FILTERING APPARATUS FOR FILTERING A FLUID
    33.
    发明申请
    FILTERING APPARATUS FOR FILTERING A FLUID 失效
    用于过滤流体的过滤设备

    公开(公告)号:US20110005341A1

    公开(公告)日:2011-01-13

    申请号:US12919509

    申请日:2009-03-05

    摘要: The present invention relates to a filtering apparatus (1) for filtering a fluid (3) comprising the filtering apparatus. The filtering apparatus comprises a filter element (2) for filtering the fluid (3) and an adhesive capillary structure (5) for generating capillary forces, wherein the adhesive capillary structure (5) is attached to the filter element (2) by using an adhesive property of the adhesive capillary structure (5). The adhesive capillary structure is preferentially made of a double-sided tape, which is adhesive on two sides. The filtering apparatus comprises further preferentially a filtering location (6), at which the filter element (2) is located, and a detection location (7), at which a property of the fluid (3) is detectable, wherein the capillary structure (5) is formed such that the filtered fluid is guided from the filtering location (6) to the detection location (7).

    摘要翻译: 本发明涉及一种用于过滤包括过滤装置的流体(3)的过滤装置(1)。 过滤装置包括用于过滤流体(3)的过滤元件(2)和用于产生毛细管力的粘性毛细管结构(5),其中粘合毛细管结构(5)通过使用 粘合毛细管结构的粘合性(5)。 粘性毛细管结构优选由两面粘合的双面胶制成。 过滤装置还优选地包括过滤元件(2)所在的过滤位置(6)和检测位置(7),在该位置处可检测流体(3)的性质,其中毛细管结构 5)被形成为使得过滤的流体从过滤位置(6)被引导到检测位置(7)。

    Generation of Channel Bit Data Files Corresponding to Angular Sections of Subtrack, for Recording Optical Metatrack Discs
    34.
    发明申请
    Generation of Channel Bit Data Files Corresponding to Angular Sections of Subtrack, for Recording Optical Metatrack Discs 审中-公开
    生成与子轨道的角度部分对应的通道位数据文件,用于记录光抄表光盘

    公开(公告)号:US20080074978A1

    公开(公告)日:2008-03-27

    申请号:US11576540

    申请日:2005-09-26

    IPC分类号: G11B5/09

    摘要: A method and device are disclosed for writing data marks representing a sequence of channel bit values to an optical disc or a master disc along either one or more concentric or spiral data tracks or along at least one concentric or spiral metatrack consisting of two or more parallel concentric or spiral sub-tracks. The method comprises the steps of—partitioning the sequence of channel bit values into an ordered set of two or more channel bit data files,—providing a periodic rotational motion and a radial motion of the disc and of at least one writing beam spot on the disc relative to each other so as to guide each writing beam spot along at least one data track or sub-track,—periodically providing an angular position signal derived from the rotational motion and indicative of the completion of one full turn of the rotational motion or a predetermined fraction thereof,—switching to a respective channel bit data file next in order with each angular position signal and writing a respective section of the sequence of channel bit values contained therein to the disc. According to the method of the invention, in the partitioning step the length of a respective section of the sequence of channel bit values to be contained by a respective channel bit data file is determined such that the complete respective section of the sequence of channel bit values contained by the channel bit data file is written to the disc between two consecutive angular position signals. The method provides an enhanced precision in the alignment of data marks, which is especially useful for synchronizing two-dimensional data patterns on a disc. Also disclosed are a method and a device for channel bit data file construction from a sequence of channel bit values, and a channel bit data memory.

    摘要翻译: 公开了一种方法和装置,用于将表示信号位值序列的数据标记沿着一个或多个同心或螺旋数据轨道或沿着至少一个由两个或更多个并行的同心或螺旋轨道组成的同心或螺旋行星轨迹写入光盘或母盘 同心或螺旋子轨道。 该方法包括以下步骤:将通道位值序列划分成两个或更多个通道位数据文件的有序集合, - 提供盘的周期性旋转运动和径向运动以及至少一个写入光束点 相对于彼此,以便沿着至少一个数据轨道或子轨道引导每个写入光束点,并且周期性地提供从旋转运动导出的角位置信号,并且指示完成旋转运动的一整圈,或者 其预定分数,根据每个角位置信号顺序切换到相应的通道位数据文件,并将其中包含的通道位值序列的相应部分写入盘中。 根据本发明的方法,在分割步骤中,确定要由各个通道位数据文件包含的通道位值序列的相应部分的长度,使得通道位值序列的完整的各个部分 由通道位数据文件包含的两个连续的角位置信号被写入盘中。 该方法提供了数据标记对准的增强精度,这对于同步光盘上的二维数据模式特别有用。 还公开了一种从通道位值序列构建通道位数据文件的方法和装置,以及通道位数据存储器。

    Method of measuring alignment of a substrate with respect to a reference alignment mark
    35.
    发明授权
    Method of measuring alignment of a substrate with respect to a reference alignment mark 有权
    测量衬底相对于参考对准标记的对准的方法

    公开(公告)号:US07095499B2

    公开(公告)日:2006-08-22

    申请号:US11152083

    申请日:2005-06-15

    IPC分类号: G01B11/00 G01B11/02

    摘要: For determining the alignment of a substrate with respect to a mask, a substrate alignment mark, having a periodic structure, and an additional alignment mark, having a periodic structure and provided in a resist layer on top of the substrate, are used. Upon illumination of these two marks, having a period which is considerably smaller than that of a reference mark, an interference pattern is generated, which has a period corresponding to that of the reference mark. By measuring the movement of the interference pattern with respect to the refernce mark, the much smaller mutual movement of the fine alignment marks can be measured. In this way, the resolution and accuracy of a conventional alignment device can be increased considerably.

    摘要翻译: 为了确定衬底相对于掩模的对准,使用具有周期性结构的衬底对准标记和具有周期性结构并且设置在衬底顶部的抗蚀剂层中的附加对准标记。 在照射这两个标记时,具有明显小于参考标记的周期的周期,产生具有对应于参考标记的周期的干涉图案。 通过测量干涉图案相对于参考标记的移动,可以测量精细对准标记的相对较小的相互移动。 以这种方式,可以显着提高常规对准装置的分辨率和精度。