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公开(公告)号：US07826126B2
公开(公告)日：2010-11-02
申请号：US12231962
申请日：2008-09-05
申请人： Hirokazu Nishino , Yoshiaki Horikawa , Akira Shiral , Fusao Ishii
发明人： Hirokazu Nishino , Yoshiaki Horikawa , Akira Shiral , Fusao Ishii
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G09G3/2011 , G09G3/3406 , G09G3/346 , G09G2320/0633 , G09G2320/064 , G09G2320/0646
摘要： The present invention provides a projection apparatus comprising: a light source, a light source control unit for controlling the output of the light source; at least one spatial light modulator for modulating the illumination light from the light source by multiple pixel elements; and an optical system for projecting, onto a screen, the illumination light deflected by the spatial light modulator, wherein: the light source control unit 1) modulates the output of the illumination light from the light source during a modulation period of the spatial light modulator, and 2) non-linearly controls the gray scale of an image projected onto the screen.
摘要翻译： 本发明提供一种投影装置，包括：光源，用于控制光源的输出的光源控制单元; 至少一个空间光调制器，用于通过多个像素元件调制来自光源的照明光; 以及用于在屏幕上投射由空间光调制器偏转的照明光的光学系统，其中：光源控制单元1）在空间光调制器的调制周期期间调制来自光源的照明光的输出 ，和2）非线性地控制投影到屏幕上的图像的灰度级。
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公开(公告)号：US20090231669A1
公开(公告)日：2009-09-17
申请号：US12231708
申请日：2008-09-04
申请人： Akira Shirai , Hirokazu Nishino , Yoshiaki Horikawa , Fusao Ishii
发明人： Akira Shirai , Hirokazu Nishino , Yoshiaki Horikawa , Fusao Ishii
IPC分类号： G02B26/02
CPC分类号： G02B26/0841 , G09G3/2011 , G09G3/346 , H04N9/312 , H04N9/3155
摘要： The present invention provides a projection apparatus, comprising: a light source for emitting illumination light; at least one spatial light modulator with a plurality of movable mirrors corresponding to pixels to be displayed, for performing a modulation of the illumination light through operation of the movable mirrors; a light source control unit performing a modulation control of the light source; and a spatial light modulator control unit generating, from an input image signal, a control signal for driving the spatial light modulator, wherein: the light source control unit adjusts a pulse emission frequency of an emission pulse of the illumination light emitted from the light source while corresponding to an oscillation frequency of the movable mirrors.
摘要翻译： 本发明提供一种投影装置，包括：用于发射照明光的光源; 至少一个空间光调制器，具有对应于要显示的像素的多个可移动镜，用于通过可移动镜的操作来执行照明光的调制; 执行光源的调制控制的光源控制单元; 以及空间光调制器控制单元，从输入图像信号生成用于驱动空间光调制器的控制信号，其中：所述光源控制单元调节从所述光源发射的照明光的发射脉冲的脉冲发射频率 同时对应于可移动反射镜的振荡频率。
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公开(公告)号：US07542197B2
公开(公告)日：2009-06-02
申请号：US11827552
申请日：2007-07-11
CPC分类号： G02B1/118 , G02B26/0833 , G02F1/136277 , G02F2201/38 , G02F2203/12 , H04N9/3141
摘要： A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.
摘要翻译： 支撑在器件衬底上的空间光调制器包括多个光调制元件，以调制从光源发射的光。 空间光调制器和器件衬底还包括在空间光调制器和/或器件衬底的表面上的循环结构，用于防止来自该循环结构的入射光的反射。 在一个示例性实施例中，循环结构包括具有比入射光的波长短的两个循环元件之间的距离的循环结构元件，用于防止来自该循环结构的入射光的反射。
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公开(公告)号：US20090115917A1
公开(公告)日：2009-05-07
申请号：US12316402
申请日：2008-12-11
CPC分类号： G02B26/0841 , G09G3/2044 , G09G3/346 , G09G2320/0266
摘要： A projection apparatus comprising a light source for projecting an illumination light through an illumination optical system to a spatial light modulator (SLM) for modulating the illumination light for generating and transmitting an image projection light to an image projection surface through a projection optical system to display an image. The projection apparatus further includes an image process unit for receiving and analyzing an input image data; and the image process unit applies a conversion process to a signal related to the input image data to generate different control patterns for a plurality of adjacent pixel elements included in the SLM for a predetermined period during at least one frame period to reproduce a gradation of the pixel whereby each of the plurality of adjacent pixel elements has a gradation of approximately a same level.
摘要翻译： 一种投影装置，包括：用于通过照明光学系统将照明光投射到空间光调制器（SLM）的光源，所述空间光调制器（SLM）用于调制用于通过投影光学系统产生并将图像投影光透射到图像投影表面的照明光以显示 一个图像。 投影装置还包括图像处理单元，用于接收和分析输入图像数据; 并且图像处理单元对与输入图像数据相关的信号应用转换处理，以在至少一个帧周期内为包括在SLM中的多个相邻像素元素生成不同的控制图案，以再现灰度级 像素，其中多个相邻像素元素中的每一个具有大致相同水平的灰度。
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公开(公告)号：US20080123168A1
公开(公告)日：2008-05-29
申请号：US11893682
申请日：2007-08-16
IPC分类号： G02B26/02
CPC分类号： G02B26/0833 , G02B27/283 , H04N9/3129
摘要： A display system includes a light source for projecting a linearly polarized illumination light. The display system further includes a deflectable mirror device having a plurality of mirror pixels. The display system further includes a polarized light separation plane that separates reflected light from the illumination light, a wave plate disposed near the deflectable mirror device, and a projection lens that projects the reflected light from the deflectable mirror device. In this system, the optical axes of the illumination light and an ON reflected light reflected from the deflectable mirror device are substantially perpendicular to the deflectable mirror device, and the optical axis of an OFF reflected light is inclined to the optical axis of the image display projection light path.
摘要翻译： 显示系统包括用于投影线偏振照明光的光源。 显示系统还包括具有多个镜像素的可偏转镜装置。 显示系统还包括分离来自照明光的反射光的偏振光分离平面，设置在可偏转镜装置附近的波片和投影来自可偏转镜装置的反射光的投影透镜。 在该系统中，照明光的光轴和从偏转镜装置反射的ON反射光基本上垂直于可偏转镜装置，OFF反射光的光轴相对于图像显示器的光轴倾斜 投影光路。
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公开(公告)号：US20080013157A1
公开(公告)日：2008-01-17
申请号：US11827552
申请日：2007-07-11
IPC分类号： G02F1/29
CPC分类号： G02B1/118 , G02B26/0833 , G02F1/136277 , G02F2201/38 , G02F2203/12 , H04N9/3141
摘要： A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure,
摘要翻译： 支撑在器件衬底上的空间光调制器包括多个光调制元件，以调制从光源发射的光。 空间光调制器和器件衬底还包括在空间光调制器和/或器件衬底的表面上的循环结构，用于防止来自该循环结构的入射光的反射。 在示例性实施例中，循环结构包括具有比入射光的波长短的两个循环元件之间的距离的循环结构元件，用于防止来自该循环结构的入射光的反射，
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公开(公告)号：US5311565A
公开(公告)日：1994-05-10
申请号：US890150
申请日：1992-05-29
申请人： Yoshiaki Horikawa
发明人： Yoshiaki Horikawa
CPC分类号： G21K7/00
摘要： A soft X-ray microscope comprising a soft X-ray radiation source which is substantially a spot radiation source, a condenser for leading soft X-rays from the radiation source to a sample, a reflecting mirror for grazing incidence which is disposed between the radiation source and the condenser, and has a rough reflecting surface, an objective optical system for forming a magnified image of the sample, and a soft X-ray detector for receiving the soft X-rays from the objective optical system. This microscope exhibits excellent imaging characteristic even when it uses a spot radiation source.
摘要翻译： 一种软X射线显微镜，包括基本上是点辐射源的软X射线辐射源，用于将来自辐射源的软X射线引导到样品的冷凝器，用于放射入射的反射镜，其设置在辐射 源极和冷凝器，并且具有粗糙的反射面，用于形成样品的放大图像的物镜光学系统和用于从物镜光学系统接收软X射线的软X射线检测器。 即使使用点辐射源，该显微镜也具有优异的成像特性。
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公开(公告)号：US4930896A
公开(公告)日：1990-06-05
申请号：US320850
申请日：1989-03-02
申请人： Yoshiaki Horikawa
发明人： Yoshiaki Horikawa
CPC分类号： G01B11/24
摘要： In order to make possible a high-speed measurement of the surface structure of a sample of any shape or any weight and also to make feasible a direct observation of the surface portion requiring measurement, the surface structure measuring apparatus comprises: a laser light beam source; an objective lens collecting the laser light beam emitting from the light source onto the surface of the sample; a pair of light deflectors disposed at positions conjugate with the pupil of the objective lens, respectively, to perform two-dimensional scanning of the surface of the sample by altering the incidence angle of the laser light beam impinging onto the objective lens; an observation optical system incorporated between the objective lens and the light deflectors for the observation of the surface of the sample; focus detecting device receiving the light reflected at the surface of the sample for detecting a displacement of the surface portion of the sample requiring measurement from a predetermined focal position; and image processing and indicating device for indicating the structure of the measured surface of the sample based on the output delivered from the focus detecting device.
摘要翻译： 为了能够高速测量任何形状或任何重量的样品的表面结构，并且还可以直接观察需要测量的表面部分，表面结构测量装置包括：激光束源 ; 将从光源发射的激光束收集到样品的表面上的物镜; 一对光偏转器，分别设置在与物镜的光瞳共轭的位置处，以通过改变入射到物镜上的激光束的入射角来对样品的表面进行二维扫描; 一个结合在物镜和光偏转器之间用于观察样品表面的观察光学系统; 接收在样品表面反射的光的聚焦检测装置，用于检测需要测量的样品的表面部分从预定焦点位置的位移; 以及图像处理和指示装置，用于基于从焦点检测装置输出的输出来指示样本的测量表面的结构。
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公开(公告)号：US4747677A
公开(公告)日：1988-05-31
申请号：US333698
申请日：1981-12-23
申请人： Yoshiaki Horikawa , Toshihiro Imai , Yasuzi Ogata
发明人： Yoshiaki Horikawa , Toshihiro Imai , Yasuzi Ogata
摘要： A lens system comprising a front lens group consisting of a first, second and third lens components respectively of positive meniscus lenses with the convex surfaces on the object side and a fourth lens component of a negative meniscus lens and a rear lens group consisting of a fifth lens component of a positive or negative cemented meniscus lens with the convex surfaces on the image side and a sixth lens component of a positive lens. In this lens system, the entire lens system is moved along an optical axis to focus and an airspace between the fourth and fifth lens component and an airspace between the fifth and sixth lens components are respectively varied non-linearly to correct the collapse of aberrations. The front lens group may consist of a first lens component of a positive lens, a second lens component of a negative lens and a third lens component of a positive lens and the rear lens group may consist of a fourth lens component of a negative lens and a fifth lens component of a positive lens. In this case, an airspace between the third and fourth lens components and an airspace between the fourth and fifth lens components are respectively varied non-linearly to correct the collapse of aberrations.
摘要翻译： 一种透镜系统，包括前透镜组，其由分别具有物体侧的凸面的正弯月形透镜的第一，第二和第三透镜部件以及负弯月形透镜的第四透镜部件和由第五透镜组 具有图像侧的凸面的正或负结合的弯月形透镜的透镜部件和正透镜的第六透镜部件。 在该透镜系统中，整个透镜系统沿着光轴移动以进行聚焦，并且分别在第四和第五透镜部件之间的空间与第五和第六透镜部件之间的空间间隔非线性地改变以校正像差的崩溃。 前透镜组可以由正透镜的第一透镜部件，负透镜的第二透镜部件和正透镜的第三透镜部件组成，并且后透镜组可以由负透镜的第四透镜部件和 正透镜的第五透镜部件。 在这种情况下，在第三和第四透镜部件之间的空间和第四和第五透镜部件之间的空间分别被非线性地改变以校正像差的崩溃。
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公开(公告)号：US4734578A
公开(公告)日：1988-03-29
申请号：US844167
申请日：1986-03-26
申请人： Yoshiaki Horikawa
发明人： Yoshiaki Horikawa
CPC分类号： G02B21/002
摘要： A scanning type optical microscope comprising a pair of light deflectors disposed between a laser light source and an objective lens for performing two-dimensional scanning of an object requiring observation by varying the incidence angle of a light entering the objective lens, and a pair of split detectors receiving a light coming from said object, wherein the light deflectors are disposed at the position of the pupil of the objective lens or at a position conjugate therewith or in their vicinity. This microscope has a high resolving power and allows an easy performance of a special microscopy and is convenient to handle. The paired detectors are arranged to be rotatable about an optical axis and allows free alteration of the orientation of differentiation of the differential observation image. A light-blocking plate can be provided within the detecting optical system for removing O-order diffraction light contained in the detection light, whereby permitting dark field microscopy at a very low cost.
摘要翻译： 一种扫描型光学显微镜，包括设置在激光光源和物镜之间的一对光偏转器，用于通过改变进入物镜的光的入射角来进行需要观察的物体的二维扫描，以及一对分裂 接收来自所述物体的光的检测器，其中所述光偏转器设置在所述物镜的光瞳位置或与其附近的位置。 该显微镜具有高分辨能力，可以轻松实现特殊的显微镜检查，方便处理。 成对的检测器布置成可围绕光轴旋转并且允许差分观察图像的微分方位的自由改变。 在检测光学系统中可以设置遮光板，用于去除检测光中所含的O级衍射光，从而以非常低的成本进行暗视野显微镜检查。
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