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31.发明授权Method and apparatus for inspection of solder joints by x-ray fluoroscopic imaging 失效通过X射线透视成像检查焊点的方法和装置
公开(公告)号：US5493594A
公开(公告)日：1996-02-20
申请号：US207796
申请日：1994-03-07
CPC分类号： G01N23/04
摘要： A method and apparatus for inspecting a solder joint by an X-ray fluoroscopic image in which an X-ray is irradiated on an object to be inspected located by a specimen stage and having a lead of an electronic part soldered to a substrate to detect an X-ray fluoroscopic image signal, a position of a lead in a tip direction is obtained by a distribution of projection with said X-ray fluoroscopic image signal projected in a lead row direction, a position of a lead in a row direction is obtained by a distribution of projection with said X-ray fluoroscopic image projected in a lead tip direction to extract a position of a solder joint as an object to be inspected, and said X-ray fluoroscopic image is evaluated every solder joint in accordance with the postion information to effect a defect detection.
摘要翻译： 一种用于通过X射线透视图像来检查焊点的方法和装置，其中X射线被照射在被检体的位置上，并且具有被焊接到基底的电子部件的引线以检测 X射线透视图像信号，通过在引导行方向上投影的所述X射线透视图像信号的投影分布来获得尖端方向上的引线位置，通过以下方式获得引线在行方向上的位置： 利用所述X射线透视图像在引线尖端方向上投射的突起的分布，以提取作为被检查对象的焊点的位置，并且根据位置信息对每个焊点评估所述X射线透视图像 以实现缺陷检测。
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公开(公告)号：US4556797A
公开(公告)日：1985-12-03
申请号：US530044
申请日：1983-09-07
摘要： In a method and apparatus for detecting the edge of a fine pattern formed on a specimen such as a fine circuit pattern formed on a semiconductor element or the like, there is prepared a predetermined model waveform based on theoretical secondary electron emission from the edge portion. Secondary electrons emitted from successive scanning points across the pattern edge portion through the irradiation of a scanning electron beam thereonto are detected to produce an actual signal waveform reflecting the secondary electron emission from the pattern edge portion. The actual signal waveform is compared with the model waveform, and one of the scanning points at which the highest coincidence exists between both the actual and model waveforms, is determined as a position of the pattern edge.
摘要翻译： 在形成在半导体元件等上形成的精细电路图案的试样上形成的精细图案的边缘的方法和装置中，根据来自边缘部分的理论二次电子发射，制备预定的模型波形。 检测从连续的扫描点通过扫描电子束照射到图案边缘部分的二次电子，以产生反映来自图案边缘部分的二次电子发射的实际信号波形。 将实际信号波形与模型波形进行比较，确定实际波形和模型波形之间存在最高一致性的扫描点之一，作为图形边缘的位置。
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公开(公告)号：US4064484A
公开(公告)日：1977-12-20
申请号：US708633
申请日：1976-07-26
CPC分类号： G06K9/38 , G06T1/0007 , H04N1/403
摘要： An analog-digital converter comprises a comparator to which signals to be converted are applied, and a threshold circuit coupled with the comparator in order to control the threshold level of the comparator, so that the signals applied to the comparator are converted into binary signals based upon a predetermined threshold level. The threshold level corresponding to the output of the threshold circuit is compensated in accordance with the variations in the levels of the signals applied to the comparator. The threshold level of the comparator is changed to a compensated level when the result, calculated from the average level of the signals approximately corresponding to a predetermined area in a field of the object and that of the signals approximately corresponding to plural areas which are in the vicinity of the predetermined area, is different from that of the preceding frame.
摘要翻译： 模拟数字转换器包括一个要被转换的信号的比较器，以及与该比较器耦合的阈值电路，以便控制比较器的阈值电平，使得施加到该比较器的信号被转换成基于二进制信号 在预定的阈值水平上。 根据施加到比较器的信号的电平的变化来补偿对应于阈值电路的输出的阈值电平。 当从近似对应于物体的场中的预定区域的信号的平均电平计算出的结果和大致对应于处于该对象中的多个区域的信号的结果时，比较器的阈值电平被改变为补偿电平 预定区域的附近与前一帧的附近不同。
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