Process for the production of an ink jet head
    33.
    发明授权
    Process for the production of an ink jet head 失效
    用于生产喷墨头的方法

    公开(公告)号:US06461798B1

    公开(公告)日:2002-10-08

    申请号:US08626110

    申请日:1996-04-01

    IPC分类号: G03C500

    摘要: A process for producing an ink jet head having an ink pathway communicating with a discharging outlet and an energy generating element for generating energy utilized for discharging ink. The process includes providing a substrate with an energy generating element disposed thereon; forming on the substrate and energy generating element a photosensitive layer comprised of an ionizing radiation decomposable photosensitive resin containing a crosslinkable structural unit; subjecting the photosensitive resin layer to crosslinking treatment to produce a crosslinked photosensitive layer; forming a coating resin layer on the crosslinked photosensitive layer; hardening the coating resin layer; irradiating ionizing radiation to the crosslinked photosensitive layer through the hardened coating resin layer to decompose the crosslinked photosensitive layer corresponding to the ink pathway in communication with a discharging outlet; and eluting the irradiated crosslinked photosensitive layer to thereby form the ink pathway.

    摘要翻译: 一种用于制造喷墨头的方法,该喷墨头具有与排出口连通的油墨通道和用于产生用于排出油墨的能量的能量产生元件。 该方法包括提供其上布置有能量产生元件的基底; 在基板和能量产生元件上形成由包含可交联结构单元的电离辐射可分解光敏树脂组成的感光层; 对感光性树脂层进行交联处理,制成交联感光层; 在交联感光层上形成涂布树脂层; 硬化涂层树脂层; 通过硬化涂层树脂层将电离辐射照射到交联的感光层上,以分解与排出口连通的与油墨通路对应的交联感光层; 并洗脱经照射的交联感光层从而形成油墨通路。

    Ink jet recording head and a method for manufacturing such ink jet
recording head
    35.
    发明授权
    Ink jet recording head and a method for manufacturing such ink jet recording head 有权
    喷墨记录头和这种喷墨记录头的制造方法

    公开(公告)号:US6113222A

    公开(公告)日:2000-09-05

    申请号:US146338

    申请日:1998-09-02

    申请人: Norio Ohkuma

    发明人: Norio Ohkuma

    IPC分类号: B41J2/14 B41J2/16 B41J2/05

    摘要: An ink jet recording head is provided at least with ink discharge pressure generating elements, nozzles for discharging ink liquid droplets, and a through opening formed by means of Si anisotropic etching for the ink supply on the Si substrate having plane orientation. Then, the oxygen concentration of the Si substrate having the plane orientation is arranged to be 1.3E18 (atoms/cm.sup.3) or less. With the substrate thus arranged, it becomes possible to enhance the production yield when forming the ink supply ports by means of the Si anisotropic etching, and at the same time, it is possible to reduce the variation of the widths of the ink supply ports that may be caused by the Si anisotropic etching. Thus, the ink discharge frequency is enhanced.

    摘要翻译: 喷墨记录头至少设置有排墨压力产生元件,用于排出墨液滴的喷嘴,以及通过Si各向异性蚀刻形成的通孔,用于在具有<100平面取向的Si基板上供墨。 然后,具有<100>面取向的Si衬底的氧浓度设定为1.3E18(原子/ cm3)以下。 通过这样布置的基板,通过Si各向异性蚀刻形成供墨口时,可以提高生产成本,同时可以减少供墨口宽度的变化, 可能由Si各向异性蚀刻引起。 因此,喷墨频率提高。