摘要:
Provided is a method of manufacturing a liquid ejection head having an element which generates energy utilized for ejecting liquid and an electrode layer electrically connecting the element. The method includes the steps of: providing an electrode layer on a substrate, a width of one portion of the electrode layer being smaller than that of another portion near the one portion; providing a resist layer on a part of the electrode layer by a screen printing method or a dispense method in such a manner that an end of the resist layer is positioned at the one portion; providing another layer on another part excluding the part of the electrode layer by utilizing the resist layer as a mask; and removing the resist layer.
摘要:
Provided is a method for manufacturing an ejection element substrate which is provided with a flow-channel-forming member having an ejection orifice for ejecting a liquid and a liquid flow channel that is communicated with the ejection orifice, and a substrate having a supply port for supplying the liquid to the liquid flow channel, and further a filter structure formed in the bottom of the supply port, including: forming the supply port by forming a through-hole by etching the substrate from a second face of the substrate on the side opposite to a first face of the substrate, on which the flow-channel-forming member is disposed; providing a resinous protection film on the side face and the bottom of the supply port; and forming a minute opening in the resinous protection film in the bottom of the supply port by carrying out a laser processing from the side of the second face.
摘要:
A method of manufacturing a silicon substrate for a liquid discharge head with a liquid supply opening formed therein includes: forming one processed portion by laser processing on the substrate from one surface of the substrate; expanding the one processed portion to form a recess portion by performing laser processing at a position which overlaps a part of the one processed portion and does not overlap another part of the one processed portion; and etching from the one surface the substrate with the recess portion formed therein to form the liquid supply opening.
摘要:
A manufacturing method for manufacturing a liquid ejection element including a liquid flow path which is open at an ejection outlet for ejecting liquid, and an energy generating member for generating energy usable for ejecting the liquid from liquid flow path through the ejection outlet, the manufacturing method, includes a step of forming the energy generating member on a front side of a substrate; a step of forming a top plate member on the side having the energy generating member formed by the energy generating member forming step, wherein the top plate member is a member in which the liquid flow path and the ejection outlet are formed; and a step of thinning the substrate, having the top plate member formed thereon by the top plate member forming step, from a back side thereof.
摘要:
A manufacturing method, for a liquid discharge head that includes a silicon substrate in which a supply port is formed for supplying a liquid, includes the steps of providing the silicon substrate, a mask layer provided with an opening that corresponds to the supply port being provided on one face of the silicon substrate; forming a groove in the silicon substrate along the shape of the opening in the mask layer; removing, via sandblasting, silicon of the silicon substrate inward of the groove in the silicon substrate; and performing, from the one face, anisotropic etching of the silicon substrate that has been sandblasted, and forming the supply port.
摘要:
A liquid discharge head substrate includes an electrode layer, which is electrically connected to an element that generates energy used for discharging a liquid and provided in an inner side of a region between a first face and a third face of a substrate, and a member made of resin which covers the electrode is provided in the region.
摘要:
It is an objective of the present invention to provide an ink jet printing head substrate by which a high adhesion can be obtained between an electrode layer and a nozzle formation member and the corrosion or electrolysis for example of a electrode due to the contact between the electrode and ink can be reduced. To realize this, the present invention includes: an electrode layer for supplying power to a heat-generating portion that is provided on a substrate and that generates thermal energy for ejecting ink; and a resin layer provided on the electrode layer via a nickel-containing layer. The electrode layer includes precious metal as a main component. The nickel-containing layer consists of gold-nickel alloy containing nickel.
摘要:
A liquid ejection head includes a substrate including, at a surface thereof, an ejection energy generating means for generating ejection energy for ejecting liquid, a flow path forming member provided with an ejection outlet, the substrate further including a liquid supply opening, penetrating therethrough, for supplying the liquid to be ejected by the ejection energy to a flow path of the flow path forming member; a reinforcing member connected to a back side of the substrate; a first penetrating electrode, penetrating the substrate from a front side to the back side thereof, for supplying electric power to the ejection energy generating means; and a second penetrating electrode penetrating the reinforcing member from a front side to a back side thereof, the second penetrating electrode being electrically connected to the first penetrating electrode.
摘要:
A method of manufacturing a liquid ejection head and a liquid ejection head capable of preventing corrosion of electrodes are provided. A method of manufacturing a liquid ejection head includes: a steps of forming porous silicon areas in portions of a silicon substrate where the liquid paths are to be formed; a steps of forming in layers in the porous silicon areas a protective layer, a heating resistor layer, an electrode layer and a heat accumulation layer; a steps of forming ink ejection openings in the silicon substrate; and a steps of removing the porous silicon areas.
摘要:
A manufacturing method for manufacturing a liquid ejection element substrate for a liquid ejection element for ejecting liquid through an ejection outlet, the liquid ejection element substrate including an energy generating element for generating energy for ejecting the liquid and an electrode for supplying electric power to the energy generating element, includes a step of forming on a front side of the substrate an energy generating element and wiring electrically connecting with the energy generating element; a step of forming a recess in the form of a groove on the side of the substrate at a position where the wiring is formed; a step of forming an embedded electrode electrically connected with the wiring by filling electrode material in the recess; and a step of thinning the substrate at a back side after formation of the embedded electrode to expose the embedded electrode at the back side of the substrate, thus providing an electrode exposed at the back side of the substrate.