公开(公告)号：US20150262867A1

公开(公告)日：2015-09-17

申请号：US14722889

申请日：2015-05-27

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: H01L21/768 ,  H01L27/105

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行隔开的沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。

公开(公告)号：US20140252300A1

公开(公告)日：2014-09-11

申请号：US14252145

申请日：2014-04-14

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Fabio Pellizzer ,  Carmela Cupeta ,  Nicola Nastasi

IPC: H01L45/00

CPC classification number: H01L45/14 ,  H01L27/2427 ,  H01L27/2463 ,  H01L45/06 ,  H01L45/1233 ,  H01L45/1253 ,  H01L45/144 ,  H01L45/16

Abstract: Memory arrays and methods of forming the same are provided. One example method of forming a memory array can include forming a conductive material in a number of vias and on a substrate structure, the conductive material to serve as a number of conductive lines of the array and coupling the number of conductive lines to the array circuitry.

Abstract translation: 提供了存储器阵列及其形成方法。 形成存储器阵列的一个示例性方法可以包括在多个通孔中以及在衬底结构上形成导电材料，所述导电材料用作阵列的多个导电线并将导线的数量耦合到阵列电路 。

公开(公告)号：US08759980B2

公开(公告)日：2014-06-24

申请号：US14066340

申请日：2013-10-29

Applicant: Micron Technology, Inc.

Inventor： Roberto Somaschini ,  Alessandro Vaccaro ,  Paolo Tessariol ,  Giulio Albini

IPC: G11C11/24

CPC classification number: H01L21/76807 ,  H01L21/76808 ,  H01L21/76811 ,  H01L21/76816 ,  H01L21/7684 ,  H01L21/76877 ,  H01L21/76895 ,  H01L23/5226 ,  H01L23/5283 ,  H01L27/1052 ,  H01L27/11521 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Array contacts for semiconductor memories may be formed using a first set of parallel stripe masks and subsequently a second set of parallel stripe masks transverse to the first set. For example, one set of masks may be utilized to etch a dielectric layer, to form parallel spaced trenches. Then the trenches may be filled with a sacrificial material. That sacrificial material may then be masked transversely to its length and etched, for example. The resulting openings may be filled with a metal to form array contacts.

Abstract translation: 半导体存储器的阵列触点可以使用第一组并行条纹掩模形成，随后可以与第一组横向的第二组平行条纹掩模形成。 例如，可以使用一组掩模来蚀刻介电层，以形成平行间隔开的​​沟槽。 然后可以用牺牲材料填充沟槽。 然后，该牺牲材料可以横向于其长度被掩蔽并被蚀刻。 所得到的开口可以用金属填充以形成阵列触点。