摘要:
Four load lock chambers 2, 2′, 2″, 2′″ and eight process chambers 101, 102, 103, 104, 105, 106, 107 and 108 are hermetically connected around the outside of a central separation chamber 3 via gate valves 5—both types of chambers being stacked up in two places—and each chamber is capable of being evacuated by its respective vacuum pump system 301, 201 and 100. A transfer mechanism 42 inside separation chamber 3 removes a substrate 9 from a load lock chamber 2, 2′, 2″, 2′″ transports it to each of the process chambers 101, 102, 103, 104, 105, 106, 107 and 108 in a prescribed sequence and thereafter returns it to load lock chamber 2, 2′, 2″, 2′″. Each load lock chamber 2 has inside it a substrate holder which always holds a single substrate 9 in the same position.
摘要:
A magnetic recording/reproduction apparatus of the present invention, which records/reproduces information on/from a magnetic tape by passing the tape around a rotary head cylinder having a rotary head for a predetermined arc, includes: a capstan shaft; a pinch roller; a first reel base rotatably attached to a shaft; a second reel base rotatably attached to a shaft; and an idler supported swingably to swing to the second reel base when the capstan is rotated in a first direction and to the first reel base when the capstan shaft is rotated in a second direction, wherein the idler includes a gear portion which rotates in association with the rotation of the capstan shaft. The above components of the magnetic recording/reproduction apparatus are situated in such a manner that when the running of a magnetic tape is to be shifted from a first direction to a second direction, the rotation of the capstan shaft, in the first direction stops, the pinch roller moves away from the capstan shaft, the capstan shaft is rotated in the second direction by a predetermined amount so that the idler swings to the first reel base, the capstan shaft stops again, the pinch roller presses the magnetic tape against the capstan shaft, and the capstan shaft is rotated again in the second direction and the gear portion to be coupled with the first reel base, the gear portion rotating the first reel base in a direction in which the magnetic tape is wound onto the first reel.
摘要:
A reel stand includes (a) a reel base for engaging a reel and driving the reel, (b) a bearing disposed in the reel base and being extended through by a rotary shaft, and (c) a spring being urged to the rotary shaft. This construction allows the reel stand to integrate a brake torque mechanism into its downsized body, and to provide a tape with uniform tape tension when the tape is taken up or supplied. The spring is pressed to the shaft to produce brake torque, which lowers the peripheral velocity of the shaft. As a result, less frictional heat is produced, which reduces changes in friction factors due to the heat.
摘要:
The invention is concerned with a magnetic recording/playback apparatus in which a magnetic tape is pulled out from a tape cassette and wound around a cylindrical rotary head cylinder, having a rotary head built therein, over a predetermined angle to record/playback signals through the rotary head, and more particularly, with a tape guide post driving mechanism, a pinch roller pressing mechanism and a tension serve mechanism. Specifically, the invention provides a tape guide post driving device which can reduce the size, weight and thickness of the apparatus by ensuring a large angle of thickness of the apparatus by ensuring a large angle of rotation of a rotating member, which includes a tension arm, in a direct manner. Also, the invention realizes a pinch roller pressing mechanism in which a sufficient stroke can be obtained even when a cam gear is reduced in its diameter and can provide a sufficient stroke even with a small amount of rotation. Further, the invention prolongs the service life and achieves a remarkable reduction in both the number of parts used and the number of assembling steps by using a pad brake (brake member), instead of a band brake, for braking a rotating member and bringing the brake member into full contact over the former's entire surface with the member being braked.
摘要:
A tape cassette including a housing accommodating a pair of tape reels around which a tape is wound, the housing having a front opening at a front face where the tape is exposed in a state of being stretched, and a bottom opening and a top opening which adjoin the front opening; a front cover moving between a closed position opposed to a front face of the tape in the state of being stretched for covering the front opening and an open position for uncovering the front opening; a rear cover moving between a closed position opposed to a rear face of the tape in the state of being stretched for covering the tape and an open position for exposing the tape; a top cover connected to the front cover and to the rear cover and moving between a closed position for covering the top opening and an open position for uncovering the top opening; a first restricting device for controlling the front cover so as to move along a first locus; a second restricting device for controlling the rear cover so as to move along a second locus in association with the movement of the front cover; and a third restricting device for controlling the top cover so as to move along a third locus in association with the movement of the front cover.
摘要:
The invention relates to a loading mechanism for a magnetic recording/playback apparatus and is directed to provide a positioning mechanism which can reliably and fixedly position a loading boat with a quite simple structure when completing an operation of withdrawing a magnetic tape. The invention is also directed to provide a loading post driving and pressing device which can eliminate the need of using a two-staged gear fitted with a spring, position two loading posts under pressing by one urging means, and realize reduction of the size, weight and thickness. The invention is further directed to provide a loading post driving device in which a gear serving as a prime mover part has the two-stages structure to realize reduction of the size, weight and height, and driving force can be directly transmitted from the gear serving as a prime mover part to a large loading gear by using no geneva gear.
摘要:
A tape loading device of a magnetic recording/reproducing apparatus, includes: first and second tape guide posts for taking a tape, extending between a supply side reel and a winding side reel of a tape cassette, from the tape cassette and travelling the tape to a predetermined position located outside the tape cassette; first and second loading guides for respectively guiding travels of the first and second tape guide posts to take out the tape from the tape cassette to the predetermined position; a common guide for joining a part of the first loading guide and a part of second loading guide into the same path so as to guide the first and second loading guides in order; and a branch pointer arm for switching between the common guide and the first and second loading guides, the branch pointer arm being urged to open one loading guide of the loading guides and close the other loading guide thereof, and pressed by one tape guide post of the tape guide posts when the tape guide post, moving along the common guide in precedence to the other tape guide post, has guided by the one loading guide which has been opened, whereby the one loading guide is closed and the other loading guide is opened to guide the other tape guide post of the tape guide posts.
摘要:
A lens unit has an optical system having at least one lens, a lens holder supporting the optical system and a lens frame having a guide component. The guide component guides a movement of the lens holder in a first direction. The lens holder has a first portion and a second portion. The first portion is disposed slidably over the guide component. The second portion is disposed slidably over the guide component and disposed spaced apart from the first portion in the first direction. The guide component is sandwiched between the first portion and the second portion by an elastic force of the first portion and/or the second portion.
摘要:
The present invention aims to provide an imaging device and a camera realizing simultaneously a high magnification zoom lens system and the miniaturization of the device. The imaging device (2) includes a first lens group (G1), a second group frame unit (42), a first group frame unit (41), a motor unit (32), a third lens group (G3), and a CCD unit (33). The first lens group (G1) takes in a light flux incident along a first optical axis (A1). The second group frame unit (42) bends the light flux incident along the first optical axis (A1) to a direction along a second optical axis (A2). The first group frame unit (41) retains the first lens group (G1), and moves the first lens group (G1) in the direction along the first optical axis (A1). The motor unit (32) drives the first group frame unit (41). The first group frame unit (41) includes a driving frame (51) movable in the direction along the first optical axis (A1), and a first group frame retaining the first lens group (G1) and able to move in the direction along the first optical axis (A1) with respect to the driving frame (51).
摘要:
A transistor type ferroelectric memory including: a substrate; a gate electrode formed above the substrate; a ferroelectric layer formed above the substrate to cover the gate electrode; a source electrode formed above the ferroelectric layer; a drain electrode formed above the ferroelectric layer and apart from the source electrode; and a channel layer formed above the ferroelectric layer and between the source electrode and the drain electrode.