公开(公告)号：US20110249534A1

公开(公告)日：2011-10-13

申请号：US13166381

申请日：2011-06-22

Applicant: Junya Fukuda ,  Masashi NUMATA ,  Sumihiko KURITA

Inventor： Junya Fukuda ,  Masashi NUMATA ,  Sumihiko KURITA

IPC: H01L41/22 ,  H03B5/36 ,  G04C11/02 ,  C03B11/00

CPC classification number: H03H9/1021 ,  H03H9/21 ,  Y10T29/42

Abstract: A package manufacturing method of the present invention is a method of manufacturing a package with a recessed cavity formed in at least one of first and second substrates formed of a glass material and includes a cavity forming step of forming the cavity by performing press molding on at least one molded substrate of the first and second substrates and a heat treatment step of heating the molded substrate formed with the cavity.

Abstract translation: 本发明的封装制造方法是在由玻璃材料形成的第一基板和第二基板中的至少一个基板上形成的具有凹腔的封装的制造方法，其特征在于，包括形成所述型腔的型腔形成工序， 所述第一和第二基板的至少一个模制基板和加热形成有所述空腔的模制基板的热处理步骤。

公开(公告)号：US20110187472A1

公开(公告)日：2011-08-04

申请号：US13018930

申请日：2011-02-01

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H03B5/32 ,  H01L41/053 ,  H01L41/22

CPC classification number: H03H9/1021 ,  H03H3/02 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42

Abstract: There are provided a piezoelectric vibrating reed capable of securing a stable bonding strength between a bump and the piezoelectric vibrating reed, a piezoelectric vibrator having the piezoelectric vibrating reed, a method for manufacturing the piezoelectric vibrator, and an oscillator, an electronic apparatus, and a radio-controlled timepiece each having the piezoelectric vibrator. A piezoelectric vibrating reed includes: a vibrating portion; a base portion adjacent to the vibrating portion; excitation electrodes formed in the vibrating portion; mount electrodes formed in the base portion; and extraction electrodes for electrically connecting the excitation electrodes and the mount electrodes to each other. A bonding film made of gold is formed on the surfaces of the mount electrodes, and the bonding film is formed to a thickness such that, when the bonding film is ultrasonically bonded to a bump made of gold, mutual diffusion occurs over approximately the entire area in the thickness direction of the bonding film.

Abstract translation: 提供一种压电振动片，其能够确保凸块与压电振动片之间的稳定的结合强度，具有压电振动片的压电振动器，压电振动器的制造方法以及振荡器，电子设备和 各自具有压电振动器的无线电控制时计。 压电振动片包括：振动部分; 与所述振动部相邻的基部; 激励电极形成在振动部分中; 形成在基部的安装电极; 以及用于将激励电极和安装电极彼此电连接的引出电极。 在安装电极的表面上形成由金制成的接合膜，并且接合膜形成为使得当接合膜超声波接合到由金制成的凸块上时，在大致整个区域上发生相互扩散 在接合膜的厚度方向上。

公开(公告)号：US20110018398A1

公开(公告)日：2011-01-27

申请号：US12842623

申请日：2010-07-23

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L41/053 ,  H01L41/22

CPC classification number: H03H9/21 ,  G04R20/10 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/1021 ,  H03H2003/026 ,  H03H2003/0478 ,  H03H2003/0492 ,  H03H2009/02165 ,  Y10T29/42

Abstract: Providing a piezoelectric vibrator which is capable of securing the degree of vacuum in a cavity and can be manufactured with high efficiency and to provide a manufacturing method thereof. A piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed onto each other so as to form a cavity C therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a gettering material 34 which is formed in the base board to be accommodated in the cavity; a bonding film 35 which is formed on the entire surface of the lid board facing the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation.

Abstract translation: 提供一种压电振动器，其能够确保空腔中的真空度并且可以高效率地制造并提供其制造方法。 一种压电振动器1，包括：基板2和盖板3，它们彼此重叠以在其间形成空腔; 压电振动片4，其容纳在空腔中并结合到基板; 吸收材料34，其形成在基板中以容纳在空腔中; 接合膜35形成在盖板的面对基板的整个表面上，以便在与基板接触的部分处将两个板彼此接合，其中接合膜由以下材料形成： 能够通过激光照射来吸收周围的气体。

公开(公告)号：US20100308694A1

公开(公告)日：2010-12-09

申请号：US12857234

申请日：2010-08-16

Applicant: Masashi NUMATA ,  Kiyoshi Aratake ,  Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

Inventor： Masashi NUMATA ,  Kiyoshi Aratake ,  Osamu Onitsuka ,  Junya Fukuda ,  Kazuyoshi Sugama

IPC: H01L41/053 ,  H01L41/22 ,  H01L41/047 ,  B23Q3/00

CPC classification number: H03H3/02 ,  H01L2224/16225 ,  H01L2924/00011 ,  H01L2924/00014 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  Y10T29/42 ,  Y10T29/49165 ,  H01L2224/0401

Abstract: The piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate; an external electrode formed on the lower face of the base substrate; a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity; and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed of a cylindrical body, which is formed of a glass material to have two flat ends and a thickness substantially equal to that of the base substrate, and is implanted in the through-hole running through the base substrate; and an electroconductive core member which is formed to have two flat ends and a thickness substantially equal to that of the base substrate and is inserted into the center hole of the cylindrical body; and the through-hole, the cylindrical body and the core member are integrally fixed to each other by firing.

Abstract translation: 压电振子包括基底; 盖基板，其中形成有空腔凹部，并且在凹部面向基底基板的状态下结合到基底基板; 压电振动构件，其被接合到基底基板的上表面，其状态是将其容纳在由基底基板和盖基板之间的凹部形成的空腔中; 形成在所述基底基板的下表面上的外部电极; 形成在基底基板内并通过基底基板的贯通电极，与外部电极电连接，同时保持腔内的气密性; 以及布线电极，形成在所述基底基板的上表面上，以将所述通孔电连接到所述接合的压电振动部件; 其特征在于，所述贯通电极由圆筒体形成，所述圆筒体由玻璃材料形成，具有两个平坦的端部，并且基本上等于所述基底基板的厚度，并且被植入穿过所述基底基板的所述通孔中; 以及导电芯体，其形成为具有两个平坦端部，并且具有基本上等于所述基底基板的厚度并且被插入到所述圆筒体的中心孔中的厚度; 并且通孔，筒体和芯部件通过烧结而彼此一体地固定。

公开(公告)号：US08918971B2

公开(公告)日：2014-12-30

申请号：US13177898

申请日：2011-07-07

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L21/52 ,  H03H3/02 ,  H01L21/78 ,  H01L21/50 ,  H03H3/04 ,  H03H9/10 ,  H01L27/146 ,  H01L51/56 ,  H01L23/055 ,  H03H9/21 ,  H03H9/24

CPC classification number: H01L21/52 ,  H01L21/50 ,  H01L21/78 ,  H01L23/055 ,  H01L27/14618 ,  H01L27/14632 ,  H01L51/56 ,  H01L2224/13 ,  H03H3/02 ,  H03H3/04 ,  H03H9/1021 ,  H03H9/21 ,  H03H9/2494 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49126 ,  Y10T29/49798

Abstract: A method of manufacturing packages having contents sealed therein, including: a step of forming cavities in a plurality of package forming areas on a first wafer; a step of bonding the first wafer and a second wafer while arranging the contents in the cavities; and a step of irradiating a bonded wafer member with a laser and separating the packages into pieces, characterized in that dummy cavities are formed on an outside of the package forming area in an outermost periphery of the first wafer in the cavity forming step.

Abstract translation: 一种制造密封在其中的内容物的方法，包括：在第一晶片上的多个封装形成区域中形成空腔的步骤; 在将所述内容物排列在所述空腔中的同时，接合所述第一晶片和第二晶片的步骤; 以及利用激光照射接合的晶片构件并将封装分离成片的步骤，其特征在于，在所述空腔形成步骤中，在所述第一晶片的最外周的所述封装形成区域的外侧形成虚设空腔。

公开(公告)号：US08436515B2

公开(公告)日：2013-05-07

申请号：US12842643

申请日：2010-07-23

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L41/053

CPC classification number: H03H3/04 ,  G04F5/063 ,  G04R20/10 ,  H03H9/1021 ,  H03H9/21 ,  H03H2003/026 ,  H03H2003/0492 ,  Y10T29/42

Abstract: Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a bonding film 35 which is formed on the entire surface of the lid board on the opposite side to the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam.

Abstract translation: 提供压电振动器的高效制造方法，并提供通过该制造方法制造的压电振动器。 一种制造压电振动器1的方法，包括：基板2和盖板3，它们彼此重叠以在它们之间形成空腔; 压电振动片4，其容纳在空腔中并结合到基板; 接合膜35，其形成在与基板相反的一侧的盖板的整个表面上，以便在与基板接触的部分处将两个板彼此接合，其中压电振动片包括 一对振动臂10和11以及形成在每个振动臂的前端的重量金属膜21，其中接合膜由能够通过激光照射激活而吸收周围气体的材料形成;以及 其特征在于，所述方法包括用激光束同时照射所述重量金属膜和所述接合膜的激光照射工序。

公开(公告)号：US20110169584A1

公开(公告)日：2011-07-14

申请号：US12984198

申请日：2011-01-04

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L41/22 ,  H01L41/04 ,  H03B5/32

CPC classification number: H03H9/1021 ,  G04R20/10 ,  H03H9/21 ,  Y10T29/42

Abstract: To provide a piezoelectric vibrator manufacturing method that curbs a dispersion of a bonding film at a time of a gettering step and with which good electrical characteristics can be obtained, and an oscillator, electronic device, and atomic timepiece, in which is mounted a piezoelectric vibrator with which good electrical characteristics can be obtained. A manufacturing method includes a gettering step whereby a getter material is irradiated with a first laser penetrating a base substrate from the outer side of the base substrate, activating the getter material so that it adsorbs gas existing inside a cavity, and a frequency adjustment step whereby a weight metal film formed at leading ends of vibrating arms of a piezoelectric vibrating piece is irradiated with a second laser penetrating the base substrate from the outer side of the base substrate, thus adjusting the frequency of the piezoelectric vibrating piece, wherein the intensity of the first laser in the gettering step is weaker than the intensity of the second laser in the frequency adjustment step.

Abstract translation: 为了提供一种压电振动器制造方法，其在吸杂步骤时可以抑制接合膜的分散，并且能够获得良好的电特性，并且其中安装有压电振动器的振荡器，电子器件和原子钟表 可以获得良好的电气特性。 一种制造方法，其特征在于，在所述吸气材料中，从所述基材的外侧照射穿过基材的第一激光吸收材料，使所述吸气材料活化，使其吸附存在于空腔内的气体，以及频率调整步骤， 在压电振动片的振动臂的前端形成的重量金属膜从基底的外侧照射穿过基底的第二激光，调整压电振动片的频率， 在频率调节步骤中，第一激光器在吸气步骤中弱于第二激光器的强度。

公开(公告)号：US20110140796A1

公开(公告)日：2011-06-16

申请号：US13035575

申请日：2011-02-25

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H01L41/053 ,  H03B5/32 ,  H01L41/22

CPC classification number: H03H9/21 ,  H03H3/02 ,  H03H9/1014 ,  H03H2003/026

Abstract: A piezoelectric vibrator includes a tuning fork type piezoelectric vibrating reed including a pair of vibration arm portions; a package that accommodates the piezoelectric vibrating reed; and a getter material that is formed along the longitudinal direction of the vibration arm portion in an inner portion of the package, wherein a cross-sectional area of a middle portion of the getter material adjacent to a center portion of the longitudinal direction of the vibration arm portion is greater than that of an end portion of the getter material.

Abstract translation: 一种压电振动器，包括：具有一对振动臂部的音叉式压电振动片; 一个容纳压电振动片的包装; 以及在所述包装体的内部沿着所述振动臂部的长度方向形成的吸气材料，所述吸气材料的与所述振动的长度方向的中心部分相邻的中间部分的截面积 臂部分大于吸气剂材料的端部的臂部分。

公开(公告)号：US20110138857A1

公开(公告)日：2011-06-16

申请号：US12965214

申请日：2010-12-10

Applicant: Masashi Numata ,  Junya Fukuda

Inventor： Masashi Numata ,  Junya Fukuda

IPC: C03B33/037 ,  C03B33/02 ,  C03B33/10

CPC classification number: H03H9/1021 ,  C03B33/037 ,  C03B33/076 ,  C03B33/10 ,  G04R20/10 ,  H03H3/04 ,  H03H2003/0492 ,  Y02P40/57

Abstract: To provide a bonded glass cutting method whereby it is possible to suppress an occurrence of a crush or chipping when bonded glass is cut, and cut the bonded glass into pieces of a predetermined size, a package manufacturing method, a package, a piezoelectric vibrator, an oscillator, an electronic device, and an atomic timepiece. A bonded glass cutting method includes a scribing step, which irradiates a lid substrate wafer with a laser beam with a wavelength absorbed by a wafer bonded body along outlines, thus forming scribe lines on the lid substrate wafer, and a breaking step which, by cutting the wafer bonded body by applying a fracture stress to the scribe lines, dices the wafer bonded body into a plurality of piezoelectric vibrators, wherein a cutting step is carried out in a condition in which the wafer bonded body is placed on silicon rubber, and an outside end face of the lid substrate wafer is caused to face the silicon rubber.

Abstract translation: 为了提供一种粘结玻璃切割方法，由此可以抑制当粘合玻璃切割时发生挤压或碎裂，并将粘结玻璃切割成预定尺寸的碎片，封装制造方法，封装，压电振动器， 振荡器，电子设备和原子钟表。 粘合玻璃切割方法包括划线步骤，其利用沿着轮廓被晶片接合体吸收的波长的激光束照射盖基板晶片，从而在盖基板晶片上形成划线，以及断开步骤，通过切割 通过对划线施加断裂应力使晶片接合体将晶片接合体切割成多个压电振动器，其中在将晶片接合体置于硅橡胶上的条件下进行切割步骤， 使盖基板晶片的外侧端面与硅橡胶相对。

公开(公告)号：US20100301954A1

公开(公告)日：2010-12-02

申请号：US12852120

申请日：2010-08-06

Applicant: Junya Fukuda

Inventor： Junya Fukuda

IPC: H03B5/36 ,  H01L41/04 ,  H01L41/22

CPC classification number: H03H9/21 ,  H01L23/055 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/3011 ,  H03H9/1021 ,  Y10T29/42 ,  H01L2924/00

Abstract: Provided are: a piezoelectric oscillation piece which has a pair of oscillation arms disposed in parallel with each other with base ends of the oscillation arms fixed to a base of the piezoelectric oscillation piece and with weight metal films formed at the tips of the oscillation arms; a base substrate on the upper surface of which the piezoelectric oscillation piece is mounted; a lid substrate joined with the base substrate such that the mounted piezoelectric oscillation piece can be accommodated in a cavity; and a control film disposed in the vicinity of the pair of the oscillation arms as viewed in the plan view and formed at least on either of the substrates in such a manner as to extend from the base end side to the tip side in the longitudinal direction of the oscillation arms for increasing the degree of vacuum inside the cavity by heating. The control film is locally deposited on the side surfaces of the oscillation arms in the vicinity of the control film by heating.

Abstract translation: 提供：压电振动片，其具有彼此平行设置的一对振荡臂，振荡臂的基端固定到压电振动片的基部，并且在振荡臂的尖端处形成重量金属膜; 其上表面上安装有压电振动片的基底; 与基底基板接合的盖基板，使得安装的压电振动片可容纳在空腔中; 以及控制膜，其设置在所述一对摆动臂的附近，并且至少在所述基板中至少形成为从所述基端侧向所述纵向方向的前端侧延伸 的振荡臂，用于通过加热来增加腔内的真空度。 控制膜通过加热局部地沉积在控制膜附近的摆动臂的侧表面上。