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48 条记录 (耗时 0.028 秒)

    Optical CT imaging device
    34.
    发明授权
    Optical CT imaging device 失效
    光学CT成像装置

    公开(公告)号：US5349951A

    公开(公告)日：1994-09-27

    申请号：US35117

    申请日：1993-03-19

    申请人： Yoshitoshi Ito ,  Fumio Kawaguchi ,  Yukito Shinohara ,  Munetaka Haida

    发明人： Yoshitoshi Ito ,  Fumio Kawaguchi ,  Yukito Shinohara ,  Munetaka Haida

    IPC分类号： A61B6/03 ,  A61B5/00 ,  A61B5/145 ,  A61B5/1455 ,  A61B10/00 ,  G01N21/17

    CPC分类号： A61B5/0073 ,  A61B5/7257

    摘要： A device for measuring the inside information of a light-scattering specimen using a Line Spread Function (LSF) function of a light-scattering specimen and the intensity distribution of light which is transmitted through the light scattering specimen in repeating light scattering and output from the light scattering specimen. The device comprises: an optical system for illumination for irradiating a specimen to be measured (a light scattering specimen); an optical system for detection for detecting the transmitted light through the specimen; and a data processor for operating the detected transmitted light data. The above-mentioned data processor operates the inside information of a specimen to be measured based on the light intensity distribution of the transmitted light through the specimen and an LSF function which is newly defined, and displays the inside information as a tomograph image.

    摘要翻译： 一种使用光散射试样的线扩展函数（LSF）函数测量光散射样本的内部信息的装置和通过光散射样本透射的光的强度分布，重复光散射并从 光散射试样。 该装置包括：用于照射待测样品的光学系统（光散射试样）; 用于检测通过样本的透射光的检测用光学系统; 以及用于操作检测到的发送光数据的数据处理器。 上述数据处理器基于通过样本的透射光的光强度分布和新定义的LSF功能来操作要测量的样本的内部信息，并且将内部信息显示为断层图像。

    Multispindle automatic lathe
    35.
    发明授权
    Multispindle automatic lathe 失效
    多功能自动车床

    公开(公告)号：US5193422A

    公开(公告)日：1993-03-16

    申请号：US786070

    申请日：1991-10-31

    申请人： Yuuichi Mukai ,  Yoshitoshi Ito ,  Takayuki Nagato ,  Tamotsu Tonomura

    发明人： Yuuichi Mukai ,  Yoshitoshi Ito ,  Takayuki Nagato ,  Tamotsu Tonomura

    IPC分类号： B23B9/00 ,  B23B19/02 ,  B23Q39/04

    CPC分类号： B23Q39/044 ,  Y10T29/5129 ,  Y10T82/2524

    摘要： A multispindle automatic lathe has a main shaft drive motor (M3) for driving spindles (13) via a driving power transmission system (2a, 12, 14, 15, 20, 21, 22, 27, 28, 31), a feed and index driving motor (M2) operating a low and high speeds in timed sequence for feeding a plurality of cross tool slides (16) via a feed driving system (3a, 61, 62, 64, 65, 67, 68, 69, 70) and indexing the spindle carrier (11) via an index driving system (62, 71, 72, 73, 74, 75, 76, 77), and a feed and index drive motor (M1) for feeding a plurality of end tool slides (18) via a feed driving system (4a, 18a, 78, 79). A ring gear (65) is disposed around and in an independently rotatable form separate from the spindle carrier (11), a cam shaft (68) for each cross tool slide has mounted thereon a gear (70) engaging the ring gear (65) and a cam (69 ), and a cam roller (67) is disposed on each cross tool slide (16) and engages with the cam surface of a respective cam, whereby rotation of the cams by the feed driving system reciprocates the cross tool slides in directions transverse to the spindle shaft. An index gear (77) on the spindle carrier is rotated in timed sequence with the cross tool slides by the feed and index drive motor.

    摘要翻译： 多轴自动车床具有经由驱动动力传递系统（2a，12,14,15,20,21,22,27,28,31）驱动主轴（13）的主轴驱动马达（M3），进给和 索引驱动电机（M2）以定时顺序操作低速和高速，用于经由进给驱动系统（3a，61,62,64,65,67,68,69,70）供给多个十字刀片滑块（16） 以及通过索引驱动系统（62,71,72,73,74,75,76,77）对所述主轴托架（11）进行分度，以及用于馈送多个末端工具滑块的进给和转向驱动马达（M1） （4a，18a，78,79）。 环形齿轮（65）围绕主轴托架（11）设置在独立旋转形式的周围，用于每个十字工具滑块的凸轮轴（68）上安装有与齿圈（65）接合的齿轮（70） 并且凸轮（69）和凸轮辊（67）设置在每个十字工具滑动件（16）上并且与相应凸轮的凸轮表面接合，由此通过进给驱动系统的凸轮的旋转使十字工具滑块 在横向于主轴的方向上。 主轴托架上的分度齿轮（77）按照时序顺序旋转，十字工具通过进给和转向驱动电机滑动。

    Equipment for optically measuring the height of step
    36.
    发明授权
    Equipment for optically measuring the height of step 失效
    用于光学测量台阶高度的设备

    公开(公告)号：US4770532A

    公开(公告)日：1988-09-13

    申请号：US17610

    申请日：1987-02-24

    申请人： Yoshitoshi Ito

    发明人： Yoshitoshi Ito

    IPC分类号： G01B11/02 ,  G01B11/06 ,  G01B11/22 ,  G01B11/24 ,  G01B11/245 ,  G01B11/30 ,  G02B21/00 ,  G01B11/00

    CPC分类号： G01B11/0608

    摘要： An equipment for optically measuring the height of step according to the present invention is characterized in that a linearly polarized laser beam from a laser source is guided onto the side of an object through an optical fiber transferring said beam in the state that the plane of polarization thereof is maintained, the beam emitted from the optical fiber is applied onto the spots in proximity to each other on the surface of the object through the intermediary of an optical system separating said beam into two component beams having planes of polarization perpendicular to each other, the beams reflected from the surface of the object are made to go back through the aforesaid optical system so that two optical paths overlap each other, and are passed in the reverse direction through the aforesaid optical fiber and guided onto the side of the laser source, the optical power of the component parallel to the plane of polarization of the incident beam and the component perpendicular thereto out of the reflected beams emitted from the optical fiber are detected by photo detectors respectively, and the height of step in the object is determined from the ratio between these optical powers.

    摘要翻译： 根据本发明的用于光学测量台阶高度的设备的特征在于，来自激光源的线性偏振激光束通过光纤传导的光纤被引导到物体的侧面，该光纤在偏振面 保持光束发射的光束通过将所述光束分离成具有彼此垂直的偏振平面的两个分量光束的光学系统的中心而被施加到物体表面上彼此接近的点上， 从物体表面反射的光束通过上述光学系统返回，使得两个光路彼此重叠，并且通过前述光纤沿相反方向通过并被引导到激光源的一侧， 该分量的光功率平行于入射光束的偏振平面和垂直于其的分量 由光检测器分别检测出从光纤发出的反射光束，并根据这些光功率之间的比率确定物体中的台阶高度。

    Pattern defect inspection apparatus
    37.
    发明授权
    Pattern defect inspection apparatus 失效
    图案缺陷检查装置

    公开(公告)号：US4731855A

    公开(公告)日：1988-03-15

    申请号：US720730

    申请日：1985-04-08

    申请人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

    发明人： Kyo Suda ,  Shigeharu Kimura ,  Shinobu Hase ,  Chusuke Munakata ,  Kanji Kinameri ,  Yoshitoshi Ito ,  Hiroto Nagatomo ,  Yuzo Taniguchi ,  Mikihito Saito

    IPC分类号： G01N21/956 ,  H01L21/26 ,  G06K9/00

    CPC分类号： G01N21/956 ,  H01L21/26

    摘要： A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected diffraction lights generated thereby and processing the detected lights. It comprises an abnormal direction signal detector including photo-detectors having wide light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from a normal pattern do not normally reach, a normal pattern detector including photo-detectors having large light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from the normal pattern reach, and a defect discriminator for determining if the abnormal direction signals are due to a true defect or not in accordance with the signals from the abnormal direction signal detector and the normal pattern detector.

    摘要翻译： 图案缺陷检查装置通过用预定光斑尺寸的相干光束将图案通常扫描到其表面来检测在半导体晶片上形成的图案中的缺陷的存在或不存在，检测由此产生的反射衍射光并且处理检测到的 灯光 它包括异常方向信号检测器，其包括具有布置在多个空间区域中的宽光接收区域的光检测器，正常图案的反射衍射光通常不能正常到达，包括光检测器的正常图案检测器具有大的光接收面积 布置在从正常图案到达的反射衍射光的多个空间区域中，以及用于根据来自异常方向信号检测器的信号和用于确定异常方向信号是否由于真实缺陷而导致的缺陷鉴别器 正常模式检测器