-
31.发明授权Method for producing color filter, color filter, liquid crystal display device and producing apparatus 有权彩色滤光片，滤色片，液晶显示装置及制作装置的制造方法公开(公告)号：US07999907B2
公开(公告)日：2011-08-16
申请号：US12705049
申请日：2010-02-12
IPC分类号： G02F1/13
CPC分类号： G02B5/201 , G02F1/133516 , G02F1/134336 , G02F2202/28
摘要： Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO2. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.
摘要翻译： 防止蚀刻停止层的剥离。 本发明的滤色器包括主要由SnO 2组成的无机保护膜（蚀刻阻挡层）。 由于无机保护膜不仅具有高的电阻率，而且具有接近于透明电极的线性膨胀系数的线性膨胀系数，所以无机保护膜即使在透明电极或树脂层上也不脱离透明电极或树脂层 加工对象物。 由于无机保护膜和透明电极可以形成在相同的成膜室中，所以与常规技术相比可以缩短生产滤色器所需的时间。
-
32.发明申请FILM FORMING METHOD FOR ANTIREFLECTION FILM, ANTIREFLECTION FILM, AND FILM FORMING DEVICE 审中-公开抗反射膜成膜方法，抗反射膜和薄膜成膜装置公开(公告)号：US20110194181A1
公开(公告)日：2011-08-11
申请号：US13123624
申请日：2009-10-14
CPC分类号： G02B1/113 , C23C14/086 , C23C14/3492
摘要： A film forming method for an antireflection film that has a first indium oxide-based thin film and a second indium oxide-based thin film that is laminated on the first indium oxide-based thin film, including a first film forming step that forms the first indium oxide-based thin film by performing sputtering using a first indium oxide-based target in a first reactive gas that contains one, two, or three types selected from a group consisting of oxygen gas, hydrogen gas, and water vapor; and a second film forming step that forms on the first indium oxide-based thin film the second indium oxide-based thin film by performing sputtering using a second indium oxide-based target in a second reactive gas that contains one, two, or three types selected from a group consisting of oxygen gas, hydrogen gas, and water vapor, and that has a different composition from the first reactive gas.
摘要翻译： 一种抗反射膜的成膜方法，其具有层叠在第一氧化铟系薄膜上的第一氧化铟系薄膜和第二氧化铟系薄膜，该第一氧化铟系薄膜和第二氧化铟系薄膜包括形成第一 氧化铟系薄膜，其通过使用第一反应气体中的第一氧化铟系靶进行溅射，所述第一反应气体含有选自氧气，氢气和水蒸气中的一种，两种或三种; 以及第二成膜步骤，通过在包含一种，两种或三种类型的第二反应性气体中使用第二氧化铟基靶进行溅射，在第一氧化铟基薄膜上形成第二氧化铟基薄膜 选自氧气，氢气和水蒸气，并且与第一反应气体具有不同的组成。
-
公开(公告)号：US20100206719A1
公开(公告)日：2010-08-19
申请号：US12678399
申请日：2008-09-17
IPC分类号： C23C14/35
CPC分类号： H01L31/1884 , C23C14/08 , C23C14/086 , C23C14/35 , H01L31/022483 , H01L31/076 , Y02E10/548
摘要： A method for manufacturing a solar cell provided with an upper electrode which functions as an electrode for extracting electric power at a light incidence side of the solar cell and includes a ZnO-based transparent conductive film, the method comprising: forming the upper electrode by sputtering a target on which a formation material of the transparent conductive film is provided while applying sputtering voltage of 340V or less and generating a horizontal magnetic field on a target surface.
摘要翻译： 一种制造太阳能电池的方法，该太阳能电池具有作为在太阳能电池的光入射侧提取电力的电极的上部电极，并且包括ZnO系透明导电膜，该方法包括：通过溅射形成上部电极 在施加340V以下的溅射电压并且在目标表面上产生水平磁场的同时设置有透明导电膜的形成材料的靶。
-
公开(公告)号：US20100187100A1
公开(公告)日：2010-07-29
申请号：US12668962
申请日：2008-08-20
IPC分类号： C23C14/35
CPC分类号： C23C14/086 , C23C14/35 , H01L31/1884 , Y02E10/50
摘要： A method for forming a transparent conductive film forms the transparent conductive film containing ZnO as a basic element on a substrate by a sputtering which is performed by applying a sputtering voltage to a target made of a material to form the transparent conductive film and generating a horizontal magnetic field over a surface of the target. The sputtering is performed by setting the sputtering voltage to 340 V or less.
摘要翻译： 形成透明导电膜的方法通过溅射形成在衬底上含有ZnO作为基本元素的透明导电膜，其通过将溅射电压施加到由材料制成的靶材上以形成透明导电膜并产生水平 在目标表面上的磁场。 通过将溅射电压设定为340V以下来进行溅射。
-
公开(公告)号：US08460965B2
公开(公告)日：2013-06-11
申请号：US13124529
申请日：2009-10-15
IPC分类号： H01L21/00
CPC分类号： H01L31/02366 , H01L31/022466 , H01L31/1884 , Y02E10/50
摘要： A manufacturing method for a solar cell including an upper electrode extracting an electrode at an incident light side, the upper electrode including a transparent conductive film, a basic structural element of the transparent conductive film being any one of an indium (In), a zinc (Zn), and tin (Sn), the manufacturing method including: a step A forming a texture on a front surface of a transparent substrate using a wet etching method, the transparent conductive film being formed on the transparent substrate, wherein in the step A, when the texture is formed, a metal thin film is formed on the transparent substrate, and an anisotropic etching is performed with the metal thin film being a mask.
摘要翻译： 一种太阳能电池的制造方法，其特征在于，包括在入射光侧提取电极的上部电极，所述上部电极包括透明导电膜，所述透明导电膜的基本结构元素为铟（In），锌 （Zn）和锡（Sn），所述制造方法包括：步骤A，其使用湿式蚀刻方法在透明基板的正面上形成纹理，所述透明导电膜形成在所述透明基板上，其中，在所述工序 如图A所示，当形成纹理时，在透明基板上形成金属薄膜，以金属薄膜为掩模进行各向异性蚀刻。
-
公开(公告)号：US08207949B2
公开(公告)日：2012-06-26
申请号：US12567089
申请日：2009-09-25
申请人： Hirohisa Takahashi , Satoru Takasawa , Isao Sugiura , Atsushi Ota , Satoru Ishibashi , Haruhiko Yamamoto
发明人： Hirohisa Takahashi , Satoru Takasawa , Isao Sugiura , Atsushi Ota , Satoru Ishibashi , Haruhiko Yamamoto
IPC分类号： G06F3/041
CPC分类号： G06F3/041 , G06F3/045 , Y10T29/49117
摘要： A highly durable touch panel is provided. A touch panel according to the present invention includes a deformable flexible panel, and a transparent electrode film containing In2O3 as a primary component and containing Ti is exposed to a surface of a lower electrode film of a display device. Since such a transparent electrode film has a high abrasion resistance as compared to a conventional one (such as, an ITO thin film), the transparent electrode film is neither clouded nor cracked even if the lower electrode film is repeatedly pressed. Therefore, the touch panel according to the present invention is highly durable.
摘要翻译： 提供高度耐用的触摸面板。 根据本发明的触摸面板包括可变形的柔性面板，并且包含In 2 O 3作为主要成分并且含有Ti的透明电极膜暴露于显示装置的下电极膜的表面。 由于这种透明电极膜与以往的透明电极膜相比具有高耐磨性（例如ITO薄膜），所以即使下反射膜反复被压制，透明电极膜也不会发生糊化或者不破裂。 因此，根据本发明的触摸面板是高度耐用的。
-
公开(公告)号：US20120097534A1
公开(公告)日：2012-04-26
申请号：US13060623
申请日：2009-08-28
IPC分类号： C23C14/35
CPC分类号： C23C14/3407 , C23C14/35 , H01J37/3408 , H01J37/3452
摘要： A magnetron sputtering cathode includes: a yoke; a magnetic circuit having a central magnet portion, a peripheral edge magnet portion, an auxiliary magnet portion, and a parallel area; and a backing plate. The central magnet portion, the peripheral edge magnet portion, and the auxiliary magnet portion are disposed so that polarities of tip portions of the central magnet portion, the peripheral edge magnet portion, and the auxiliary magnet portion are different from each other at portions between adjacent magnet portions. The magnetic field profile observed from above of the backing plate and the magnetic flux density in a horizontal direction are determined so that the magnetic flux density in a first area is a positive value and the magnetic flux density in a second area is a negative value with respect to a position corresponding to the central magnet portion as a boundary.
摘要翻译： 磁控溅射阴极包括：磁轭; 具有中心磁体部分，周缘磁铁部分，辅助磁体部分和平行区域的磁路; 和背板。 中心磁体部分，周缘磁铁部分和辅助磁体部分被设置成使得中心磁体部分，周边磁体部分和辅助磁体部分的尖端部分的极性在相邻的部分之间的部分彼此不同 磁铁部分。 确定从背板的上方观察的磁场分布和水平方向的磁通密度，使得第一区域中的磁通密度为正值，第二区域中的磁通密度为负值， 相对于与中心磁体部分相对应的位置作为边界。
-
公开(公告)号：US20100269898A1
公开(公告)日：2010-10-28
申请号：US12810060
申请日：2008-12-24
CPC分类号： C23C14/0084 , C23C14/086 , H01L31/022466 , H01L31/022483 , H01L31/1884 , Y02E10/50
摘要： A method for manufacturing a photovoltaic cell that is provided with an upper electrode that is arranged on the light incoming side and functions as a power extraction electrode, the method including the step of: forming the upper electrode on a substrate by sputtering using a target that contains a zinc oxide-based material, wherein in the step of forming the upper electrode, the sputtering is performed in an atmosphere that contains two or three selected from a group consisting of hydrogen gas, oxygen gas, and water vapor.
摘要翻译： 一种制造光电池的方法，其具有布置在光入射侧上并用作功率提取电极的上电极，所述方法包括以下步骤：通过使用靶材溅射在基板上形成上电极， 含有氧化锌系材料，其中在形成上部电极的步骤中，在含有选自氢气，氧气和水蒸气中的两种或三种的气氛中进行溅射。
-
公开(公告)号：US20100013787A1
公开(公告)日：2010-01-21
申请号：US12567089
申请日：2009-09-25
申请人： Hirohisa TAKAHASHI , Satoru Takasawa , Isao Sugiura , Atsushi Ota , Satoru Ishibashi , Haruhiko Yamamoto
发明人： Hirohisa TAKAHASHI , Satoru Takasawa , Isao Sugiura , Atsushi Ota , Satoru Ishibashi , Haruhiko Yamamoto
CPC分类号： G06F3/041 , G06F3/045 , Y10T29/49117
摘要： A highly durable touch panel is provided. A touch panel according to the present invention includes a deformable flexible panel, and a transparent electrode film containing In2O3 as a primary component and containing Ti is exposed to a surface of a lower electrode film of a display device. Since such a transparent electrode film has a high abrasion resistance as compared to a conventional one (such as, an ITO thin film), the transparent electrode film is neither clouded nor cracked even if the lower electrode film is repeatedly pressed. Therefore, the touch panel according to the present invention is highly durable.
摘要翻译： 提供高度耐用的触摸面板。 根据本发明的触摸面板包括可变形的柔性面板，并且包含In 2 O 3作为主要成分并且含有Ti的透明电极膜暴露于显示装置的下电极膜的表面。 由于这种透明电极膜与以往的透明电极膜相比具有高耐磨性（例如ITO薄膜），所以即使下反射膜反复被压制，透明电极膜也不会发生糊化或者不破裂。 因此，根据本发明的触摸面板是高度耐用的。
-
公开(公告)号：US5180476A
公开(公告)日：1993-01-19
申请号：US660840
申请日：1991-02-26
申请人： Satoru Ishibashi , Kyuzo Nakamura , Yasushi Higuchi , Takashi Komatsu , Yuzo Murata , Yoshifumi Ota
发明人： Satoru Ishibashi , Kyuzo Nakamura , Yasushi Higuchi , Takashi Komatsu , Yuzo Murata , Yoshifumi Ota
IPC分类号： C23C14/08 , C23C14/34 , C23C14/35 , H01L21/203 , H01L21/285
CPC分类号： C23C14/086 , C23C14/35 , H01L31/1884 , Y02E10/50
摘要： A method of producing by sputtering an In-O, Sn-O, Zn-O, Cd-Sn-O or Cd-In-O based transparent conductive film according to the present invention uses the addition of a donor element, if needed. The sputtering is carried out by maintaining an intensity of a magnetic field on a surface of a target at 600 Oe or greater as well as by charging the target with a DC electric field superimposed by an RF electric field. An apparatus for producing an In-O, Sn-O, Zn-O, Cd-Sn-O or Cd-In-O base transparent conductive film uses the addition of a donor element, if needed. The apparatus has a vacuum chamber adapted to support therein a substrate and a target in an opposed relationship for forming by sputtering the transparent conductive film on the substrate by plasma discharge generated therebetween. The apparatus has a device for forming a magnetic field having a predetermined intensity of 600 Oe or greater on a surface of the target, a DC power supply for charging the target with a DC electric field, and an RF power supply for charging the target with an RF electric field superimposed on the DC electric field.
-
-
-
-
-
-
-
-
-
搜索结果
61 条记录 (耗时 0.024 秒)
