Abstract:
The present invention relates to a method for preventing a metal corrosion in a semiconductor device. The present method includes the steps of etching of a metal layer in a chamber, the metal layer having a photoresist pattern thereon or thereover; oxidizing a surface of the metal layer using a plasma comprising N2O in the same chamber; and removing the photoresist. Therefore, metal corrosion as well as bridges between metal wirings can be suppressed or prevented, thereby improving the profile of metal layer and the reliability and yield of the semiconductor device.
Abstract:
A method of forming an aluminum contact including forming a barrier metal layer on an interlayer insulation layer pattern defining a contact hole, and forming an aluminum layer on the barrier metal layer so as to fill the contact hole. The method further includes forming a photoresist pattern for ion implantation, implanting ions into the aluminum layer, and annealing by using a rapid thermal process.
Abstract:
Disclosed are a monomer of iridium complex having a fluoro group as a functional group, a monomer of carbazole derivative having a hydroxy group as the functional group, and a copolymer containing the monomers in its main chain. The iridium complex used as a phosphorescent material and the carbazole derivative having an excellent hole transporting capability are synthesized as the monomer to form the copolymer. The content of iridium complex is easily controlled, and the carbazole derivative and iridium complex are contained in the main chain during the copolymer formation, thereby capable of manufacturing a light emitting device with higher heat resistance and chemical stability.
Abstract:
Methods of forming a shallow trench isolation structures in semiconductor devices are disclosed. A disclosed method comprises forming a first oxide layer, a nitride layer, and a second oxide layer on a substrate; forming a trench defining first and second active areas by etching the second oxide layer, the nitride layer, the first oxide layer, and the substrate in a predetermined area; forming a third oxide layer along an inside of the trench; forming a fourth oxide layer to fill up the trench; forming a sacrificial oxide layer on the fourth oxide layer; and removing the sacrificial oxide layer, the fourth oxide layer, the third oxide layer, the second oxide layer, and the nitride layer so as to form the shallow trench isolation. Thus, it is possible to minimize the damage of a narrow active area when forming an element isolation area through an STI process.
Abstract:
A damping structure of a hard disk drive. The damping structure includes: a damping plate arranged spaced apart from an upper surface of the cover member, such that an air gap is formed between the cover member and the damping plate; and a damping member arranged between an edge of the cover member and an edge of the damping plate. The damping plate includes a stepped portion which is inwardly formed at a portion spaced apart from the edge of the damping plate by a predetermined distance, and a bent portion which is formed at an edge of the damping plate and smoothly bent toward the cover member. In such a damping structure, an impact that is applied to the cover member from an outside can be reduced much more through the damping plate and the damping member.
Abstract:
The present invention relates to a semiconductor device fabrication method, which includes forming an inter metal dielectric on a semiconductor substrate having wirings and planarizing the inter metal dielectric through a chemical mechanical polishing, wherein the inter metal dielectric is formed by carrying out at least one cycle of depositing polycrystalline silicon, plasma-processing the polycrystalline silicon, and oxidizing the polycrystalline silicon.
Abstract:
Metal interconnection lines of semiconductor devices and methods of forming the same are disclosed. Improved reliability is achieved in a disclosed metal line of a semiconductor device by preventing metal layers from eroding and preventing metal lines from being destroyed due to electro-migration (EM) and stress-migration (SM). An illustrated metal interconnection line includes: a semiconductor substrate; a metal pattern on the substrate; a glue pattern under the metal pattern; an anti-reflection pattern on the metal pattern; and dummy patterns surrounding side walls of the metal pattern.
Abstract:
The present invention relates to a polymerization method of polyisocyanates endcapped with acyl chlorides, and more particularly to a process for preparing polyisocyanate with higher stability comprising endcapping a living polymer chain amidate anion with an acyl chloride derivative in the presence of an amine catalyst, thereby enabling to maximize endcapping ratios.
Abstract:
The present invention relates to a poly(2-vinylpyridine)-b-poly(n-hexylisocyanate) amphiphilic coil-rod block copolymer and a polymerization method thereof, more particularly to a poly(2-vinylpyridine)-b-poly(n-hexylisocyanate) amphiphilic coil-rod block copolymer polymerized by a process comprising synthesizing poly(2-vinylpyridine) having a narrow molecular weight distribution by living polymerization using potassium diphenylmethane (K-DPM) as initiator, adding sodium tetraphenylborate (NaBPh4) to replace the counter cation with a sodium ion (Na+) and adding n-hexylisocyanate and performing polymerization and a polymerization method thereof. According to the present invention, it is possible to control the molecular weight and the structure of each block of the copolymer. Therefore, coil-rod type amphiphilic block copolymers having a variety of structures can be obtained. The resultant block copolymer is a useful optical polymer material.
Abstract:
The present invention relates to a polymerization method of polyisocyanates endcapped with acyl chlorides, and more particularly to a process for preparing polyisocyanate with higher stability comprising endcapping a living polymer chain amidate anion with an acyl chloride derivative in the presence of an amine catalyst, thereby enabling to maximize endcapping ratios.