Virtual sensor based monitoring and fault detection/classification
system and method for semiconductor processing equipment
    31.
    发明授权
    Virtual sensor based monitoring and fault detection/classification system and method for semiconductor processing equipment 失效
    基于虚拟传感器的监控和故障检测/分类系统和半导体处理设备的方法

    公开(公告)号:US5864773A

    公开(公告)日:1999-01-26

    申请号:US743113

    申请日:1996-11-01

    IPC分类号: H01L21/66 G01B7/00

    CPC分类号: H01L22/20

    摘要: A virtual sensor based monitoring and fault detection/classification system (10) for semiconductor processing equipment (12) is provided. A plurality of equipment sensors (14) are each operable to measure a process condition and provide a signal representing the measured process condition. A plurality of filtering process units (16) are each operable to receive at least one signal from the plurality of equipment sensors (14) and to reduce data represented by the at least one signal and provide filtered data. A plurality of virtual sensors (24) are each operable to receive the filtered data. The plurality of virtual sensors (24) model states of the processing equipment (12) and a work piece in the processing equipment (12). Each virtual sensor is operable to provide an output signal representing an estimated value for the modeled state. A rule based logic system (26) is operable to receive and process the signals provided by the plurality of equipment sensors (14) and the output signals provided by the virtual sensors (24) to monitor processing equipment (12) or to detect and classify faults within the processing equipment (12).

    摘要翻译: 提供了一种用于半导体处理设备(12)的基于虚拟传感器的监视和故障检测/分类系统(10)。 多个设备传感器(14)各自可操作以测量处理条件并提供表示所测量的处理条件的信号。 多个滤波处理单元(16)各自可操作以从多个设备传感器(14)接收至少一个信号,并且减少由至少一个信号表示的数据,并提供滤波数据。 多个虚拟传感器(24)各自可操作以接收经滤波的数据。 多个虚拟传感器(24)对处理设备(12)的状态和处理设备(12)中的工件进行建模。 每个虚拟传感器可操作以提供表示建模状态的估计值的输出信号。 基于规则的逻辑系统(26)可操作以接收和处理由多个设备传感器(14)提供的信号和由虚拟传感器(24)提供的输出信号以监视处理设备(12)或检测和分类 处理设备(12)内的故障。

    Security closure
    32.
    发明授权
    Security closure 失效
    安全关闭

    公开(公告)号:US5832671A

    公开(公告)日:1998-11-10

    申请号:US603314

    申请日:1996-02-20

    申请人: David A. White

    发明人: David A. White

    CPC分类号: E06B9/02 E06B9/04

    摘要: A security closure for covering an opening, e.g., a window, in a building includes a panel having a circumferential sidewall. A support member is securable to extend across the opening in fixed relation thereto, the support member being releasably securable to the interior of the panel away from one edge thereof by a releasable securing device. The support member is fixed at the one edge by a hinged fixing structure which allows the panel to pivot substantially along the one edge away from the opening when the support member is released from the releasable securing device. As a result, an emergency release of the panel can be accomplished.

    摘要翻译: 用于覆盖建筑物中的开口(例如窗户)的安全闭合件包括具有圆周侧壁的面板。 支撑构件可固定以能够以固定关系延伸穿过开口,支撑构件通过可释放的固定装置可脱离地固定到面板内部的一个边缘。 支撑构件通过铰接的固定结构固定在一个边缘处,当铰链固定结构从支撑构件从可释放的固定装置释放时,允许面板沿着一个边缘远离开口枢转。 结果,可以实现面板的紧急释放。

    Pipette device
    33.
    发明授权
    Pipette device 失效
    移液器

    公开(公告)号:US5156811A

    公开(公告)日:1992-10-20

    申请号:US734533

    申请日:1991-07-23

    申请人: David A. White

    发明人: David A. White

    IPC分类号: B01D39/16 B01L3/02

    摘要: A hollow pipette member open at its opposite ends contains a plug of porous, hydrophobic material force fitted between its ends to define a liquid sample chamber between the plug and one end of the tube. At least a major portion of the pores of the plug material are impregnated with particles of a liquid scavenging material which are of smaller size than the pores so as to allow gas to be drawn through the plug. The liquid sample chamber is of predetermined volume greater than the volume of liquid drawn by a suitable suction device attached to the opposite end of the tube, so that an air gap will remain between the drawn sample and the plug. Any liquid droplets vaporized and drawn into the plug member will contact the hydrophilic particles, which will expand to block passage through those pores while still permitting gas flow through other pores. If the liquid sample itself contacts the plug, enough particles will expand to completely block gas or liquid flow through the plug.

    摘要翻译: 在其相对端开放的中空移液管构件包含多孔的疏水材料力塞,该栓塞安装在其端部之间,以在塞子和管的一端之间限定液体样品室。 插塞材料的孔的至少大部分用液体清除材料的颗粒浸渍,其具有比孔小的尺寸,以允许气体通过塞子被吸入。 液体样品室的预定体积大于由连接到管的相对端的合适的抽吸装置抽取的液体的体积,使得空气间隙将保留在抽出的样品和插塞之间。 蒸发并吸入插塞部件中的任何液滴将接触亲水性颗粒,该颗粒将膨胀以阻止通过那些孔隙,同时仍允许气体流过其它孔。 如果液体样品本身接触插塞,则足够的颗粒将膨胀以完全阻止气体或液体流过插塞。

    Ion exchange using hydrous uranium dioxide
    34.
    发明授权
    Ion exchange using hydrous uranium dioxide 失效
    使用含水二氧化铀进行离子交换

    公开(公告)号:US4959181A

    公开(公告)日:1990-09-25

    申请号:US326487

    申请日:1989-03-20

    CPC分类号: G21F9/12 B01J39/02 B01J39/10

    摘要: Ion exchange performed by contacting a solution containing ions to be absorbed with a hydrous oxide of uranium in a suitable form. The hydrous oxide may be uranium dioxide or uranium hydroxide, and may be prepared by reducing a uranium species, precipitating the reduced species, and drying the precipitate to give the required hydrous oxide.

    摘要翻译: 通过使含有待吸收的离子的溶液以适当形式的铀水合氧化物接触进行离子交换。 水合氧化物可以是二氧化铀或氢氧化铀,并且可以通过还原铀物质,沉淀还原物质和干燥沉淀物来制备所需的水合氧化物。

    Seat with three point user restraint
    35.
    发明授权
    Seat with three point user restraint 失效
    座位与三点用户约束

    公开(公告)号:US4889389A

    公开(公告)日:1989-12-26

    申请号:US291384

    申请日:1988-12-23

    IPC分类号: B60R22/26

    CPC分类号: B60N2/688 B60N2/163 B60R22/26

    摘要: A seat with integral three point user restraint which has a seat and a three point restraint system for restraining the user to the seat, the three point restraint system is mounted entirely and directly to the seat, the seat and the three point restraint system together form a self contained integral unit so that the seat is adaptable to different installations without relocating the three point restraint system.

    摘要翻译: 具有整体三点用户约束的座椅,其具有用于限制使用者到座椅的座椅和三点约束系统,三点约束系统完全并且直接安装到座椅,座椅和三点约束系统一起形成 一个自包含的整体单元,使得座椅适应不同的安装,而不需要重新定位三点约束系统。

    Fluid transfer device
    36.
    发明授权
    Fluid transfer device 失效
    流体输送装置

    公开(公告)号:US4808381A

    公开(公告)日:1989-02-28

    申请号:US519099

    申请日:1983-08-01

    摘要: A fluid transfer device having a cannula for piercing a stopper and a surrounding shroud to guide the cannula during piercing. The cannula is positioned parallel to and off-center from the shroud axis in a position opposite to the direction of the taper of the point of the cannula to compensate for the sideways movement created during the piercing of the closure and to cause the cannula tip to be located approximately on the receptacle axis after piercing.

    摘要翻译: 流体输送装置具有用于刺穿塞子和周围护罩的插管,以在穿刺期间引导套管。 套管与护套轴线平行并偏离中心,位于与套管点的锥形方向相反的位置,以补偿在穿孔期间产生的侧向运动并使插管尖端 在穿刺后大致位于容器轴上。

    Vertical filing system
    38.
    发明授权
    Vertical filing system 失效
    垂直归档系统

    公开(公告)号:US4368935A

    公开(公告)日:1983-01-18

    申请号:US187946

    申请日:1980-09-16

    申请人: David A. White

    发明人: David A. White

    IPC分类号: B42F15/06 A47B63/00

    CPC分类号: B42F15/063

    摘要: A vertical filing system is provided wherein documents are filed in the spaces between a plurality of filing bars contained in a cabinet by hanging the documents on pins extending through the bars and outwardly into the spaces. In the closed, filing position, the pins extending from any one bar extend into the space between bars and overlap the pins extending into the space from an adjacent bar. In the open position, any two adjacent filing bars are separated such that the oppositely coacting pins on adjacent bars do not overlap and documents can be either inserted and filed or removed therefrom. In a preferred embodiment, openings are provided in each filing bar through which pins from adjacent bars can extend, the preferred pin-opening sequence on the filing bars being pin-opening-opening, pin-opening-opening, and so on.

    摘要翻译: 提供了一种垂直文件系统,其中文件通过将文件悬挂在延伸穿过杆的销上并向外进入空间中而放置在容纳在机柜中的多个文件栏之间的空间中。 在封闭的封闭位置,从任何一个杆延伸的销延伸到杆之间的空间中,并且与从相邻的杆延伸到空间中的销重叠。 在打开位置,任何两个相邻的压条被分离,使得相邻杆上的相反的联合销不重叠,并且文档可以被插入和移出。 在一个优选实施例中,在每个锉条中设置有开口,通过该开口可以从相邻的杆延伸出销,锉条上的优选的针开opening顺序为销开,销开opening等。

    Short detection in battery cells
    39.
    发明授权
    Short detection in battery cells 有权
    电池短路检测

    公开(公告)号:US09097774B2

    公开(公告)日:2015-08-04

    申请号:US13182998

    申请日:2011-07-14

    摘要: Internal shorts and other failures in lithium-ion battery cells may be detected during balancing of the battery cells. A counter may be used to detect when a battery cell is behaving differently than other battery cells by balancing more or less frequently. The counter may increment each time a battery cell is balanced to the other battery cells. A misbehaving battery cell may be flagged, when the counter exceeds a threshold value, for safety checks before an overheating event occurs. This misbehaving battery cell may be faulty due to an internal short. If the faulty battery cell is not corrected by replacement with a different battery cell or corrected by a user resetting the counter, the misbehaving battery cell may be disconnected to prevent the overheating event.

    摘要翻译: 在电池单元的平衡期间,可能会检测到锂离子电池单元的内部短路和其他故障。 可以使用计数器来检测电池单元的运行方式与其他电池单元的运行方式不同或多或少地平衡。 每当电池单元与其他电池单元平衡时,计数器可能会增加。 当计数器超过阈值时,可能会发生行为不当的电池单元,以便在发生过热事件之前进行安全检查。 由于内部短路,这种不正常的电池可能有故障。 如果故障的电池单元没有通过用不同的电池单元更换或由用户重新设置计数器来校正,则可能断开不正常的电池单元以防止过热事件。