公开(公告)号：US20150156576A1

公开(公告)日：2015-06-04

申请号：US14402163

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R1/08

CPC classification number: H04R1/08 ,  H04R1/005 ,  H04R1/04 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed on each of the divided regions. An isolation portion that suppresses vibration from being propagated is formed on the back plate to partition the sensing units from each other.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域上形成由振动电极板和固定电极板构成的传感单元。 在背板上形成抑制振动传播的隔离部分，以将传感单元彼此隔开。

公开(公告)号：US20150104048A1

公开(公告)日：2015-04-16

申请号：US14402246

申请日：2013-05-22

Applicant: OMRON Corporation

Inventor： Yuki Uchida ,  Takashi Kasai

IPC: H04R23/00 ,  G01H11/00 ,  G01R27/26

CPC classification number: H04R23/00 ,  G01H11/00 ,  G01R27/2605 ,  H01L2224/48137 ,  H01L2924/15151 ,  H01L2924/16152 ,  H04R1/28 ,  H04R7/06 ,  H04R19/005 ,  H04R19/04 ,  H04R2201/003

Abstract: A capacitance sensor has a substrate, a vibration electrode plate formed over an upper side of the substrate, a back plate formed over the upper side of the substrate to cover the vibration electrode plate, and a fixed electrode plate arranged on the back plate facing the vibration electrode plate. At least one of the vibration electrode plate and the fixed electrode plate is divided into a plurality of regions. A sensing unit configured by the vibration electrode plate and the fixed electrode plate is formed in each of the divided regions. The plurality of sensing units output a plurality of signals having different sensitivities. At least some sensing units of the sensing units have vibration electrode plates having areas different from the areas of the vibration electrode plates in the other sensing units.

Abstract translation: 电容传感器具有基板，形成在基板的上侧的振动电极板，形成在基板的上侧以覆盖振动电极板的背板，以及布置在背板上的固定电极板， 振动电极板。 振动电极板和固定电极板中的至少一个被分成多个区域。 在每个分割区域中形成由振动电极板和固定电极板构成的感测单元。 多个感测单元输出具有不同灵敏度的多个信号。 感测单元的至少一些感测单元具有与其它感测单元中的振动电极板的区域不同的振动电极板。

公开(公告)号：US20130294622A1

公开(公告)日：2013-11-07

申请号：US13936104

申请日：2013-07-05

Applicant: STMicroelectronics S.r.I. ,  Omron Corporation

Inventor： Takashi Kasai ,  Shobu Sato ,  Yuki Uchida ,  Igino Padovani ,  Filippo David ,  Sebastiano Conti

IPC: H04R3/00

CPC classification number: H04R19/04 ,  B81B3/0021 ,  H04R1/023 ,  H04R1/086 ,  H04R3/00 ,  H04R3/005 ,  H04R19/005 ,  H04R19/016 ,  H04R31/00 ,  H04R2201/003 ,  H04R2499/11

Abstract: Provided is an acoustic transducer including: a semiconductor substrate; a vibrating membrane provided above the semiconductor substrate, including a vibrating electrode; and a fixed membrane provided above the semiconductor substrate, including a fixed electrode, the acoustic transducer detecting a sound wave according to changes in capacitances between the vibrating electrode and the fixed electrode, converting the sound wave into electrical signals, and outputting the electrical signals. At least one of the vibrating electrode and the fixed electrode is divided into a plurality of divided electrodes, and the plurality of divided electrodes outputting the electrical signals.

Abstract translation: 提供一种声换能器，包括：半导体基板; 设置在所述半导体基板上方的包括振动电极的振动膜; 以及设置在所述半导体衬底上方的固定膜，包括固定电极，所述声换能器根据所述振动电极和所述固定电极之间的电容的变化来检测声波，将所述声波转换为电信号，并输出所述电信号。 振动电极和固定电极中的至少一个分为多个分割电极，多个分割电极输出电信号。