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1.发明授权Variable thresholding circuit for converting an analog signal to a binary signal 失效用于将模拟信号转换为二进制信号的可变阈值电路
公开(公告)号：US4109211A
公开(公告)日：1978-08-22
申请号：US649809
申请日：1976-01-16
CPC分类号： H03K5/082 , H04L25/062
摘要： A variable thresholding circuit for converting an analog signal to a binary signal comprises a comparator to which signals to be converted are applied and a threshold circuit coupled with the comparator in order to provide the threshold level of the comparator, so that the signals applied to the comparator are converted into binary signals in accordance with the threshold level. The threshold level corresponding to the output of the threshold circuit is compensated in accordance with the variations of the levels of the signals applied to the comparator. The threshold level of the comparator is changed to a compensated level when the result calculated from the threshold level and the signals applied to the comparator is smaller than a predetermined value, whereas the threshold level of the comparator is not changed to the compensated one when the result calculated from the threshold level and the signals applied to the comparator is larger than that and the compensation is repeated until the calculated result becomes smaller than the predetermined value.
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公开(公告)号：US4091394A
公开(公告)日：1978-05-23
申请号：US762717
申请日：1977-01-26
申请人： Seiji Kashioka , Masakazu Ejiri , Michihiro Mese , Takafumi Miyatake , Toshimitsu Hamada , Isamu Yamazaki
发明人： Seiji Kashioka , Masakazu Ejiri , Michihiro Mese , Takafumi Miyatake , Toshimitsu Hamada , Isamu Yamazaki
摘要： A pattern position detecting system comprising first means to sequentially fetch local images in a two-dimensionally arrayed form from a video signal in accordance with the scanning of an image and at sampling intervals which are variably instructed independently in the vertical and horizontal directions, second means to hold two-dimensional patterns having the same array as the local images, third means to evaluate the degree of non-coincidence between the image of the first means and the pattern of the second means, fourth means to store the position of an image scanning point at the time when the degree of non-coincidence becomes the minimum in a predetermined range within a picture frame, fifth means to calculate the position of an object from the position obtained by the fourth means, and sixth means to store the vertical and horizontal sampling intervals necessary for the operation of the first means, the two-dimensional patterns for use in the second means and numerical values necessary for the positional calculation of the fifth means, and to select required ones and send them to the first, second and fifth means.
摘要翻译： 一种图案位置检测系统，包括根据图像的扫描和在垂直和水平方向上独立地可变地指示的采样间隔从视频信号以二维排列的形式顺序地取出局部图像的第一装置，第二装置 保持具有与本地图像相同的阵列的二维图案，第三装置用于评估第一装置的图像与第二装置的图案之间的不一致程度，第四装置，用于存储图像扫描的位置 第五装置根据由第四装置获得的位置计算物体的位置;以及第六装置，用于存储垂直和水平的第一装置， 用于第一装置的操作所需的采样间隔，用于第二装置的二维图案和数值n 用于第五装置的位置计算，并选择所需要的并将其发送到第一，第二和第五装置。
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公开(公告)号：US4291334A
公开(公告)日：1981-09-22
申请号：US797848
申请日：1977-05-17
申请人： Michihiro Mese , Seiji Kashioka , Masakazu Ejiri , Takafumi Miyatake , Isamu Yamazaki , Toshimitsu Hamada
发明人： Michihiro Mese , Seiji Kashioka , Masakazu Ejiri , Takafumi Miyatake , Isamu Yamazaki , Toshimitsu Hamada
IPC分类号： G01B11/00 , G01B11/02 , G01D5/249 , G05D3/12 , G06T1/00 , G06T7/00 , G06T7/60 , H01L21/60 , H01L21/68 , H04M7/00
CPC分类号： G06T7/0044 , G01B11/024 , H01L21/681 , H01L2924/14
摘要： An apparatus for detecting the position of an object. The apparatus has an optical device for magnifying or enlarging a plurality of portions on the object, a photoelectric converter adapted for converting the enlarged portion image into electric signals, a plurality of thresholding circuits adapted for changing analogue signals from the respective photoelectric converter into binary signals with a threshold value determined by a signal level given by a first signal holding circuit, a circuit for calculating the threshold value from the analogue signals, a circuit for detecting the approximate position of a specific pattern in the enlarged portion images through a coarse sampling of the binary signals. A circuit for detecting the exact position of the specific pattern through measuring the area of a specific brightness in a plurality of regions in the enlarged portion images, by a fine sampling of the binary signals, and a controller for controlling the operations of respective circuits.
摘要翻译： 一种用于检测物体的位置的装置。 该装置具有用于放大或放大物体上的多个部分的光学装置，适用于将放大部分图像转换成电信号的光电转换器，适用于将来自各个光电转换器的模拟信号改变为二进制信号的多个阈值电路 具有由由第一信号保持电路给出的信号电平确定的阈值，用于从模拟信号计算阈值的电路，用于通过粗略采样来检测放大部分图像中的特定图案的大致位置的电路 二进制信号。 用于通过对二进制信号的精细采样来测量放大部分图像中的多个区域中的特定亮度的面积来检测特定图案的精确位置的电路和用于控制各个电路的操作的控制器。
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公开(公告)号：US4064484A
公开(公告)日：1977-12-20
申请号：US708633
申请日：1976-07-26
CPC分类号： G06K9/38 , G06T1/0007 , H04N1/403
摘要： An analog-digital converter comprises a comparator to which signals to be converted are applied, and a threshold circuit coupled with the comparator in order to control the threshold level of the comparator, so that the signals applied to the comparator are converted into binary signals based upon a predetermined threshold level. The threshold level corresponding to the output of the threshold circuit is compensated in accordance with the variations in the levels of the signals applied to the comparator. The threshold level of the comparator is changed to a compensated level when the result, calculated from the average level of the signals approximately corresponding to a predetermined area in a field of the object and that of the signals approximately corresponding to plural areas which are in the vicinity of the predetermined area, is different from that of the preceding frame.
摘要翻译： 模拟数字转换器包括一个要被转换的信号的比较器，以及与该比较器耦合的阈值电路，以便控制比较器的阈值电平，使得施加到该比较器的信号被转换成基于二进制信号 在预定的阈值水平上。 根据施加到比较器的信号的电平的变化来补偿对应于阈值电路的输出的阈值电平。 当从近似对应于物体的场中的预定区域的信号的平均电平计算出的结果和大致对应于处于该对象中的多个区域的信号的结果时，比较器的阈值电平被改变为补偿电平 预定区域的附近与前一帧的附近不同。
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5.发明授权Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method 失效用于检查填充有填充物的通孔的填充状态的方法和用于执行该方法的装置
公开(公告)号：US5015097A
公开(公告)日：1991-05-14
申请号：US416934
申请日：1989-10-04
IPC分类号： G01N21/88 , G01N21/956 , G06T7/00 , H05K3/00 , H05K3/40
CPC分类号： G06T7/0004 , G01N21/95692 , G06T7/604 , G01N2021/95653 , G01N21/8806 , G06T2207/30141
摘要： A method for inspecting the filled state of a plurality of via-holes which pass through a non-conductive circuit board and are filled with a conductive substance and an apparatus for carrying out the method are disclosed.The surface of the circuit board is illuminated in two directions to generate shadows depending on the concave or convex state of the fillers in a plurality of via-holes. An optical image of the illuminated surface of the circuit board is detected. Each edge of the two shadow areas, which exist in the detected optical image and are generated in one via-hole by light irradiation in two directions, is detected. Whether the filler in this one via-hole is in the concave state or convex state is identified according to the mutual position relationship of the detected edges. The length of each shadow area is detected, and whether the concave state or convex state of the filler is within a predetermined allowance is decided according to the detection results. The area of the image of the filler is detected according to differences between the brightness of the board surface or of the via-hole wall and the brightness of the filler in the via-hole in the detected optical image, and whether the filler is lacking or not is decided according to the detection result.
摘要翻译： 公开了一种用于检查通过非导电电路板并填充有导电物质的多个通孔的填充状态的方法和用于实施该方法的装置。 电路板的表面在两个方向上被照亮，以产生取决于多个通孔中的填料的凹凸状态的阴影。 检测电路板的被照射表面的光学图像。 检测存在于所检测的光学图像中并且在两个方向上通过光照射在一个通孔中产生的两个阴影区域的每个边缘。 根据检测到的边缘的相互位置关系来识别该通孔中的填充物是处于凹状还是凸状状态。 检测每个阴影区域的长度，根据检测结果确定填料的凹状或凸状状态是否处于预定的余量内。 根据检测到的光学图像中的基板表面或通孔壁的亮度与通孔中的填充物的亮度之间的差异来检测填充物的图像的面积，以及填充材料是否缺乏 是否根据检测结果决定。
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公开(公告)号：US4403294A
公开(公告)日：1983-09-06
申请号：US211113
申请日：1980-11-28
CPC分类号： G01N21/88 , G06T7/001 , G06T2207/30164
摘要： A surface defect inspection system comprises an image pick-up device for picking up an image by sequentially scanning the surface of an object two-dimensionally, a threshold circuit for quantizing the image signal produced from the image pick-up device as a binary code, a pattern feature extracting device for making calculations for extracting the features of image patterns from the quantized signal in synchronism with the scanning, and for temporarily storing the result of the calculations, a pattern region end decision device for deciding that individual pattern regions have ended in one direction, and a defect decision device for reading out from the pattern feature extracting device the result of the calculations on the pattern features corresponding to the positions each of the patterns in the direction perpendicular to the one direction each time of the decision that each pattern region has ended, so that the feature of each pattern scanned is compared with a predetermined reference, thus deciding and an indication of producing the presence or absence of a defect.
摘要翻译： 表面缺陷检查系统包括用于通过二维顺序地扫描对象的表面来拾取图像的图像拾取装置，用于量化由图像拾取装置产生的图像信号作为二进制代码的阈值电路， 图案特征提取装置，用于进行与扫描同步地从量化信号中提取图像图案的特征的计算，并且用于临时存储计算结果;图案区域结束判定装置，用于决定各个图案区域已经结束 一个方向，以及缺陷判定装置，用于从每个图案特征提取装置的每个图案每次都从与图形特征相对应的图案特征相对应的图案特征提取装置读出与每个方向垂直的方向上的位置的计算结果 区域已经结束，使得所扫描的每个图案的特征与预定的裁剪进行比较 因此，决定和产生缺陷的存在或缺失的指示。
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公开(公告)号：US09504963B2
公开(公告)日：2016-11-29
申请号：US13976317
申请日：2011-12-22
CPC分类号： B01D63/10 , B01D65/00 , B01D2313/00 , B01D2313/02 , B01D2313/12
摘要： A spiral separation membrane element (1A) includes: a wound body (3) including a separation membrane; a core tube (2) that penetrates the wound body (3) along the central axis of the wound body (3); and a joining portion (4) that joins the wound body (3) to the core tube (2) at at least one end face (3a) of the wound body (3). The joining portion (4) has a holding portion (41) disposed inwardly of the end face (3a) of the wound body (3) and an extending portion (42) formed integrally with the holding portion (41). The spiral separation membrane element (1A) further includes a restraining member (5A) that secures the extending portion (42) to the core tube (2).
摘要翻译： 螺旋分离膜元件（1A）包括：包括分离膜的卷绕体（3）; 沿着所述卷绕体（3）的中心轴线穿过所述卷绕体（3）的芯管（2）; 以及在所述卷绕体（3）的至少一个端面（3a）处将所述卷绕体（3）与所述芯管（2）接合的接合部（4）。 接合部（4）具有设置在卷绕体（3）的端面（3a）的内侧的保持部（41）和与保持部（41）一体形成的延伸部（42）。 螺旋分离膜元件（1A）还包括将延伸部分（42）固定到芯管（2）的约束件（5A）。
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公开(公告)号：US06757621B2
公开(公告)日：2004-06-29
申请号：US10342871
申请日：2003-01-16
申请人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
发明人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
IPC分类号： H01L2166
CPC分类号： H01L22/20 , G01N21/9501 , G01R31/2894 , G01R33/06 , H01L2223/54466 , H01L2924/0002 , H01L2924/00
摘要： A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
摘要翻译： 根据本发明的处理管理系统包括用于检查晶片上的缺陷的检查装置，通过通信网络连接的检查装置，从这些检查装置获得的检查信息和图像信息被收集以构建数据库和图像 文件，其中缺陷的定义通过基于检查信息和从检查装置获得的图像信息来表征缺陷的元件的组合来给出。 通过给出缺陷的定义，可以细分和知道缺陷的特征。 因此，可以研究缺陷的原因。
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公开(公告)号：US4776023A
公开(公告)日：1988-10-04
申请号：US850681
申请日：1986-04-11
申请人： Toshimitsu Hamada , Mineo Nomoto , Kozo Nakahata
发明人： Toshimitsu Hamada , Mineo Nomoto , Kozo Nakahata
IPC分类号： H04N7/18 , G01N21/956 , G06T7/00 , H01L51/00 , G06K9/64
CPC分类号： G06T7/001 , G01N21/95607 , G06T2207/30148
摘要： Two kinds of image corresponding to a reference pattern and a pattern to be inspected are converted into binary images and local images cut out from the binary images are compared with each other to detect differences between the cut out images and recognize these differences as a defect. One of the main subjects of the inspecting method is to moderate excess sensitivity to the different portions to the extent of allowing non-serious actual defects. By setting don't care areas each of which consists of one pixel row neighboring on a binary boundary line in the image, and comparing the remaining portions of the images other than the don't care areas by logical processing it is possible to detect various defects without regarding the quantization error as a defect.
摘要翻译： 对应于参考图案和待检查图案的两种图像被转换为二进制图像，并且将从二进制图像切出的局部图像彼此进行比较，以检测切出的图像之间的差异并将这些差异识别为缺陷。 检查方法的主要课题之一是对不同部位的过度敏感度进行调节，使得不严重的实际缺陷达到程度。 通过设置不关心区域，每个区域由图像中的二进制边界线上相邻的一个像素行组成，并且通过逻辑处理比较除了无关区域之外的图像的剩余部分，可以检测各种 缺陷而不考虑量化误差作为缺陷。
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公开(公告)号：US09061247B2
公开(公告)日：2015-06-23
申请号：US13877030
申请日：2011-09-13
申请人： Shinichi Chikura , Toshimitsu Hamada , Yasuhiro Uda , Hideyuki Yamane , Kazuhito Yoshida , Masashi Beppu , Masakatsu Takata
发明人： Shinichi Chikura , Toshimitsu Hamada , Yasuhiro Uda , Hideyuki Yamane , Kazuhito Yoshida , Masashi Beppu , Masakatsu Takata
CPC分类号： B01D65/003 , B01D63/106 , B01D63/12 , B01D2313/04 , B01D2313/083
摘要： A separation membrane module (1A) includes: a tubular pressure container (7); a plurality of separation membrane elements (2) inserted in the pressure container (7) and each having a first end member (3) and a second end member (4); and a sealing member (5A) mounted on one of or both the first end member (3) and the second end member (4) that are adjacent to each other. In a normal condition, the sealing member (5A) is located radially inward of a maximum diameter portion of the first end member (3) and/or the second end member (4) on which the sealing member (5A) is mounted. The sealing member (5A) is deformed due to contact between the adjacent separation membrane elements (2) or due to supply of a pressurized liquid into the pressure container (7), and comes into close contact with an inner circumferential face (7a) of the pressure container (7).
摘要翻译： 分离膜组件（1A）包括：管状压力容器（7）; 多个分离膜元件（2）插入压力容器（7）中，每个具有第一端部构件（3）和第二端部构件（4）; 以及安装在彼此相邻的第一端构件（3）和第二端构件（4）中的一个或两者上的密封构件（5A）。 在正常情况下，密封构件（5A）位于安装有密封构件（5A）的第一端构件（3）和/或第二端构件（4）的最大直径部分的径向内侧。 密封构件（5A）由于相邻的隔离膜元件（2）之间的接触而变形，或者由于向压力容器（7）供应加压液体而变形，并且与密封构件（5A）的内周面（7a）紧密接触 压力容器（7）。
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