公开(公告)号：US20120067500A1

公开(公告)日：2012-03-22

申请号：US13375339

申请日：2010-02-24

申请人： Tadashi Nishioka

发明人： Tadashi Nishioka

IPC分类号： B32B37/00

CPC分类号： G02F1/1303 ,  G02F2001/133325 ,  G02F2202/28 ,  Y10T156/10 ,  Y10T156/17

摘要： A liquid crystal panel P is positioned and held by a plurality of first locating pins 5 of a first holder 3 with a diagonal line of the liquid crystal panel P oriented in a vertical direction by making use of a weight of the liquid crystal panel P. A backlight B is positioned and held by a plurality of second locating pins 6 of a second holder 4 with a diagonal line of the backlight B corresponding to the diagonal line of the liquid crystal panel P extending in the vertical direction by making use of a weight of the backlight B. A bonding mechanism 13 horizontally moves the second holder 4 to bring the first and second holders 3 and 4 relatively close to each other to bond the liquid crystal panel P and the backlight B. This allows easy and precise positioning and bonding of the objects.

摘要翻译： 液晶面板P由第一保持器3的多个第一定位销5定位并保持，其中液晶面板P的对角线通过利用液晶面板P的重量在垂直方向上取向。 背光源B由第二保持器4的多个第二定位销6定位和保持，其中背光源B的对角线对应于液晶面板P的在垂直方向上延伸的对角线，通过使用重量 接合机构13水平移动第二保持器4以使第一和第二保持器3,4彼此相对靠近以将液晶面板P和背光源B接合。这允许容易且精确的定位和结合 的对象。

公开(公告)号：US5688723A

公开(公告)日：1997-11-18

申请号：US726235

申请日：1996-10-04

申请人： Chikayuki Okamoto ,  Tadashi Nishioka ,  Satoru Kawazu

发明人： Chikayuki Okamoto ,  Tadashi Nishioka ,  Satoru Kawazu

IPC分类号： H01L21/302 ,  G03F7/40 ,  H01L21/027 ,  H01L21/033 ,  H01L21/3065 ,  H01L21/30

CPC分类号： G03F7/405 ,  G03F7/40 ,  H01L21/0337 ,  H01L21/0338 ,  Y10S438/947

摘要： Sidewalls of patterned resist are reformed using a reforming agent selected from the group consisting of (a) a carbon trichloride radical, (b) a mixture of silicon ion and oxygen ion, (c) a mixture of carbon ion and carbon monoxide ion, (d) a chlorine radical, (e) aluminum trichloride liquid and (f) dibutyl magnesium liquid, and sidewall reformed portions are thus formed on the sidewalls of pattern resist. The not reformed portion of the patterned resist is removed away, and sidewall reformed portions are left on an object layer. The portion of object layer excluding the portion immediately below sidewall reformed portions is etched away, and fine patterns of object layer are formed as a result.

公开(公告)号：US5656809A

公开(公告)日：1997-08-12

申请号：US587528

申请日：1996-01-17

申请人： Norihisa Miyashita ,  Tadashi Nishioka

发明人： Norihisa Miyashita ,  Tadashi Nishioka

IPC分类号： G01B11/30 ,  G01B7/34 ,  G01N21/21 ,  G01N27/00 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/24 ,  G01Q60/38 ,  G02B21/00 ,  G02F1/01 ,  H01J37/28

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  Y10S977/87

摘要： It is an object to realize a measuring head capable of maintaining high Z direction accuracy even with a measured sample having fine, complicated and very uneven pattern configuration, in an atomic force microscope. A light beam (141) of non-linear polarization is incident upon an end portion (110a) of an upper main surface of a cantilever body (110) having a probe (2). The cantilever body (110) is a polarizing plate, and its refractive index is given by tan (a Brewster's angle of the light beam (141)). Accordingly, a reflected light beam (142) reflected at the end portion (110a) becomes light of linear polarization. A light position detector (150) including an analyzing window (150a) including a polaroid thin film as an analyzing material transmits only the light oscillating in the same direction as the electric vector of the linearly polarized reflected light beam (142) to detect its positional change. A control signal (V3) for driving a piezo element (6) is generated on the basis of a value of its output signal (V1) and a measured sample (3) is scanned in the XYZ directions.

摘要翻译： 在原子力显微镜中，即使是具有精细，复杂且非常不均匀的图案构造的测量样品，也能够实现能够保持高Z方向精度的测量头。 非线性偏光的光束（141）入射到具有探针（2）的悬臂体（110）的上主表面的端部（110a）上。 悬臂体（110）是偏振片，其折射率由tan（光束的布鲁斯特角度）给出。 因此，在端部（110a）反射的反射光束（142）变为线偏振光。 包括具有作为分析材料的偏光片薄膜的分析窗口（150a）的光位置检测器（150）仅透射与与线偏振反射光束（142）的电矢量相同的方向振荡的光，以检测其位置 更改。 基于其输出信号（V1）的值生成用于驱动压电元件（6）的控制信号（V3），并且在XYZ方向上扫描测量样品（3）。

公开(公告)号：US5652428A

公开(公告)日：1997-07-29

申请号：US589515

申请日：1996-01-22

申请人： Tadashi Nishioka ,  Takao Yasue

发明人： Tadashi Nishioka ,  Takao Yasue

IPC分类号： G01B7/34 ,  G01N1/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/06 ,  G01Q30/08 ,  G01Q30/20 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/24 ,  G01Q80/00 ,  G01Q90/00 ,  G02B21/00 ,  H01J37/28

CPC分类号： G01Q70/00 ,  B82Y35/00 ,  Y10S977/85 ,  Y10S977/852 ,  Y10S977/86 ,  Y10S977/871 ,  Y10S977/881

摘要： A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample and the probe, the step of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step of repeating the step of pulse application and the step of determination of cleanness until the probe is cleaned, the step for replacing the standard sample by a sample for measurement after cleanness of the probe is confirmed, and the step of drawing.

摘要翻译： 使用扫描探针显微镜的方法包括在环境大气中将探针安装到扫描探针显微镜的步骤，在反馈控制下保持恒定的隧道电流的同时通过二维扫描在标准样品的表面上拉伸的步骤 标准样品和探针之间的距离;在二维扫描期间在探针和标准样品之间施加脉冲电压的步骤，在每个扫描点停止反馈控制的步骤，获得 将所获得的绘制图像与在标准样品的表面上绘制的步骤中获得的绘制图像进行比较，从而确定探针的清洁度，重复脉冲施加步骤的步骤和确定清洁度的步骤直到 探针被清洁，确认了在探头清洁后通过样品进行测量的步骤来替代标准样品 绘图步骤

公开(公告)号：US5477732A

公开(公告)日：1995-12-26

申请号：US314962

申请日：1994-09-29

申请人： Takao Yasue ,  Tadashi Nishioka

发明人： Takao Yasue ,  Tadashi Nishioka

IPC分类号： G01N19/00 ,  G01B21/30 ,  G01L1/00 ,  G01N13/00 ,  G01N19/04 ,  G01Q20/02 ,  G01Q60/24 ,  G01Q60/28 ,  H01L21/30 ,  H01L21/66

CPC分类号： G01Q60/28 ,  B82Y35/00 ,  G01N13/00 ,  G01N19/04 ,  H01L22/20 ,  H01L22/12

摘要： An adhesion measuring apparatus includes a measuring device for measuring a Force-Curve at each of multiple measuring points on a sample surface using a cantilever provided at its distal end with a probe which is made of a material to be formed on the sample surface, and a distribution image forming device for calculating adhesion between a material making up the sample surface and the material to be formed on the sample surface from an output of the measuring device, and forming an image of adhesion distribution on the sample surface. An adhesion measuring method includes the steps of adjusting the spacing between a probe which is provided at the distal end of a cantilever and made of a material to be formed on a sample surface and the sample surface to measure a Force-Curve at each of multiple measuring points on the sample surface, calculating adhesion between a material making up the sample surface and the material to be formed on the sample surface at each of the measuring points from the result of measuring the Force-Curve, and forming an image of adhesion distribution on the sample surface from the adhesion calculated for each of the measuring points. With the present adhesion measuring apparatus and method, the condition of the sample surface can be accurately determined at an atomic level.

摘要翻译： 附着测量装置包括：测量装置，用于在样品表面上的多个测量点的每个测量点上使用在其远端设置的悬臂，用由要在样品表面上形成的材料制成的探针来测量力曲线;以及 分布图像形成装置，用于从测量装置的输出计算构成样品表面的材料与样品表面上形成的材料之间的粘合力，并在样品表面上形成粘合分布图像。 附着测量方法包括以下步骤：调整设置在悬臂的远端并由要形成在样品表面上的材料制成的探针与样品表面之间的间隔，以在多个样品中的每一个处测量力曲线 测量样品表面的测量点，从测量力曲线的结果计算构成样品表面的材料与待测样品表面上待形成的材料之间的粘附力，并形成粘附分布图 在样品表面上从为每个测量点计算的粘附力。 利用本粘合测量装置和方法，能够以原子级准确地确定样品表面的状态。