Support platform of non-contact transfer apparatus
    39.
    发明授权
    Support platform of non-contact transfer apparatus 有权
    非接触式传送装置的支撑平台

    公开(公告)号:US07927045B2

    公开(公告)日:2011-04-19

    申请号:US11455930

    申请日:2006-06-20

    IPC分类号: B65G53/00

    CPC分类号: H01L21/67784

    摘要: Provided is a support platform of a non-contact transfer apparatus. The support platform is arranged horizontally and includes first and second members adding a lift force to a first force for lifting peripheral portions of a transferred object, wherein the first force is lower than a second force lifting a central portion of the transferred object.

    摘要翻译: 提供一种非接触式传送装置的支撑平台。 支撑平台水平地布置,并且包括第一和第二构件,其将第一和第二构件加到用于提升转移物体的周边部分的第一力,其中第一力低于提升被转移物体的中心部分的第二力。