公开(公告)号：US20170169981A1

公开(公告)日：2017-06-15

申请号：US15371511

申请日：2016-12-07

申请人： HORIBA STEC, CO., LTD.

发明人： Kohei SASAI ,  Toshihiro IKEYAMA ,  Toshiaki SAKAI

IPC分类号： H01J1/146 ,  H01J49/42 ,  H01J9/04

CPC分类号： H01J1/146 ,  H01J9/042 ,  H01J49/08 ,  H01J49/4215

摘要： In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament including a core member through which electric current flows and an electron emitting layer which is formed so as to cover a surface of the core member, the electron emitting layer is configured to have denseness for substantial gas-tight integrity.

公开(公告)号：US20170138794A1

公开(公告)日：2017-05-18

申请号：US15344848

申请日：2016-11-07

申请人： HORIBA, LTD. ,  HORIBA STEC, CO., LTD.

发明人： Sho FUJINO ,  Naoto BANDO ,  Masakazu MINAMI

IPC分类号： G01J5/00 ,  G01J5/10

CPC分类号： G01J5/0007 ,  G01J5/0875 ,  G01J5/10 ,  G01J2005/0048 ,  G01J2005/068

摘要： In order to provide a radiation thermometer with which a temperature of a measurement object disposed in a chamber configured to form plasma therein can be accurately measured in a noncontact manner from outside of the chamber, the radiation thermometer includes an infrared sensor and a window temperature compensation part. The infrared sensor is disposed outside the chamber configured to form plasma therein, and is configured to detect infrared ray emitted from the measurement object in the chamber through a transmission window provided in the chamber. The infrared sensor is configured to output an output signal according to energy of detected infrared ray. The window temperature compensation part is configured to compensate for a pre-compensation temperature of the measurement object being indicated by the output signal of the infrared sensor, on the basis of a temperature of the transmission window.

公开(公告)号：US09625048B2

公开(公告)日：2017-04-18

申请号：US14477573

申请日：2014-09-04

申请人： HORIBA STEC CO., LTD.

发明人： Kim Ngoc Vu

IPC分类号： F16K31/02 ,  F16K31/00 ,  H02N2/04

CPC分类号： F16K27/029 ,  F16K31/007 ,  H02N2/043 ,  Y10T137/7758 ,  Y10T137/7761

摘要： A mechanism for coupling motion of a piezoelectric actuator in axisymmetric devices like modulating proportional valves uses actuator extension motion to cause translation away from a mechanism mounting plane and thereby enables lifting open of a valve element instead of the usual pushing closed of the valve element. The mechanism does not contain any gears nor leadscrew threads, and in usual practice is constantly loaded, so apparent change of direction is achieved without mechanical backlash introducing hysteresis. The mechanism surrounds a piezoelectric stack actuator by contacting opposite ends of the piezoelectric stack, whereby extension motion lengthening the actuator causes a lifting portion of the mechanism to translate toward the bulk of the actuator while the proximally adjacent mounting portion of the mechanism remains at a fixed location.

公开(公告)号：US20170102095A1

公开(公告)日：2017-04-13

申请号：US15283757

申请日：2016-10-03

申请人： HORIBA STEC, Co., Ltd.

发明人： Daichi Kunita ,  Atsushi Ieki

IPC分类号： F16K37/00 ,  F16K31/00 ,  G05D7/06 ,  F16K1/12

CPC分类号： F16K37/0083 ,  F16K1/12 ,  F16K31/007 ,  F16K37/0041 ,  F16K37/0091 ,  G05D7/0635

摘要： The present invention provides a fluid control valve that improves usability by eliminating misunderstanding of a user. The fluid control valve includes a valve seat, a valve body disposed to be approachable to and separable from the valve seat, an actuator configured to move the valve body in an approaching or separating direction, a positional information detection part configured to detect a value corresponding to a relative position of the valve body with respect to the valve seat, and a position output part configured to set, irrespective of positional information acquired by the positional information detection part at an opening start position of the valve body, the opening start position to position zero.

公开(公告)号：US09464955B2

公开(公告)日：2016-10-11

申请号：US14183414

申请日：2014-02-18

申请人： HORIBA STEC, Co., Ltd.

发明人： Hidetaka Yada ,  Sotaro Kishida ,  Takehisa Hataita

IPC分类号： G01L7/08 ,  G01L19/00 ,  G01L7/00 ,  G01F1/38

CPC分类号： G01L19/0023 ,  G01F1/38 ,  G01L7/00 ,  G01L7/08 ,  G01L7/082

摘要： A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.

摘要翻译： 一种结构，包括：基底; 隔膜 周壁部件，其一端面安装在隔膜的周缘部，另一端面安装在基座的上表面，与基座和隔膜一起形成内部空间; 突出部，其从所述基部的顶面突出; 以及从基座的底面朝向隔膜延伸的通信连接路径，并且将内部空间和外部彼此连通地连通以流动流体，其中在突出部分的外侧表面上形成有开口 在与所述通信连接路径的内侧面相交的部分中，所述通信连接路径的前端内表面的一部分形成在所述突出部中。

公开(公告)号：US20160178235A1

公开(公告)日：2016-06-23

申请号：US14954688

申请日：2015-11-30

申请人： HORIBA STEC, Co., Ltd.

发明人： Akihiro Taguchi ,  Masashi Hamada ,  Hidetaka Yada

IPC分类号： F24H1/14

摘要： The present invention is a fluid heater that can easily be reduced in size, that can be manufactured inexpensively, and that provides a stable heating performance. This fluid heater heats a fluid using a heater, and is provided with a heating block in which an internal flow path having an intake port through which the fluid is introduced, and a discharge port through which the fluid is discharged is formed, and in which a heater insertion portion that extends in a predetermined axial direction is formed, wherein the internal flow path has a plurality of main flow path portions that extend in the predetermined axial direction, and one or a plurality of connecting path flow portions that connect the plurality of main flow path portions together.

摘要翻译： 本发明是能够容易地减小尺寸的流体加热器，其可以廉价地制造并且提供稳定的加热性能。 该流体加热器使用加热器加热流体，并且设置有加热块，其中形成有具有引入流体的进气口的内部流路和流体被排出的排出口，其中 形成沿预定轴向延伸的加热器插入部分，其中内部流路具有在预定轴向方向上延伸的多个主流路部分，以及连接多个 主流路部分在一起。

公开(公告)号：US20160153898A1

公开(公告)日：2016-06-02

申请号：US14952735

申请日：2015-11-25

申请人： HORIBA STEC, Co., Ltd.

发明人： Masakazu Minami

IPC分类号： G01N21/3504 ,  G05D16/00 ,  G01N21/31

CPC分类号： G01N21/3504 ,  G01N2021/8416 ,  G01N2201/06113 ,  G05D21/02

摘要： Provided is a decomposition detecting unit that despite a simple configuration, can detect whether or not decomposition occurs in material gas resulting from the vaporization of a semiconductor material. The decomposition detecting unit includes: an NDIR type or laser absorption spectroscopy type absorbance measuring mechanism that measures first absorbance, which is absorbance at a wavelength at which a semiconductor material absorbs light, and second absorbance, which is absorbance at a wavelength at which a material produced when the semiconductor material decomposes absorbs light, of mixed gas containing material gas resulting from the vaporization of the semiconductor material; and a decomposition detection part that detects the decomposition in the material gas on the basis of the ratio between first concentration calculated on the basis of the first absorbance and the second absorbance and second concentration calculated on the basis of the second absorbance.

摘要翻译： 提供一种分解检测单元，尽管简单的结构，可以检测在半导体材料的蒸发产生的原料气中是否发生分解。 分解检测单元包括：NDIR型或激光吸收光谱型吸光度测量机构，其测量在半导体材料吸收光的波长处的吸光度的第一吸光度，以及第二吸光度，其是材料的波长处的吸光度 当半导体材料分解时产生的含有由半导体材料蒸发产生的原料气体的混合气体的光; 以及分解检测部，其基于以基于第一吸光度计算的第一浓度与基于第二吸光度计算的第二吸光度和第二浓度的比率，检测原料气体中的分解。

公开(公告)号：US20160124439A1

公开(公告)日：2016-05-05

申请号：US14894932

申请日：2014-10-15

申请人： HORIBA STEC, Co., Ltd.

发明人： Tadahiro Yasuda ,  Shigeyuki Hayashi

IPC分类号： G05D7/06 ,  F16K27/02

CPC分类号： G05D7/06 ,  F16K27/02 ,  F16K31/007 ,  F16K47/08 ,  G05D7/01

摘要： To provide a fluid control valve that enables the internal volume to be reduced and, for example, the falling response performance to be improved without compromising the accuracy in controlling a pressure, a flow rate, and so on of fluid, a fluid control valve includes a valve seat portion, a valve body capable of making or breaking contact with the valve seat portion, a fluid resistance, and a pair of clamping members that clamps the fluid resistance. The fluid resistance and the pair of clamping members form an in-valve space in which the valve body or at least part of an actuation member that moves the valve body is housed. Fluid passes through the fluid resistance from the downstream-side in-valve space and flows out to the outside.

摘要翻译： 为了提供能够降低内部体积并且例如降低响应性能而不损害控制流体的压力，流量等的精度的流体控制阀，流体控制阀包括 阀座部分，能够制造或断开与阀座部分接触的阀体，流体阻力以及夹持流体阻力的一对夹紧件。 流体阻力和一对夹持构件形成阀门空间，其中容纳阀体或移动阀体的致动构件的至少一部分。 流体从下游侧的阀内空间流过流体阻力并流出到外部。

公开(公告)号：US20160033973A1

公开(公告)日：2016-02-04

申请号：US14814340

申请日：2015-07-30

申请人： HORIBA STEC, Co., Ltd.

发明人： Kotaro Takijiri ,  Yuki Tanaka ,  Atsushi Ieki

IPC分类号： G05D7/06 ,  G05B15/02

CPC分类号： G05D7/0635 ,  Y10T137/7761

摘要： In order to keep a stable flow rate at a set flow rate value when a pressure fluctuation occurs in an upstream side of a valve, without providing an additional sensor for detecting a pressure fluctuation, a flow rate control apparatus is provided with: the valve; a flow rate sensor; a valve control part configured to control the valve so that a deviation between a set flow rate value and a measurement flow rate value is reduced, on the basis of the deviation and a set control coefficient; and a control coefficient setting part configured to set the control coefficient so that when a pressure rise occurs in the upstream side of the valve, a decreased amount in flow due to a decreased opening of the valve and an increased amount in flow due to an increased amount of a differential pressure before and after the valve, are balanced.

摘要翻译： 为了在阀的上游侧发生压力波动时，在设定的流量值下保持稳定的流量，不设置用于检测压力波动的附加传感器，所以流量控制装置具有：阀; 流量传感器; 阀控制部，其基于所述偏差和设定控制系数，对所述阀进行控制，使得设定流量值与测定流量值之间的偏差减小; 以及控制系数设定部，其被配置为设定所述控制系数，使得当在所述阀的上游侧发生压力上升时，由于阀的打开减小而导致的流量减少，并且由于增加的流量增加 阀前后的压差量平衡。

公开(公告)号：US09222923B2

公开(公告)日：2015-12-29

申请号：US14197635

申请日：2014-03-05

申请人： HORIBA STEC, CO., LTD.

发明人： Tomohiro Sasaki ,  Naoki Wada

IPC分类号： G01N30/86

CPC分类号： G01N30/8675 ,  G01N30/8668

摘要： As a data processing device and data processing program for a gas chromatograph, which enable composition, a name, and the like of a registered substance to be extracted from an actually measured retention index by a reverse search, a known RI data storage part that stores a plurality of pieces of known RI data each in which an identifier Gn specific to each registered substance, and retention indices actually measured at a plurality of different temperatures by gas chromatographic analysis on the registered substance indicated by the identifier Gn are paired, and a known RI data conversion part that is configured to convert the retention indices of the registered substance at the plurality of different temperatures to a retention index of the registered substance under a predetermined temperature condition for each of the pieces of known RI data are provided.

摘要翻译： 作为用于气相色谱仪的数据处理装置和数据处理程序，其通过反向搜索使得从实际测量的保留指数中提取注册物质的组成，名称等，存储了已知的RI数据存储部分 多个已知的RI数据，其中每个注册物质特有的标识符Gn和通过气相色谱分析在多个不同温度下实际测量的由标识符Gn表示的登记物质的保留指数成对配对， RI数据转换部件被配置为将多个不同温度下的登记物质的保留指数转换为预定温度条件下的注册物质的保留指数，用于每个已知的RI数据。