Method for fabricating polysilicon film
    41.
    发明授权
    Method for fabricating polysilicon film 有权
    多晶硅薄膜制造方法

    公开(公告)号:US07939434B2

    公开(公告)日:2011-05-10

    申请号:US12116017

    申请日:2008-05-06

    CPC classification number: H01L29/66765 C23C16/24 C23C16/507

    Abstract: A method of directly depositing a polysilicon film at a low temperature is disclosed. The method comprises providing a substrate and performing a sequential deposition process. The sequential deposition process comprises first and second deposition steps. In the first deposition step, a first bias voltage is applied to the substrate, and plasma chemical vapor deposition is utilized to form a first polysilicon sub-layer on the substrate. In the second deposition step, a second bias voltage is applied to the substrate, and plasma chemical vapor deposition is utilized to form a second polysilicon sub-layer on the first sub-layer. The first and second sub-layers constitute the polysilicon film, and the first bias voltage differs from the second bias voltage.

    Abstract translation: 公开了一种在低温下直接沉积多晶硅膜的方法。 该方法包括提供衬底并执行顺序沉积工艺。 顺序沉积工艺包括第一和第二沉积步骤。 在第一沉积步骤中,向衬底施加第一偏置电压,并且利用等离子体化学气相沉积在衬底上形成第一多晶硅子层。 在第二沉积步骤中,向衬底施加第二偏置电压,并且利用等离子体化学气相沉积在第一子层上形成第二多晶硅子层。 第一和第二子层构成多晶硅膜,第一偏置电压与第二偏置电压不同。

    ONLINE MONITORING METHOD OF DRIVER STATE AND SYSTEM USING THE SAME
    45.
    发明申请
    ONLINE MONITORING METHOD OF DRIVER STATE AND SYSTEM USING THE SAME 审中-公开
    使用该驱动器状态和系统的在线监测方法

    公开(公告)号:US20090033501A1

    公开(公告)日:2009-02-05

    申请号:US12179528

    申请日:2008-07-24

    CPC classification number: G08B21/06 A61B5/18 A61B5/7267

    Abstract: An online monitoring method of driver state and a system using the same are provided. First a driver model is established, wherein the driver model generates a steering angle to control transportation means for riding according to the lateral position error of the riding transportation means. Next, a system identification processing is performed on the lateral position error and the steering angle of the riding transportation means to obtain a transfer function of the driver model. After that, an analysis processing is performed on the driver model transfer function to extract specific information therefrom, following by performing an assessment processing on the specific information and multiple statistics of raw data to generate the driver state assessment.

    Abstract translation: 提供了驱动器状态的在线监视方法和使用其的系统。 首先建立驾驶员模型,其中驾驶员模型产生转向角以控制根据骑马运输装置的横向位置误差进行骑乘的运送装置。 接下来,对骑乘运输装置的横向位置误差和转向角执行系统识别处理,以获得驾驶员模型的传递函数。 之后,对驾驶员模型传递函数执行分析处理以从其中提取特定信息,然后通过对特定信息进行评估处理和原始数据的多个统计来生成驾驶员状态评估。

    LOW TEMPERATURE DIRECT DEPOSITED POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
    46.
    发明申请
    LOW TEMPERATURE DIRECT DEPOSITED POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    低温直接沉积多晶硅薄膜晶体管结构及其制造方法

    公开(公告)号:US20070254399A1

    公开(公告)日:2007-11-01

    申请号:US11380491

    申请日:2006-04-27

    CPC classification number: H01L29/66757 H01L29/78609 H01L29/78678

    Abstract: A method for manufacturing a thin film transistor (“TFT”) device includes providing a substrate, forming a patterned first metal layer on the substrate, forming an insulating layer over the patterned first metal layer, forming an amorphous silicon layer over the insulating layer, forming a first polycrystalline silicon layer over the amorphous silicon layer, forming a second polycrystalline silicon layer over the first polycrystalline silicon layer, doping the second polycrystalline silicon layer to form a doped polycrystalline silicon layer, patterning the amorphous silicon layer, first polycrystalline silicon layer and doped polycrystalline silicon layer to form an active region layer for the TFT device, and forming a patterned second metal layer over the active region layer.

    Abstract translation: 一种制造薄膜晶体管(“TFT”)器件的方法包括提供衬底,在衬底上形成图案化的第一金属层,在图案化的第一金属层上形成绝缘层,在绝缘层上形成非晶硅层, 在所述非晶硅层上形成第一多晶硅层,在所述第一多晶硅层上形成第二多晶硅层,掺杂所述第二多晶硅层以形成掺杂多晶硅层,图案化所述非晶硅层,第一多晶硅层和 掺杂多晶硅层以形成TFT器件的有源区,并在有源区上形成图案化的第二金属层。

    Method and device for clamping electromagnetically molds of injection molding machine
    49.
    发明授权
    Method and device for clamping electromagnetically molds of injection molding machine 失效
    注塑机电磁模具夹紧方法及装置

    公开(公告)号:US06619940B1

    公开(公告)日:2003-09-16

    申请号:US09849365

    申请日:2001-05-07

    CPC classification number: B29C45/64 B29C2045/645

    Abstract: A device for clamping electromagnetically molds of the injection molding machine comprises a stand on which a fixed board and a guiding mechanism are mounted. A movable board is slidably mounted on the guiding mechanism to slide back and forth in relation to the fixed board. The fixed board is provided with a male mold mounted thereon. The movable board is provided with a female mold mounted thereon. The sliding motion of the movable board toward the fixed board brings about the mold opening action, the mold closing action, and the mold locking action. The movable board and the fixed board are provided with a magnetic force generating mechanism for effecting attraction or repulsion between the movable board and the fixed board. The attraction serves to effect the mold closing action and the mold locking action. The repulsion serves to effect the mold opening action.

    Abstract translation: 用于夹持注射成型机的电磁模的装置包括固定板和引导机构安装在该支架上的支架。 可移动板可滑动地安装在引导机构上以相对于固定板来回滑动。 固定板上装有阳模, 可动板设置有安装在其上的阴模。 可动板朝向固定板的滑动运动导致开模动作,闭模动作和模具锁定动作。 可动板和固定板设置有用于在可动板和固定板之间进行吸引或排斥的磁力产生机构。 该吸引力用于实现闭合动作和模具锁定动作。 排斥用于实现开模动作。

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