公开(公告)号：US5111017A

公开(公告)日：1992-05-05

申请号：US564053

申请日：1990-08-07

申请人： Shoji Futamura ,  Masaki Kurihara

发明人： Shoji Futamura ,  Masaki Kurihara

IPC分类号： B23H1/02

CPC分类号： B23H1/022 ,  B23H2300/20

摘要： A power supply circuit for discharge machining comprising a first switching means for supplying a d-c power voltage to a discharge gap between a discharge machining electrode and a workpiece, a first energy consumption circuit having a second switching means provided on the output side of the first switching means, and a second energy consumption circuit having a third switching means provided in the vicinity of the discharge gap in parallel therewith, in which the second switching means of the first energy consumption circuit and the third switching means of the second energy consumption circuit are caused to conduct after the first switching means is turned off.

摘要翻译： 一种用于放电加工的电源电路，包括用于向放电加工电极和工件之间的放电间隙提供直流电压的第一开关装置，具有设置在第一开关的输出侧的第二开关装置的第一能量消耗电路 装置和第二能量消耗电路，其具有设置在与其平行的放电间隙附近的第三开关装置，其中引起第一能量消耗电路的第二开关装置和第二能量消耗电路的第三开关装置 在第一切换装置关闭之后进行。

公开(公告)号：USD282843S

公开(公告)日：1986-03-04

申请号：US496342

申请日：1983-05-19

申请人： Masaki Kurihara

设计人： Masaki Kurihara

公开(公告)号：US09140541B2

公开(公告)日：2015-09-22

申请号：US13193214

申请日：2011-07-28

申请人： Masaki Kurihara

发明人： Masaki Kurihara

IPC分类号： H04N7/18 ,  G01B11/03 ,  G01B11/02 ,  G06T7/60

CPC分类号： G01B11/03 ,  G01B11/028 ,  G06T7/62 ,  G06T2207/20104 ,  G06T2207/30164

摘要： Disclosed is an image measuring apparatus including an image capture unit which captures an image of a measurement subject, an import unit which imports the image of the measurement subject which is captured by the image capture unit, a binarization unit which binarizes the image which is imported by the import unit, a contour detection unit which recognizes graphic information in the image which is binarized by the binarization unit and detects a contour of the graphic information, a corner detection unit which detects corners of the graphic information based on the contour which is detected by the contour detection unit, a setting unit which respectively sets edge detection tools on lines of the contour including the corners detected by the corner detection unit and a measurement unit which measures the graphic information by the edge detection tools which are set by the setting unit.

摘要翻译： 公开了一种图像测量装置，包括：拍摄测量对象的图像的图像捕获单元，导入由图像捕获单元捕获的测量对象的图像的导入单元，将导入的图像二值化的二值化单元 轮廓检测单元，其识别由二值化单元二值化并且检测图形信息的轮廓的图像中的图形信息;拐角检测单元，其基于检测到的轮廓检测图形信息的角部; 通过轮廓检测单元，设置单元，其分别设置包括由拐角检测单元检测到的角的轮廓线上的边缘检测工具以及由设置单元设置的边缘检测工具测量图形信息的测量单元 。

公开(公告)号：US08209641B2

公开(公告)日：2012-06-26

申请号：US13076511

申请日：2011-03-31

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G06F17/50

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method of fabricating a photomask used to form a lens. The method includes the steps of generating mask pattern data for each of a plurality of grid cells constituting a mask pattern for the lens, and fabricating the photomask based on the mask pattern data. The step of generating the mask pattern data includes acquiring data which represents a transmitted light distribution required for the photomask to fabricate the lens, in which the transmitted light distribution includes a quantity of transmitted light in each of the plurality of grid cells, and determining whether to place a shield on each of the plurality of grid cells by binarizing the quantity of transmitted light in each of the plurality of grid cells in order of increasing or decreasing distance from a center of the mask pattern using an error diffusion method.

摘要翻译： 一种制造用于形成透镜的光掩模的方法。 该方法包括以下步骤：为构成透镜的掩模图案的多个网格单元中的每一个生成掩模图案数据，以及基于掩模图案数据来制造光掩模。 生成掩模图案数据的步骤包括获取表示光掩模所需的透射光分布以制造透镜的数据，其中透射光分布包括多个格栅单元中的每一个中的透射光量，以及确定是否 通过使用误差扩散法从掩模图案的中心的距离的增加或减小的顺序二值化多个网格单元中的每一个网格单元中的透射光的量来将屏蔽放置在多个网格单元中的每一个上。

公开(公告)号：US20120128233A1

公开(公告)日：2012-05-24

申请号：US13362181

申请日：2012-01-31

申请人： Ryo NAKAGAKI ,  Masaki Kurihara ,  Toshifumi Honda

发明人： Ryo NAKAGAKI ,  Masaki Kurihara ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6256 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

摘要翻译： 在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统 由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。 当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。 分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

公开(公告)号：US20120043634A1

公开(公告)日：2012-02-23

申请号：US13198258

申请日：2011-08-04

申请人： Masaki Kurihara

发明人： Masaki Kurihara

IPC分类号： H01L31/0232 ,  G03F7/40 ,  H01L31/18

CPC分类号： G02B3/0018 ,  G02B3/0043 ,  G03F7/0007 ,  G03F7/40 ,  H01L27/14621 ,  H01L27/14623 ,  H01L27/14627

摘要： A method of manufacturing a microlens array includes forming a resist film on a structure including a plurality of light-receiving portions, exposing the resist film using a photomask in which a plurality of lens patterns for forming a plurality of microlenses are arranged, forming a resist pattern by developing the exposed resist film, and forming the plurality of microlens by annealing the resist pattern, wherein the plurality of lens patterns include lens patterns having exposure light transmittance distributions different from each other.

摘要翻译： 微透镜阵列的制造方法包括在包括多个受光部的结构体上形成抗蚀剂膜，使用其上配置多个用于形成多个微透镜的多个透镜图案的光掩模曝光所述抗蚀剂膜，形成抗蚀剂 通过显影曝光的抗蚀剂膜，以及通过退火抗蚀剂图案形成多个微透镜，其中多个透镜图案包括具有彼此不同的曝光光线透射率分布的透镜图案。

公开(公告)号：US20080263502A1

公开(公告)日：2008-10-23

申请号：US12048691

申请日：2008-03-14

申请人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

发明人： Kyouhei Watanabe ,  Masaki Kurihara ,  Hitoshi Shindo ,  Nobuhiko Sato ,  Yasuhiro Sekine ,  Masataka Ito

IPC分类号： G06F17/50

CPC分类号： G03F1/68 ,  G03F1/50 ,  G03F7/0005 ,  Y10T29/49

摘要： A method for generating mask pattern data of a photomask used to form microlenses divides a pattern formation surface of a mask pattern to be used for the photomask into a plurality of grid cells, acquires data which represents transmitted light distribution of the mask pattern to be used for the photomask, determines whether to place a shield on each of the plurality of grid cells by binarizing the plurality of grid cells in order of increasing or decreasing distance from a center of the pattern formation surface using an error diffusion method to acquire the transmitted light distribution, and generates mask pattern data which represents an arrangement of the shields based on results from the determining step.

摘要翻译： 用于生成用于形成微透镜的光掩模的掩模图案数据的方法将用于光掩模的掩模图案的图案形成表面划分成多个网格单元，获取表示要使用的掩模图案的透射光分布的数据 对于光掩模，通过使用误差扩散方法使用误差扩散方法来依次增加或减小距离图案形成表面的中心的距离来二进制化多个网格单元，来确定是否将多个网格单元中的每一个放置屏蔽，以获取透射光 分配，并且基于来自确定步骤的结果生成表示屏蔽的布置的掩模图案数据。

公开(公告)号：US20070201739A1

公开(公告)日：2007-08-30

申请号：US11704350

申请日：2007-02-09

申请人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

发明人： Ryo Nakagaki ,  Masaki Kurihara ,  Toshifumi Honda

IPC分类号： G06K9/00

CPC分类号： G06T7/0006 ,  G06K9/6256 ,  G06T7/0004 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/10061 ,  G06T2207/30148

摘要： In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.

摘要翻译： 在用于自动获取并且还自动分类诸如半导体晶片的样本上存在的缺陷的图像的设备中，提供了能够容易地接受甚至基于以下情况产生大量分类等级的情况的分类系统 由用户发出的请求，甚至是分类等级的基础被高频地改变的情况。 当用户定义分类类时，提供用于指定由各个分级类所拥有的属性的设备。 分类系统自动地在内部提供的基于规则的分类器和基于示例的分类器之间改变连接模式，从而自动构建适合用户分类基础的这样的分类系统。

公开(公告)号：US20070031026A1

公开(公告)日：2007-02-08

申请号：US11488636

申请日：2006-07-19

申请人： Masaki Kurihara ,  Toshifumi Honda ,  Ryo Nakagaki

发明人： Masaki Kurihara ,  Toshifumi Honda ,  Ryo Nakagaki

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/2817

摘要： A method and apparatus for reviewing defects of a semiconductor device is provided which involves detecting a defect on a SEM image taken at low magnification, and reviewing the defect on a SEM image taken at high magnification, and which can review a lot of defects in a short period of time thereby to improve the efficiency of defect review. In the present invention, the method for reviewing defects of a semiconductor device includes the steps of obtaining an image including a defect on the semiconductor device detected by a detection device by use of a scanning electron microscope at a first magnification, making a reference image from the image including the defect obtained at the first magnification, detecting the defect by comparing the image including the defect obtained at the first magnification to the reference image made from the image including the defect at the first magnification, and taking an image of the detected defect at a second magnification that is larger than the first magnification.

摘要翻译： 提供了一种用于检查半导体器件缺陷的方法和装置，其涉及检测在低放大倍率下拍摄的SEM图像上的缺陷，并且以高倍放大倍数检查SEM图像上的缺陷，并且可以检查在 短时间内可以提高缺陷检查的效率。 在本发明中，用于检查半导体器件的缺陷的方法包括以下步骤：通过使用扫描电子显微镜以第一放大率获得由检测装置检测的半导体器件上的缺陷的图像，从而 所述图像包括在第一放大处获得的缺陷，通过将包括在第一放大获得的缺陷的图像与由包含第一放大率的缺陷构成的图像进行比较的图像进行比较来检测缺陷，并且获取检测到的缺陷的图像 在大于第一放大率的第二放大倍率下。

公开(公告)号：US20060041909A1

公开(公告)日：2006-02-23

申请号：US11198440

申请日：2005-08-08

申请人： Tomoharu Kirihara ,  Masaki Kurihara ,  Yoshitaka Yaeguchi ,  Takeo Miyazaki ,  Kenji Azuma

发明人： Tomoharu Kirihara ,  Masaki Kurihara ,  Yoshitaka Yaeguchi ,  Takeo Miyazaki ,  Kenji Azuma

IPC分类号： H04N5/445 ,  H04N7/173 ,  G06F13/00 ,  G06F3/00

CPC分类号： H04N5/782 ,  H04N5/765 ,  H04N5/775 ,  H04N5/781 ,  H04N5/85 ,  H04N9/8042 ,  H04N21/4135 ,  H04N21/4334 ,  H04N21/43622 ,  H04N21/47214

摘要： An information recording apparatus is provided with: a reserving device for specifying a channel, a recording start time point, and a recording end time point of a regular broadcast program which is regularly broadcasted (i.e. every week, every day, every month, or the like), to thereby reserve the regular broadcast program; an obtaining device for obtaining Electronic Program Guide (EPG) information which is distributed along with or aside from the regular broadcast program and which includes airtime zone information for indicating a channel, a broadcast start time point, and a broadcast end time point; a recording device capable of recording the regular broadcast program; and a controlling device for (i) controlling the recording device to record the regular broadcast program from the recording start time point, (ii) searching for the broadcast end time point of the regular broadcast program, from the EPG information, while the regular broadcast program is recorded, and (iii) controlling the recording device to record the regular broadcast program until the searched broadcast end time point

摘要翻译： 一种信息记录装置，具有：定期广播的常规广播节目（即每周，每一天，每个月或每月一次）的通道的指定信道的预约装置，记录开始时间点和记录结束时间点 喜欢），从而保留常规广播节目; 用于获得与常规广播节目一起分布或除了常规广播节目分发的电子节目指南（EPG）信息的获取装置，并且包括用于指示频道的广播时段信息，广播开始时间点和广播结束时间点; 能够记录常规广播节目的记录装置; 以及控制装置，用于（i）控制记录装置从记录开始时间点记录常规广播节目，（ii）从EPG信息中寻找常规广播节目的广播结束时间点，而常规广播 记录节目，以及（iii）控制记录装置记录常规广播节目，直到搜索到的广播结束时间点为止