MICRO-MOTOR BASED SWEPT WAVELENGTH OPTICAL COMPONENTS

    公开(公告)号:US20190179136A1

    公开(公告)日:2019-06-13

    申请号:US16214544

    申请日:2018-12-10

    摘要: Optical spectroscopy is a widely used method to identify the chemical composition of materials and the characteristics of optical signals. Silicon based integrated photonics offers a platform for many optical functions through microelectromechanical systems (MEMS) and microoptoelectromechanical systems (MOEMS), silicon waveguides, integrated CMOS electronics and hybrid integration of compound semiconductor elements for optical gain. Accordingly, it would be beneficial to provide advanced optical tools for techniques such as optical spectroscopy and optical tomography exploiting MOEMS to provide swept filters that offer improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, reconfigurability, and lower cost. Further, such MOEMS elements can support the provisioning of swept optical sources, swept filters, swept receivers etc. in the planar waveguide domain without free space optics.