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公开(公告)号:US11812670B2
公开(公告)日:2023-11-07
申请号:US18052307
申请日:2022-11-03
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H10N50/80 , H10B51/30 , H10B61/00 , H10B63/00 , H10N50/01 , H10N50/10 , H10N50/85 , H10N70/00 , H10N70/20
CPC classification number: H10N50/80 , H10B51/30 , H10B61/00 , H10B63/00 , H10N50/01 , H10N50/10 , H10N50/85 , H10N70/011 , H10N70/231 , H10N70/826 , H10N70/841 , H10N70/881
Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
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公开(公告)号:US20230078730A1
公开(公告)日:2023-03-16
申请号:US18052307
申请日:2022-11-03
Applicant: GlobalFoundries U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
IPC: H01L43/02 , H01L27/24 , H01L27/22 , H01L27/1159 , H01L43/08 , H01L45/00 , H01L43/12 , H01L43/10
Abstract: An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
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公开(公告)号:US11502200B2
公开(公告)日:2022-11-15
申请号:US16906490
申请日:2020-06-19
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Sipeng Gu , Judson R. Holt , Haiting Wang , Yanping Shen
IPC: H01L29/78 , H01L29/08 , H01L29/06 , H01L29/66 , H01L21/8234
Abstract: An illustrative transistor device disclosed herein includes a gate structure positioned around a portion of a fin defined in a semiconductor substrate and epitaxial semiconductor material positioned on the fin in a source/drain region of the transistor device, wherein the epitaxial semiconductor material has a plurality of lower angled surfaces. In this example, the device further includes a first sidewall spacer positioned adjacent the gate structure, wherein a first portion of the first sidewall spacer is also positioned on and in physical contact with at least a portion of the lower angled surfaces of the epitaxial semiconductor material.
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公开(公告)号:US20210320207A1
公开(公告)日:2021-10-14
申请号:US16843421
申请日:2020-04-08
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Haiting Wang , Judson R. Holt , Sipeng Gu
Abstract: A structure for a field-effect transistor includes a semiconductor body, a first gate structure extending over the semiconductor body, and a second gate structure extending over the semiconductor body. A recess is in the semiconductor body between the first and second gate structures. A three part source/drain region includes a pair of spaced semiconductor spacers in the recess; a first semiconductor layer laterally between the pair of semiconductor spacers; and a second semiconductor layer over the first semiconductor layer. The pair of spaced semiconductor spacers, the first semiconductor layer and the second semiconductor layer may all have different dopant concentrations.
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公开(公告)号:US20210313321A1
公开(公告)日:2021-10-07
申请号:US16842075
申请日:2020-04-07
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Haiting Wang , Sipeng Gu , Shesh Mani Pandey , Lixia Lei , Gregory Costrini
IPC: H01L27/088 , H01L29/06 , H01L29/78 , H01L27/092 , H01L21/8234
Abstract: One illustrative device disclosed herein includes at least one fin structure and an isolation structure comprising a stepped upper surface comprising a first region and a second region. The first region has a first upper surface and the second region has a second upper surface, wherein the first upper surface is positioned at a first level and the second upper surface is positioned at a second level and wherein the first level is below the second level. In this illustrative example, the device also includes a gate structure comprising a first portion and a second portion, wherein the first portion of the gate structure is positioned above the first upper surface of the isolation structure and above the at least one fin structure and wherein the second portion of the gate structure is positioned above the second upper surface of the isolation structure.
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公开(公告)号:US20210305495A1
公开(公告)日:2021-09-30
申请号:US16836434
申请日:2020-03-31
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Yanping Shen , Haiting Wang , Sipeng Gu
Abstract: One illustrative memory cell disclosed herein includes at least one layer of insulating material having a first opening and an internal sidewall spacer positioned within the first opening, wherein the internal sidewall spacer includes a spacer opening. The memory cell also includes a bottom electrode positioned within the spacer opening, a memory state material positioned above an upper surface of the bottom electrode and above an upper surface of the internal sidewall spacer, and a top electrode positioned above the memory state material.
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公开(公告)号:US11075298B2
公开(公告)日:2021-07-27
申请号:US16454238
申请日:2019-06-27
Applicant: GLOBALFOUNDRIES U.S. Inc.
Inventor: Jiehui Shu , Judson R. Holt , Sipeng Gu , Halting Wang
IPC: H01L29/78 , H01L29/06 , H01L29/41 , H01L29/66 , H01L29/417
Abstract: One illustrative integrated circuit product disclosed herein includes a gate structure positioned above a semiconductor substrate, a source region and a drain region, both of which include an epi semiconductor material, wherein at least a portion of the epi semiconductor material in the source and drain regions is positioned in the substrate. In this example, the IC product also includes an isolation structure positioned in the substrate between the source region and the drain region, wherein the isolation structure includes a channel-side edge and a drain-side edge, wherein the channel-side edge is positioned vertically below the gate structure and wherein a portion of the substrate laterally separates the isolation structure from the epi semiconductor material in the drain region.
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