公开(公告)号：US08286508B2

公开(公告)日：2012-10-16

申请号：US12839216

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo ,  Yosief Abraha

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo ,  Yosief Abraha

IPC: G01L3/02

CPC classification number: G01D5/20 ,  B64C25/28 ,  B64D2045/008

Abstract: A system for monitoring landing gear position. An example rotation position sensor includes a hub mount that locks within a shaft of a joint, a first sensor attached to the hub mount, and a second sensor attached to the rotatably attached part that does not rotate. The hub mount includes a nut that has a partially tapered surface and a threaded cavity. The nut is secured within the shaft. The hub mount also includes a mounting unit that has a partially tapered surface that is in opposition to the partially tapered surface of the nut. A fastener secures the hub mount to the nut. In one example, the first sensor includes a magnetometer and the second sensor includes magnet(s). In another example, the first sensor includes inductor sensor(s) and the second sensor includes device(s) that causes a change in an inductance value of the inductor sensor(s) as the joint rotates.

Abstract translation: 用于监控起落架位置的系统。 示例性旋转位置传感器包括锁定在接头的轴内的轮毂座，附接到轮毂座的第一传感器和附接到不旋转的可旋转地附接的部分的第二传感器。 毂安装件包括具有部分锥形表面和螺纹腔的螺母。 螺母固定在轴内。 毂安装件还包括安装单元，该安装单元具有与螺母的部分锥形表面相对的部分锥形表面。 紧固件将轮毂安装件固定到螺母上。 在一个示例中，第一传感器包括磁力计，第二传感器包括磁体。 在另一示例中，第一传感器包括电感传感器，并且第二传感器包括当接头旋转时引起电感器传感器的电感值变化的装置。

公开(公告)号：US20120012700A1

公开(公告)日：2012-01-19

申请号：US12839216

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo ,  Yosief Abraha

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo ,  Yosief Abraha

IPC: B64C25/00 ,  G01B7/30

CPC classification number: G01D5/20 ,  B64C25/28 ,  B64D2045/008

Abstract: A system for monitoring landing gear position. An example rotation position sensor includes a hub mount that locks within a shaft of a joint, a first sensor attached to the hub mount, and a second sensor attached to the rotatably attached part that does not rotate. The hub mount includes a nut that has a partially tapered surface and a threaded cavity. The nut is secured within the shaft. The hub mount also includes a mounting unit that has a partially tapered surface that is in opposition to the partially tapered surface of the nut. A fastener secures the hub mount to the nut. In one example, the first sensor includes a magnetometer and the second sensor includes magnet(s). In another example, the first sensor includes inductor sensor(s) and the second sensor includes device(s) that causes a change in an inductance value of the inductor sensor(s) as the joint rotates.

Abstract translation: 用于监控起落架位置的系统。 示例性旋转位置传感器包括锁定在接头的轴内的轮毂座，附接到轮毂座的第一传感器和附接到不旋转的可旋转地附接的部分的第二传感器。 毂安装件包括具有部分锥形表面和螺纹腔的螺母。 螺母固定在轴内。 毂安装件还包括安装单元，该安装单元具有与螺母的部分锥形表面相对的部分锥形表面。 紧固件将轮毂安装件固定到螺母上。 在一个示例中，第一传感器包括磁力计，第二传感器包括磁体。 在另一示例中，第一传感器包括电感传感器，并且第二传感器包括当接头旋转时引起电感器传感器的电感值变化的装置。

公开(公告)号：US20120011946A1

公开(公告)日：2012-01-19

申请号：US12839170

申请日：2010-07-19

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo ,  Chuang-Chia Lin ,  Lawrence Joseph Stang

IPC: G01D21/00

CPC classification number: B64C25/001 ,  B64C25/60 ,  B64D2045/008 ,  G01L1/142

Abstract: A strain sensor device for measuring loads on aircraft landing gear. This is done by measuring strains in the lower end of the strut, by which we infer the loading in the entire landing gear structure. These strains can be very large (as high as 10,000 microstrain) and can be imposed in numerous random directions and levels. The present invention includes a removable sensor assembly. An electromechanical means is presented that can accommodate large strains, be firmly attached to the strut, and provide good accuracy and resolution.

Abstract translation: 用于测量飞机起落架载荷的应变传感器装置。 这是通过测量支柱下端的应变来进行的，我们推断整个起落架结构的载荷。 这些菌株可以非常大（高达10,000微克），并且可以在许多随机的方向和水平上施加。 本发明包括可拆卸传感器组件。 提出了一种可以容纳大应变的机电装置，牢固地连接到支柱上，并提供良好的精度和分辨率。

公开(公告)号：US07765875B2

公开(公告)日：2010-08-03

申请号：US12215735

申请日：2008-06-30

Applicant: Shuwen Guo

Inventor： Shuwen Guo

IPC: G01L9/12

CPC classification number: G01L9/0072 ,  G01L9/12 ,  G01L19/04 ,  G01L23/125

Abstract: Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.

公开(公告)号：US07642115B2

公开(公告)日：2010-01-05

申请号：US12426310

申请日：2009-04-20

Applicant: Odd Harald Steen Eriksen ,  Kimiko J. Childress ,  Shuwen Guo

Inventor： Odd Harald Steen Eriksen ,  Kimiko J. Childress ,  Shuwen Guo

IPC: H01L21/58

CPC classification number: G01L9/0042 ,  C23C14/021 ,  C23C14/022 ,  C23C14/025 ,  C23C14/0682 ,  C23C14/5806 ,  C23C14/5846 ,  C23C14/5873 ,  G01L9/0054 ,  G01L9/008 ,  G01L19/0061 ,  G01L19/0069 ,  G01L19/0076 ,  G01L19/0084 ,  G01L19/0609 ,  G01L19/141 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/05553 ,  H01L2224/45169 ,  H01L2224/48472 ,  H01L2224/81805 ,  H01L2224/83805 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A method for forming a transducer including the step of providing a semiconductor-on-insulator wafer including first and second semiconductor layers separated by an electrically insulating layer. The method further includes depositing or growing a piezoelectric film or piezoresistive film on the wafer, depositing or growing an electrically conductive material on the piezoelectric or piezoresistive film to form at least one electrode, and depositing or growing a bonding layer including an electrical connection portion that is located on or is electrically coupled to the electrode. The method further includes the step of providing a ceramic substrate having a bonding layer located thereon, the bonding layer including an electrical connection portion and being patterned in a manner to generally match the bonding layer of the semiconductor-on-insulator wafer. The method also includes causing the bonding layer of the semiconductor-on-insulator wafer and the bonding layer of the substrate to bond together to thereby mechanically and electrically couple the semiconductor-on-insulator wafer and the substrate to form the transducer, wherein the electrical connection portions of the bonding layers of the semiconductor-on-insulator wafer and the substrate are fluidly isolated from the surrounding environment by the bonding layers.

Abstract translation: 一种用于形成换能器的方法，包括提供绝缘体上半导体晶片的步骤，该晶片包括由电绝缘层分隔的第一和第二半导体层。 该方法还包括在晶片上沉积或生长压电薄膜或压阻薄膜，在压电或压阻薄膜上沉积或生长导电材料以形成至少一个电极，以及沉积或生长包括电连接部分的粘合层， 位于电极上或与电极电耦合。 该方法还包括提供具有位于其上的结合层的陶瓷基板的步骤，所述接合层包括电连接部分并且以通常匹配绝缘体上半导体晶片的结合层的方式被图案化。 该方法还包括使绝缘体上半导体晶片的接合层和衬底的接合层接合在一起，从而机械地和电耦合绝缘体上半导体晶片和衬底以形成换能器，其中电气 绝缘体上半导体晶片和衬底的结合层的连接部分通过结合层与周围环境流体隔离。

公开(公告)号：US07404247B2

公开(公告)日：2008-07-29

申请号：US11139207

申请日：2005-05-27

Applicant: Odd Harald Steen Eriksen ,  Shuwen Guo

Inventor： Odd Harald Steen Eriksen ,  Shuwen Guo

IPC: G01R3/00

CPC classification number: G01L9/008 ,  G01L9/0042 ,  G01L9/0055 ,  H01L41/1132 ,  Y10S439/936 ,  Y10T29/42 ,  Y10T29/49 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of, after the forming or locating step, etching a cavity in the substrate below the pressure sensing component to define a diaphragm above the cavity with the pressure sensing component located on the diaphragm. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the diaphragm.

Abstract translation: 一种用于制造压力传感器的方法，包括以下步骤：提供基底并在基底上形成或定位压力感测部件。 该方法还包括以下步骤：在成形或定位步骤之后，蚀刻位于压力感测部件下方的衬底中的空腔，以在压电感测部件位于隔膜上方限定腔上方的隔膜。 压力感测部件包括导电电子气体，其在隔膜移动时改变其电阻。

公开(公告)号：US20070013014A1

公开(公告)日：2007-01-18

申请号：US11523244

申请日：2006-09-19

Applicant: Shuwen Guo ,  Odd Eriksen ,  David Potasek

Inventor： Shuwen Guo ,  Odd Eriksen ,  David Potasek

IPC: H01L29/84 ,  H01L21/00

CPC classification number: C23C14/021 ,  C23C14/022 ,  C23C14/025 ,  C23C14/0682 ,  C23C14/5806 ,  C23C14/5846 ,  C23C14/5873 ,  G01L9/0042 ,  G01L19/0061 ,  G01L19/0609 ,  G01L19/147 ,  H01L2224/48472

Abstract: A harsh environment transducer including a substrate having a first surface and a second surface, wherein the second surface is in communication with the environment. The transducer includes a device layer sensor means located on the substrate for measuring a parameter associated with the environment. The sensor means including a single crystal semiconductor material having a thickness of less than about 0.5 microns. The transducer further includes an output contact located on the substrate and in electrical communication with the sensor means. The transducer includes a package having an internal package space and a port for communication with the environment. The package receives the substrate in the internal package space such that the first surface of the substrate is substantially isolated from the environment and the second surface of the substrate is substantially exposed to the environment through the port. The transducer further includes a connecting component coupled to the package and a wire electrically connecting the connecting component and the output contact such that an output of the sensor means can be communicated. An external surface of the wire is substantially platinum, and an external surface of at least one of the output contact and the connecting component is substantially platinum.

Abstract translation: 一种恶劣环境换能器，包括具有第一表面和第二表面的基底，其中第二表面与环境连通。 换能器包括位于基板上的用于测量与环境有关的参数的装置层传感器装置。 传感器装置包括厚度小于约0.5微米的单晶半导体材料。 换能器还包括位于基板上并与传感器装置电连通的输出触点。 换能器包括具有内部封装空间和用于与环境通信的端口的封装。 该封装在内部封装空间中接收衬底，使得衬底的第一表面基本上与环境隔离，并且衬底的第二表面基本上通过端口暴露于环境。 传感器还包括耦合到封装件的连接部件和将连接部件和输出触头电连接的导线，使得传感器装置的输出可以被传送。 导线的外表面基本上是铂，并且输出触点和连接部件中的至少一个的外表面基本上是铂。

公开(公告)号：US07122797B2

公开(公告)日：2006-10-17

申请号：US10658042

申请日：2003-09-09

Applicant: Shuwen Guo ,  Thomas Wiegele

Inventor： Shuwen Guo ,  Thomas Wiegele

IPC: G01J5/00

CPC classification number: G01J5/10 ,  G01H11/08 ,  G01J5/02 ,  G01J5/024 ,  G01J5/04 ,  G01J5/046 ,  G01J5/12

Abstract: A detector including a base having a recess formed therein and a diaphragm generally extending across the recess. The detector further includes an infrared sensitive component or a piezoelectric or piezoresistive element located on, above or supported by the diaphragm. The diaphragm includes a material which is generally resistant to liquid chemical etchants and which has a thermal conductivity of less than about 0.005 Wcm−1K−1.

Abstract translation: 一种检测器，包括具有形成在其中的凹部的基部和通常延伸穿过凹部的隔膜。 检测器还包括位于隔膜上方或由隔膜支撑的红外敏感元件或压电或压阻元件。 隔膜包括通常耐液体化学蚀刻剂的材料，并且其热导率小于约0.005Wcm -1 -K -1。