公开(公告)号：US08141429B2

公开(公告)日：2012-03-27

申请号：US12804874

申请日：2010-07-30

Applicant: Shuwen Guo

Inventor： Shuwen Guo

IPC: G01L9/12

CPC classification number: G01L9/0075 ,  G01L19/04 ,  Y10T29/49002

Abstract: Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central portion thereof. The central portion of the diaphragm and the first electrode are adapted and configured to deflect in response to pressure variations encountered within an interior sensing chamber and by the pressure sensor. A sapphire substrate which has a second electrode formed thereon is fused to the sapphire diaphragm about its periphery to form a sapphire stack and to define a reference chamber therebetween. Prior to fusing the sapphire diaphragm to the sapphire substrate, all contact surfaces are chemically treated and prepared using plasma activation, so as to create a bonding layer and to reduce the temperature required for the fusion.

Abstract translation: 公开了用于高温应用的电容式压力探针或传感器。 本发明的电容式压力传感器尤其包括蓝宝石隔膜，蓝宝石隔膜设置在探头外壳的内部感测室内，并具有形成在其中心部分上的第一电极。 隔膜和第一电极的中心部分适于和构造成响应于在内部感测室和压力传感器内遇到的压力变化而偏转。 其上形成有第二电极的蓝宝石衬底在其周围与蓝宝石隔膜融合以形成蓝宝石叠层并在其间限定基准室。 在将蓝宝石隔膜熔合到蓝宝石基板之前，所有的接触表面都使用等离子体激活进行化学处理和制备，以便产生粘结层并降低融合所需的温度。

公开(公告)号：US08079262B2

公开(公告)日：2011-12-20

申请号：US11978090

申请日：2007-10-26

Applicant: Shuwen Guo

Inventor： Shuwen Guo

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/131 ,  G01P2015/0831

Abstract: A pendulous capacitive accelerometer including a substrate having a substantially planar upper surface with an electrode section, and a sensing plate having a central anchor portion supported on the upper surface of the substrate to define a hinge axis. The sensing plate includes a solid proof mass on a first side of the central anchor portion and a substantially hollow proof mass on a second side of the central anchor portion, providing for reduced overall chip size and balanced gas damping. The solid proof mass has a first lower surface with a first electrode element thereon, and the substantially hollow proof mass has a second lower surface with a second electrode element thereon. Both the solid proof mass and the hollow proof mass have the same capacitive sensing area. The sensing plate rotates about the hinge axis relative to the upper surface of the substrate in response to an acceleration.

Abstract translation: 一种下摆电容式加速度计，包括具有基本平坦的上表面的基板，具有电极部分，以及感测板，其具有支撑在基板的上表面上以限定铰链轴线的中心锚固部分。 感测板包括在中心锚固部分的第一侧上的固体质量块和在中心锚固部分的第二侧上的基本上中空的质量块，从而提供减小的整体芯片尺寸和平衡的气体阻尼。 固体质量体具有在其上具有第一电极元件的第一下表面，并且基本上中空的质量块具有在其上的第二电极元件的第二下表面。 固体质量块和中空质量块均具有相同的电容感应区域。 感测板响应于加速度相对于基板的上表面围绕铰链轴线旋转。

公开(公告)号：US20100000326A1

公开(公告)日：2010-01-07

申请号：US12215735

申请日：2008-06-30

Applicant: Shuwen Guo

Inventor： Shuwen Guo

IPC: G01L9/12

CPC classification number: G01L9/0072 ,  G01L9/12 ,  G01L19/04 ,  G01L23/125

Abstract: Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.

Abstract translation: 公开了用于高温应用的电容式压力探测器，例如用于燃气涡轮发动机中。 本发明的电容式探头或压力传感器尤其包括传感器外壳，该传感器外壳限定内部检测腔室，其具有邻近传感电极定位的压力端口和内部参考室。 参考室通过由Haynes 230合金制成的可偏转隔膜与感测室分离，其中响应于感测室中施加的压力的隔膜的偏转对应于由感测电极检测的电容值的变化。

公开(公告)号：US20060076855A1

公开(公告)日：2006-04-13

申请号：US11139207

申请日：2005-05-27

Applicant: Odd Eriksen ,  Shuwen Guo

Inventor： Odd Eriksen ,  Shuwen Guo

IPC: H01L41/04

CPC classification number: G01L9/008 ,  G01L9/0042 ,  G01L9/0055 ,  H01L41/1132 ,  Y10S439/936 ,  Y10T29/42 ,  Y10T29/49 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A pressure sensor including a movable component that is configured to move when the pressure sensor is exposed to differential pressure thereacross, and a pressure sensing component located on the movable component. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the movable component. The pressure sensor is configured such that leads can be coupled to the pressure sensing component and the pressure sensing component can output a signal via the leads, the signal being related to a pressure to which the pressure sensor is exposed.

Abstract translation: 一种压力传感器，包括被构造成当压力传感器暴露于其间的差压时移动的可移动部件以及位于可移动部件上的压力感测部件。 压力感测部件包括导电电子气体，其在可移动部件移动时改变其电阻。 压力传感器被配置为使得引线可以耦合到压力感测部件，并且压力感测部件可以经由引线输出信号，该信号与压力传感器暴露于的压力相关。

公开(公告)号：US20050013533A1

公开(公告)日：2005-01-20

申请号：US10620119

申请日：2003-07-15

Applicant: Thomas Wiegele ,  Christopher Apanius ,  Kenneth Goldman ,  Shuwen Guo ,  Loren St. Clair ,  Timothy O'Meara ,  James Pohl

Inventor： Thomas Wiegele ,  Christopher Apanius ,  Kenneth Goldman ,  Shuwen Guo ,  Loren St. Clair ,  Timothy O'Meara ,  James Pohl

IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B6/26

CPC classification number: B81C1/0023 ,  B81B2201/042 ,  G02B26/0841

Abstract: A micro mirror array including an upper wafer portion having a plurality of movable reflective surfaces located thereon, the upper wafer portion defining a coverage area in top view. The array further includes a lower wafer portion located generally below and coupled to the upper wafer portion. The lower wafer portion includes at least one connection site located thereon, the at least one connection site being electrically or operatively coupled to at least one component which can control the movement of at least one of the reflective surfaces. The at least one connection site is not generally located within the coverage area of the upper wafer portion.

Abstract translation: 一种微镜阵列，包括具有位于其上的多个可移动反射表面的上晶片部分，上晶片部分在顶视图中限定覆盖区域。 该阵列还包括下部晶片部分，该下部晶片部分大致位于上部晶片部分下方并耦合到该上部晶片部分。 下晶片部分包括位于其上的至少一个连接部位，所述至少一个连接部位电连接或可操作地耦合到至少一个可控制至少一个反射表面的部件的部件。 至少一个连接位置通常不位于上晶片部分的覆盖区域内。

公开(公告)号：US07765875B2

公开(公告)日：2010-08-03

申请号：US12215735

申请日：2008-06-30

Applicant: Shuwen Guo

Inventor： Shuwen Guo

IPC: G01L9/12

CPC classification number: G01L9/0072 ,  G01L9/12 ,  G01L19/04 ,  G01L23/125

Abstract: Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.

公开(公告)号：US20070013014A1

公开(公告)日：2007-01-18

申请号：US11523244

申请日：2006-09-19

Applicant: Shuwen Guo ,  Odd Eriksen ,  David Potasek

Inventor： Shuwen Guo ,  Odd Eriksen ,  David Potasek

IPC: H01L29/84 ,  H01L21/00

CPC classification number: C23C14/021 ,  C23C14/022 ,  C23C14/025 ,  C23C14/0682 ,  C23C14/5806 ,  C23C14/5846 ,  C23C14/5873 ,  G01L9/0042 ,  G01L19/0061 ,  G01L19/0609 ,  G01L19/147 ,  H01L2224/48472

Abstract: A harsh environment transducer including a substrate having a first surface and a second surface, wherein the second surface is in communication with the environment. The transducer includes a device layer sensor means located on the substrate for measuring a parameter associated with the environment. The sensor means including a single crystal semiconductor material having a thickness of less than about 0.5 microns. The transducer further includes an output contact located on the substrate and in electrical communication with the sensor means. The transducer includes a package having an internal package space and a port for communication with the environment. The package receives the substrate in the internal package space such that the first surface of the substrate is substantially isolated from the environment and the second surface of the substrate is substantially exposed to the environment through the port. The transducer further includes a connecting component coupled to the package and a wire electrically connecting the connecting component and the output contact such that an output of the sensor means can be communicated. An external surface of the wire is substantially platinum, and an external surface of at least one of the output contact and the connecting component is substantially platinum.

Abstract translation: 一种恶劣环境换能器，包括具有第一表面和第二表面的基底，其中第二表面与环境连通。 换能器包括位于基板上的用于测量与环境有关的参数的装置层传感器装置。 传感器装置包括厚度小于约0.5微米的单晶半导体材料。 换能器还包括位于基板上并与传感器装置电连通的输出触点。 换能器包括具有内部封装空间和用于与环境通信的端口的封装。 该封装在内部封装空间中接收衬底，使得衬底的第一表面基本上与环境隔离，并且衬底的第二表面基本上通过端口暴露于环境。 传感器还包括耦合到封装件的连接部件和将连接部件和输出触头电连接的导线，使得传感器装置的输出可以被传送。 导线的外表面基本上是铂，并且输出触点和连接部件中的至少一个的外表面基本上是铂。

公开(公告)号：US07122797B2

公开(公告)日：2006-10-17

申请号：US10658042

申请日：2003-09-09

Applicant: Shuwen Guo ,  Thomas Wiegele

Inventor： Shuwen Guo ,  Thomas Wiegele

IPC: G01J5/00

CPC classification number: G01J5/10 ,  G01H11/08 ,  G01J5/02 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/12

Abstract: A detector including a base having a recess formed therein and a diaphragm generally extending across the recess. The detector further includes an infrared sensitive component or a piezoelectric or piezoresistive element located on, above or supported by the diaphragm. The diaphragm includes a material which is generally resistant to liquid chemical etchants and which has a thermal conductivity of less than about 0.005 Wcm−1K−1.

Abstract translation: 一种检测器，包括具有形成在其中的凹部的基部和通常延伸穿过凹部的隔膜。 检测器还包括位于隔膜上方或由隔膜支撑的红外敏感元件或压电或压阻元件。 隔膜包括通常耐液体化学蚀刻剂的材料，并且其热导率小于约0.005Wcm -1 -K -1。