公开(公告)号：US5410696A

公开(公告)日：1995-04-25

申请号：US32066

申请日：1993-03-16

Applicant: Mitsuho Seki ,  Mitsuji Ikeda ,  Yoshikazu Kiyoshige

Inventor： Mitsuho Seki ,  Mitsuji Ikeda ,  Yoshikazu Kiyoshige

IPC: G06F15/16 ,  G06F9/44 ,  G06F9/50 ,  G06F15/177 ,  G06F9/38

CPC classification number: G06F8/45

Abstract: In order to process a program by parallel processing using a plurality of processors, the program is divided into a plurality of partial programs. Then one or more expressions are derived, the or each expression expressing a relationship between the partial programs, such as which can be executed independently and which require the execution of another partial program. The expression or expressions can then be investigated to determine which has a desired characteristic, such as a characteristic corresponding to uniform loading of the processors. The expression can also be varied, to give more options for the selection of the expression with the desired characteristic. Then the partial programs can be distributed to the processors on the basis of the relationship corresponding to the expression which has the desired characteristic. Furthermore, when the partial programs are being executed by the processors, any processor which has completed its processing broadcasts a signal to the other processors, which may then re-assign one or more of their partial programs. In this way, parallel processing can be carried out quickly, with substantially uniform loading of the processors.

Abstract translation: 为了通过使用多个处理器的并行处理来处理程序，程序被分成多个部分程序。 然后导出一个或多个表达式，该表达式或每个表达式表示部分程序之间的关系，例如哪些可以独立执行，哪些需要执行另一个部分程序。 然后可以调查表达式或表达式以确定哪个具有期望的特性，例如对应于处理器的均匀加载的特性。 该表达式也可以变化，以给出具有所需特征的表达选择的更多选择。 然后，可以基于与具有期望特性的表达式对应的关系将部分程序分配给处理器。 此外，当处理器执行部分程序时，已经完成其处理的任何处理器向其他处理器广播信号，然后可以重新分配其部分程序中的一个或多个。 以这种方式，可以快速地执行并行处理，同时处理器的加载基本均匀。

公开(公告)号：US5136680A

公开(公告)日：1992-08-04

申请号：US719050

申请日：1991-06-21

Applicant: Shoji Seike ,  Koichi Mori ,  Mitsuji Ikeda ,  Masayuki Nozaki ,  Hisakazu Okajima ,  Hiroyuki Katsukawa ,  Kazumi Nakanishi ,  Kenji Doi

Inventor： Shoji Seike ,  Koichi Mori ,  Mitsuji Ikeda ,  Masayuki Nozaki ,  Hisakazu Okajima ,  Hiroyuki Katsukawa ,  Kazumi Nakanishi ,  Kenji Doi

IPC: G02B6/44 ,  H01B17/00

CPC classification number: G02B6/4417 ,  G02B6/442 ,  G02B6/4471 ,  H01B17/005

Abstract: An excellent optical fiber built-in type composite insulator including at least two insulator bodies each having a penetration bore, at least one optical fiber inserted in the penetration bores, and sealing structures for the penetration bores of the insulator bodies and for a joining layer of opposing end surfaces of adjacent insulator bodies, is provided, which effectively prevents leakage of inner silicone grease, bending and breakage of the optical fiber, leakage of electric current along the penetration bores, short circuited trouble, and destruction of the insulator bodies, improves joining strength of the opposing end surfaces of the insulator bodies, and maintains the joining strength for a long period, affords a change of numbers of the insulator bodies, and facilitates the production. A method of producing such composite insulator is also provided.

公开(公告)号：US10535129B2

公开(公告)日：2020-01-14

申请号：US13981963

申请日：2011-12-07

Applicant: Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

Inventor： Masahiro Kitazawa ,  Mitsuji Ikeda ,  Yuichi Abe ,  Junichi Taguchi ,  Wataru Nagatomo

IPC: G06T7/00

Abstract: It is an object of the present invention to provide a semiconductor inspection apparatus capable of well carrying out position alignment and correctly determining whether the position alignment has been carried out successfully or has ended in a failure without operator interventions even if an inspected image is an image having few characteristics as is the case with a repetitive pattern or the inspected image is an image having a complicated shape.The semiconductor inspection apparatus includes means for imaging a shape on a wafer or on an exposure mask; means for storing an image inspected by the imaging means; means for storing design data of the semiconductor circuit corresponding to a position on the wafer or on the exposure mask which are to be imaged by the imaging means; means for storing a design-data image obtained as a result of converting the design data into an image; means for generating a design-data ROI image by converting an interest drawing region found from a relative crude-density relation of a shape included in the design-data image into an image; and a position alignment section configured to carry out position alignment on the inspected image and the design-data image. The semiconductor inspection apparatus makes use of the design-data ROI image in order to identify a position at which the inspected image and the design-data image match each other or compute the degree of coincidence.

公开(公告)号：US09141879B2

公开(公告)日：2015-09-22

申请号：US13807664

申请日：2011-05-30

Applicant: Hiroyuki Ushiba ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda

Inventor： Hiroyuki Ushiba ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda

IPC: G06K9/00 ,  G06K9/62 ,  G01B15/00 ,  H01J37/28 ,  G06T7/00 ,  G06K9/32 ,  G06K9/74

CPC classification number: G06K9/6201 ,  G01B15/00 ,  G06K9/3241 ,  G06K9/6223 ,  G06K9/74 ,  G06T7/001 ,  G06T7/337 ,  G06T2207/10061 ,  G06T2207/20036 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2817

Abstract: In order to provide a computer program, an image processing device, and a pattern matching method that perform pattern matching at a high level of accuracy without relying on edge deformation, contrast fluctuations, etc., in one embodiment, the disclosed pattern matching method and device perform pattern matching over an image using a template produced on the basis of the below mentioned design data. The pattern matching method and device determine the characteristic quantities of the image for an inner region and/or an outer region that are divided by a line that defines the contour of a pattern, and determine positions at which said characteristic quantities satisfy predetermined conditions to be matching positions, matching position candidates, or erroneous matching positions.

Abstract translation: 为了提供一个计算机程序，图像处理装置和模式匹配方法，其在一个实施例中，不依赖于边缘变形，对比度波动等，以高精度执行模式匹配，所公开的模式匹配方法和 设备使用基于下述设计数据生成的模板对图像执行模式匹配。 图案匹配方法和装置确定由限定图案轮廓的线划分的内部区域和/或外部区域的图像的特征量，并且确定所述特征量满足预定条件的位置 匹配位置，匹配位置候选或错误匹配位置。

公开(公告)号：US20130216141A1

公开(公告)日：2013-08-22

申请号：US13807664

申请日：2011-05-30

Applicant: Hiroyuki Ushiba ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda

Inventor： Hiroyuki Ushiba ,  Yasutaka Toyoda ,  Yuichi Abe ,  Mitsuji Ikeda

IPC: G06K9/62

CPC classification number: G06K9/6201 ,  G01B15/00 ,  G06K9/3241 ,  G06K9/6223 ,  G06K9/74 ,  G06T7/001 ,  G06T7/337 ,  G06T2207/10061 ,  G06T2207/20036 ,  G06T2207/30148 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2817

Abstract: In order to provide a computer program, an image processing device, and a pattern matching method that perform pattern matching at a high level of accuracy without relying on edge deformation, contrast fluctuations, etc., in one embodiment, the disclosed pattern matching method and device perform pattern matching over an image using a template produced on the basis of the below mentioned design data. The pattern matching method and device determine the characteristic quantities of the image for an inner region and/or an outer region that are divided by a line that defines the contour of a pattern, and determine positions at which said characteristic quantities satisfy predetermined conditions to be matching positions, matching position candidates, or erroneous matching positions.

Abstract translation: 为了提供一个计算机程序，图像处理装置和模式匹配方法，其在一个实施例中，不依赖于边缘变形，对比度波动等，以高精度执行模式匹配，所公开的模式匹配方法和 设备使用基于下述设计数据生成的模板对图像执行模式匹配。 图案匹配方法和装置确定由限定图案轮廓的线划分的内部区域和/或外部区域的图像的特征量，并且确定所述特征量满足预定条件的位置 匹配位置，匹配位置候选或错误匹配位置。

公开(公告)号：US20120182415A1

公开(公告)日：2012-07-19

申请号：US13499983

申请日：2010-10-04

Applicant: Yasutaka Toyoda ,  Mitsuji Ikeda ,  Yuichi Abe

Inventor： Yasutaka Toyoda ,  Mitsuji Ikeda ,  Yuichi Abe

IPC: H04N7/18

CPC classification number: G01N21/95607 ,  G06T7/001 ,  G06T2207/30148

Abstract: Disclosed is a pattern matching method whereby a testing point can be searched accurately while simplifying the work of presetting. An image region of a part of a captured image is extracted, and a divided image of the image region is set as a template image. A pattern matching is performed by rotating the template image. Moreover, the pattern matching determines whether a point-symmetric pattern exists inside the image region.

Abstract translation: 公开了一种模式匹配方法，其中可以精确地搜索测试点，同时简化预设的工作。 提取拍摄图像的一部分的图像区域，并将图像区域的分割图像设置为模板图像。 通过旋转模板图像来执行模式匹配。 此外，图案匹配确定图像区域内是否存在点对称图案。

公开(公告)号：US20110129140A1

公开(公告)日：2011-06-02

申请号：US13055870

申请日：2009-06-29

Applicant: Masahiro Kitazawa ,  Mitsuji Ikeda

Inventor： Masahiro Kitazawa ,  Mitsuji Ikeda

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G06T2207/30148

Abstract: Provided is a defect review device enabling identification of a defect and a defect coordinate 33. The defect review device comprises a distance inspection image generation unit 5 for generating, on the basis of an inspection image 28, a distance inspection image 29 in which distance values between pixels constituting the contour of an actual pattern 28a and pixels lying in a direction normal to the contour are set in respect of the individual pixels, a distance design image generation unit 6 for generating a distance design image 27 in which values between pixels constituting the contour of a design pattern 26a corresponding to the actual pattern 28a and pixels lying in a direction normal to the contour are set in respect of the individual pixels, a distance difference image generation unit 9 for generating a distance difference image 30 in which differences in distance value between the distance design image 27 and the distance inspection image 29 are set in respect of the individual pixels, and a defect coordinate identifying unit 10 for identifying, on the basis of the distance difference image 30, a defect coordinate 33 at which a defect 28b takes place.

Abstract translation: 提供了能够识别缺陷和缺陷坐标33的缺陷检查装置。缺陷检查装置包括距离检查图像生成单元5，用于基于检查图像28生成距离检查图像29，其中距离值 构成实际图案28a的轮廓的像素和与轮廓垂直的方向的像素相对于各个像素设置距离设计图像生成单元6，用于生成距离设计图像27，其中构成 相对于各个像素设置与实际图案28a对应的设计图案26a的轮廓和垂直于轮廓的方向的像素，距离差图像生成单元9，用于生成距离差图像30，其中距离差 距离设计图像27和距离检查图像29之间的值相对于个体被设定 像素，以及缺陷坐标识别单元10，用于基于距离差图像30识别发生缺陷28b的缺陷坐标33。

公开(公告)号：US20090087103A1

公开(公告)日：2009-04-02

申请号：US12194763

申请日：2008-08-20

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Sato ,  Yasutaka Toyoda

IPC: G06K9/62

CPC classification number: G06K9/6203

Abstract: There is provided an inspection apparatus and method that output an accurate matching position even if a search image contains a pattern similar to a template. An image search unit includes a relative position comparing unit which compares the relative position of a template in a template selection image with the relative position of a location currently being searched for in a search image and outputs the amount of position mismatch between the relative positions. A matching position determining unit determines a matching position by taking into consideration the amount of position mismatch in addition to search image similarity distribution information.

Abstract translation: 提供了即使搜索图像包含类似于模板的模式的输出精确匹配位置的检查装置和方法。 图像搜索单元包括相对位置比较单元，其将模板选择图像中的模板的相对位置与搜索图像中当前正在搜索的位置的相对位置进行比较，并输出相对位置之间的位置不匹配量。 匹配位置确定单元除了搜索图像相似度分布信息之外还考虑位置偏差量来确定匹配位置。

公开(公告)号：US20080205769A1

公开(公告)日：2008-08-28

申请号：US12010763

申请日：2008-01-29

Applicant: Junichi Taguchi ,  Mitsuji Ikeda

Inventor： Junichi Taguchi ,  Mitsuji Ikeda

IPC: G06K9/62

CPC classification number: G06K9/6202 ,  G06K9/685

Abstract: A similar image having a high correlation is selected through autocorrelation performs a template original image selected from an image photographed for a template, and a difference image between the similar image and template original image is formed. An image extracting a real difference is formed by removing noises and edges in unstable areas from the difference image. This image is added to the template original image to form a modified template. Template matching is performed by using the modified template as a template. The image extracting the real reference and added to the modified template functions to add an evaluation penalty to the similar image during matching evaluation to lower an evaluation value of the similar image so that a probability of erroneously recognizing the similar image as the image to be detected.

Abstract translation: 通过自相关选择具有高相关性的类似图像，执行从为模板拍摄的图像中选择的模板原始图像，并且形成相似图像和模板原始图像之间的差分图像。 通过从不同图像中去除不稳定区域中的噪声和边缘，形成提取真实差异的图像。 该图像被添加到模板原始图像以形成修改的模板。 通过使用修改的模板作为模板来执行模板匹配。 提取真实参考并添加到修改的模板的图像功能，以在匹配评估期间向相似图像添加评估代价以降低相似图像的评估值，使得错误地识别与要检测的图像相似的图像的概率 。

公开(公告)号：US20080069453A1

公开(公告)日：2008-03-20

申请号：US11836452

申请日：2007-08-09

Applicant: Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

Inventor： Yuichi Abe ,  Mitsuji Ikeda ,  Yoshimichi Satou ,  Yasutaka Toyoda

IPC: G06K9/62

CPC classification number: G06K9/6203 ,  G06K2209/19 ,  G06T7/32 ,  G06T2207/10056 ,  G06T2207/30148

Abstract: An inspection apparatus performing template matching of a search image capable of outputting a correct matching position even if a pattern similar to a template exists in the search image is provided.The inspection apparatus includes a template cutout means for cutting out a template from a template selection image, a marginal similarity calculation means for calculating marginal similarity distribution information, which is a similarity distribution of the template selection image to the template, a search image similarity calculation part for calculating search image similarity distribution information, which is a similarity distribution of the search image to the template, a similarity distribution-to-similarity distribution similarity calculation means for calculating similarity distribution-to-similarity distribution similarity information between the marginal similarity distribution information and the search image similarity distribution information, and a matching position determination part for determining a matching position based on the similarity distribution-to-similarity distribution similarity.

Abstract translation: 提供了即使在搜索图像中存在类似于模板的图案，也能够执行能够输出正确的匹配位置的搜索图像的模板匹配的检查装置。 所述检查装置包括用于从模板选择图像切割模板的模板切除装置，用于计算作为模板选择图像与模板的相似度分布的边缘相似度分布信息的边缘相似度计算装置，搜索图像相似度计算 用于计算搜索图像与模板的相似度分布的搜索图像相似度分布信息的部分，用于计算边缘相似度分布信息之间的相似度分布 - 相似度分布相似度信息的相似度分布 - 相似度分布相似度计算装置 以及搜索图像相似度分布信息，以及匹配位置确定部分，用于基于相似度分布与相似度分布相似度来确定匹配位置。