公开(公告)号：US20190206667A1

公开(公告)日：2019-07-04

申请号：US16333879

申请日：2017-09-22

Applicant: HORIBA, Ltd. ,  HORIBA STEC, Co., Ltd.

Inventor： Takahito INOUE ,  Hiroshi UCHIHARA ,  Kohei SASAI ,  Toshihiro IKEYAMA

IPC: H01J49/04 ,  H01J49/42 ,  H01J49/00

CPC classification number: H01J49/049 ,  G01N27/62 ,  G01N31/12 ,  H01J49/0027 ,  H01J49/04 ,  H01J49/0495 ,  H01J49/4205

Abstract: An objective of this invention is to conduct an accurate quantitative analysis on the Ar element contained in a sample gas by an element analysis device comprising a heating furnace and a mass spectrometer for conducting a quantitative analysis on an element in a vacuum atmosphere. The element analysis device comprises: a heating furnace that heats a graphite crucible containing a sample while introducing a carrier gas into the heating furnace, thereby vaporizing the sample to generate a sample gas; a quadrupole mass spectrometer that conducts the quantitative analysis on the Ar element contained in the sample gas in a mixed gas comprising the carrier gas and the sample gas discharged from the heating furnace, a first pressure regulator that controls the pressure of the carrier gas to be introduced into the heating furnace, and a second pressure regulator that controls the pressure of the mixed gas discharged from the heating furnace.

公开(公告)号：US20210318267A1

公开(公告)日：2021-10-14

申请号：US17057094

申请日：2019-05-21

Applicant: HORIBA, Ltd. ,  HORIBA STEC, Co., Ltd.

Inventor： Takahito INOUE ,  Hiroshi UCHIHARA ,  Kohei SASAI ,  Toshihiro IKEYAMA ,  Hiroyuki SEKI

IPC: G01N27/623 ,  G01N31/22 ,  G01N21/31 ,  G01N33/00 ,  H01J49/26

Abstract: An element analysis device is provided, which can quantitatively analyze an H element contained in a sample gas with high accuracy. The element analysis device is provided with a heating furnace for heating a crucible having a sample contained therein while a carrier gas is introduced into the heating furnace to vaporize at least a part of the sample to generate a sample gas containing the H element and then deriving the sample gas with the carrier gas as a mixed gas and a mass spectrometer for quantitatively analyzing at least one element contained in the sample gas in the mixed gas that has been derived from the heating furnace, wherein the mass spectrometer quantitatively analyzes the H element contained as an H2O component in the mixed gas as the H element contained in the sample gas.

公开(公告)号：US20210166932A1

公开(公告)日：2021-06-03

申请号：US16953946

申请日：2020-11-20

Applicant: HORIBA STEC, Co., Ltd. ,  HORIBA, Ltd.

Inventor： Kohei SASAI ,  Kazushi SASAKURA ,  Toshihiro IKEYAMA ,  Takahito INOUE ,  Hiroshi UCHIHARA

IPC: H01J49/42 ,  H01J49/02

Abstract: A quadrupole mass spectrometer includes an ion source that ionizes a sample, a filter unit that includes a quadrupole and separates ions generated from the ion source according to mass, a detector that detects ions passing through the filter unit, a filter voltage controller that controls a filter voltage applied to the quadrupole to switch between a blocking mode in which ions entering the filter unit are not allowed to impinge on the detector and a passing mode in which ions entering the filter unit are allowed to impinge on the detector, the filter voltage including a radio-frequency voltage and a direct-current voltage, a baseline computing unit that computes a baseline based on outputs of the detector in the blocking mode, and an analyzing unit that outputs an analysis result of the sample based on outputs of the detector in the passing mode and the computed baseline.

公开(公告)号：US20170169981A1

公开(公告)日：2017-06-15

申请号：US15371511

申请日：2016-12-07

Applicant: HORIBA STEC, CO., LTD.

Inventor： Kohei SASAI ,  Toshihiro IKEYAMA ,  Toshiaki SAKAI

IPC: H01J1/146 ,  H01J49/42 ,  H01J9/04

CPC classification number: H01J1/146 ,  H01J9/042 ,  H01J49/08 ,  H01J49/4215

Abstract: In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament including a core member through which electric current flows and an electron emitting layer which is formed so as to cover a surface of the core member, the electron emitting layer is configured to have denseness for substantial gas-tight integrity.