37 CFR 1.72（b）。

公开(公告)号：US20060291444A1

公开(公告)日：2006-12-28

申请号：US11152117

申请日：2005-06-14

Applicant: Daniel Alvarez ,  Yiqun Cai

Inventor： Daniel Alvarez ,  Yiqun Cai

IPC: H04L12/28

CPC classification number: H04L45/00 ,  H04L45/16

Abstract: An apparatus or method for selecting a rendezvous point (RP) for a multicast group or a range of multicast groups. In one embodiment, the method includes an RP enabled device receiving a plurality of advertisements, wherein the plurality of advertisements comprise a plurality of IP addresses, respectively, for the RP enabled device creates a list, wherein the list comprises the plurality of IP addresses and an IP address of the RP enabled device. Thereafter an xth (e.g., first, third, fourth, etc.) IP address from the list is selected by the RP enabled device as the IP address for an active RP for the multicast group or range of multicast groups. After the RP enabled device selects the xth IP address, the RP enabled device can set up a forwarding state for the multicast group or any of the range of multicast groups without first advertising the selection of the xth IP address as the address for the RP.

Abstract translation: 一种用于为多播组或多个组播组的范围选择会合点（RP）的装置或方法。 在一个实施例中，该方法包括接收多个广告的支持RP的设备，其中，所述多个广告分别包括多个IP地址，用于启用RP的设备创建列表，其中该列表包括多个IP地址，以及 RP启用设备的IP地址。 此后，由RP使能的设备选择列表中的x（例如，第一，第三，第四等）IP地址作为多播组或多播组范围的活动RP的IP地址。 启用RP的设备选择第x个IP地址后，RP启用的设备可以设置组播组或任何一个组播组的转发状态，而无需首先发布第x个IP地址的选择作为RP的地址。

公开(公告)号：US06869463B2

公开(公告)日：2005-03-22

申请号：US10692019

申请日：2003-10-23

Applicant: Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Joshua T. Cook

Inventor： Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Joshua T. Cook

IPC: B01D53/04 ,  B01J20/34

CPC classification number: B01D53/02 ,  B01D53/04 ,  B01D2259/40086 ,  B01J20/28057 ,  B01J20/3458 ,  B01J20/3491

Abstract: A method is described for rapid and economical activation and/or preconditioning of gas purification substrates by providing forced convection of the preconditioning or activating gas through the pores of the substrate. The gas is pumped into the substrate-containing vessel and raised to an elevated pressure, which is maintained for a short predetermined time, followed by venting of contents of the vessel. The vessel is again pressurized with the purging gas to an elevated level, and the elevated pressure is maintained for a short predetermined time, followed by venting of the vessel. This cycle is repeated as often as needed or desired. Activation and/or preconditioning can be accomplished in a much shorter time and with much less gas usage compared to diffusion preconditioning and activation processes. This process is particularly suited for preconditioning and activation of gas purifier substrates for decontamination of gases down to ≦1 ppm contaminants.

Abstract translation: 描述了通过提供预处理或活化气体通过衬底的孔的强制对流来快速和经济地激活和/或预处理气体净化衬底的方法。 将气体泵送到含底物的容器中并升高到升高的压力，其保持较短的预定时间，然后排出容器的内容物。 将容器再次用吹扫气体加压到升高的水平，并且升高的压力保持较短的预定时间，然后排出容器。 根据需要或期望，经常重复该循环。 激活和/或预处理可以在更短的时间内完成，并且与扩散预处理和激活过程相比，气体使用量更少。 该方法特别适用于气体净化器基板的预处理和激活，用于将污染物净化至<= 1ppm污染物。

公开(公告)号：US20050019244A1

公开(公告)日：2005-01-27

申请号：US10626266

申请日：2003-07-23

Applicant: Jeffrey Spiegelman ,  Daniel Alvarez

Inventor： Jeffrey Spiegelman ,  Daniel Alvarez

IPC: C01B3/02 ,  C01B3/56 ,  C01C1/04 ,  C01C1/02

CPC classification number: C01B21/045 ,  C01B3/025 ,  C01B3/56 ,  C01B2203/043 ,  C01B2203/0465 ,  C01B2203/047 ,  C01B2203/0475 ,  C01B2203/048 ,  C01B2203/0495 ,  C01C1/024 ,  C01C1/0405 ,  Y02E60/364 ,  Y02E60/366 ,  Y02P20/52

Abstract: The present invention discloses a method for the manufacture of high purity ammonia, hydrogen, and nitrogen from de-ionized water and standard nitrogen. De-ionized water is degassed and fed to an electrolytic hydrogen generator to produce raw hydrogen. The hydrogen is purified and mixed with purified nitrogen, compressed, and fed to a catalytic ammonia reactor. Following purification, the ammonia is delivered to the semiconductor process tool along with purified hydrogen and purified nitrogen.

Abstract translation: 本发明公开了一种从去离子水和标准氮气制造高纯氨，氢和氮的方法。 去离子水被脱气并进料到电解氢发生器以产生原始氢。 将氢纯化并与纯化氮混合，压缩，并进料到催化氨反应器中。 纯化后，将氨与纯化的氢气和纯化氮气一起输送到半导体工艺工具。

公开(公告)号：US10744381B2

公开(公告)日：2020-08-18

申请号：US16410305

申请日：2019-05-13

Applicant: Russell Malina ,  Daniel Alvarez

Inventor： Russell Malina ,  Daniel Alvarez

IPC: A63B55/60 ,  A63B55/00

Abstract: Disclosed herein is a golf bag cover for use in covering a golf bag having golf clubs placed therein. The golf bag cover is configured to couple to the bottom portion of a golf bag in a closed position and can selectively cover the golf bag and golf clubs in an open position. In the closed position, the golf bag cover can collapse into an integrated pouch and remain attached to the base of the golf bag.