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公开(公告)号:US20150184850A1
公开(公告)日:2015-07-02
申请号:US14415929
申请日:2013-07-17
Applicant: Edwards Limited
Inventor: Andrew James Seeley
CPC classification number: F23D14/14 , F23D14/16 , F23D2900/14123 , F23G7/065
Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; at least one effluent nozzle for ejecting the effluent gas stream into the combustion chamber; and a perforated liner proximate to the combustion surface. Providing a perforated liner controls the combustion materials passing into the combustion chamber to treat the effluent gas stream and also provides a surface onto which residual combustion deposits may be received. Accordingly, the liner can both improve the efficiency of the treatment of the effluent gas stream and can act as a sacrificial surface which may be replaced or cleaned either in accordance with a maintenance regime or when the performance of the radiant burner reduces.
Abstract translation: 公开了一种辐射燃烧器和方法。 辐射燃烧器用于处理来自制造工艺工具的流出气流,并包括:具有多孔套筒的燃烧室,燃烧材料通过该多孔套筒通过燃烧附近的燃烧表面; 至少一个用于将废气流喷射到燃烧室中的流出喷嘴; 和靠近燃烧表面的多孔衬垫。 提供穿孔衬垫控制燃烧材料进入燃烧室以处理废气流并且还提供可以接收残留燃烧沉积物的表面。 因此,内衬可以提高流出物流的处理效率,并且可以作为牺牲表面,其可以根据维护方式或辐射式燃烧器的性能降低而被替换或清洁。
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公开(公告)号:US12189362B2
公开(公告)日:2025-01-07
申请号:US17055391
申请日:2019-05-13
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Gary Peter Knight , Duncan Michael Price , Mayank Verma
IPC: G05B19/4099 , B33Y50/00 , F23D14/18 , G06F30/00 , G06F30/23 , G06F119/18 , G06T17/20 , F23G7/06 , G06F113/10
Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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公开(公告)号:US12158266B2
公开(公告)日:2024-12-03
申请号:US17296101
申请日:2019-11-21
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Fraser Gray
Abstract: An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.
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公开(公告)号:US20240307891A1
公开(公告)日:2024-09-19
申请号:US18578387
申请日:2022-07-12
Applicant: Edwards Limited
Inventor: James Hann , Andrew James Seeley
Abstract: A wet electrostatic precipitator includes an ancillary component cleaning device with a cleaning assembly moveably supportable within an electrostatic precipitator; the cleaning assembly having a scraper configurable to abut an ancillary component of the electrostatic precipitator, such that movement of the cleaning assembly within the electrostatic precipitator causes movement of the scraper with respect to the ancillary component and wherein the ancillary component includes a component of a separation assembly provided in the wet electrostatic precipitator to maintain electrical isolation between the discharge and collection electrodes.
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公开(公告)号:US20230001478A1
公开(公告)日:2023-01-05
申请号:US17779361
申请日:2020-11-24
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Duncan Michael Price
Abstract: A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.
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公开(公告)号:US20220403942A1
公开(公告)日:2022-12-22
申请号:US17776418
申请日:2020-11-12
Applicant: Edwards Limited
Inventor: Andrew James Seeley
Abstract: A valve includes a housing with at least one inlet and at least one outlet; a valve member located within the housing and being moveable between different positions for controlling, in use, the flow of a fluid from an inlet to an outlet of the valve; wherein the valve further includes at least two spaced-apart valve seats in which the valve member is seated so as to form a cavity bounded by the valve seats, an exterior surface of the valve member and an interior surface of the housing; a first conduit extending between the exterior of the housing and the cavity; and a second conduit extending between the cavity and a bore of the valve member, through which conduits, in use, a purge gas can be introduced into the cavity and bore.
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公开(公告)号:US20220234056A1
公开(公告)日:2022-07-28
申请号:US17617473
申请日:2020-06-05
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Ian David Stones , Duncan Michael Price
Abstract: An inlet assembly for an abatement apparatus includes an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the abatement apparatus.
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公开(公告)号:US20220010960A1
公开(公告)日:2022-01-13
申请号:US17296101
申请日:2019-11-21
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Fraser Gray
Abstract: An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.
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公开(公告)号:US20210223755A1
公开(公告)日:2021-07-22
申请号:US17055391
申请日:2019-05-13
Applicant: Edwards Limited
Inventor: Andrew James Seeley , Gary Peter Knight , Duncan Michael Price , Mayank Verma
IPC: G05B19/4099 , B33Y50/00
Abstract: A method for fabricating a component of an abatement apparatus is disclosed. The method comprises: meshing a 3D model representation of a component defining a reaction chamber of an abatement apparatus based on specified component characteristics to define an optimised finite element representation of the component; and fabricating the optimised finite element representation. In this way, a 3D model of a component of an abatement apparatus can be generated from which its performance can be modelled. Particular characteristics of the component may be defined which affect the operation of the abatement apparatus. Those characteristics may then be used to generate the optimized finite element representation of the component which has those characteristics using meshing (it will be appreciated that meshing is the operation of representing a geometric object as a set of finite elements). The optimized finite element representation may then fabricated, reliably producing a component having the required characteristics.
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公开(公告)号:US10816194B2
公开(公告)日:2020-10-27
申请号:US15563294
申请日:2016-03-23
Applicant: Edwards Limited
Inventor: Andrew James Seeley
Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, is used to raise the temperature within the treatment chamber in order to treat the effluent gas stream.
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