公开(公告)号：US08664004B2

公开(公告)日：2014-03-04

申请号：US10544309

申请日：2004-02-20

Applicant: Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Allan Tram

Inventor： Jeffrey J. Spiegelman ,  Daniel Alvarez, Jr. ,  Allan Tram

IPC: G01N1/40

CPC classification number: G01N30/12 ,  G01N1/2214 ,  G01N1/44 ,  G01N2030/085 ,  Y10T436/25 ,  Y10T436/25375 ,  Y10T436/255

Abstract: The present invention relates to the monitoring of contaminant concentrations in manufacturing processes that employ fluid purification devices. The invention provides a sensitive method for analyzing contaminant concentrations in a process fluid stream using purification material to adsorb contaminants contained therein over an entire process.

Abstract translation: 本发明涉及使用流体净化装置的制造过程中的污染物浓度的监测。 本发明提供了一种用于分析工艺流体流中的污染物浓度的敏感方法，其使用净化材料在整个过程中吸附其中所含的污染物。

公开(公告)号：US08470176B2

公开(公告)日：2013-06-25

申请号：US12705621

申请日：2010-02-14

Applicant: Alexander David Deptala ,  Daniel Alvarez ,  Arthur Deptala

Inventor： Alexander David Deptala ,  Daniel Alvarez ,  Arthur Deptala

IPC: B01D39/00

CPC classification number: B01D27/02 ,  B01D15/22 ,  B01D39/2055 ,  B01D39/2058 ,  B01D2239/0258 ,  B01D2239/0485 ,  B01D2239/1216 ,  B01D2239/1241 ,  B01D2239/1291 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/2803 ,  B01J20/28047 ,  B01J20/28057 ,  B01J20/28078 ,  B01J20/3293 ,  G01N1/34 ,  G01N30/6091 ,  G21C19/46 ,  G21C19/48 ,  Y02W30/883 ,  Y02W30/884 ,  Y10T436/255

Abstract: Disclosed is an apparatus and method whereby small particle nano materials may be contained in a highly functional package for fluid separation and/or purification applications. The package consists of an aerogel material which uniformly surrounds the nano-particles. The aerogel may be composed of carbon, silicon, or silicon oxide or other suitable materials. The morphological features of the aerogel may be tailored specifically towards fine particle and ultrafine particle containment while maintaining uniform fluid flow in separation and purification processes. The aerogel may be bonded to a suitable rigid housing by chemical or mechanical means.

Abstract translation: 公开了一种装置和方法，其中小颗粒纳米材料可以包含在用于流体分离和/或纯化应用的高功能封装中。 该包装由均匀包围纳米颗粒的气凝胶材料组成。 气凝胶可以由碳，硅或氧化硅或其它合适的材料组成。 气凝胶的形态特征可以专门针对细颗粒和超细颗粒容纳，同时在分离和纯化过程中保持均匀的流体流动。 气凝胶可以通过化学或机械方式结合到合适的刚性壳体。

公开(公告)号：US20110201041A1

公开(公告)日：2011-08-18

申请号：US12705621

申请日：2010-02-14

Applicant: Alexander David Deptala ,  Daniel Alvarez ,  Arthur Deptala

Inventor： Alexander David Deptala ,  Daniel Alvarez ,  Arthur Deptala

IPC: C12Q1/02 ,  B01D15/00 ,  B01D39/16 ,  B01D39/04 ,  B01D53/02 ,  G01N1/00 ,  G21C19/42

CPC classification number: B01D27/02 ,  B01D15/22 ,  B01D39/2055 ,  B01D39/2058 ,  B01D2239/0258 ,  B01D2239/0485 ,  B01D2239/1216 ,  B01D2239/1241 ,  B01D2239/1291 ,  B01J20/20 ,  B01J20/28011 ,  B01J20/2803 ,  B01J20/28047 ,  B01J20/28057 ,  B01J20/28078 ,  B01J20/3293 ,  G01N1/34 ,  G01N30/6091 ,  G21C19/46 ,  G21C19/48 ,  Y02W30/883 ,  Y02W30/884 ,  Y10T436/255

Abstract: Disclosed is an apparatus and method whereby small particle nano materials may be contained in a highly functional package for fluid separation and/or purification applications. The package consists of an aerogel material which uniformly surrounds the nano-particles. The aerogel may be composed of carbon, silicon, or silicon oxide or other suitable materials. The morphological features of the aerogel may be tailored specifically towards fine particle and ultrafine particle containment while maintaining uniform fluid flow in separation and purification processes. The aerogel may be bonded to a suitable rigid housing by chemical or mechanical means.

Abstract translation: 公开了一种装置和方法，其中小颗粒纳米材料可以包含在用于流体分离和/或纯化应用的高功能封装中。 该包装由均匀包围纳米颗粒的气凝胶材料组成。 气凝胶可以由碳，硅或氧化硅或其它合适的材料组成。 气凝胶的形态特征可以专门针对细颗粒和超细颗粒容纳，同时在分离和纯化过程中保持均匀的流体流动。 气凝胶可以通过化学或机械方式结合到合适的刚性壳体。

公开(公告)号：US07824628B2

公开(公告)日：2010-11-02

申请号：US10141215

申请日：2002-05-07

Applicant: Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman

IPC: B01D50/00

CPC classification number: B01J20/3458 ,  B01D15/00 ,  B01J20/06 ,  B01J20/28057 ,  B01J20/3433 ,  B01J20/3483 ,  B01J2220/56 ,  C01C1/024 ,  H01S3/005

Abstract: A method and apparatus for the decontamination of fluid ammonia are described. Liquid or gaseous ammonia is purified of contaminants by passage through an adsorbent bed, the contaminants accumulating in the bed. A portion of the purified ammonia discharged from the bed is decomposed to hydrogen and nitrogen. The hydrogen is used to regenerate an adsorbent bed which has accumulated sufficient contaminants to reduce its ability to further decontaminate incoming ammonia satisfactorily. Preferably there are a plurality of interconnected adsorbent beds, with some being operated for ammonia decontamination while others are being regenerated, with their operations being reversed as needed to maintain a continual production of decontaminated ammonia from the plurality of beds. Computers or other controllers can be used to control such bed operations and interchanges. Internal production of hydrogen makes the system self-contained and no addition of hydrogen is needed.

Abstract translation: 描述了用于去除氨液体的方法和装置。 液体或气态氨通过吸附床净化污染物，污染物积聚在床中。 从床排出的一部分纯化氨分解成氢和氮。 氢气用于再生吸收剂床，其吸收了足够的污染物，以降低其进一步净化进入氨的能力。 优选地，存在多个相互连接的吸附剂床，其中一些被运行用于氨去污，而另一些被再生，其操作根据需要反转，以保持从多个床中连续生产净化的氨。 计算机或其他控制器可用于控制这种床操作和交换。 氢的内部生产使得系统自包含，不需要添加氢。

公开(公告)号：US20090021953A1

公开(公告)日：2009-01-22

申请号：US12239402

申请日：2008-09-26

Applicant: Daniel Alvarez Garcia ,  Pascal POIROT

Inventor： Daniel Alvarez Garcia ,  Pascal POIROT

IPC: B60Q1/115

CPC classification number: B60Q1/076

Abstract: The lighting and/or signaling system according to the invention comprises at least one lighting and/or signaling device which is able to emit at least one light beam and is equipped with at least one actuator for adjusting an angle of the light beam, and at least one actuator control device for controlling the actuator. According to the invention, the actuator control device transmits an active setpoint information item to the actuator only when a current value of the setpoint information item differs substantially from a previous value of the setpoint information item. The improved actuator control incorporated in the system according to the invention helps to achieve greater reliability and a longer service life.

Abstract translation: 根据本发明的照明和/或信令系统包括至少一个能够发射至少一个光束并且配备有至少一个用于调节光束的角度的致动器的照明和/或信号装置，并且在 用于控制致动器的至少一个致动器控制装置。 根据本发明，只有当设定点信息项的当前值与设定点信息项的先前值显着不同时，致动器控制装置才向致动器传送有效设定点信息项。 结合在根据本发明的系统中的改进的致动器控制有助于实现更高的可靠性和更长的使用寿命。

公开(公告)号：US07377982B2

公开(公告)日：2008-05-27

申请号：US11113726

申请日：2005-04-25

Applicant: Daniel Alvarez, Jr. ,  Jeffrey J Spiegelman

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J Spiegelman

IPC: B08B3/00

CPC classification number: B01D53/00 ,  B01D53/72 ,  B08B5/02 ,  B08B9/00 ,  C23G5/00 ,  H01L21/02046

Abstract: The present invention discloses a method for the removal of a number of molecular contaminants from surfaces within a device. A purge gas containing oxygen and/or water is introduced into the interior of the device, contacting at least a portion of the interior surfaces. A contaminated purge gas is produced by transferring a portion of the contamination from the interior surfaces into the purge gas. The contaminated purge gas is removed from the device and the process is continued until the contaminant concentration in the contaminated purge gas is below a predetermined level.

Abstract translation: 本发明公开了一种从装置内的表面除去多种分子污染物的方法。 含有氧气和/或水的净化气体被引入到装置的内部，与内表面的至少一部分接触。 污染的吹扫气体通过将一部分污染物从内表面转移到吹扫气体中而产生。 污染的净化气体从设备中移出，并且继续该过程直到污染的吹扫气体中的污染物浓度低于预定水平。

公开(公告)号：US20070031321A1

公开(公告)日：2007-02-08

申请号：US10559070

申请日：2004-06-23

Applicant: Daniel Alvarez ,  Daniel Lev ,  Jeffrey Spiegelman ,  Tram Nguyen ,  Russell Holmes

Inventor： Daniel Alvarez ,  Daniel Lev ,  Jeffrey Spiegelman ,  Tram Nguyen ,  Russell Holmes

IPC: C01F11/22 ,  C01F5/28

CPC classification number: B01J20/3204 ,  B01D53/261 ,  B01D53/28 ,  B01J20/0211 ,  B01J20/041 ,  B01J20/06 ,  B01J20/28057 ,  B01J20/28097 ,  B01J20/3236 ,  B01J20/3433 ,  B01J20/3458 ,  B01J20/3483 ,  C01B7/0718 ,  C01B7/0743 ,  C01B7/093 ,  C01B7/096 ,  C01B7/197 ,  C01B7/20 ,  C01B7/24

Abstract: A process, composition and apparatus for the removal of impurities from corrosive gases, particularly halogen-containing gases, down to about 100 ppb concentration are described. The critical component is zirconia (ZrO2), which in a variety of physical forms is capable of dehydrating such gases. The zirconia can be in the form of a coating on a substrate, as a granular bulk material, or deposited within the pores of a porous body. The zirconia is retained in a simple container which is easily installed in a gas supply line, such as to a gas- or vapor-deposition manufacturing unit. The purification process can be operated for long periods of time in the presence of these gases. The invention provides final purification to gas streams intended for gas- or vapor-deposition formation of high purity electronic, prosthetic or similar products, and can be used in combination with a preliminary dehydration process or a solid particulate removal unit upstream.

Abstract translation: 描述了用于从低至约100ppb浓度的腐蚀性气体，特别是含卤素气体中除去杂质的方法，组合物和装置。 关键组分是氧化锆（ZrO 2/2），其以各种物理形式能够使这些气体脱水。 氧化锆可以是基材上的涂层形式，作为颗粒体材料，或者沉积在多孔体的孔内。 氧化锆保持在易于安装在气体供应管线中的简单容器中，例如气体或气相沉积制造单元。 净化过程可在这些气体存在的情况下长时间运行。 本发明提供了用于气体或气相沉积形成高纯度电子，假体或类似产品的气流的最终纯化，并且可以与预脱水方法或固体颗粒去除单元上游结合使用。

公开(公告)号：US20060243585A1

公开(公告)日：2006-11-02

申请号：US10565396

申请日：2004-07-22

Applicant: Jeffrey Spiegelman ,  Daniel Alvarez

Inventor： Jeffrey Spiegelman ,  Daniel Alvarez

IPC: C01B13/00

CPC classification number: C01B21/045 ,  C01B3/025 ,  C01B3/56 ,  C01B2203/043 ,  C01B2203/0465 ,  C01B2203/047 ,  C01B2203/0475 ,  C01B2203/048 ,  C01B2203/0495 ,  C01C1/024 ,  C01C1/0405 ,  Y02E60/364 ,  Y02E60/366 ,  Y02P20/52

Abstract: The present invention discloses a method for the manufacture of high purity ammonia, hydrogen, and nitrogen from de-ionized water and standard nitrogen. De-ionized water is degassed and fed to an electrolytic hydrogen generator to produce raw hydrogen. The hydrogen is purified and mixed with purified nitrogen, compressed, and fed to a catalytic ammonia reactor. Following purification, the ammonia is delivered to the semiconductor process tool along with purified hydrogen and purified nitrogen.

Abstract translation: 本发明公开了一种从去离子水和标准氮气制造高纯氨，氢和氮的方法。 去离子水被脱气并进料到电解氢发生器以产生原始氢。 将氢纯化并与纯化氮混合，压缩，并进料到催化氨反应器中。 纯化后，将氨与纯化的氢气和纯化氮气一起输送到半导体工艺工具。

公开(公告)号：US20060211131A1

公开(公告)日：2006-09-21

申请号：US10544309

申请日：2004-02-20

Applicant: Jeffrey Spiegelman ,  Daniel Alvarez ,  Allan Tram

Inventor： Jeffrey Spiegelman ,  Daniel Alvarez ,  Allan Tram

IPC: G01N1/18

CPC classification number: G01N30/12 ,  G01N1/2214 ,  G01N1/44 ,  G01N2030/085 ,  Y10T436/25 ,  Y10T436/25375 ,  Y10T436/255

Abstract: The present invention relates to the monitoring of contaminant concentrations in manufacturing processes that employ fluid purification devices. The invention provides a sensitive method for analyzing contaminant concentrations in a process fluid stream using purification material to adsorb contaminants contained therein over an entire process.

Abstract translation: 本发明涉及使用流体净化装置的制造过程中的污染物浓度的监测。 本发明提供了一种用于分析工艺流体流中的污染物浓度的敏感方法，其使用净化材料在整个过程中吸附其中所含的污染物。

公开(公告)号：US07101416B2

公开(公告)日：2006-09-05

申请号：US10692018

申请日：2003-10-23

Applicant: Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman

Inventor： Daniel Alvarez, Jr. ,  Jeffrey J. Spiegelman

IPC: B01D53/04

CPC classification number: G03F7/70883 ,  B01D53/02 ,  B01D53/04 ,  B01D53/261 ,  B01D53/508 ,  B01D53/565 ,  B01D53/72 ,  B01D2253/108 ,  B01D2256/10 ,  B01D2256/18 ,  B01D2257/206 ,  B01D2257/306 ,  B01D2257/70 ,  B01D2257/702 ,  B01D2257/80 ,  B01J20/02 ,  B01J20/0207 ,  B01J20/0211 ,  B01J20/0214 ,  B01J20/0225 ,  B01J20/0229 ,  B01J20/0237 ,  B01J20/0244 ,  B01J20/06 ,  B01J20/08 ,  B01J20/103 ,  B01J20/18 ,  B01J2220/42 ,  G03F7/70925 ,  G03F7/70933

Abstract: A method and composition for the removal of contaminants in a gas stream used in the contamination sensitive processes of photolithography and metrology are described. The synergistic effect of a combination of an electropositive metal component, a high silica zeolite, and a late transition metal compound effects removal or reduction of the contaminates in the gas which interfere with light transmittance to the ppb or ppt levels necessary for the gas to be suitable for these uses. The removal of neutral polar molecules, neutral polar aprotic molecules, protic and aprotic alkaline molecules, acidic polar species, and neutral non-polar aprotic molecules is accomplished with the claimed composition. Depending on the type of contaminant, the composition components are each varied from 10 to 80 parts by volume, with the total composition limited to 100 parts by volume.

Abstract translation: 描述了用于去除光刻和计量的污染敏感过程中气流中污染物的方法和组合物。 正电性金属组分，高二氧化硅沸石和后期过渡金属化合物的组合的协同效应影响气体中污染物的去除或还原，其干扰对于气体所需的ppb或ppt水平的透光率 适合这些用途。 中性极性分子，中性极性非质子分子，质子和非质子碱性分子，酸性极性物质和中性非极性非质子分子的去除是用要求保护的组合物完成的。 取决于污染物的类型，组合物组分各自为10至80体积份，总组合物限制为100体积份。