公开(公告)号：US20120123270A1

公开(公告)日：2012-05-17

申请号：US13384879

申请日：2010-07-26

Applicant: Mareike Klee ,  Christianus Martinus Van Heesch ,  Peter Dirksen ,  Ruediger Mauczok ,  Nico Maris Adriaan De Wild

Inventor： Mareike Klee ,  Christianus Martinus Van Heesch ,  Peter Dirksen ,  Ruediger Mauczok ,  Nico Maris Adriaan De Wild

IPC: A61B8/00

CPC classification number: A61B8/12 ,  A61B5/489 ,  A61B5/6848 ,  A61B6/4441 ,  A61B8/06 ,  A61B8/0816 ,  A61B8/445 ,  A61B8/4483 ,  A61B2017/00106 ,  B06B1/0622

Abstract: The invention proposes to equip the tip of a surgical instrument such as a needle or catheter or any other instrument with an ultrasound transducer array to measure flow just in front of the tip by means of time and frequency differences between the sent and received pulses. Since no image is required, only a few transducer elements are required. The transducer elements generate a pressure pulses in specific directions and receives its echo's without the use of imaging techniques and complex driving electronics. Using the frequency shift and time delay of the received signals the proximity and lateral direction of the blood flow may be detected, thus identifying blood vessels.

Abstract translation: 本发明提出将诸如针或导管或任何其他器械的手术器械的尖端装备有超声换能器阵列，以通过发送和接收的脉冲之间的时间和频率差来测量刚好在尖端前面的流量。 由于不需要图像，因此只需要几个换能器元件。 传感器元件在特定方向产生压力脉冲，并且不使用成像技术和复杂的驱动电子元件接收其回波。 使用接收信号的频移和时间延迟可以检测血流的接近和横向，从而识别血管。

公开(公告)号：US20120109536A1

公开(公告)日：2012-05-03

申请号：US13382934

申请日：2010-06-24

Applicant: Willem F. Pasveer ,  Peter Dirksen ,  Biju K. Sreedharan Nair

Inventor： Willem F. Pasveer ,  Peter Dirksen ,  Biju K. Sreedharan Nair

IPC: G06F19/00

CPC classification number: G01N29/024 ,  G01N29/2481 ,  G01N2291/021 ,  G01N2291/045 ,  H05B37/0218 ,  H05B37/0227 ,  Y02B20/46

Abstract: The invention refers to a multifunction sensor system and a corresponding method for supervising room conditions, comprising a temperature sensor, a humidity sensor, an ultrasonic transducer for emitting ultrasonic waves and being positioned in a fixed distance to a reflecting fixed reflective surface. For calculating the CO2 concentration in the supervised room, the time of flight of ultrasonic waves between the transducer and the fixed reflective surface is measured, and the CO2 concentration is calculated from the output values of the temperature sensor, the humidity sensor and the measured time of flight.

Abstract translation: 本发明涉及一种用于监督房间条件的多功能传感器系统和相应的方法，包括温度传感器，湿度传感器，用于发射超声波的超声换能器，并且定位在与反射固定的反射表面固定的距离上。 为了计算监督室中的CO2浓度，测量换能器与固定反射面之间的超声波飞行时间，并根据温度传感器，湿度传感器和测量时间的输出值计算CO2浓度 的飞行。

公开(公告)号：US20120010538A1

公开(公告)日：2012-01-12

申请号：US13203751

申请日：2010-02-10

Applicant: Peter Dirksen

Inventor： Peter Dirksen

IPC: A61N7/00 ,  B06B1/02

CPC classification number: A61B8/00 ,  A61B8/4483 ,  B06B1/0292

Abstract: A CMUT transducer cell suitable for use in an ultrasonic CMUT transducer array has a membrane with a first electrode, a substrate with a second electrode, and a cavity between the membrane and the substrate. The CMUT is operated in a precollapsed state by biasing the membrane to a collapsed condition with the floor of the cavity, and a lens is cast over the collapsed membrane. When the lens material has polymerized or is of a sufficient stiffness, the bias voltage is removed and the lens material retains the membrane in the collapsed state.

Abstract translation: 适用于超声CMUT换能器阵列的CMUT换能器单元具有膜，其具有第一电极，具有第二电极的基板以及膜与基板之间的空腔。 CMUT通过将膜偏置到具有空腔的底部的折叠状态并且将透镜投射在折叠的膜上而在预胶合状态下操作。 当透镜材料已经聚合或具有足够的刚度时，偏移电压被去除并且透镜材料将膜保持在折叠状态。

公开(公告)号：US20110314897A1

公开(公告)日：2011-12-29

申请号：US13203987

申请日：2010-03-10

Applicant: Martijn Schellekens ,  Josephus Arnoldus Henricus Maria Kahlman ,  Martinus Gernardus Van Der Mark ,  Peter Dirksen

Inventor： Martijn Schellekens ,  Josephus Arnoldus Henricus Maria Kahlman ,  Martinus Gernardus Van Der Mark ,  Peter Dirksen

IPC: G01N33/497 ,  G01N29/02

CPC classification number: G01N33/497 ,  G01N29/2406 ,  G01N29/348 ,  G01N33/004 ,  G01N2291/0215 ,  G01N2291/02809

Abstract: A sensor chip (1030) for gas has cells (200) for emitting and receiving ultrasound and is configured for a sufficiently large frequency range and for measuring concentration of at least one of the gas components based on at least two responses within the range. The frequency range can be achieved by varying the size of cell membranes (230), varying bias voltages, and/or varying air pressure for an array (205) of cMUTs or MEMS microphones. The sensor chip can be applied in, for example, capnography. A measurement air chamber (515) is implemented in the respiratory pathway (400), and it and/or the pathway may be designed to reduce turbulence in the exhaled breath (120) subject to ultrasound interrogation. The chip (1030) can be implemented as self-contained in the monitoring of parameters, obviating the need for off-chip sensors.

Abstract translation: 用于气体的传感器芯片（1030）具有用于发射和接收超声波的电池（200），并且被配置为足够大的频率范围，并且用于基于该范围内的至少两个响应来测量至少一个气体成分的浓度。 频率范围可以通过改变cMUT或MEMS麦克风的阵列（205）的细胞膜（230）的尺寸，改变的偏置电压和/或变化的空气压力来实现。 传感器芯片可以应用于例如二氧化碳图谱中。 在呼吸路径（400）中实施测量空气室（515），并且其和/或路径可被设计成减少经过超声询问的呼出呼吸（120）中的湍流。 芯片（1030）可以被实现为独立于监视参数，从而避免了片外传感器的需要。

公开(公告)号：US20110163630A1

公开(公告)日：2011-07-07

申请号：US13062744

申请日：2009-09-08

Applicant: Johan H. Klootwijk ,  Peter Dirksen ,  Marcel Mulder ,  Elisabeth M. L. Moonen

Inventor： Johan H. Klootwijk ,  Peter Dirksen ,  Marcel Mulder ,  Elisabeth M. L. Moonen

IPC: H02N1/00 ,  H04R31/00

CPC classification number: B60B1/0292 ,  B06B1/0292 ,  H02N1/006 ,  H02N1/08 ,  Y10T29/49005

Abstract: The patent application discloses a capacitive micromachined ultrasound transducer, comprising a silicon substrate; a cavity; a first electrode, which is arranged between the silicon substrate and the cavity; wherein the first electrode is arranged under the cavity; a membrane, wherein the membrane is arranged above the cavity and opposite to the first electrode; a second electrode, wherein the second electrode is arranged above the cavity and opposite to the first electrode; wherein the second electrode is arranged in or close to the membrane, wherein the first electrode and the second electrode are adapted to be supplied by a voltage; and a first isolation layer, which is arranged between the first electrode and the second electrode, wherein the first isolation layer comprises a dielectric. It is also described a system for generating or detecting ultrasound waves, wherein the system comprises a transducer according to the patent application. Further, it is disclosed a method for manufacturing a transducer according to the patent application, wherein the transducer is manufactured with the help of a CMOS manufacturing process, wherein the transducer can be manufactured as a post-processing feature during a CMOS process.

Abstract translation: 该专利申请公开了一种电容式微机械超声换能器，其包括硅衬底; 一个空腔 布置在硅衬底和腔之间的第一电极; 其中所述第一电极布置在所述空腔下方; 膜，其中所述膜布置在所述腔的上方并与所述第一电极相对; 第二电极，其中所述第二电极布置在所述空腔上方并与所述第一电极相对; 其中所述第二电极布置在所述膜中或靠近所述膜，其中所述第一电极和所述第二电极适于由电压供应; 以及布置在所述第一电极和所述第二电极之间的第一隔离层，其中所述第一隔离层包括电介质。 还描述了用于产生或检测超声波的系统，其中该系统包括根据该专利申请的换能器。 此外，公开了根据专利申请的用于制造换能器的方法，其中借助于CMOS制造工艺制造所述换能器，其中所述换能器可以在CMOS工艺期间被制造为后处理特征。

公开(公告)号：US20100207485A1

公开(公告)日：2010-08-19

申请号：US12678453

申请日：2008-09-17

Applicant: Peter Dirksen ,  Anthonie Van Der Lugt

Inventor： Peter Dirksen ,  Anthonie Van Der Lugt

IPC: H02N11/00 ,  H04R31/00

CPC classification number: B06B1/0292 ,  A61B8/00 ,  H04R19/005 ,  Y10T29/43 ,  Y10T29/49005 ,  Y10T29/4908

Abstract: Methods are provided for production of pre-collapsed capacitive micro-machined ultrasonic transducers (cMUTs). Methods disclosed generally include the steps of obtaining a nearly completed traditional cMUT structure prior to etching and sealing the membrane, defining holes through the membrane of the cMUT structure for each electrode ring fixed relative to the top face of the membrane, applying a bias voltage across the membrane and substrate of the cMUT structure so as to collapse the areas of the membrane proximate to the holes to or toward the substrate, fixing and sealing the collapsed areas of the membrane to the substrate by applying an encasing layer, and discontinuing or reducing the bias voltage. CMUT assemblies are provided, including packaged assemblies, integrated assemblies with an integrated circuit/chip (e.g., a beam-steering chip) and a cMUT/lens assembly. Advantageous cMUT-based applications utilizing the disclosed pre-collapsed cMUTs are also provided, e.g., ultrasound transducer-based applications, catheter-based applications, needle-based applications and flowmeter applications.

Abstract translation: 提供了用于生产预塌陷电容式微加工超声波换能器（cMUT）的方法。 所公开的方法通常包括以下步骤：在蚀刻和密封膜之前获得几乎完成的传统cMUT结构，通过cMUT结构的膜定义孔，用于相对于膜的顶面固定的每个电极环，施加偏压 cMUT结构的膜和基底，以便将膜的靠近孔的区域折叠到基底或朝向基底，通过施加包封层将膜的折叠区域固定和密封到基底，并且中断或者减少 偏压。 提供CMUT组件，包括封装组件，具有集成电路/芯片（例如，光束转向芯片）和cMUT /透镜组件的集成组件。 还提供了利用所公开的预塌陷cMUT的有利的基于cMUT的应用，例如基于超声换能器的应用，基于导管的应用，基于针的应用和流量计应用。

公开(公告)号：US07599811B2

公开(公告)日：2009-10-06

申请号：US10582247

申请日：2004-12-09

Applicant: Frits Jurgen Van Hout ,  Josephus Antonius Maria Van Bommel ,  Peter Dirksen ,  Mark Kroon ,  Casparus Anthonius Henricus Juffermans ,  Renatus Maria Adrianus Mathias Van Den Eijnden

Inventor： Frits Jurgen Van Hout ,  Josephus Antonius Maria Van Bommel ,  Peter Dirksen ,  Mark Kroon ,  Casparus Anthonius Henricus Juffermans ,  Renatus Maria Adrianus Mathias Van Den Eijnden

IPC: G06F15/00

CPC classification number: G03F7/70591 ,  G03F7/7085

Abstract: A sensor arrangement may be used to measure properties, such as optical properties, of a device arranged to process substrates. The sensor arrangement includes a substrate having the following: a plurality of sensor elements provided as an integrated circuit in the substrate, for each one of the plurality of sensor elements associated electronic circuitry comprising a processing circuit connected to the sensor element and an input/output interface connected to the processing circuit, and a power supply unit configured to supply operating power only to the electronic circuitry associated with one or more of the plurality of sensor elements which are in use. The at least one sensor element and possibly the processing electronics, the input/output unit, and/or the power supply unit may be provided as one or more integrated circuits or other structures in the substrate.

Abstract translation: 可以使用传感器装置来测量布置成处理衬底的器件的性质，例如光学性质。 所述传感器装置包括具有以下基板：多个传感器元件，作为所述基板中的集成电路设置，所述多个传感器元件中的每一个相关联的电子电路包括连接到所述传感器元件的处理电路和输入/输出 接口连接到处理电路，以及电源单元，被配置为仅向与所使用的多个传感器元件中的一个或多个相关联的电子电路提供工作电力。 至少一个传感器元件以及可能的处理电子器件，输入/输出单元和/或电源单元可以被提供为衬底中的一个或多个集成电路或其他结构。

公开(公告)号：US20080305970A1

公开(公告)日：2008-12-11

申请号：US12097082

申请日：2006-12-15

Applicant: Peter Dirksen ,  Yuri Aksenov ,  Fredericus Christiaan Van Den Heuvel ,  Johannes Arnoldus Jacobus Maria Kwinten

Inventor： Peter Dirksen ,  Yuri Aksenov ,  Fredericus Christiaan Van Den Heuvel ,  Johannes Arnoldus Jacobus Maria Kwinten

IPC: G01N33/00 ,  B32B15/04 ,  G03F7/20 ,  C40B50/08

CPC classification number: G03F7/70616 ,  B01L3/502707 ,  B01L2200/12 ,  B01L2300/0654 ,  B01L2300/0819 ,  G03F7/70608 ,  G03F9/7011 ,  G03F9/7019 ,  G03F9/7076 ,  G06F3/016 ,  G11C16/16

Abstract: The invention relates to a device comprising a first material (10) and a second material. (20) whereby the first and the second material are so provided towards each other as to form at least one focusing microstructure with a focal point (30) located outside of the first material.

Abstract translation: 本发明涉及包括第一材料（10）和第二材料的装置。 （20），由此第一和第二材料朝向彼此设置成形成至少一个具有位于第一材料外部的焦点（30）的聚焦微结构。

公开(公告)号：US07037626B2

公开(公告)日：2006-05-02

申请号：US10478339

申请日：2002-05-16

Applicant: Peter Dirksen ,  Casparus Anthonius Henricus Juffermans ,  Johannes Van Wingerden

Inventor： Peter Dirksen ,  Casparus Anthonius Henricus Juffermans ,  Johannes Van Wingerden

IPC: G01F9/00

CPC classification number: H01L21/32139 ,  G03F1/26 ,  G03F1/36 ,  G03F7/0035

Abstract: For lithographically manufacturing a device with a very high density, a design mask pattern (120) is distributed on a number of sub-patterns (120a, 120b, 120c) by means of a new method. The sub-patterns do not comprise “forbidden” structures (135) and can be transferred by conventional apparatus to a substrate layer to be patterned. For the transfer, a new stack of layers is used, which comprise a pair of a processing layer (22; 26) and an inorganic anti-reflection layer (24; 28) for each sub-pattern. After a first processing layer (26) has been patterned with a first sub-pattern, it is coated with a new resist layer (30) which is exposed with a second sub-pattern, and a second processing layer (22) under the first processing layer is processed with the second sub-pattern.

Abstract translation: 为了光刻制造具有非常高密度的器件，通过新的方法将设计掩模图案（120）分布在多个子图案（120a，120b，120c）上。 子图案不包括“禁止”结构（135）并且可以通过常规设备传送到待图案化的基底层。 为了传送，使用新的层叠层，其包括用于每个子图案的一对处理层（22; 26）和无机抗反射层（24; 28）。 在第一处理层（26）已经被图案化为第一子图案之后，其被涂覆有用第二子图案曝光的新抗蚀剂层（30）和在第一子图案下方的第二处理层（22） 用第二子图案处理处理层。

公开(公告)号：US06331368B2

公开(公告)日：2001-12-18

申请号：US09844122

申请日：2001-04-27

Applicant: Peter Dirksen ,  Casparus A. H. Juffermans

Inventor： Peter Dirksen ,  Casparus A. H. Juffermans

IPC: G03F800

CPC classification number: G03F7/706 ,  G03F7/70241 ,  G03F7/70358

Abstract: Aberrations of an imaging system (PL) can be detected in an accurate and reliable way by imaging, by means of the imaging system, a test object having circular phase structure (22) on a photoresist (PR), developing the resis and scanning it with a scanning detection device (SEM) which is coupled to an image processor (IP). The circular phase structure is imaged in a ring structure (25) and each of several possible aberrations, like coma, astigmatism, three-point aberration, etc. causes a specific change in the shape of the inner contour (CI) and the outer contour (CE) of the ring and/or a change in the distance between these contours, so that the aberrations can be detected independently of each other.

Abstract translation: 通过成像系统，在光致抗蚀剂（PR）上成像具有圆形相位结构（22）的测试对象，可以以准确和可靠的方式检测成像系统（PL）的像差，从而显影和扫描成像系统 具有耦合到图像处理器（IP）的扫描检测装置（SEM）。 圆形相结构被成像为环形结构（25），并且几个可能的像差中的每一个像昏迷，散光，三点像差等都导致内部轮廓（CI）和外部轮廓的形状的特定变化 （CE）和/或这些轮廓之间的距离的变化，使得可以彼此独立地检测像差。