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    Transfer container
    1.
    发明申请
    Transfer container 审中-公开
    转运集装箱

    公开(公告)号：US20090272461A1

    公开(公告)日：2009-11-05

    申请号：US11989874

    申请日：2006-07-31

    申请人： Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Russell J. Holmes

    发明人： Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Russell J. Holmes

    IPC分类号： H01L21/677 ,  B65D81/20

    CPC分类号： H01L21/67389 ,  H01L21/67017 ,  H01L21/67393

    摘要： A transfer container for transferring an object between environments is described. The transfer container comprises an enclosure; a purifier comprising a purification material, the purifier attached to the enclosure, the purifier configured to purify fluid flowing into the enclosure; and a fluid propelling means, attached to the enclosure, for propelling fluid through the purifier and into the enclosure.

    摘要翻译： 描述用于在环境之间传送对象的传送容器。 转移容器包括外壳; 净化器，其包括净化材料，所述净化器附接到所述外壳，所述净化器被配置为净化流入所述外壳的流体; 以及附接到外壳的用于推动流体通过净化器并进入外壳的流体推进装置。

    Systems and method for capture substrates
    2.
    发明申请
    Systems and method for capture substrates 审中-公开
    捕获底物的系统和方法

    公开(公告)号：US20090229346A1

    公开(公告)日：2009-09-17

    申请号：US11989553

    申请日：2006-07-31

    申请人： Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Jeffrey J. Spiegelman

    发明人： Daniel Alvarez, JR. ,  Troy B. Scoggins ,  Jeffrey J. Spiegelman

    IPC分类号： G01N33/00 ,  B01D59/26

    CPC分类号： B08B17/00

    摘要： A method of detecting a molecular species in an electronics processing environment is disclosed. The method exposes a capture substrate to the processing environment. The capture substrate has a surface area different from the surface area of an electronic substrate undergoing electronics processing. The molecular species is transferred from the environment to the capture substrate. A characteristic of the molecular species is identified, thereby detecting the species. Other methods utilize a capture substrate to remove the molecular species from an electronic processing environment, or use the capture substrate to determine the presence of a molecular species in a transfer container operating between two process environments or two intermediate process steps. Systems for carrying out the methods are also disclosed.

    摘要翻译： 公开了一种在电子处理环境中检测分子种类的方法。 该方法将捕获衬底暴露于处理环境。 捕获基板具有与经历电子处理的电子基板的表面积不同的表面积。 分子物质从环境转移到捕获底物。 确定分子种类的特征，从而检测物种。 其他方法利用捕获底物从电子处理环境中除去分子物质，或使用捕获底物来确定在两个工艺环境或两个中间工艺步骤之间操作的转移容器中分子物质的存在。 还公开了用于实施方法的系统。