摘要:
A multipass printing is performed by setting the print permission ratios, predetermined for the nozzles in adjoining first and second blocks, in a way that satisfies the following conditions (i) and (ii). (i) The print permission ratio in the boundary section between the first and second blocks represents a value between the print permission ratio in the non-boundary section of the first block and that of the second block. (ii) The print permission ratios in the non-boundary sections of the first and second blocks are each set substantively constant. This arrangement allows the print permission ratio to be adjusted among nozzle blocks, thus satisfying the condition that the print permission ratio in a boundary between adjoining nozzles blocks does not change sharply and that the print permission ratio is substantively constant in each of the nozzle blocks. It is possible to suppress “interband variations”, “seam lines” and “intraband variations” coincidentally.
摘要:
A processing temperature of thermal processing is corrected based on measurement of a first dimension of a resist pattern on a substrate from a previously obtained relation between a dimension of a resist pattern and a temperature of thermal processing, a second dimension of the resist pattern after thermal processing is performed at the corrected processing temperature is measured, a distribution within the substrate of the second dimension is classified into a linear component expressed by an approximated curved surface and a nonlinear component, a processing condition of exposure processing is corrected based on the linear component from a previously obtained relation between a dimension of a resist pattern and a processing condition of exposure processing, and thermal processing at the processing temperature corrected in a temperature correcting step and exposure processing under the processing condition corrected in an exposure condition correcting step are performed to form a predetermined pattern.
摘要:
In a pattern measuring unit installed in a coating and developing treatment system, the height of a pattern formed on a substrate is measured using the Scatterometry method. Based on the measured height of the pattern, an appropriate number of rotations of the substrate during application of a coating solution is calculated, so that the rotation of the substrate during the application is controlled by the calculated number of rotations of the substrate. Since the number of rotations of the substrate when the coating solution is applied to the substrate is controlled, it is unnecessary to stop the system which performs photolithography processing on the substrate, resulting in improved productivity of the substrate.
摘要:
The present invention provides an ink jet printing apparatus configured to allow the ejection performance of a print head with a large number of nozzles densely arranged therein to be kept in a favorable condition by preliminary ejection and to enable degradation of images caused by the preliminary ejection to be alleviated. Preliminary ejection data generation unit is provided which generates preliminary ejection data designed to allow ink not contributing to image printing to be ejected through nozzles 103A and 103B in a print head 21-1. The preliminary ejection data generation unit generates preliminary ejection data designed to allow the ink to be preliminarily ejected onto a print medium through the nozzles 103B, which are included in the plural types of nozzles and which offer a smaller ejection amount than the other nozzles 103A.
摘要:
In a multipass printing system, a quality image is printed even when the number of passes is reduced to increase a printing speed. For this purpose, in a multipass printing system which repetitively alternates a printing scan, which causes the print head to eject ink from the nozzles as it moves in the main scan direction, and a feeding operation, which feeds a print medium in a sub scan direction, the feed distance of the print medium is set according to a density of an image being printed on the print medium.
摘要:
In the present invention, a plurality of heat treatment units are arranged side by side in a linear form and a substrate transfer mechanism for transferring the substrate between the heat treatment units is provided in a heat treatment apparatus. The substrate is sequentially heat-treated in the arrangement order, whereby one heat treatment as a whole is dividedly and successively performed in the plurality of heat treatment units. This allows substrates to be heat-treated along the same route and uniforms the thermal history among the substrates. At the time when heat-treating a plurality of substrates, the present invention causes less variation in thermal history among the substrates as compared to the case of parallel heat treatments.
摘要:
A printing apparatus divides printing elements of a printhead into blocks, time-divisionally drives the printing elements, and prints a halftone image on a printing medium in accordance with a result obtained by performing digital-halftoning for input multi-valued image data in each matrix of a predetermined size. The apparatus includes a scanner for reciprocally scanning the printhead, a conveyor for conveying the printing medium in a direction different from a scanning direction of the printhead, and a controller for printing a halftone image in each matrix. An arrayed direction of the printing elements is the convey direction of the conveyor. The controller sets a size of the block to be equal to or an integral multiple of a size of the matrix in the convey direction. The digital-halftoning increases the number of dots from a center of the matrix as a density expressed by the multi-valued image data increases.
摘要:
The present invention makes it possible to print a good quality image even if ink is ejected abnormally from a nozzle. To attain this, when there is an abnormal nozzle (N) exhibiting an abnormal ink ejection state, the printing data corresponding to the abnormal nozzle (N) is added to the printing data corresponding to neighboring nozzles (N−1) and (N+1) arranged in the neighborhood of the abnormal nozzle (N). In this way, the printing data corresponding to the abnormal nozzle (N) can be compensated.
摘要:
In a pattern measuring unit installed in a coating and developing treatment system, the height of a pattern formed on a substrate is measured using the Scatterometry method. Based on the measured height of the pattern, an appropriate number of rotations of the substrate during application of a coating solution is calculated, so that the rotation of the substrate during the application is controlled by the calculated number of rotations of the substrate. Since the number of rotations of the substrate when the coating solution is applied to the substrate is controlled, it is unnecessary to stop the system which performs photolithography processing on the substrate, resulting in improved productivity of the substrate.
摘要:
A 1,3-dihydro-2H-indol-2-one derivative expressed by Formula 1 (wherein R1 is a halogen atom, a C1 to C4 alkyl group, etc., and R2 is a hydrogen atom, a halogen atom, etc., or R2 is in the 6-position of the indol-2-one and R1 and R2 join together to form a C3 to C6 alkylene group, R3 is a halogen atom, a hydroxyl group, etc., and R4 is a hydrogen atom, a halogen atom, a C1 to C4 alkyl group, etc., or R4 is in the 3-position of the phenyl and R3 and R4 join together to form a methylenedioxy group, R5 is a hydrogen atom or a fluorine atom, R6 is an ethylamino group, a dimethylamino group, etc., R7 is a C1 to C4 alkoxy group, and R8 is a C1 to C4 alkoxy group), or a pharmaceutically acceptable salt of this derivative. This is a novel compound that has antagonistic activity against an aruginine-vasopressin V1b receptor.