公开(公告)号：US5847383A

公开(公告)日：1998-12-08

申请号：US723093

申请日：1996-09-30

申请人： Yi Tong

发明人： Yi Tong

IPC分类号： G01B21/30 ,  G01N37/00 ,  G01Q10/02 ,  G01Q20/04 ,  G01Q60/10 ,  G01Q60/24 ,  G01Q60/34 ,  H01J37/00 ,  H01J37/28

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q60/38 ,  Y10S977/868 ,  Y10S977/87

摘要： Light is reflected from a cantilever, and the reflected light, except that part which is reflected from the back of the cantilever, is applied to a light-receiving device. A distance between the probe of the cantilever and a sample is determined in accordance with changes in the light in order to protect both the sample and the probe and to shorten the time the probe requires to reach the sample. The probe is moved toward the sample at high speed until the probe reaches a point close to the sample. A mechanism is provided which detects changes in a probe-displacement signal representing the displacement of the probe. A differentiation section provided in the mechanism differentiates the probe-displacement signal and generates a signal. The signal is supplied to a threshold determination section, which determines whether or not the output signal of the differentiation section exceeds a predetermined threshold value. When the signal is found to exceed the threshold value, an approaching interruption section generates an interruption command, which is supplied to a motor driver, stopping, a motor. As a result, a coarse adjustment mechanism stops moving the prove toward the sample. A voltage at a predetermined level is then immediately applied to a piezoelectric member, causing the piezoelectric member to contract in the Z direction, thereby moving the probe away from the sample.

摘要翻译： 光从悬臂反射，除了从悬臂的背面反射的部分之外的反射光被施加到光接收装置。 根据光的变化来确定悬臂的探针与样品之间的距离，以便保护样品和探针，并缩短探针到达样品所需的时间。 探针以高速移动到样品，直到探头到达接近样品的点。 提供了一种机构，其检测表示探针的位移的探针位移信号的变化。 设置在该机构中的微分部分区分探针位移信号并产生信号。 信号被提供给阈值确定部分，其确定微分部分的输出信号是否超过预定阈值。 当发现信号超过阈值时，接近中断部分产生提供给电动机驱动器的停止命令，停止电动机。 结果，粗调机构停止向证件移动证明。 然后将一个预定电平的电压立即施加到压电元件上，使得压电元件在Z方向收缩，从而将探头移离样品。

公开(公告)号：US5418771A

公开(公告)日：1995-05-23

申请号：US201430

申请日：1994-02-24

申请人： Yuji Kasanuki ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Haruki Kawada ,  Tsutomi Ikeda ,  Ryo Kuroda ,  Takehiko Kawasaki ,  Akihiko Yamano ,  Masahiro Tagawa

发明人： Yuji Kasanuki ,  Katsunori Hatanaka ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Haruki Kawada ,  Tsutomi Ikeda ,  Ryo Kuroda ,  Takehiko Kawasaki ,  Akihiko Yamano ,  Masahiro Tagawa

IPC分类号： G01B7/31 ,  G01Q10/02 ,  G11B9/00 ,  G01N21/86

CPC分类号： G01B7/31 ,  G11B9/1436 ,  B82Y10/00 ,  Y10S977/849 ,  Y10S977/943 ,  Y10S977/947

摘要： An information processing apparatus includes first, second and third upper electrodes provided on a first substrate, and first, second and third lower electrodes provided on a second substrate opposed to the first, second and third upper electrodes, respectively. Also provided are first, second and third detectors for detecting a first capacitance between the first upper and lower electrodes, a second capacitance between the second upper and lower electrodes and a third capacitance between the third upper and lower electrodes. In addition, the apparatus also includes a first driver for moving the first and second substrates relative to each other in a first direction with respect to the substrate surfaces, a second driver for moving the first and second substrates relative to each other in a second direction perpendicular to the first direction, a third driver for rotating the first and second substrates relative to each other about an axis in a third direction perpendicular to the first and second directions, and a control unit.

摘要翻译： 信息处理装置包括设置在第一基板上的第一，第二和第三上电极以及分别设置在与第一，第二和第三上电极相对的第二基板上的第一，第二和第三下电极。 还提供了用于检测第一上电极和下电极之间的第一电容的第一，第二和第三检测器，第二上电极和下电极之间的第二电容以及第三上电极和下电极之间的第三电容。 此外，该装置还包括第一驱动器，用于相对于基板表面在第一方向上相对于彼此移动第一和第二基板;第二驱动器，用于沿第二方向相对于彼此移动第一和第二基板 垂直于第一方向的第三驱动器，用于使垂直于第一和第二方向的第三方向上的第一和第二基板相对于彼此旋转的第三驱动器，以及控制单元。

公开(公告)号：US5286977A

公开(公告)日：1994-02-15

申请号：US8804

申请日：1993-01-25

申请人： Kazuo Yokoyama ,  Motoshi Shibata

发明人： Kazuo Yokoyama ,  Motoshi Shibata

IPC分类号： G01B7/00 ,  G01B7/34 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/04 ,  G01Q30/18 ,  G01Q70/04 ,  G01Q90/00 ,  G12B5/00 ,  H01J37/20

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  G01Q70/04 ,  H01J37/20 ,  Y10S977/872

摘要： Disclosed is a positioning device comprising an X-Y scanning mechanism capable of scanning and driving in planar directions and a Z-scanning mechanism capable of scanning and driving in a direction perpendicular to the planar directions. A sample table is affixed to the moving part of the Z-scanning mechanism, and the housing of the probe head is fixed to the casing of the positioning device through a plate spring. The housing abuts against a plane formed in the moving part of the X-Y scanning mechanism through three point contact legs such that the resonance frequency of the entire device can be set high, thereby realizing a high anti-vibration effect and stable probe scanning. The housing of the probe head abuts against said plane formed in the moving part of the X-Y scanning mechanism through three ball bearings composing the three point contact legs, and is mounted on the fixed table through a thin plate spring.

摘要翻译： 公开了一种定位装置，其包括能够在平面方向上扫描和驱动的X-Y扫描机构，以及能够沿垂直于平面方向的方向扫描和驱动的Z扫描机构。 样品台固定在Z扫描机构的运动部分，探头的外壳通过板簧固定在定位装置的壳体上。 壳体通过三点接触腿与X-Y扫描机构的移动部分形成的平面抵接，使得整个装置的共振频率可以设定得高，从而实现高抗振效果和稳定的探头扫描。 探针头的壳体通过构成三点接触腿的三个球轴承抵靠形成在X-Y扫描机构的运动部分中的所述平面，并通过薄板弹簧安装在固定台上。

公开(公告)号：US11474127B2

公开(公告)日：2022-10-18

申请号：US17313743

申请日：2021-05-06

申请人： Rutgers, The State University of New Jersey

发明人： Angela Coe ,  Guohong Li ,  Eva Y. Andrei

IPC分类号： G01Q70/08 ,  G01Q30/20 ,  G01Q10/02

摘要： An apparatus, including: a scanning probe microscope head with a frame configured to fit within an insert of a cryostat, and a scanner, a probe and a sample holder all disposed within the frame; and a coarse motor assembly disposed within the frame and comprising: a positionable component; and coarse motors. The coarse motors are configured to move the positionable component relative to the frame along an X axis, a Y axis, and a Z axis. The apparatus further includes a universal electrical base connection with half of a plug/socket arrangement. The plug/socket arrangement is configured to provide electrical communication between the scanning probe microscope head and a base which has a second half of the plug/socket arrangement when the scanning probe microscope head is lowered onto the base.

公开(公告)号：US20220299544A1

公开(公告)日：2022-09-22

申请号：US17638937

申请日：2020-08-31

申请人： National Research Council of Canada ,  The Governors of the University of Alberta

发明人： Robert A. Wolkow ,  Jason Pitters ,  Mark Salomons

IPC分类号： G01Q10/02 ,  H02N2/02 ,  G01Q10/04

摘要： A nano-positioning system for fine and coarse nano-positioning including at least one actuator, wherein the at least one actuator includes a high Curie temperature material and wherein the nano-positioning system is configured to apply a voltage to the at least one actuator to generate fine and/or coarse motion by the at least one actuator. The nano-positioning system being a stand-alone system, a scanning probe microscope, or an attachment to an existing microscope configured to perform a method of creepless nano-positioning that includes positioning a probe relative to a first area of a substrate using coarse stepping and interacting with the first area of the substrate using fine motion after less than 60 seconds of the positioning the probe. The movement of the scanning probe microscope is actuated by a high Curie temperature piezoelectric material that limits and/or eliminates creep, hysteresis and aging.

公开(公告)号：US20220146548A1

公开(公告)日：2022-05-12

申请号：US17583727

申请日：2022-01-25

申请人： Carl Zeiss SMT GmbH

发明人： Ulrich Matejka ,  Christof Baur

IPC分类号： G01Q10/02 ,  G01Q30/04

摘要： The present application relates to an apparatus for a scanning probe microscope, said apparatus having: (a) at least one first measuring probe having at least one first cantilever, the free end of which has a first measuring tip; (b) at least one first reflective area arranged in the region of the free end of the at least one first cantilever and embodied to reflect at least two light beams in different directions; and (c) at least two first interferometers embodied to use the at least two light beams reflected by the at least one first reflective area to determine the position of the first measuring tip.

公开(公告)号：US11099210B2

公开(公告)日：2021-08-24

申请号：US16481759

申请日：2018-01-30

申请人： TRUSTEES OF TUFTS COLLEGE

发明人： Piers Echols-Jones ,  William C. Messner ,  Igor Sokolov

IPC分类号： G01Q60/34 ,  G01Q10/02 ,  G01Q10/06

摘要： A method of carrying out sub-resonant tapping in an atomic force microscope includes causing a probe that is disposed above a sample to be translated in a direction parallel to a horizontal plane defined by the sample and to oscillate in a vertical direction that is perpendicular to the horizontal plane about an equilibrium line that is separated from the horizontal plane by a vertical offset. As a result, the probe repeatedly taps a surface of the sample. Each tap begins with a first contact of the probe on the surface followed by a progressive increase in force exerted by the sample on the probe until a peak force is attained. The vertical offset is controlled by relying at least in part on a feature other than the peak force as a basis for controlling the vertical offset.

公开(公告)号：US10161958B2

公开(公告)日：2018-12-25

申请号：US14794968

申请日：2015-07-09

申请人： Hitachi High-Tech Science Corporation

发明人： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masafumi Watanabe

IPC分类号： G01Q10/04 ,  G01Q70/04 ,  G01Q10/02 ,  G01Q20/00 ,  G01Q20/02

摘要： A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.

公开(公告)号：US20180292432A1

公开(公告)日：2018-10-11

申请号：US15837852

申请日：2017-12-11

申请人： Oxford Instruments Asylum Research, Inc.

发明人： Roger Proksch ,  Jason Bemis ,  Aleksander Labuda

IPC分类号： G01Q10/02 ,  G01Q60/32 ,  G01Q40/00 ,  G01Q10/04

CPC分类号： G01Q10/04 ,  G01Q20/00 ,  G01Q40/00 ,  G01Q60/24 ,  G01Q60/32

摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.

公开(公告)号：US09995763B2

公开(公告)日：2018-06-12

申请号：US14630074

申请日：2015-02-24

申请人： Bruker Nano, Inc.

发明人： Jason Osborne ,  Eric Milligan ,  Andrew Lopez ,  Xianghai Wu ,  Sean Hand ,  Vladimir Fonoberov

IPC分类号： G01Q10/02 ,  G01Q10/06 ,  G01Q30/06

CPC分类号： G01Q10/02 ,  G01Q10/065 ,  G01Q30/06

摘要： A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.