公开(公告)号：US20110164473A1

公开(公告)日：2011-07-07

申请号：US13035408

申请日：2011-02-25

Applicant: Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

Inventor： Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

IPC: G04C11/02 ,  H01L41/053 ,  H03B1/00 ,  H01L41/08 ,  H01L41/22

CPC classification number: H03H9/1021 ,  H03H9/21 ,  Y10T29/42

Abstract: A piezoelectric vibrator includes a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel and is mounted on the base substrate within the cavity; and a getter material of a metallic film that is formed on the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated. A restriction portion, which is arranged in the cavity and restricts a scattering direction of the getter material evaporated by the heating to suppress a scattering amount scattering toward the vibration arm portion, is formed in the base substrate or the lid substrate.

Abstract translation: 一种压电振动器，包括：底座基板和盖基板，它们彼此接合并形成有腔; 压电振动片，其具有平行延伸并安装在所述空腔内的所述基底基板上的一对振动臂部; 以及金属膜的吸气材料，其形成在基底基板或盖基板上，以便布置在空腔内，并且通过加热来提高空腔内的真空度。 在基底或盖基板上形成有限制部，该限制部设置在空腔中，并且限制通过加热蒸发的吸气剂材料的散射方向，以抑制向振动臂部散射的散射量。

公开(公告)号：US20110140794A1

公开(公告)日：2011-06-16

申请号：US13035443

申请日：2011-02-25

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H03B5/32 ,  H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  H03H3/02 ,  H03H9/1014 ,  H03H2003/026 ,  Y10T29/42

Abstract: A piezoelectric vibrator including a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode; an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and a getter material formed of the metallic material that is formed on any of the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.

Abstract translation: 一种压电振动器，包括基底基板和盖基板，它们彼此接合并形成有腔; 具有平行延伸的一对振动臂部的压电振动片，使一对振动臂部振动的一对激励电极和与该一对激励电极电连接的安装电极，压电振动片为 通过安装电极安装在腔内的基底基板上; 绝缘膜，形成在压电振动片上以覆盖激励电极; 以及由金属材料形成的吸气材料，所述吸气材料形成在所述基底基板或盖基板中的任一个上，以便布置在所述空腔内，并且通过加热来提高所述空腔内的真空度。

公开(公告)号：US20110050045A1

公开(公告)日：2011-03-03

申请号：US12868310

申请日：2010-08-25

Applicant: Kiyoshi Aratake ,  Takeshi Sugiyama ,  Junya Fukuda

Inventor： Kiyoshi Aratake ,  Takeshi Sugiyama ,  Junya Fukuda

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03H9/1021 ,  H03H2003/0478 ,  H03H2003/0492 ,  Y10T29/42

Abstract: Providing a package and a method for manufacturing the package capable of achieving improvement in the degree of vacuum in the cavity, and to provide a piezoelectric vibrator, an oscillator, an electronic device, and a radio-controlled timepiece. There is provided a package which includes a plurality of kinds of gettering materials 20, 21 having different activation temperatures and which are capable of being activated by heating is disposed in the cavity C.

Abstract translation: 提供一种能够实现空腔内真空度提高的封装和封装方法，以及提供压电振动器，振荡器，电子设备和无线电控制的钟表。 提供了包括多种具有不同活化温度的吸气材料20,21的包装件，其能够通过加热而被活化。

公开(公告)号：US20110018388A1

公开(公告)日：2011-01-27

申请号：US12842643

申请日：2010-07-23

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H3/04 ,  G04F5/063 ,  G04R20/10 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42

Abstract: Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a bonding film 35 which is formed on the entire surface of the lid board on the opposite side to the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam.

Abstract translation: 提供压电振动器的高效制造方法，并提供通过该制造方法制造的压电振动器。 一种制造压电振动器1的方法，包括：基板2和盖板3，它们彼此重叠以在它们之间形成空腔; 压电振动片4，其容纳在空腔中并结合到基板; 接合膜35，其形成在与基板相反的一侧的盖板的整个表面上，以便在与基板接触的部分处将两个板彼此接合，其中压电振动片包括 一对振动臂10和11以及形成在每个振动臂的前端的重量金属膜21，其中接合膜由能够通过激光照射激活而吸收周围气体的材料形成;以及 其特征在于，所述方法包括用激光束同时照射所述重量金属膜和所述接合膜的激光照射工序。