Abstract:
Provided are a vertical interconnection structure including carbon nanotubes and a method of fabricating the same. The vertical interconnection structure includes a substrate; a lower electrode formed on the substrate; a catalyst layer formed on the lower electrode; an inactivated catalyst layer covering the lower electrode and having a first hole exposing the catalyst layer; an insulating layer which is formed on the inert catalyst layer and has a second hole connected to the first hole; a plurality of carbon nanotubes grown from an exposed area of the catalyst layer by the first hole; an upper electrode on the insulating layer being electrically connected to the carbon nanotubes, the inactivated catalyst layer is formed through a thermal reaction between the catalyst layer covering the lower electrode except for the catalyst layer in the first hole and a passivation layer having a third hole corresponding to the second hole.
Abstract:
A method of making a catalyst layer for synthesis of carbon nanotubes is provided. The method includes: coating a thin film formed of copolymer on a substrate; heat treating the thin film coated on the substrate to form a regular structure; removing a part of block copolymers that form the copolymer; depositing a catalyst base on the thin film from which a part of the block copolymers are removed; and removing the thin film to form a catalyst layer formed of a plurality of metal catalyst dots.
Abstract:
In a carbon nanotube (CNT) structure and a method of manufacturing the CNT structure, and in a field emission display (FED) device using the CNT structure and a method of manufacturing the FED device, the CNT structure includes a substrate, a plurality of buffer particles having a predetermined size coated on the substrate, a plurality of catalyst layers formed on surfaces of the buffer particles by annealing a catalyst material deposited on the substrate to a predetermined thickness so as to cover the buffer particles, and a plurality of CNTs grown from the catalyst layers.
Abstract:
A method of vertically aligning carbon nanotubes, whereby carbon nanotubes are grown on a substrate on which a catalyst metallic layer is formed, the grown carbon nanotubes are separated from the substrate in a bundle shape, the separated carbon nanotube bundles is put in an electrolyte having a charger, the carbon nanotube bundles are mixed with the charger to charge the carbon nanotube bundles, and the charged carbon nanotube bundles are vertically attached onto a surface of an electrode, using electrophoresis.
Abstract:
Provided is a microelectro mechanical system (MEMS). The provided MEMS switch includes a substrate; a signal line formed on the substrate; a beam deformed by an electrostatic force to electrically switch with the signal line; and a spring type contact unit formed on the signal line to electrically contact the beam and elastically deformed by an external force. Thus, stability of the contact between the contact unit and the beam is improved. In particular, even when the beam or the contact unit under the beam is unbalanced, the contact unit can elastically contact the beam to obtain a stable electrical switching operation.
Abstract:
A solar cell integrated display device with a solar cell attached to one side of a display device and a method of fabricating the same. The solar cell integrated display device includes an emissive display device unit that includes a first transparent substrate, a first transparent electrode deposited on the transparent substrate, a second transparent electrode facing the first transparent electrode, and a light emitting layer between the first transparent electrode and the second transparent electrode and a polymer membrane coated on the second transparent electrode. The polymer membrane includes CNT, which allows for a smooth flow of electrons. A solar cell unit that supplies power to the display device unit is stacked on the polymer membrane.
Abstract:
A novel field emission display (FED) and a novel method for making the same. The FED includes a substrate, a cathode electrode and a focus electrode formed on the same level with each other on the substrate, an insulation layer formed on the cathode electrode and the focus electrode such that the cathode electrode and the focus electrode are partially exposed through the insulation layer, a field emitter formed at the cathode electrode exposed by the insulation layer, and a gate electrode formed on the insulation layer. The field emitter being formed on the same layer and of the same material and at the same time as the cathode electrode.
Abstract:
A field emission device includes; a substrate including at least one groove, at least one metal electrode disposed respectively in the at least one groove, and carbon nanotube (“CNT”) emitters disposed respectively on the at least one metal electrode, wherein each of the CNT emitters includes a composite of Sn and CNTs.
Abstract:
An electron emission source includes nano-sized acicular materials and a cracked portion formed in at least one portion of the electron emission source. The acicular materials are exposed between inner walls of the cracked portion. A method for preparing the electron emission source, a field emission device including the electron emission source, and a composition for forming the electron emission source are also provided in the present invention.
Abstract:
Afield emission device includes; a substrate, a plurality of cathode electrodes disposed on the substrate, and a plurality of fiber emitters respectively disposed on the plurality of cathode electrodes and each of the plurality of fiber emitters including; at least one conductive fiber and a plurality of carbon nanotubes disposed on surfaces of the at least one conductive fiber.